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    • 2. 发明授权
    • Method of fabricating display device using maskless exposure apparatus and display device
    • 使用无掩模曝光装置和显示装置制造显示装置的方法
    • US09046779B2
    • 2015-06-02
    • US13861039
    • 2013-04-11
    • SAMSUNG DISPLAY CO., LTD.
    • Sang Hyun YunCha-Dong KimJung-In ParkJae Hyuk ChangHi Kuk Lee
    • B32B3/00G03F7/20G03F7/00G02F1/1335G02F1/1339
    • G03F7/2022G02F1/133512G02F1/13394G03F7/0007G03F7/203G03F7/70475Y10T428/24851
    • The present invention relates to a method of fabricating a display device using a maskless exposure apparatus, and the display device, and more particularly, to a method of fabricating a display device by using a maskless exposure apparatus, which is capable of preventing a stain from being viewed, and the display device. An exemplary embodiment of the present invention provides a method of fabricating a display device, including: forming a first exposure region on a substrate by performing exposure while scanning the substrate with a first exposure head irradiating an exposure beam according to pattern information of a first pattern in a scanning direction; and forming a second exposure region adjacent to the first exposure region on the substrate by performing exposure while scanning the substrate with a second exposure head irradiating an exposure beam according to the pattern information of the first pattern in the scanning direction; in which an exposure boundary region between the first exposure region and the second exposure region is extended in the scanning direction, and the exposure boundary region overlaps a light blocking region.
    • 本发明涉及使用无掩模曝光装置和显示装置制造显示装置的方法,更具体地说,涉及一种使用无掩模曝光装置制造显示装置的方法,该无掩模曝光装置能够防止 被观看,以及显示装置。 本发明的一个示例性实施例提供了一种制造显示装置的方法,包括:通过在用基于第一图案的图案信息的照射曝光光束的第一曝光头扫描基板的同时进行曝光来在基板上形成第一曝光区域 在扫描方向; 以及根据所述第一图案在所述扫描方向上的图案信息,利用照射曝光光束的第二曝光头对所述基板进行曝光,同时在所述基板上形成与所述第一曝光区域相邻的第二曝光区域; 其中第一曝光区域和第二曝光区域之间的曝光边界区域在扫描方向上延伸,并且曝光边界区域与遮光区域重叠。
    • 5. 发明授权
    • Stage transferring device and position measuring method thereof
    • 舞台转移装置及其位置测量方法
    • US09366975B2
    • 2016-06-14
    • US13959864
    • 2013-08-06
    • Samsung Display Co., Ltd.
    • Hi Kuk LeeSang Don JangJae Hyuk ChangHyang-Shik KongCha-Dong KimChang Hoon KimJung-In ParkSang Hyun Yun
    • G01B11/02G03F7/20
    • G03F7/70775
    • A stage transferring device invention includes: a transferring stage upon which an object is mounted and which transfers the object in an x-y plane; and a stage position measuring device. The stage position measuring device includes a one-dimensional scale on the transferring stage; a one-dimensional scale reading head which is configured to overlap the one-dimensional scale, irradiate a measuring beam to the overlapped one-dimensional scale and measure a 1D y-axis coordinate of the transferring stage; a two-dimensional encoder on the transferring stage; and a two-dimensional encoder reading head which is configured to overlap the two-dimensional encoder, irradiate a measuring beam to the overlapped two-dimensional encoder and measure a 2D x-axis coordinate and a 2D y-axis coordinate of the transferring stage.
    • 舞台转移装置发明包括:传送台,物体安装在该传送台上,并在x-y平面内传送物体; 和台架位置测量装置。 舞台位置测量装置在转印台上包括一维刻度; 被配置为与一维刻度重叠的一维刻度读取头,将测量光束照射到重叠的一维刻度并测量转印台的1Dy轴坐标; 转印台上的二维编码器; 以及被构造成与二维编码器重叠的二维编码器读取头,将测量光束照射到重叠的二维编码器,并测量转印台的2D x轴坐标和2D y轴坐标。