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    • 4. 发明授权
    • Method for providing a side shield for a magnetic recording transducer using an air bridge
    • 用于使用空气桥提供用于磁记录换能器的侧屏蔽的方法
    • US08879207B1
    • 2014-11-04
    • US13887252
    • 2013-05-03
    • Western Digital (Fremont), LLC
    • Jinqiu ZhangFeng LiuShaoping LiMing Sun
    • G11B5/127G11B5/11
    • G11B5/112G11B5/1278G11B5/3116G11B5/315G11B5/3163Y10T29/49044
    • A method fabricates a side shield for a magnetic transducer having a nonmagnetic layer and an ABS location corresponding to an ABS. The nonmagnetic layer has a pole trench therein. The pole trench has a shape and location corresponding to the pole. A wet etchable layer is deposited. Part of the wet etchable layer resides in the pole trench. A pole is formed. The pole has a bottom and a top wider than the bottom in the pole tip region. Part of the pole in the pole tip region is in the pole trench on at least part of the wet etchable layer. At least parts of the wet etchable layer and the nonmagnetic layer are removed, forming an air bridge. The air bridge is between part of the pole at the ABS location and an underlying layer. Side shield layer(s) that substantially fill the air bridge are deposited.
    • 一种制造用于具有对应于ABS的非磁性层和ABS位置的磁换能器的侧屏蔽的方法。 非磁性层在其中具有极沟槽。 极沟具有对应于极的形状和位置。 沉积湿蚀刻层。 湿蚀刻层的一部分位于极沟槽中。 一个极点形成。 电极具有底部和顶部宽于电极尖端区域中的底部。 极尖区域中的极的一部分在至少部分湿蚀刻层的极沟中。 去除湿蚀刻层和非磁性层的至少一部分,形成空气桥。 空气桥在ABS位置的极点的一部分和下层之间。 基本上填充空气桥的侧面屏蔽层被沉积。
    • 8. 发明授权
    • Method for fabricating a magnetic writer using multiple etches
    • 使用多个蚀刻制造磁性写入器的方法
    • US09280990B1
    • 2016-03-08
    • US14229297
    • 2014-03-28
    • Western Digital (Fremont), LLC
    • Jinqiu ZhangFeng LiuHongmei HanMing SunXiaotian Zhou
    • B44C1/22G11B5/31
    • G11B5/3163G11B5/1278G11B5/3116
    • A method and system provide a magnetic transducer having an air-bearing surface (ABS) location. The method includes forming a trench in the intermediate layer using a plurality of etches. A first etch substantially provides a first portion of the trench having a first sidewall angle. The second etch substantially provides a second portion of the trench having a second sidewall angle. The second sidewall angle is greater than the first sidewall angle. The second portion of the trench includes the ABS location. The method also includes providing a main pole in the trench. The main pole has a plurality of sidewalls. The sidewalls having the first sidewall angle in the first portion of the trench and the second sidewall angle in the second portion of the trench.
    • 一种方法和系统提供具有空气轴承表面(ABS)位置的磁换能器。 该方法包括使用多个蚀刻在中间层中形成沟槽。 第一蚀刻基本上提供具有第一侧壁角的沟槽的第一部分。 第二蚀刻基本上提供具有第二侧壁角的沟槽的第二部分。 第二侧壁角度大于第一侧壁角度。 沟槽的第二部分包括ABS位置。 该方法还包括在沟槽中提供主极。 主极具有多个侧壁。 所述侧壁在沟槽的第一部分具有第一侧壁角,并且在沟槽的第二部分中具有第二侧壁角。