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1. 发明授权

US08093971B2 Micro-electromechanical system switch 有权
标题翻译：微机电系统开关
公开(公告)号：US08093971B2
公开(公告)日：2012-01-10
申请号：US12340775
申请日：2008-12-22
申请人： Xuefeng Wang , Alex David Corwin , Bo Li , Kanakasabapathi Subramanian , Kuna Venkat Satya Rama Kishore
发明人： Xuefeng Wang , Alex David Corwin , Bo Li , Kanakasabapathi Subramanian , Kuna Venkat Satya Rama Kishore
IPC分类号： H01H51/22
CPC分类号： H01H59/0009 , H01H1/0036 , H01H2001/0078 , H01H2001/0084 , Y10T29/49105
摘要： A micro electromechanical system switch having an electrical pathway is presented. The switch includes a first portion and a second portion. The second portion is offset to a zero overlap position with respect to the first portion when the switch is in open position (or in the closed position depending on the switch architecture). The switch further includes an actuator for moving the first portion and the second portion into contact.
摘要翻译：提出了具有电路径的微机电系统开关。开关包括第一部分和第二部分。当开关处于打开位置时（或根据开关结构处于闭合位置），第二部分相对于第一部分偏移到零重叠位置。开关还包括用于使第一部分和第二部分移动接触的致动器。

2. 发明申请

US20100155203A1 MICRO-ELECTROMECHANICAL SYSTEM SWITCH 有权
标题翻译：微电子系统开关
公开(公告)号：US20100155203A1
公开(公告)日：2010-06-24
申请号：US12340775
申请日：2008-12-22
申请人： Xuefeng Wang , Alex David Corwin , Bo Li , Kanakasabapathi Subramanian , Kuna Venkat Satya Rama Kishore
发明人： Xuefeng Wang , Alex David Corwin , Bo Li , Kanakasabapathi Subramanian , Kuna Venkat Satya Rama Kishore
IPC分类号： H01H57/00 , H01H11/00
CPC分类号： H01H59/0009 , H01H1/0036 , H01H2001/0078 , H01H2001/0084 , Y10T29/49105
摘要： A micro electromechanical system switch having an electrical pathway is presented. The switch includes a first portion and a second portion. The second portion is offset to a zero overlap position with respect to the first portion when the switch is in open position (or in the closed position depending on the switch architecture). The switch further includes an actuator for moving the first portion and the second portion into contact.
摘要翻译：提出了具有电路径的微机电系统开关。开关包括第一部分和第二部分。当开关处于打开位置时（或根据开关结构在关闭位置），第二部分相对于第一部分偏移到零重叠位置。开关还包括用于使第一部分和第二部分移动接触的致动器。

3. 发明授权

US07928333B2 Switch structures 有权
标题翻译：开关结构
公开(公告)号：US07928333B2
公开(公告)日：2011-04-19
申请号：US12541321
申请日：2009-08-14
申请人： Xuefeng Wang , Marco Francesco Aimi , Shubhra Bansal , Christopher Fred Keimel , Kuna Venkat Satya Rama Kishore , Kanakasabapathi Subramanian
发明人： Xuefeng Wang , Marco Francesco Aimi , Shubhra Bansal , Christopher Fred Keimel , Kuna Venkat Satya Rama Kishore , Kanakasabapathi Subramanian
IPC分类号： H01H57/00
CPC分类号： H01H59/0009 , H01H2001/0084
摘要： A device, such as a switch structure, is provided, the device including a contact and a conductive element. The conductive element can be configured to be selectively moveable between a non-contacting position, in which the conductive element is separated from the contact (in some cases by a distance less than or equal to about 4 μm, and in others by less than or equal to about 1 μm), and a contacting position, in which the conductive element contacts and establishes electrical communication with the contact. When the conductive element is disposed in the non-contacting position, the contact and the conductive element can be configured to support an electric field therebetween with a magnitude of greater than 320 V μm−1 and/or a potential difference of about 330 V or more.
摘要翻译：提供诸如开关结构的装置，该装置包括接触件和导电元件。导电元件可以被配置为在非接触位置之间选择性地移动，在非接触位置中，导电元件与接触件分离（在一些情况下，距离小于或等于约4μm，而另一些距离小于或等于约4μm，等于约1μm），以及接触位置，其中导电元件接触并建立与接触件的电连通。当导电元件设置在非接触位置时，触点和导电元件可被配置为支撑其间具有大于320Vμm-1的大小和/或约330V的电位差的电场，或更多。

4. 发明授权

US07473859B2 Gating voltage control system and method for electrostatically actuating a micro-electromechanical device 有权
标题翻译：门电压控制系统和静电驱动微机电装置的方法
公开(公告)号：US07473859B2
公开(公告)日：2009-01-06
申请号：US11622483
申请日：2007-01-12
申请人： Joshua Isaac Wright , Kanakasabapathi Subramanian , William James Premerlani , John Norton Park , Christopher Keimel , Long Que , Kuna Venkat Satya Rama Kishore , Abhijeet Dinkar Sathe , Xuefeng Wang , Edward Keith Howell
发明人： Joshua Isaac Wright , Kanakasabapathi Subramanian , William James Premerlani , John Norton Park , Christopher Keimel , Long Que , Kuna Venkat Satya Rama Kishore , Abhijeet Dinkar Sathe , Xuefeng Wang , Edward Keith Howell
IPC分类号： H01H51/22
CPC分类号： H01H59/0009 , H01H47/22 , Y10T307/937
摘要： A gating voltage control system and method are provided for electrostatically actuating a micro-electromechanical systems (MEMS) device, e.g., a MEMS switch. The device may comprise an electrostatically responsive actuator movable through a gap for actuating the device to a respective actuating condition corresponding to one of a first actuating condition (e.g., a closed switching condition) and a second actuating condition (e.g., an open switching condition). The gating voltage control system may comprise a drive circuit electrically coupled to a gate terminal of the device to apply a gating voltage. The gating voltage control system may further comprise a controller electrically coupled to the drive circuit to control the gating voltage applied to the gating terminal in accordance with a gating voltage control sequence. The gating voltage control sequence may comprise a first interval for ramping up the gating voltage to a voltage level for producing an electrostatic force sufficient to accelerate the actuator through a portion of the gap to be traversed by the actuator to reach a respective actuating condition. The gating voltage control sequence may further comprise a second interval for ramping down the gating voltage to a level sufficient to reduce the electrostatic force acting on the movable actuator. This allows reducing the amount of force at which the actuator engages a contact for establishing the first actuating condition, or avoiding an overshoot position of the actuator while reaching the second actuating condition.
摘要翻译：提供了门控电压控制系统和方法，用于静电致动微机电系统（MEMS）装置，例如MEMS开关。该装置可以包括静电响应致动器，其可通过间隙移动，以将装置致动到对应于第一致动状态（例如，闭合开关状态）和第二致动状态（例如，开启状态）之一的相应致动状态，。门控电压控制系统可以包括电耦合到该器件的栅极端子以施加选通电压的驱动电路。门控电压控制系统还可以包括电耦合到驱动电路的控制器，以根据门控电压控制顺序控制施加到门控端子的门控电压。门控电压控制序列可以包括用于将门控电压升高到电压电平的第一间隔，用于产生足以通过由致动器穿过的间隙的一部分来加速致动器以达到相应的致动状态的静电力。门控电压控制序列还可以包括用于将门控电压降低到足以减小作用在可移动致动器上的静电力的水平的第二间隔。这允许减小致动器接合接触件以建立第一致动条件的力的量，或者避免致动器在达到第二致动状态时的过冲位置。

5. 发明申请

US20110036690A1 SWITCH STRUCTURES 有权
标题翻译：开关结构
公开(公告)号：US20110036690A1
公开(公告)日：2011-02-17
申请号：US12541321
申请日：2009-08-14
申请人： Xuefeng Wang , Marco Francesco Aimi , Shubhra Bansal , Christopher Fred Keimel , Kuna Venkat Satya Rama Kishore , Kanakasabapathi Subramanian
发明人： Xuefeng Wang , Marco Francesco Aimi , Shubhra Bansal , Christopher Fred Keimel , Kuna Venkat Satya Rama Kishore , Kanakasabapathi Subramanian
IPC分类号： H01H57/00
CPC分类号： H01H59/0009 , H01H2001/0084
摘要： A device, such as a switch structure, is provided, the device including a contact and a conductive element. The conductive element can be configured to be selectively moveable between a non-contacting position, in which the conductive element is separated from the contact (in some cases by a distance less than or equal to about 4 μm, and in others by less than or equal to about 1 μm), and a contacting position, in which the conductive element contacts and establishes electrical communication with the contact. When the conductive element is disposed in the non-contacting position, the contact and the conductive element can be configured to support an electric field therebetween with a magnitude of greater than 320 V μm−1 and/or a potential difference of about 330 V or more.
摘要翻译：提供诸如开关结构的装置，该装置包括接触件和导电元件。导电元件可以被配置为在非接触位置之间选择性地移动，在非接触位置中，导电元件与接触件分离（在一些情况下，距离小于或等于约4μm，而另一些距离小于或等于约4μm，等于约1μm），以及接触位置，其中导电元件接触并建立与接触件的电连通。当导电元件设置在非接触位置时，触点和导电元件可被配置为支撑其间具有大于320Vμm-1的大小和/或约330V的电位差的电场，或更多。

6. 发明授权

US07609136B2 MEMS microswitch having a conductive mechanical stop 有权
标题翻译： MEMS微动开关具有导电的机械停止
公开(公告)号：US07609136B2
公开(公告)日：2009-10-27
申请号：US11961767
申请日：2007-12-20
申请人： Xuefeng Wang , Kanakasabapathi Subramanian , Christopher Fred Keimel , Marco Francesco Aimi , Kuna Venkat Satya Rama Kishore , Glenn Scott Claydon , Oliver Charles Boomhower , Parag Thakre
发明人： Xuefeng Wang , Kanakasabapathi Subramanian , Christopher Fred Keimel , Marco Francesco Aimi , Kuna Venkat Satya Rama Kishore , Glenn Scott Claydon , Oliver Charles Boomhower , Parag Thakre
IPC分类号： H01H51/22
CPC分类号： H01H59/0009 , H01H2059/0072
摘要： A MEMS switch includes a substrate, a movable actuator coupled to the substrate, a substrate contact, a substrate electrode, and a conductive stopper electrically coupled to the movable actuator and structured to prevent the movable actuator from contacting the substrate electrode while allowing the movable actuator to make contact with the substrate contact.
摘要翻译： MEMS开关包括衬底，耦合到衬底的可移动致动器，衬底接触件，衬底电极和电耦合到可移动致动器的导电阻塞件，并被构造成防止可动致动器接触衬底电极，同时允许可动致动器与基板接触。

7. 发明申请

US20080169707A1 Gating Voltage Control System And Method For Electrostatically Actuating A Micro-Electromechanical Device 有权
标题翻译：静电驱动微机电装置门控电压控制系统及方法
公开(公告)号：US20080169707A1
公开(公告)日：2008-07-17
申请号：US11622483
申请日：2007-01-12
申请人： Joshua Isaac Wright , Kanakasabapathi Subramanian , William James Premerlani , John Norton Park , Christopher Keimel , Long Que , Kuna Venkat Satya Rama Kishore , Abhijeet Dinkar Sathe , Xuefeng Wang , Edward Keith Howell
发明人： Joshua Isaac Wright , Kanakasabapathi Subramanian , William James Premerlani , John Norton Park , Christopher Keimel , Long Que , Kuna Venkat Satya Rama Kishore , Abhijeet Dinkar Sathe , Xuefeng Wang , Edward Keith Howell
IPC分类号： H01H9/54
CPC分类号： H01H59/0009 , H01H47/22 , Y10T307/937
摘要： A gating voltage control system and method are provided for electrostatically actuating a micro-electromechanical systems (MEMS) device, e.g., a MEMS switch. The device may comprise an electrostatically responsive actuator movable through a gap for actuating the device to a respective actuating condition corresponding to one of a first actuating condition (e.g., a closed switching condition) and a second actuating condition (e.g., an open switching condition). The gating voltage control system may comprise a drive circuit electrically coupled to a gate terminal of the device to apply a gating voltage. The gating voltage control system may further comprise a controller electrically coupled to the drive circuit to control the gating voltage applied to the gating terminal in accordance with a gating voltage control sequence. The gating voltage control sequence may comprise a first interval for ramping up the gating voltage to a voltage level for producing an electrostatic force sufficient to accelerate the actuator through a portion of the gap to be traversed by the actuator to reach a respective actuating condition. The gating voltage control sequence may further comprise a second interval for ramping down the gating voltage to a level sufficient to reduce the electrostatic force acting on the movable actuator. This allows reducing the amount of force at which the actuator engages a contact for establishing the first actuating condition, or avoiding an overshoot position of the actuator while reaching the second actuating condition.
摘要翻译：提供了门控电压控制系统和方法，用于静电致动微机电系统（MEMS）装置，例如MEMS开关。该装置可以包括静电响应致动器，其可通过间隙移动，以将装置致动到对应于第一致动状态（例如，闭合开关状态）和第二致动状态（例如，开启状态）之一的相应致动状态，。门控电压控制系统可以包括电耦合到该器件的栅极端子以施加选通电压的驱动电路。门控电压控制系统还可以包括电耦合到驱动电路的控制器，以根据门控电压控制顺序控制施加到门控端子的门控电压。门控电压控制序列可以包括用于将门控电压升高到电压电平的第一间隔，用于产生足以通过由致动器穿过的间隙的一部分来加速致动器以达到相应的致动状态的静电力。门控电压控制序列还可以包括用于将门控电压降低到足以减小作用在可移动致动器上的静电力的水平的第二间隔。这允许减小致动器接合接触件以建立第一致动条件的力的量，或者避免致动器在达到第二致动状态时的过冲位置。

8. 发明申请

US20100156577A1 MICRO-ELECTROMECHANICAL SYSTEM SWITCH 审中-公开
标题翻译：微电子系统开关
公开(公告)号：US20100156577A1
公开(公告)日：2010-06-24
申请号：US12340776
申请日：2008-12-22
申请人： Xuefeng Wang , Kuna Venkat Satya Rama Kishore , Christopher Fred Keimel , Glenn Scott Claydon , Kanakasabapathi Subramanian
发明人： Xuefeng Wang , Kuna Venkat Satya Rama Kishore , Christopher Fred Keimel , Glenn Scott Claydon , Kanakasabapathi Subramanian
IPC分类号： H01H51/22
CPC分类号： H01H59/0009 , H01H1/0036
摘要： A micro electro-mechanical system switch is presented. The switch includes a base substrate having a support surface. An actuating surface having a notch and an electrical contact surface having an extension is provided. The extension is disposed within the notch. A beam is attached to the base substrate. The beam includes an actuatable free end that is configured to flex upon actuation and to make contact with at least a portion of the extension and carry current therethrough.
摘要翻译：介绍了一种微机电系统开关。开关包括具有支撑表面的基底。提供具有凹口和具有延伸部的电接触表面的致动表面。延伸部位于凹口内。梁连接到基底基板。梁包括可致动的自由端，其构造成在致动时弯曲并且与延伸部的至少一部分接触并且携带电流通过其中。

9. 发明申请

US20090159410A1 MEMS MICROSWITCH HAVING A CONDUCTIVE MECHANICAL STOP 有权
标题翻译：具有导电机械停止功能的MEMS微控制器
公开(公告)号：US20090159410A1
公开(公告)日：2009-06-25
申请号：US11961767
申请日：2007-12-20
申请人： Xuefeng Wang , Kanakasabapathi Subramanian , Christopher Fred Keimel , Marco Francesco Aimi , Kuna Venkat Satya Rama Kishore , Glenn Scott Claydon , Oliver Charles Boomhower , Parag Thakre
发明人： Xuefeng Wang , Kanakasabapathi Subramanian , Christopher Fred Keimel , Marco Francesco Aimi , Kuna Venkat Satya Rama Kishore , Glenn Scott Claydon , Oliver Charles Boomhower , Parag Thakre
IPC分类号： H01H57/00
CPC分类号： H01H59/0009 , H01H2059/0072
摘要： A MEMS switch includes a substrate, a movable actuator coupled to the substrate, a substrate contact, a substrate electrode, and a conductive stopper electrically coupled to the movable actuator and structured to prevent the movable actuator from contacting the substrate electrode while allowing the movable actuator to make contact with the substrate contact.
摘要翻译： MEMS开关包括衬底，耦合到衬底的可移动致动器，衬底接触件，衬底电极和电耦合到可移动致动器的导电阻塞件，并被构造成防止可动致动器接触衬底电极，同时允许可动致动器与基板接触。

10. 发明授权

US08610519B2 MEMS microswitch having a dual actuator and shared gate 有权
标题翻译： MEMS微动开关具有双驱动器和共用门
公开(公告)号：US08610519B2
公开(公告)日：2013-12-17
申请号：US11961737
申请日：2007-12-20
申请人： Christopher Fred Keimel , Xuefeng Wang , Marco Francesco Aimi , Kanakasabapathi Subramanian
发明人： Christopher Fred Keimel , Xuefeng Wang , Marco Francesco Aimi , Kanakasabapathi Subramanian
IPC分类号： H01H51/22
CPC分类号： H01H59/0009 , H01H9/40 , H01H2001/0084 , H01H2057/006
摘要： In accordance with one aspect of the present invention, a MEMS switch is provided. The MEMS switch includes a substrate, a first and a second actuating element electrically coupled together, an anchor mechanically coupled to the substrate and supporting at least one of the first and second actuating elements, and a gate driver configured to actuate the first and second actuating elements.
摘要翻译：根据本发明的一个方面，提供一种MEMS开关。 MEMS开关包括基板，电耦合在一起的第一和第二致动元件，机械耦合到基板并支撑第一和第二致动元件中的至少一个的锚固件，以及配置成致动第一和第二致动元件的栅极驱动器元素。

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