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1. 发明申请

US20100090109A1 SCANNING ELECTRON MICROSCOPE 审中-公开
标题翻译：扫描电子显微镜
公开(公告)号：US20100090109A1
公开(公告)日：2010-04-15
申请号：US12415907
申请日：2009-03-31
申请人： Michio HATANO , Sukehiro Ito , Shinichi Tomita , Junichi Katane
发明人： Michio HATANO , Sukehiro Ito , Shinichi Tomita , Junichi Katane
IPC分类号： G01N23/225
CPC分类号： H01J37/256 , H01J37/244 , H01J2237/2444 , H01J2237/2448 , H01J2237/2605 , H01J2237/2806
摘要： A scanning electron microscope includes an irradiation optical system for irradiating an electron beam to a sample; a sample holder for supporting the sample, arranged inside a sample chamber; at least one electric field supply electrode arranged around the sample holder; and an ion current detection electrode.
摘要翻译：扫描电子显微镜包括用于向样品照射电子束的照射光学系统; 用于支撑样品的样品保持器，布置在样品室内部; 至少一个电场供给电极，布置在所述样品保持器周围; 和离子电流检测电极。

2. 发明授权

US07511271B2 Scanning electron microscope 有权
标题翻译：扫描电子显微镜
公开(公告)号：US07511271B2
公开(公告)日：2009-03-31
申请号：US11230642
申请日：2005-09-21
申请人： Michio Hatano , Sukehiro Ito , Shinichi Tomita , Junichi Katane
发明人： Michio Hatano , Sukehiro Ito , Shinichi Tomita , Junichi Katane
IPC分类号： H01J47/00
CPC分类号： H01J37/256 , H01J37/244 , H01J2237/2444 , H01J2237/2448 , H01J2237/2605 , H01J2237/2806
摘要： A scanning electron microscope includes an irradiation optical system for irradiating an electron beam to a sample; a sample holder for supporting the sample, arranged inside a sample chamber; at least one electric field supply electrode arranged around the sample holder; and an ion current detection electrode.
摘要翻译：扫描电子显微镜包括用于向样品照射电子束的照射光学系统; 用于支撑样品的样品保持器，布置在样品室内; 至少一个电场供给电极，布置在所述样品保持器周围; 和离子电流检测电极。

3. 发明申请

US20080035843A1 Scanning Electron Microscope 有权
标题翻译：扫描电子显微镜
公开(公告)号：US20080035843A1
公开(公告)日：2008-02-14
申请号：US11768291
申请日：2007-06-26
申请人： Michio Hatano , Sukehiro Ito , Shinichi Tomita , Junichi Katane
发明人： Michio Hatano , Sukehiro Ito , Shinichi Tomita , Junichi Katane
IPC分类号： H01J49/00
CPC分类号： H01J37/244 , H01J37/28 , H01J2237/2444 , H01J2237/24445 , H01J2237/24495 , H01J2237/2605 , H01J2237/28
摘要： In a scanning electron microscope, a reflection plate at ground potential is provided in a specimen chamber and backscattering electrons given off from a specimen impinge on the reflection plate to generate subsidiary electrons. An electric field supply electrode applied with a positive voltage of +100 to +500V is arranged in a gap defined by the reflection plate and a specimen stage. A first detection electrode is arranged to detect ion current attributable to backscattering electrons and a second detection electrode is arranged to detect current representative of coexistence of ion currents attributable to secondary electron and backscattering electron. The scanning electron microscope constructed as above can achieve simultaneous separation/detection of secondary electron and backscattering electron.
摘要翻译：在扫描型电子显微镜中，在试样室内设置接地电位的反射板，反射散射从试样射出的电子撞击在反射板上，产生副电子。施加+100〜+ 500V的正电压的电场供给电极被配置在由反射板和样本台所限定的间隙中。布置第一检测电极以检测归因于后向散射电子的离子电流，并且布置第二检测电极以检测代表归属于二次电子和后向散射电子的离子电流共存的电流。如上构造的扫描电子显微镜可以实现二次电子和后向散射电子的同时分离/检测。

4. 发明授权

US07755045B2 Scanning electron microscope 有权
标题翻译：扫描电子显微镜
公开(公告)号：US07755045B2
公开(公告)日：2010-07-13
申请号：US11768291
申请日：2007-06-26
申请人： Michio Hatano , Sukehiro Ito , Shinichi Tomita , Junichi Katane
发明人： Michio Hatano , Sukehiro Ito , Shinichi Tomita , Junichi Katane
IPC分类号： H01J37/26
CPC分类号： H01J37/244 , H01J37/28 , H01J2237/2444 , H01J2237/24445 , H01J2237/24495 , H01J2237/2605 , H01J2237/28
摘要： In a scanning electron microscope, a reflection plate at ground potential is provided in a specimen chamber and backscattering electrons given off from a specimen impinge on the reflection plate to generate subsidiary electrons. An electric field supply electrode applied with a positive voltage of +100 to +500V is arranged in a gap defined by the reflection plate and a specimen stage. A first detection electrode is arranged to detect ion current attributable to backscattering electrons and a second detection electrode is arranged to detect current representative of coexistence of ion currents attributable to secondary electron and backscattering electron. The scanning electron microscope constructed as above can achieve simultaneous separation/detection of secondary electron and backscattering electron.
摘要翻译：在扫描型电子显微镜中，在试样室内设置接地电位的反射板，反射散射从试样射出的电子撞击在反射板上，产生副电子。施加+100〜+ 500V的正电压的电场供给电极被配置在由反射板和样本台所限定的间隙中。布置第一检测电极以检测归因于后向散射电子的离子电流，并且布置第二检测电极以检测代表归属于二次电子和后向散射电子的离子电流共存的电流。如上构造的扫描电子显微镜可以实现二次电子和后向散射电子的同时分离/检测。

5. 发明申请

US20060186337A1 Scanning electron microscope 有权
公开(公告)号：US20060186337A1
公开(公告)日：2006-08-24
申请号：US11230642
申请日：2005-09-21
申请人： Michio Hatano , Sukehiro Ito , Shinichi Tomita , Junichi Katane
发明人： Michio Hatano , Sukehiro Ito , Shinichi Tomita , Junichi Katane
IPC分类号： H01J37/28
CPC分类号： H01J37/256 , H01J37/244 , H01J2237/2444 , H01J2237/2448 , H01J2237/2605 , H01J2237/2806
摘要： A scanning electron microscope includes an irradiation optical system for irradiating an electron beam to a sample; a sample holder for supporting the sample, arranged inside a sample chamber; at least one electric field supply electrode arranged around the sample holder; and an ion current detection electrode.

6. 发明授权

US08143573B2 Charged particle beam apparatus 有权
标题翻译：带电粒子束装置
公开(公告)号：US08143573B2
公开(公告)日：2012-03-27
申请号：US12490775
申请日：2009-06-24
申请人： Sukehiro Ito , Junichi Katane , Shigeru Kawamata , Shinichi Tomita
发明人： Sukehiro Ito , Junichi Katane , Shigeru Kawamata , Shinichi Tomita
IPC分类号： G02F1/1335 , G01K1/08
CPC分类号： H01J37/1478 , H01J37/153 , H01J37/265 , H01J37/28 , H01J2237/2611
摘要： A charged particle beam impinging on a specimen is set to have left and right tilt angles corresponding to a parallactic angle. A control unit is provided which scans the beam over the specimen while giving a left tilt and a right tilt corresponding to the parallactic angle alternately to the beam on each scanning line. In this way, images are acquired. A three-dimensional image in which deterioration of the resolution is suppressed is displayed in real time by combining aberration cancellation means with the control of the beam according to the parallactic angle. The aberration cancellation means uses an optical system having plural stages of lenses to provide overall cancellation of aberrations by making use of the action of a lens to deflect the beam back to the optical axis.
摘要翻译：照射在试样上的带电粒子束被设定为具有对应于副视角的左右倾斜角。提供了一种控制单元，其在垂直于每个扫描线上的光束上交替地向左侧倾斜和对准视角的右侧倾斜扫描样本上的光束。以这种方式，获取图像。通过将像差消除装置与根据近视角的光束的控制组合来实时显示分辨率的劣化被抑制的三维图像。像差消除装置使用具有多级透镜的光学系统，通过利用透镜的作用将光束偏转回光轴来提供像差的整体消除。

7. 发明申请

US20070284542A1 Charged particle beam apparatus and method for charged particle beam adjustment 有权
标题翻译：带电粒子束装置和带电粒子束调整方法
公开(公告)号：US20070284542A1
公开(公告)日：2007-12-13
申请号：US11715506
申请日：2007-03-08
申请人： Takeshi Ogashiwa , Mitsugu Sato , Atsushi Takane , Toshihide Agemura , Yuusuke Narita , Takeharu Shichiji , Shinichi Tomita , Sukehiro Ito , Junichi Katane
发明人： Takeshi Ogashiwa , Mitsugu Sato , Atsushi Takane , Toshihide Agemura , Yuusuke Narita , Takeharu Shichiji , Shinichi Tomita , Sukehiro Ito , Junichi Katane
IPC分类号： G01N21/00
CPC分类号： G01N23/22 , H01J37/1471 , H01J37/28 , H01J2237/1501
摘要： A charged particle beam apparatus facilitating adjusting the beam center axis of a charged particle beam in a case where optical conditions are modified or in a case where the beam center axis of the charged particle beam is moved due to state variation of the apparatus. When the beam center axis of a primary charged particle beam is adjusted with a deflector (aligner), a processing step (1) for measuring the sensitivity of the aligner and a processing step (2) for detecting the deviation between the center of the primary charged particle beam and the center of the objective aperture are provided. The charged particle beam apparatus has means for determining the aligner set values, using the aligner sensitivity measured in the processing step (1) and the amount of deviation detected in the processing step (2), such that the primary charged particle beam passes through the center of the objective aperture and controlling the aligner using the aligner set values.
摘要翻译：在光学条件被修改的情况下或者由于装置的状态变化使带电粒子束的束中心轴移动的情况下，有利于调整带电粒子束的束中心轴的带电粒子束装置。当用偏转器（对准器）调整初级带电粒子束的束中心轴时，用于测量对准器的灵敏度的处理步骤（1）和用于检测初级带电粒子的中心之间的偏差的处理步骤（2）提供带电粒子束和物镜孔的中心。带电粒子束装置具有使用在处理步骤（1）中测量的对准器灵敏度和在处理步骤（2）中检测到的偏差量来确定对准器设定值的装置，使得初级带电粒子束通过物镜光圈中心，并使用对准器设定值控制对准器。

8. 发明授权

US08026491B2 Charged particle beam apparatus and method for charged particle beam adjustment 有权
标题翻译：带电粒子束装置和带电粒子束调整方法
公开(公告)号：US08026491B2
公开(公告)日：2011-09-27
申请号：US11715506
申请日：2007-03-08
申请人： Takeshi Ogashiwa , Mitsugu Sato , Atsushi Takane , Toshihide Agemura , Yuusuke Narita , Takeharu Shichiji , Shinichi Tomita , Sukehiro Ito , Junichi Katane
发明人： Takeshi Ogashiwa , Mitsugu Sato , Atsushi Takane , Toshihide Agemura , Yuusuke Narita , Takeharu Shichiji , Shinichi Tomita , Sukehiro Ito , Junichi Katane
IPC分类号： G01N21/00
CPC分类号： G01N23/22 , H01J37/1471 , H01J37/28 , H01J2237/1501
摘要： A charged particle beam apparatus facilitating adjusting a beam center axis of a charged particle beam in a case where optical conditions are modified or in a case where the beam center axis of the charged particle beam is moved due to state variation of the apparatus. When the beam center axis of a primary charged particle beam is adjusted with a deflector (aligner), a first processing step for measuring the sensitivity of the aligner and a second processing step for detecting the deviation between the center of the primary charged particle beam and the center of the objective aperture are provided. The charged particle beam apparatus determines the aligner set values, using the aligner sensitivity measured in the first processing step and the amount of deviation detected in the second processing step, such that the primary charged particle beam passes through the center of the objective aperture and controls the aligner using the aligner set values.
摘要翻译：在光学条件被修改的情况下或者由于装置的状态变化使带电粒子束的束中心轴移动的情况下，有利于调整带电粒子束的束中心轴的带电粒子束装置。当用偏转器（对准器）调整初级带电粒子束的束中心轴时，用于测量对准器的灵敏度的第一处理步骤和用于检测初级带电粒子束的中心与第一带电粒子束的中心之间的偏差的第二处理步骤提供了物镜孔的中心。带电粒子束装置使用在第一处理步骤中测量的对准器灵敏度和在第二处理步骤中检测到的偏差量来确定对准器设定值，使得初级带电粒子束通过物镜孔的中心并控制对齐器使用对准器设置值。

9. 发明申请

US20090230304A1 SCANNING ELECTRON MICROSCOPE 有权
标题翻译：扫描电子显微镜
公开(公告)号：US20090230304A1
公开(公告)日：2009-09-17
申请号：US12396593
申请日：2009-03-03
申请人： Michio Hatano , Sukehiro Ito , Nagahide Ishida , Shinichi Tomita , Wataru Kotake
发明人： Michio Hatano , Sukehiro Ito , Nagahide Ishida , Shinichi Tomita , Wataru Kotake
IPC分类号： G01N23/00
CPC分类号： H01J37/244 , H01J37/28 , H01J2237/24445 , H01J2237/24465 , H01J2237/2605
摘要： In a VP-SEM that uses gas multiplication induced within a low-vacuum sample chamber and uses a method of detecting a positive displacement current, a secondary electron detector for the VP-SEM that responds at high speed, which can acquire a TV-Scan rate image at a low cost while saving a space is provided. A secondary electron detector is formed by forming the electron supplying electrode and the detection electrode on the flexible thin film type substrate such as a polyimide film, etc., by an etching method. Thereby, the space can be saved while realizing low cost due to mass production. Further, the ion horizontally moving with respect to the surface of the secondary electron detector is detected and the ion moving in a vertical direction returned to the sample holder is not detected, making it possible to realize a high-speed response.
摘要翻译：在使用在低真空样品室内引起的气体倍增并使用检测正位移电流的方法的VP-SEM中，用于高速响应的VP-SEM的二次电子检测器，其可以获取TV扫描提供了节省空间的低成本的速率图像。通过蚀刻方法在诸如聚酰亚胺膜等的柔性薄膜型基板上形成电子供给电极和检测电极来形成二次电子检测器。由此，可以节省空间，同时由于批量生产而实现低成本。此外，检测相对于二次电子检测器的表面水平移动的离子，并且未检测到返回到样品架的垂直方向的离子移动，使得可以实现高速响应。

10. 发明授权

US08097848B2 Scanning electron microscope 有权
标题翻译：扫描电子显微镜
公开(公告)号：US08097848B2
公开(公告)日：2012-01-17
申请号：US12396593
申请日：2009-03-03
申请人： Michio Hatano , Sukehiro Ito , Nagahide Ishida , Shinichi Tomita , Wataru Kotake
发明人： Michio Hatano , Sukehiro Ito , Nagahide Ishida , Shinichi Tomita , Wataru Kotake
IPC分类号： H01J37/28
CPC分类号： H01J37/244 , H01J37/28 , H01J2237/24445 , H01J2237/24465 , H01J2237/2605
摘要： In a VP-SEM that uses gas multiplication induced within a low-vacuum sample chamber and uses a method of detecting a positive displacement current, a secondary electron detector for the VP-SEM that responds at high speed, which can acquire a TV-Scan rate image at a low cost while saving a space is provided. A secondary electron detector is formed by forming the electron supplying electrode and the detection electrode on the flexible thin film type substrate such as a polyimide film, etc., by an etching method. Thereby, the space can be saved while realizing low cost due to mass production. Further, the ion horizontally moving with respect to the surface of the secondary electron detector is detected and the ion moving in a vertical direction returned to the sample holder is not detected, making it possible to realize a high-speed response.
摘要翻译：在使用在低真空样品室内引起的气体倍增并使用检测正位移电流的方法的VP-SEM中，用于高速响应的VP-SEM的二次电子检测器，其可以获取TV扫描提供了节省空间的低成本的速率图像。通过蚀刻方法在诸如聚酰亚胺膜等的柔性薄膜型基板上形成电子供给电极和检测电极来形成二次电子检测器。由此，可以节省空间，同时由于批量生产而实现低成本。此外，检测相对于二次电子检测器的表面水平移动的离子，并且未检测到返回到样品架的垂直方向的离子移动，使得可以实现高速响应。

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