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1. 发明授权

US09721591B1 Magnetic recording write apparatus having a pole having an aspect ratio greater than one and an auxiliary pole 有权
公开(公告)号：US09721591B1
公开(公告)日：2017-08-01
申请号：US15097182
申请日：2016-04-12
申请人： Western Digital (Fremont), LLC
发明人： Feng Liu , Zhigang Bai , Peng Luo , Jinqiu Zhang , Ming Sun , Xiaoyu Yang , Yifan Zhang , Xiaojun Zhang , Ming Jiang
IPC分类号： G11B5/127 , G11B5/31 , G11B5/21 , G11B5/147
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/1475 , G11B5/21 , G11B5/3146
摘要： A magnetic write apparatus has a media-facing surface (MFS) and includes an auxiliary pole, coil(s) and a main pole having a pole tip and a yoke. The pole tip occupies part of the MFS. The yoke has a yoke length measured from the MFS in a yoke direction perpendicular to the MFS. The yoke length is less than four microns. The main pole has a total length in the yoke direction and a width in a cross-track direction. The main pole is continuous along the total length. The aspect ratio of the main pole is the total length divided by the width and exceeds one. The main pole includes surface(s) having a nonzero acute flare angle from the MFS. The auxiliary pole is adjacent to the main pole and recessed from the MFS by not more than 1.05 micron. The coil(s) energizes the main pole and have not more than two turns.

2. 发明授权

US09431038B1 Method for fabricating a magnetic write pole having an improved sidewall angle profile 有权
标题翻译：具有改进的侧壁角轮廓的磁性写入极的制造方法
公开(公告)号：US09431038B1
公开(公告)日：2016-08-30
申请号：US14753630
申请日：2015-06-29
申请人： Western Digital (Fremont), LLC
发明人： Jinqiu Zhang , Xiaoyu Yang , Feng Liu , Xiaojun Zhang , Krishna Chetry , Masahiro Osugi , Ning Wu
IPC分类号： G11B5/11 , B44C1/22 , G11B5/31 , G11B5/60
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116
摘要： A method provides a magnetic device having an air-bearing surface (ABS) location. A layer including first and second sublayers is provided. The first sublayer includes the ABS location. The second sublayer recessed from the ABS location such that part of the first sublayer is between the second sublayer and the ABS location. The first sublayer has a rear surface oriented at a nonzero, acute angle from a surface perpendicular to the ABS location. A trench is formed in the layer. The trench has a bottom, a top and sidewalls. The sidewalls form a first angle with a direction perpendicular to the bottom at the ABS location. The sidewalls form a second angle with the direction in part of the second sublayer. The second angle is smaller than the first angle. The sidewall angle varies along the rear surface of the first sublayer. A main pole is provided in the trench.
摘要翻译：一种方法提供具有空气轴承表面（ABS）位置的磁性装置。提供包括第一和第二子层的层。第一子层包括ABS位置。第二子层从ABS位置凹陷，使得第一子层的一部分位于第二子层和ABS位置之间。第一子层具有从垂直于ABS位置的表面定向成非零锐角的后表面。在该层中形成沟槽。沟槽具有底部，顶部和侧壁。在ABS位置处，侧壁与垂直于底部的方向形成第一角度。侧壁与第二子层的一部分中的方向形成第二角度。第二角度小于第一角度。侧壁角沿第一子层的后表面变化。沟槽中设有主极。

3. 发明授权

US08988825B1 Method for fabricating a magnetic writer having half-side shields 有权
标题翻译：一种具有半边屏蔽的磁性写入器的制造方法
公开(公告)号：US08988825B1
公开(公告)日：2015-03-24
申请号：US14279608
申请日：2014-05-16
申请人： Western Digital (Fremont), LLC
发明人： Jinqiu Zhang , Lien-Chang Wang , Xiaoyu Yang , Feng Liu , Ming Jiang
IPC分类号： G11B5/147 , G11B5/31 , G11B5/11
CPC分类号： G11B5/3163 , G11B5/3116
摘要： A method and system provide a magnetic transducer having an air-bearing surface (ABS) location. An intermediate is provided. The intermediate layer includes a first sublayer and a second sublayer in at least a side shield region. The first sublayer has a first sublayer top. The second sublayer is on the first sublayer top in the shield region. A trench is formed in the intermediate layer using at least one etch. A main pole is provided in the trench. The main pole has a bottom and a top wider than the bottom. The first sublayer top is between the top and the bottom of the main pole. At least a portion of the second sublayer is removed in the shield region. At least one half side shield is provided. A bottom of the at least one half side shield being between the top and the bottom of the main pole.
摘要翻译：一种方法和系统提供具有空气轴承表面（ABS）位置的磁换能器。提供中间体。中间层包括至少一个侧屏蔽区域中的第一子层和第二子层。第一子层具有第一子层顶部。第二子层位于屏蔽区域中的第一子层顶部。使用至少一个蚀刻在中间层中形成沟槽。沟槽中设有主极。主杆的底部和顶部宽于底部。第一子层顶部位于主极的顶部和底部之间。第二子层的至少一部分在屏蔽区域中被去除。提供至少一个半边屏蔽。至少一个半侧护罩的底部位于主杆的顶部和底部之间。

4. 发明授权

US10115416B2 Magnetic recording write apparatus having a pole having an aspect ratio greater than one and an auxiliary pole 有权
公开(公告)号：US10115416B2
公开(公告)日：2018-10-30
申请号：US15652629
申请日：2017-07-18
申请人： WESTERN DIGITAL (FREMONT), LLC
发明人： Feng Liu , Zhigang Bai , Peng Luo , Jinqiu Zhang , Ming Sun , Xiaoyu Yang , Yifan Zhang , Xiaojun Zhang , Ming Jiang
IPC分类号： G11B5/31 , G11B5/127 , G11B5/21 , G11B5/147
摘要： A magnetic write apparatus has a media-facing surface (MFS) and includes an auxiliary pole, coil(s) and a main pole having a pole tip and a yoke. The pole tip occupies part of the MFS. The yoke has a yoke length measured from the MFS in a yoke direction perpendicular to the MFS. The yoke length is less than four microns. The main pole has a total length in the yoke direction and a width in a cross-track direction. The main pole is continuous along the total length. The aspect ratio of the main pole is the total length divided by the width and exceeds one. The main pole includes surface(s) having a nonzero acute flare angle from the MFS. The auxiliary pole is adjacent to the main pole and recessed from the MFS by not more than 1.05 micron. The coil(s) energizes the main pole and have not more than two turns.

5. 发明授权

US09940951B2 PMR writer with non-conformal side gaps 有权
公开(公告)号：US09940951B2
公开(公告)日：2018-04-10
申请号：US15053211
申请日：2016-02-25
申请人： Western Digital (Fremont), LLC
发明人： Jinqiu Zhang , Feng Liu , Xiaoyu Yang , Ming Jiang , Xiaotian Zhou , Zeyu Ma , Hai Sun
IPC分类号： G11B5/235 , G11B5/11 , G11B5/127 , G11B5/23 , G11B5/187 , G11B5/10 , G11B5/60 , H01L21/027 , H01L21/3213 , G11B5/147 , G11B5/31
CPC分类号： G11B5/1278 , G11B5/10 , G11B5/11 , G11B5/112 , G11B5/147 , G11B5/187 , G11B5/1878 , G11B5/232 , G11B5/235 , G11B5/3116 , G11B5/313 , G11B5/3146 , G11B5/315 , G11B5/3163 , G11B5/6082 , H01L21/0272 , H01L21/32134 , H01L21/32139 , Y10T29/49032 , Y10T29/49041 , Y10T29/49043
摘要： A perpendicular magnetic recording (PMR) writer is configured to magnetically record data on a rotatable disk surface. The PMR writer including a pole tip, side shields, an air-bearing surface (ABS) region, a yoke region comprising Silicon Dioxide (SiO2), side gaps and a plurality of throat regions. The side gaps are arranged respectively between the pole tip and the side shields and include SiO2. A side gap width of the plurality of throat regions increases with a side shield throat height above the ABS region for each of the throat regions. The side gap width has a different width variation in each of the throat regions.

6. 发明授权

US09741366B1 Method for fabricating a magnetic writer having a gradient in saturation magnetization of the shields 有权
公开(公告)号：US09741366B1
公开(公告)日：2017-08-22
申请号：US14871553
申请日：2015-09-30
申请人： Western Digital (Fremont), LLC
发明人： Jinqiu Zhang , Feng Liu , Ming Sun , Yunfei Li , Ming Jiang , Xiaojun Zhang
IPC分类号： G11B5/127 , G11B5/187 , G11B5/31
CPC分类号： G11B5/1272 , G11B5/11 , G11B5/1278 , G11B5/187 , G11B5/23 , G11B5/3116 , G11B5/315 , G11B5/3163
摘要： A method provides a magnetic transducer having a media-facing surface (MFS). The method includes providing a pole, providing a side gap, providing coil(s) for energizing the pole and providing side shield(s). A portion of the pole resides at the MFS. The side gap is between the pole and the side shield(s). The side shield(s) have a gradient in a saturation magnetization such that the saturation magnetization increases in a yoke direction perpendicular to the MFS. The step of providing the side shield(s) further includes providing a nonmagnetic structure having a side surface parallel to the MFS and providing at least one side shield layer. A portion of the side shield layer(s) are on the side surface. The portion of the side shield layer(s) has the gradient in the saturation magnetization. At least part of the side shield being formed by the portion of the side shield layer(s).

7. 发明授权

US09711168B1 Method for providing a magnetic recording write apparatus by predefining side shields 有权
公开(公告)号：US09711168B1
公开(公告)日：2017-07-18
申请号：US15156877
申请日：2016-05-17
申请人： Western Digital (Fremont), LLC
发明人： Xiaoyu Yang , Jinqiu Zhang , Feng Liu , Xiaotian Zhou , Hai Sun , Ming Jiang
IPC分类号： G11B5/187 , G11B5/11
CPC分类号： G11B5/187 , G11B5/112 , G11B5/1278 , G11B5/3116 , G11B5/315
摘要： A method provides magnetic write apparatus. A side shield location layer having a location corresponding to the side shield(s) and back and side surfaces is provided. Part of the back surface corresponds to the back surface of the side shield. A nonmagnetic layer adjoining the back and side surface(s) of the side shield location layer is provided. A pole trench is formed in the layers using a first etch process. The nonmagnetic and side shield location layers have an etch selectivity of at least 0.9 and not more than 1.1 for the first etch. A pole is provided in the pole trench. A remaining portion of the side shield location layer is removed using a wet etch. The nonmagnetic layer is nonremovable by the wet etch. Side shield(s) having a back surface substantially the same as the back surface of the side shield location layer are provided.

8. 发明授权

US08879207B1 Method for providing a side shield for a magnetic recording transducer using an air bridge 有权
标题翻译：用于使用空气桥提供用于磁记录换能器的侧屏蔽的方法
公开(公告)号：US08879207B1
公开(公告)日：2014-11-04
申请号：US13887252
申请日：2013-05-03
申请人： Western Digital (Fremont), LLC
发明人： Jinqiu Zhang , Feng Liu , Shaoping Li , Ming Sun
IPC分类号： G11B5/127 , G11B5/11
CPC分类号： G11B5/112 , G11B5/1278 , G11B5/3116 , G11B5/315 , G11B5/3163 , Y10T29/49044
摘要： A method fabricates a side shield for a magnetic transducer having a nonmagnetic layer and an ABS location corresponding to an ABS. The nonmagnetic layer has a pole trench therein. The pole trench has a shape and location corresponding to the pole. A wet etchable layer is deposited. Part of the wet etchable layer resides in the pole trench. A pole is formed. The pole has a bottom and a top wider than the bottom in the pole tip region. Part of the pole in the pole tip region is in the pole trench on at least part of the wet etchable layer. At least parts of the wet etchable layer and the nonmagnetic layer are removed, forming an air bridge. The air bridge is between part of the pole at the ABS location and an underlying layer. Side shield layer(s) that substantially fill the air bridge are deposited.
摘要翻译：一种制造用于具有对应于ABS的非磁性层和ABS位置的磁换能器的侧屏蔽的方法。非磁性层在其中具有极沟槽。极沟具有对应于极的形状和位置。沉积湿蚀刻层。湿蚀刻层的一部分位于极沟槽中。一个极点形成。电极具有底部和顶部宽于电极尖端区域中的底部。极尖区域中的极的一部分在至少部分湿蚀刻层的极沟中。去除湿蚀刻层和非磁性层的至少一部分，形成空气桥。空气桥在ABS位置的极点的一部分和下层之间。基本上填充空气桥的侧面屏蔽层被沉积。

9. 发明授权

US10037770B1 Method for providing a magnetic recording write apparatus having a seamless pole 有权
公开(公告)号：US10037770B1
公开(公告)日：2018-07-31
申请号：US14939934
申请日：2015-11-12
申请人： Western Digital (Fremont), LLC
发明人： Krishna Bahadur Chetry , Ming Sun , Jinqiu Zhang
IPC分类号： G11B5/127 , G11B5/17 , G11B5/31
CPC分类号： G11B5/1272 , G11B5/1278 , G11B5/17 , G11B5/3116 , G11B5/3163 , Y10T29/49021 , Y10T29/49032 , Y10T29/4906
摘要： A method provides a magnetic write apparatus. The method includes providing a pole including a pole tip, a yoke, a pole bottom and a pole top. The pole is seam free and formed vertically in a direction from the pole bottom toward the pole top. At least one coil for energizing the pole is also provided. In some aspects, providing the pole may include removing a portion of an intermediate layer to form a trench therein. The trench has a shape and location corresponding to the pole, a bottom, a top and sides. A conductive layer is deposited in the trench and on a top surface of the intermediate layer. Insulating layer(s) are provided on the sides of the trench. Only part of the conductive layer on the trench bottom is exposed. Pole material(s) are grown on the exposed portion of the conductive layer to provide the pole.

10. 发明授权

US09305583B1 Method for fabricating a magnetic writer using multiple etches of damascene materials 有权
标题翻译：用多层蚀刻材料制造磁性刻录机的方法
公开(公告)号：US09305583B1
公开(公告)日：2016-04-05
申请号：US14280342
申请日：2014-05-16
申请人： Western Digital (Fremont), LLC
发明人： Jinqiu Zhang , Feng Liu , Hongmei Han , Ming Sun , Xiaotian Zhou
IPC分类号： G11B5/31 , G11B5/855 , G11B5/127
CPC分类号： G11B5/855 , G11B5/1278 , G11B5/232 , G11B5/315 , G11B5/3163
摘要： A method provides a magnetic transducer having an air-bearing surface (ABS) location. An intermediate layer that includes a first sublayer in a side shield region and a second sublayer outside of the side shield region is provided. A trench is formed in the intermediate layer using multiple etches. A first etch removes part of the second sublayer, providing a first portion of the trench having a first sidewall angle. A second etch removes part of the first sublayer, providing a second portion of the trench having a second sidewall angle. The second sidewall angle is greater than the first sidewall angle. A main pole is provided in the trench and has a plurality of sidewalls. The sidewalls have the second sidewall angle in the second portion of the trench and at least one main pole sidewall angle corresponding to the first sidewall angle in the first portion of the trench.
摘要翻译：一种方法提供具有空气轴承表面（ABS）位置的磁换能器。提供了包括侧屏蔽区域中的第一子层和侧屏蔽区域外侧的第二子层的中间层。使用多个蚀刻在中间层中形成沟槽。第一蚀刻移除第二子层的一部分，提供具有第一侧壁角的沟槽的第一部分。第二蚀刻去除第一子层的一部分，提供具有第二侧壁角的沟槽的第二部分。第二侧壁角度大于第一侧壁角度。主极设置在沟槽中并且具有多个侧壁。侧壁在沟槽的第二部分具有第二侧壁角，并且至少一个主极侧壁角对应于沟槽的第一部分中的第一侧壁角。

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