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    • 3. 发明申请
    • Encoder
    • 编码器
    • US20080185506A1
    • 2008-08-07
    • US12007676
    • 2008-01-14
    • Susumu MakinouchiAkihiro WatanabeToru Imai
    • Susumu MakinouchiAkihiro WatanabeToru Imai
    • G01D5/34
    • G01D5/34715G01D5/38
    • An illumination light to be used for position measurement of a movable scale is spatially (or physically) split into a first illumination light and a second illumination light using a triangle prism, and the first and second illumination lights are made to be incident on the same position on the movable scale, so that positional information of the movable scale is detected by utilizing interference of the first and second illumination lights. The spatially split first and second illumination lights interfere with each other even when they are made to be incident on the same position of the movable scale and are completely overlapped with each other, which is different, for example, from the case of the ±1st order diffracted lights that are generated by an illumination light being ±1st order diffracted by a diffraction grating. Therefore, wasted illumination lights that do not contribute to the interference can be minimized and the use efficiency of illumination lights can be improved.
    • 用于可移动刻度的位置测量的照明光在空间上(或物理地)被分割为第一照明光和使用三角形棱镜的第二照明光,并且使第一和第二照明光入射在其上 位置,从而通过利用第一和第二照明光的干涉来检测可动标尺的位置信息。 空间分离的第一和第二照明光即使当它们被入射到可移动标尺的相同位置并且彼此完全重叠时也彼此干涉,例如与±1的情况不同 由衍射光栅衍射的被照明光产生的±1级级衍射光。 因此,可以使对干扰无影响的浪费的照明灯最小化,能够提高照明光的使用效率。
    • 6. 发明授权
    • Movable-body apparatus, exposure apparatus, exposure method, and device manufacturing method
    • 移动体装置,曝光装置,曝光方法以及装置的制造方法
    • US08390780B2
    • 2013-03-05
    • US12330119
    • 2008-12-08
    • Susumu MakinouchiToru ImaiAkihiro Watanabe
    • Susumu MakinouchiToru ImaiAkihiro Watanabe
    • G03B27/42
    • G01D5/38G01D5/266G03F7/70716G03F7/70775
    • A moving grating is arranged on a side of a wafer stage, a light source irradiates a light to the moving grating, diffracted lights generated from the moving grating are interfered by fixed scales and an index scale of which positional relation with the light source is fixed, and a detection instrument detects the interfered light. In this case, since the moving grating is arranged on a side of the wafer stage, upsizing of the entire wafer stage can be suppressed. Further, since interference occurs between a plurality of diffracted lights (e.g., the ±1st-order diffracted light) passing extremely close optical paths, influence caused by a fluctuation of ambient atmosphere becomes less in comparison to conventional interferometers, and thus, a high-precision measurement of positional information of the movable body is possible.
    • 移动光栅布置在晶片台的一侧,光源将光照射到移动光栅,由移动光栅产生的衍射光被固定的刻度干扰,并且与光源的位置关系固定的折射率 并且检测仪器检测被干扰的光。 在这种情况下,由于移动光栅布置在晶片台的一侧,因此可以抑制整个晶片台的大型化。 此外,由于在通过非常接近的光路的多个衍射光(例如±1级衍射光)之间发生干涉,所以与常规干涉仪相比,由环境大气的波动引起的影响变小, 移动体的位置信息的精度测量是可能的。
    • 7. 发明申请
    • Encoder
    • 编码器
    • US20070267571A1
    • 2007-11-22
    • US11798255
    • 2007-05-11
    • Susumu MakinouchiToru ImaiAkihiro Watanabe
    • Susumu MakinouchiToru ImaiAkihiro Watanabe
    • G01D5/34
    • G01D5/38
    • When an incident light is obliquely incident on an index scale, the optical path length of light A becomes longer than the optical path length of light B and an optical path length difference occurs, which causes a phase difference in both of the diffracted lights incident on a photodetection element. According to the phase difference, intensity of a photoelectric detection signal output from the photodetection element changes. That is, due to a periodic change in the incident angle of the incident light, the phase difference between light A and light B is modulated, and the interference signal becomes greatly modulated.
    • 当入射光倾斜地入射到指数刻度上时,光A的光程长度比光B的光路长度长,并且产生光程长度差,导致入射到的两个衍射光的相位差 光电检测元件。 根据相位差,从光检测元件输出的光电检测信号的强度变化。 也就是说,由于入射光的入射角度的周期性变化,光A和光B之间的相位差被调制,并且干扰信号变得很大地被调制。