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1. 发明授权

US09366975B2 Stage transferring device and position measuring method thereof 有权
标题翻译：舞台转移装置及其位置测量方法
公开(公告)号：US09366975B2
公开(公告)日：2016-06-14
申请号：US13959864
申请日：2013-08-06
申请人： Samsung Display Co., Ltd.
发明人： Hi Kuk Lee , Sang Don Jang , Jae Hyuk Chang , Hyang-Shik Kong , Cha-Dong Kim , Chang Hoon Kim , Jung-In Park , Sang Hyun Yun
IPC分类号： G01B11/02 , G03F7/20
CPC分类号： G03F7/70775
摘要： A stage transferring device invention includes: a transferring stage upon which an object is mounted and which transfers the object in an x-y plane; and a stage position measuring device. The stage position measuring device includes a one-dimensional scale on the transferring stage; a one-dimensional scale reading head which is configured to overlap the one-dimensional scale, irradiate a measuring beam to the overlapped one-dimensional scale and measure a 1D y-axis coordinate of the transferring stage; a two-dimensional encoder on the transferring stage; and a two-dimensional encoder reading head which is configured to overlap the two-dimensional encoder, irradiate a measuring beam to the overlapped two-dimensional encoder and measure a 2D x-axis coordinate and a 2D y-axis coordinate of the transferring stage.
摘要翻译：舞台转移装置发明包括：传送台，物体安装在该传送台上，并在x-y平面内传送物体; 和台架位置测量装置。舞台位置测量装置在转印台上包括一维刻度; 被配置为与一维刻度重叠的一维刻度读取头，将测量光束照射到重叠的一维刻度并测量转印台的1Dy轴坐标; 转印台上的二维编码器; 以及被构造成与二维编码器重叠的二维编码器读取头，将测量光束照射到重叠的二维编码器，并测量转印台的2D x轴坐标和2D y轴坐标。

2. 发明授权

US09645450B2 Alignment apparatus, exposing apparatus including the same, and manufacturing method of liquid crystal display device 有权
公开(公告)号：US09645450B2
公开(公告)日：2017-05-09
申请号：US13871732
申请日：2013-04-26
申请人： Samsung Display Co., Ltd.
发明人： Jae Hyuk Chang , Hi Kuk Lee , Cha-Dong Kim , Sang Hyun Yun , Jung-In Park , Chang Hoon Kim , Ki Beom Lee
IPC分类号： G01B11/00 , G02F1/1341 , G02F1/13 , G01B11/27 , G02F1/1333 , G02F1/1335
CPC分类号： G02F1/1341 , G01B11/272 , G02F1/1303 , G02F2001/133354 , G02F2001/133548
摘要： Exemplary embodiments of the invention relate to an alignment apparatus including a source unit providing an electromagnetic signal, a receiving unit detecting the provided electromagnetic signal, and a polarization element positioned between the source unit and the receiving unit and having a transmissive axis fixed in a predetermined direction. A substrate may be positioned between the source unit and the receiving unit, and may be formed with a polarizer including a plurality of metal lines with a minute linear pattern. The luminance or intensity of the electromagnetic signal may be detected by the receiving unit while rotating the substrate.

3. 发明授权

US09383651B2 Maskless exposure device 有权
标题翻译：无掩模曝光装置
公开(公告)号：US09383651B2
公开(公告)日：2016-07-05
申请号：US14189663
申请日：2014-02-25
申请人： Samsung Display Co., Ltd.
发明人： Hi Kuk Lee , Tsunemitsu Torigoe , Chang Hoon Kim , Ki Beom Lee , Su-Yeon Sim , Sang Hyun Lee
IPC分类号： G03F7/20
CPC分类号： G03F7/70158 , G03F7/70291
摘要： In an aspect, a grating light valve module including: a substrate; and a plurality of ribbons disposed on the substrate, wherein each of the ribbons includes an insulating layer, a conductive layer disposed on the insulating layer, and an anti-oxidation layer disposed on the conductive layer is provided.
摘要翻译：一方面，一种光栅光阀模块，包括：基板; 以及设置在基板上的多个带，其中每个带包括绝缘层，设置在绝缘层上的导电层和设置在导电层上的抗氧化层。

4. 发明申请

US20140340662A1 MASKLESS EXPOSURE DEVICE 有权
标题翻译： MASKLESS曝光装置
公开(公告)号：US20140340662A1
公开(公告)日：2014-11-20
申请号：US14189663
申请日：2014-02-25
申请人： SAMSUNG DISPLAY CO., LTD.
发明人： Hi Kuk Lee , Tsunemitsu Torigoe , Chang Hoon Kim , Ki Beom Lee , Su-Yeon Sim , Sang Hyun Lee
IPC分类号： G03F7/20
CPC分类号： G03F7/70158 , G03F7/70291
摘要： In an aspect, a grating light valve module including: a substrate; and a plurality of ribbons disposed on the substrate, wherein each of the ribbons includes an insulating layer, a conductive layer disposed on the insulating layer, and an anti-oxidation layer disposed on the conductive layer is provided.
摘要翻译：一方面，一种光栅光阀模块，包括：基板; 以及设置在基板上的多个带，其中每个带包括绝缘层，设置在绝缘层上的导电层和设置在导电层上的抗氧化层。

5. 发明申请

US20140167298A1 ALIGNMENT APPARATUS, EXPOSING APPRATUS INCLUDING THE SAME, AND MANUFACTURING METHOD OF LIQUID CRYSTAL DISPLAY DEVICE 有权
标题翻译：对准装置，包括其的装置以及液晶显示装置的制造方法
公开(公告)号：US20140167298A1
公开(公告)日：2014-06-19
申请号：US13871732
申请日：2013-04-26
申请人： SAMSUNG DISPLAY CO., LTD.
发明人： Jae Hyuk CHANG , Hi Kuk Lee , Cha-Dong Kim , Sang Hyun Yun , Jung-In Park , Chang Hoon Kim , Kim Beom Lee
IPC分类号： G02F1/13 , G02F1/1339 , G02F1/1341 , G01B11/14
CPC分类号： G02F1/1341 , G01B11/272 , G02F1/1303 , G02F2001/133354 , G02F2001/133548
摘要： Exemplary embodiments of the invention relate to an alignment apparatus including a source unit providing an electromagnetic signal, a receiving unit detecting the provided electromagnetic signal, and a polarization element positioned between the source unit and the receiving unit and having a transmissive axis fixed in a predetermined direction. A substrate may be positioned between the source unit and the receiving unit, and may be formed with a polarizer including a plurality of metal lines with a minute linear pattern. The luminance or intensity of the electromagnetic signal may be detected by the receiving unit while rotating the substrate.
摘要翻译：本发明的示例性实施例涉及一种对准装置，包括提供电磁信号的源单元，检测所提供的电磁信号的接收单元和位于源单元和接收单元之间的偏振元件，并且具有固定在预定的方向。衬底可以位于源单元和接收单元之间，并且可以由具有微小线性图案的多个金属线的偏振器形成。在旋转基板的同时，可以由接收单元检测电磁信号的亮度或强度。

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