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1. 发明授权

US10115416B2 Magnetic recording write apparatus having a pole having an aspect ratio greater than one and an auxiliary pole 有权
公开(公告)号：US10115416B2
公开(公告)日：2018-10-30
申请号：US15652629
申请日：2017-07-18
申请人： WESTERN DIGITAL (FREMONT), LLC
发明人： Feng Liu , Zhigang Bai , Peng Luo , Jinqiu Zhang , Ming Sun , Xiaoyu Yang , Yifan Zhang , Xiaojun Zhang , Ming Jiang
IPC分类号： G11B5/31 , G11B5/127 , G11B5/21 , G11B5/147
摘要： A magnetic write apparatus has a media-facing surface (MFS) and includes an auxiliary pole, coil(s) and a main pole having a pole tip and a yoke. The pole tip occupies part of the MFS. The yoke has a yoke length measured from the MFS in a yoke direction perpendicular to the MFS. The yoke length is less than four microns. The main pole has a total length in the yoke direction and a width in a cross-track direction. The main pole is continuous along the total length. The aspect ratio of the main pole is the total length divided by the width and exceeds one. The main pole includes surface(s) having a nonzero acute flare angle from the MFS. The auxiliary pole is adjacent to the main pole and recessed from the MFS by not more than 1.05 micron. The coil(s) energizes the main pole and have not more than two turns.

2. 发明授权

US09940951B2 PMR writer with non-conformal side gaps 有权
公开(公告)号：US09940951B2
公开(公告)日：2018-04-10
申请号：US15053211
申请日：2016-02-25
申请人： Western Digital (Fremont), LLC
发明人： Jinqiu Zhang , Feng Liu , Xiaoyu Yang , Ming Jiang , Xiaotian Zhou , Zeyu Ma , Hai Sun
IPC分类号： G11B5/235 , G11B5/11 , G11B5/127 , G11B5/23 , G11B5/187 , G11B5/10 , G11B5/60 , H01L21/027 , H01L21/3213 , G11B5/147 , G11B5/31
CPC分类号： G11B5/1278 , G11B5/10 , G11B5/11 , G11B5/112 , G11B5/147 , G11B5/187 , G11B5/1878 , G11B5/232 , G11B5/235 , G11B5/3116 , G11B5/313 , G11B5/3146 , G11B5/315 , G11B5/3163 , G11B5/6082 , H01L21/0272 , H01L21/32134 , H01L21/32139 , Y10T29/49032 , Y10T29/49041 , Y10T29/49043
摘要： A perpendicular magnetic recording (PMR) writer is configured to magnetically record data on a rotatable disk surface. The PMR writer including a pole tip, side shields, an air-bearing surface (ABS) region, a yoke region comprising Silicon Dioxide (SiO2), side gaps and a plurality of throat regions. The side gaps are arranged respectively between the pole tip and the side shields and include SiO2. A side gap width of the plurality of throat regions increases with a side shield throat height above the ABS region for each of the throat regions. The side gap width has a different width variation in each of the throat regions.

3. 发明申请

US20180025745A1 MAGNETIC RECORDING WRITE APPARATUS HAVING A STEPPED CONFORMAL TRAILING SHIELD 审中-公开
公开(公告)号：US20180025745A1
公开(公告)日：2018-01-25
申请号：US15677145
申请日：2017-08-15
申请人： WESTERN DIGITAL (FREMONT), LLC
发明人： Feng Liu , Zhanjie LI , ZHIGANG BAI , Yi WANG
IPC分类号： G11B5/31 , G11B5/127 , G11B5/11
CPC分类号： G11B5/3116 , G11B5/11 , G11B5/1278 , G11B5/23 , G11B5/3146 , G11B5/315
摘要： A magnetic write apparatus has a media-facing surface (MFS), a pole having leading and trailing surfaces, a trailing shield having a pole-facing surface, a write gap and coil(s). The pole's trailing surface has a portion adjoining the MFS and oriented at a nonzero, acute bevel angle from a direction perpendicular to the MFS. The pole-facing surface includes a first portion adjoining the MFS and oriented at a first angle substantially the same as the bevel angle, a second portion oriented at a second angle greater than the first trailing shield angle, and a third portion oriented at a third angle substantially the same as the first angle. The write gap has first, second and third thicknesses adjacent to the first, second and third portions of the pole-facing surface, respectively. The first thickness is constant. The second thickness varies. The third thickness is constant and greater than the first thickness.

4. 发明授权

US09754611B1 Magnetic recording write apparatus having a stepped conformal trailing shield 有权
公开(公告)号：US09754611B1
公开(公告)日：2017-09-05
申请号：US14953982
申请日：2015-11-30
申请人： Western Digital (Fremont), LLC
发明人： Feng Liu , Zhanjie Li , Zhigang Bai , Yi Wang
IPC分类号： G11B5/11 , G11B5/31 , G11B5/127
CPC分类号： G11B5/3116 , G11B5/11 , G11B5/1278 , G11B5/23 , G11B5/3146 , G11B5/315
摘要： A magnetic write apparatus has a media-facing surface (MFS), a pole having leading and trailing surfaces, a trailing shield having a pole-facing surface, a write gap and coil(s). The pole's trailing surface has a portion adjoining the MFS and oriented at a nonzero, acute bevel angle from a direction perpendicular to the MFS. The pole-facing surface includes a first portion adjoining the MFS and oriented at a first angle substantially the same as the bevel angle, a second portion oriented at a second angle greater than the first trailing shield angle, and a third portion oriented at a third angle substantially the same as the first angle. The write gap has first, second and third thicknesses adjacent to the first, second and third portions of the pole-facing surface, respectively. The first thickness is constant. The second thickness varies. The third thickness is constant and greater than the first thickness.

5. 发明授权

US09741366B1 Method for fabricating a magnetic writer having a gradient in saturation magnetization of the shields 有权
公开(公告)号：US09741366B1
公开(公告)日：2017-08-22
申请号：US14871553
申请日：2015-09-30
申请人： Western Digital (Fremont), LLC
发明人： Jinqiu Zhang , Feng Liu , Ming Sun , Yunfei Li , Ming Jiang , Xiaojun Zhang
IPC分类号： G11B5/127 , G11B5/187 , G11B5/31
CPC分类号： G11B5/1272 , G11B5/11 , G11B5/1278 , G11B5/187 , G11B5/23 , G11B5/3116 , G11B5/315 , G11B5/3163
摘要： A method provides a magnetic transducer having a media-facing surface (MFS). The method includes providing a pole, providing a side gap, providing coil(s) for energizing the pole and providing side shield(s). A portion of the pole resides at the MFS. The side gap is between the pole and the side shield(s). The side shield(s) have a gradient in a saturation magnetization such that the saturation magnetization increases in a yoke direction perpendicular to the MFS. The step of providing the side shield(s) further includes providing a nonmagnetic structure having a side surface parallel to the MFS and providing at least one side shield layer. A portion of the side shield layer(s) are on the side surface. The portion of the side shield layer(s) has the gradient in the saturation magnetization. At least part of the side shield being formed by the portion of the side shield layer(s).

6. 发明授权

US09711168B1 Method for providing a magnetic recording write apparatus by predefining side shields 有权
公开(公告)号：US09711168B1
公开(公告)日：2017-07-18
申请号：US15156877
申请日：2016-05-17
申请人： Western Digital (Fremont), LLC
发明人： Xiaoyu Yang , Jinqiu Zhang , Feng Liu , Xiaotian Zhou , Hai Sun , Ming Jiang
IPC分类号： G11B5/187 , G11B5/11
CPC分类号： G11B5/187 , G11B5/112 , G11B5/1278 , G11B5/3116 , G11B5/315
摘要： A method provides magnetic write apparatus. A side shield location layer having a location corresponding to the side shield(s) and back and side surfaces is provided. Part of the back surface corresponds to the back surface of the side shield. A nonmagnetic layer adjoining the back and side surface(s) of the side shield location layer is provided. A pole trench is formed in the layers using a first etch process. The nonmagnetic and side shield location layers have an etch selectivity of at least 0.9 and not more than 1.1 for the first etch. A pole is provided in the pole trench. A remaining portion of the side shield location layer is removed using a wet etch. The nonmagnetic layer is nonremovable by the wet etch. Side shield(s) having a back surface substantially the same as the back surface of the side shield location layer are provided.

7. 发明授权

US08879207B1 Method for providing a side shield for a magnetic recording transducer using an air bridge 有权
标题翻译：用于使用空气桥提供用于磁记录换能器的侧屏蔽的方法
公开(公告)号：US08879207B1
公开(公告)日：2014-11-04
申请号：US13887252
申请日：2013-05-03
申请人： Western Digital (Fremont), LLC
发明人： Jinqiu Zhang , Feng Liu , Shaoping Li , Ming Sun
IPC分类号： G11B5/127 , G11B5/11
CPC分类号： G11B5/112 , G11B5/1278 , G11B5/3116 , G11B5/315 , G11B5/3163 , Y10T29/49044
摘要： A method fabricates a side shield for a magnetic transducer having a nonmagnetic layer and an ABS location corresponding to an ABS. The nonmagnetic layer has a pole trench therein. The pole trench has a shape and location corresponding to the pole. A wet etchable layer is deposited. Part of the wet etchable layer resides in the pole trench. A pole is formed. The pole has a bottom and a top wider than the bottom in the pole tip region. Part of the pole in the pole tip region is in the pole trench on at least part of the wet etchable layer. At least parts of the wet etchable layer and the nonmagnetic layer are removed, forming an air bridge. The air bridge is between part of the pole at the ABS location and an underlying layer. Side shield layer(s) that substantially fill the air bridge are deposited.
摘要翻译：一种制造用于具有对应于ABS的非磁性层和ABS位置的磁换能器的侧屏蔽的方法。非磁性层在其中具有极沟槽。极沟具有对应于极的形状和位置。沉积湿蚀刻层。湿蚀刻层的一部分位于极沟槽中。一个极点形成。电极具有底部和顶部宽于电极尖端区域中的底部。极尖区域中的极的一部分在至少部分湿蚀刻层的极沟中。去除湿蚀刻层和非磁性层的至少一部分，形成空气桥。空气桥在ABS位置的极点的一部分和下层之间。基本上填充空气桥的侧面屏蔽层被沉积。

8. 发明授权

US09558763B1 Magnetic recording write apparatus having a pole including an assist portion extending in the cross-track direction 有权
标题翻译：磁记录装置具有包括沿横向方向延伸的辅助部分的极点
公开(公告)号：US09558763B1
公开(公告)日：2017-01-31
申请号：US15081727
申请日：2016-03-25
申请人： Western Digital (Fremont), LLC
发明人： Peng Luo , Yunfei Li , Zhigang Bai , Hai Sun , Feng Liu , Zhanjie Li
IPC分类号： G11B5/127 , G11B5/31
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/3163
摘要： A magnetic write apparatus has a media-facing surface (MFS), a pole, side shield(s), a side gap and coil(s) for energizing the pole. The pole includes main and assist portions. The main portion is ferromagnetic, includes a pole tip and includes side surface(s) having a flare angle from the MFS. The pole tip occupies a portion of the MFS. The flare angle is nonzero and acute. The assist portion adjoins the main portion, extends from the main portion in a direction having a component in a cross-track direction, and has a depth of not more than three hundred nanometers. The side shield(s) occupy another portion of the MFS, have a back surface, and are between the assist portion and the MFS. The assist portion is conformal with the back surface of the side shield(s). The side gap is between the main portion of the pole and the side shield(s).
摘要翻译：磁性写入装置具有面向媒体的表面（MFS），极点，侧面屏蔽，侧面间隙和线圈，用于激励极点。杆包括主和辅助部分。主要部分是铁磁性的，包括一个极尖并且包括具有来自MFS的喇叭角的侧表面。极尖占据MFS的一部分。喇叭角是非零和尖锐的。辅助部分邻接主体部分，沿着具有沿横向方向的分量的方向从主体部分延伸，并且具有不超过三百纳米的深度。侧护罩占据MFS的另一部分，具有后表面，并且位于辅助部分和MFS之间。辅助部分与侧护罩的后表面共形。侧面间隙位于极的主要部分和侧面屏蔽之间。

9. 发明授权

US09368134B1 Method and system for providing an antiferromagnetically coupled writer 有权
公开(公告)号：US09368134B1
公开(公告)日：2016-06-14
申请号：US13769951
申请日：2013-02-19
申请人： Western Digital (Fremont), LLC
发明人： Ming Sun , Dehua Han , Jose A. Medina , Ming Jiang , Ying Hong , Feng Liu , Jian X. Shen
IPC分类号： G11B5/187
CPC分类号： G11B5/187 , G11B5/3116 , G11B5/3163
摘要： A method and system for fabricating a magnetic transducer are described. The magnetic transducer includes a pole and a nonmagnetic intermediate layer adjacent to the pole. The pole has a paddle and a pole tip including a plurality of sidewalls. The pole includes a first magnetic pole layer, at least one antiferromagnetic coupling (AFC) structure on the first magnetic pole layer, and a second magnetic pole layer on the AFC structure(s). At least a portion of the first magnetic pole layer resides on the sidewalls of the pole tip. The paddle has a paddle width in a track width direction. The pole tip has a pole tip width in a track width direction that is less than the paddle width.

10. 发明授权

US09305583B1 Method for fabricating a magnetic writer using multiple etches of damascene materials 有权
标题翻译：用多层蚀刻材料制造磁性刻录机的方法
公开(公告)号：US09305583B1
公开(公告)日：2016-04-05
申请号：US14280342
申请日：2014-05-16
申请人： Western Digital (Fremont), LLC
发明人： Jinqiu Zhang , Feng Liu , Hongmei Han , Ming Sun , Xiaotian Zhou
IPC分类号： G11B5/31 , G11B5/855 , G11B5/127
CPC分类号： G11B5/855 , G11B5/1278 , G11B5/232 , G11B5/315 , G11B5/3163
摘要： A method provides a magnetic transducer having an air-bearing surface (ABS) location. An intermediate layer that includes a first sublayer in a side shield region and a second sublayer outside of the side shield region is provided. A trench is formed in the intermediate layer using multiple etches. A first etch removes part of the second sublayer, providing a first portion of the trench having a first sidewall angle. A second etch removes part of the first sublayer, providing a second portion of the trench having a second sidewall angle. The second sidewall angle is greater than the first sidewall angle. A main pole is provided in the trench and has a plurality of sidewalls. The sidewalls have the second sidewall angle in the second portion of the trench and at least one main pole sidewall angle corresponding to the first sidewall angle in the first portion of the trench.
摘要翻译：一种方法提供具有空气轴承表面（ABS）位置的磁换能器。提供了包括侧屏蔽区域中的第一子层和侧屏蔽区域外侧的第二子层的中间层。使用多个蚀刻在中间层中形成沟槽。第一蚀刻移除第二子层的一部分，提供具有第一侧壁角的沟槽的第一部分。第二蚀刻去除第一子层的一部分，提供具有第二侧壁角的沟槽的第二部分。第二侧壁角度大于第一侧壁角度。主极设置在沟槽中并且具有多个侧壁。侧壁在沟槽的第二部分具有第二侧壁角，并且至少一个主极侧壁角对应于沟槽的第一部分中的第一侧壁角。

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