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1. 发明申请

US20050140946A1 Exposure system and method for manufacturing device 失效
标题翻译：曝光系统及其制造方法
公开(公告)号：US20050140946A1
公开(公告)日：2005-06-30
申请号：US10969971
申请日：2004-10-22
申请人： Toshihiko Tsuji , Yoshitomo Nagahashi , Manabu Fujii , Hironori Murakami
发明人： Toshihiko Tsuji , Yoshitomo Nagahashi , Manabu Fujii , Hironori Murakami
IPC分类号： G03F7/20 , G03B27/52
CPC分类号： G03F7/70991 , G03F7/70858 , G03F7/70875 , G03F7/70891 , G03F7/709
摘要： An exposure system is provided which can maintain a predetermined performance of the exposure apparatus stably by maintaining a cooling capacity by preventing a negative pressure from being generated in a circulation path of the liquid and preventing the back pressure from increasing even if at least a part of a temperature adjusting device is disposed under a disposition surface of the exposure apparatus due to the disposition area. A sealed tank which stores the cooling agent which is circulated in the circuiting systems and a pump, etc., which circulates the cooling agent are disposed under the disposition surface FL of the exposure system. The reticle stage and the wafer stage which are objects of which the temperature is supposed to be controlled are disposed above the disposition surface FL. A tank which open to air is provided so as to prevent the negative pressure from being generated in the reticle stage, etc. such that the tank and the tank are connected by a connecting piping arrangement. Also, the piping arrangement which eliminates the bubbles which are contained in the cooling agent which is circulated in the circulating systems are connected to the circulating systems.
摘要翻译：提供一种曝光系统，其可以通过防止在液体的循环路径中产生负压并通过保持冷却能力来稳定地保持曝光装置的预定性能，并且即使在至少一部分温度调节装置由于配置区域而设置在曝光装置的配置表面下。储存在循环系统中循环的冷却剂的密封罐和循环冷却剂的泵等设置在曝光系统的配置面FL的下方。作为温度被控制的对象的标线片台和晶片台设置在配置面FL上方。设置有开放空气的罐，以防止在标线片等中产生负压，使得罐和罐通过连接配管装置连接。此外，消除在循环系统中循环的冷却剂中包含的气泡的管道装置连接到循环系统。

2. 发明授权

US07106414B2 Exposure system and method for manufacturing device 失效
标题翻译：曝光系统及其制造方法
公开(公告)号：US07106414B2
公开(公告)日：2006-09-12
申请号：US10969971
申请日：2004-10-22
申请人： Toshihiko Tsuji , Yoshitomo Nagahashi , Manabu Fujii , Hironori Murakami
发明人： Toshihiko Tsuji , Yoshitomo Nagahashi , Manabu Fujii , Hironori Murakami
IPC分类号： G03B27/42 , G03B27/52 , G03B27/32
CPC分类号： G03F7/70991 , G03F7/70858 , G03F7/70875 , G03F7/70891 , G03F7/709
摘要： An exposure system is provided which can maintain a predetermined performance of the exposure apparatus stably by maintaining a cooling capacity by preventing a negative pressure from being generated in a circulation path of the liquid and preventing the back pressure from increasing even if at least a part of a temperature adjusting device is disposed under a disposition surface of the exposure apparatus due to the disposition area. A sealed tank which stores the cooling agent which is circulated in the circuiting systems and a pump, etc., which circulates the cooling agent are disposed under the disposition surface FL of the exposure system. The reticle stage and the wafer stage which are objects of which the temperature is supposed to be controlled are disposed above the disposition surface FL. A tank which open to air is provided so as to prevent the negative pressure from being generated in the reticle stage, etc. such that the tank and the tank are connected by a connecting piping arrangement. Also, the piping arrangement which eliminates the bubbles which are contained in the cooling agent which is circulated in the circulating systems are connected to the circulating systems.
摘要翻译：提供一种曝光系统，其可以通过防止在液体的循环路径中产生负压并通过保持冷却能力来稳定地保持曝光装置的预定性能，并且即使在至少一部分温度调节装置由于配置区域而设置在曝光装置的配置表面下。储存在循环系统中循环的冷却剂的密封罐和循环冷却剂的泵等设置在曝光系统的配置面FL的下方。作为温度被控制的对象的标线片台和晶片台设置在配置面FL上方。设置有开放空气的罐，以防止在标线片等中产生负压，使得罐和罐通过连接配管装置连接。此外，消除在循环系统中循环的冷却剂中包含的气泡的管道装置连接到循环系统。

5. 发明申请

US20100060701A1 LIQUID CONTAINER 审中-公开
标题翻译：液体容器
公开(公告)号：US20100060701A1
公开(公告)日：2010-03-11
申请号：US12556502
申请日：2009-09-09
申请人： Hitoshi Takada , Nobuyuki Hatasa , Hideki Ogura , Hironori Murakami , Masaya Uetsuki , Hideo Fukazawa , Eiichi Adachi
发明人： Hitoshi Takada , Nobuyuki Hatasa , Hideki Ogura , Hironori Murakami , Masaya Uetsuki , Hideo Fukazawa , Eiichi Adachi
IPC分类号： B41J2/175
CPC分类号： B41J2/17509 , B41J2/17556
摘要： An inner-pressure-changing connecting portion that changes the inner pressure of an ink cartridge and a fitted portion to be fitted on a positioning mechanism provided on an ink-jet printer are disposed coaxially. In a configuration for supplying ink by applying pressure to a pressure chamber, high-accuracy positioning of the ink cartridge and the ink-jet printer can be achieved.
摘要翻译：同时设置改变墨盒的内部压力和装配在喷墨打印机上的定位机构上的装配部分的内部压力变换连接部。在通过向压力室施加压力来供应墨水的构造中，可以实现墨盒和喷墨打印机的高精度定位。

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