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    • 2. 发明授权
    • Method for fabricating a magnetic write pole having an improved sidewall angle profile
    • 具有改进的侧壁角轮廓的磁性写入极的制造方法
    • US09431038B1
    • 2016-08-30
    • US14753630
    • 2015-06-29
    • Western Digital (Fremont), LLC
    • Jinqiu ZhangXiaoyu YangFeng LiuXiaojun ZhangKrishna ChetryMasahiro OsugiNing Wu
    • G11B5/11B44C1/22G11B5/31G11B5/60
    • G11B5/3163G11B5/1278G11B5/3116
    • A method provides a magnetic device having an air-bearing surface (ABS) location. A layer including first and second sublayers is provided. The first sublayer includes the ABS location. The second sublayer recessed from the ABS location such that part of the first sublayer is between the second sublayer and the ABS location. The first sublayer has a rear surface oriented at a nonzero, acute angle from a surface perpendicular to the ABS location. A trench is formed in the layer. The trench has a bottom, a top and sidewalls. The sidewalls form a first angle with a direction perpendicular to the bottom at the ABS location. The sidewalls form a second angle with the direction in part of the second sublayer. The second angle is smaller than the first angle. The sidewall angle varies along the rear surface of the first sublayer. A main pole is provided in the trench.
    • 一种方法提供具有空气轴承表面(ABS)位置的磁性装置。 提供包括第一和第二子层的层。 第一子层包括ABS位置。 第二子层从ABS位置凹陷,使得第一子层的一部分位于第二子层和ABS位置之间。 第一子层具有从垂直于ABS位置的表面定向成非零锐角的后表面。 在该层中形成沟槽。 沟槽具有底部,顶部和侧壁。 在ABS位置处,侧壁与垂直于底部的方向形成第一角度。 侧壁与第二子层的一部分中的方向形成第二角度。 第二角度小于第一角度。 侧壁角沿第一子层的后表面变化。 沟槽中设有主极。