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1. 发明申请

US20180315572A1 CURRENT HANDLING IN LEGS AND ANCHORS OF RF-SWITCH 审中-公开
公开(公告)号：US20180315572A1
公开(公告)日：2018-11-01
申请号：US15771038
申请日：2016-11-14
申请人： CAVENDISH KINETICS, INC.
发明人： Robertus Petrus VAN KAMPEN , Richard L. KNIPE
IPC分类号： H01H59/00 , B81B7/00 , B81C1/00
CPC分类号： H01H59/0009 , B81B7/0006 , B81B2201/01 , B81B2203/0307 , B81B2203/04 , B81B2207/07 , B81C1/00166 , H01G5/16 , H01G5/38 , H01H2001/0084 , H01H2203/026
摘要： The present invention generally relates to a mechanism for making the anchor of the MEMS switch more robust for current handling.

2. 发明授权

US09530600B2 Microelectronic switch and active matrix organic light emitting display device 有权
标题翻译：微电子开关和有源矩阵有机发光显示装置
公开(公告)号：US09530600B2
公开(公告)日：2016-12-27
申请号：US14801213
申请日：2015-07-16
申请人： BOE TECHNOLOGY GROUP CO., LTD. , BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
发明人： Ziwei Cui , Hao Wu , Hong Zhu , Hongjun Yu , Hailin Xue , Luyang Wang
IPC分类号： H01H59/00 , H01L27/32 , H01H1/00
CPC分类号： H01H59/0009 , H01H2001/0084 , H01L27/3262
摘要： The embodiments of the present invention discloses a microelectronic switch comprising: a gate electrode; a source electrode; a drain electrode; a first electrostatic electrode; a cantilever with two working positions of an open position and a close position; a connecting portion arranged at the cantilever; a second electrostatic electrode arranged at the cantilever, the second electrostatic electrode is electrically connected with the gate electrode and is arranged opposite to the first electrostatic electrode; an insulating dielectric layer arranged between the first electrostatic electrode and the second electrostatic electrode; the cantilever is located at one working position of the two working positions when the voltage applied by the gate electrode to the second electrostatic electrode is less than a preset threshold, the cantilever is switched to the other working position of the two working positions when said voltage is greater than the preset threshold.
摘要翻译：本发明的实施例公开了一种微电子开关，包括：栅电极; 源电极; 漏电极; 第一静电电极; 具有两个工作位置的悬臂，处于打开位置和关闭位置; 布置在悬臂的连接部分; 布置在所述悬臂上的第二静电电极，所述第二静电电极与所述栅电极电连接并且与所述第一静电电极相对地布置; 布置在所述第一静电电极和所述第二静电电极之间的绝缘介电层; 当由栅电极施加到第二静电电极的电压小于预设阈值时，悬臂位于两个工作位置的一个工作位置，当所述电压在两个工作位置时，悬臂被切换到两个工作位置的另一个工作位置大于预设阈值。

3. 发明申请

US20160268084A1 DUAL SUBSTRATE ELECTROSTATIC MEMS SWITCH WITH MULTIPLE HINGES AND METHOD OF MANUFACTURE 有权
标题翻译：具有多个铰链的双基板静电MEMS开关及其制造方法
公开(公告)号：US20160268084A1
公开(公告)日：2016-09-15
申请号：US15060630
申请日：2016-03-04
申请人： Innovative Micro Technology
发明人： Christopher S. GUDEMAN , Paul J. RUBEL , Marin Sigurdson
IPC分类号： H01H59/00 , B81C1/00 , H01H49/00 , B81B7/00
CPC分类号： H01H59/0009 , B81B7/00 , B81B2201/012 , B81C1/00341 , H01H49/00 , H01H2001/0084
摘要： Systems and methods for forming an electrostatic MEMS switch include forming a movable cantilevered beam on a first substrate, forming the electrical contacts on a second substrate, and coupling the two substrates using a hermetic seal. Electrical access to the electrostatic MEMS switch may be made by forming vias through the thickness of the second substrate. The cantilevered beam may be formed by etching the perimeter shape in the device layer of an SOI substrate. An additional void may be formed in the movable beam such that it bends about an additional hinge line as a result of the additional void. This may give the beam and switch advantageous kinematic characteristics.
摘要翻译：用于形成静电MEMS开关的系统和方法包括在第一基板上形成可移动的悬臂梁，在第二基板上形成电触点，并且使用气密密封来连接两个基板。可以通过形成穿过第二基板的厚度的通孔来进行对静电MEMS开关的电接入。可以通过蚀刻SOI衬底的器件层中的周边形状来形成悬臂梁。可移动梁中可能形成一个额外的空隙，使其由于附加的空隙而围绕另外的铰链线弯曲。这可以给出光束并切换有利的运动特性。

4. 发明授权

US09362608B1 Multichannel relay assembly with in line MEMS switches 有权
标题翻译：具有在线MEMS开关的多通道继电器组件
公开(公告)号：US09362608B1
公开(公告)日：2016-06-07
申请号：US14558990
申请日：2014-12-03
申请人： GENERAL ELECTRIC COMPANY
发明人： Yongjae Lee , Marco Francesco Aimi , Glenn Scott Claydon , Christopher Fred Keimel
IPC分类号： H01P5/18 , H01P1/10
CPC分类号： H01P1/127 , H01H59/0009 , H01H2001/0084
摘要： An ohmic RF MEMS relay includes a substrate with a capacitive coupling, Csub; two actuating elements electrically coupled in series, so as to define a channel, wherein the actuating elements are configured to be independently actuated or simultaneously operated. The actuating elements have their own capacitive coupling, Cgap; a midpoint on the channel is in electrical communication with the actuating elements; and an anchor mechanically coupled to the substrate and supporting at least one of the actuating elements. Also, an ohmic RF MEMS relay that includes an input port; a plurality of first MEMS switches that make up a first switching group in electrical communication with the input port, thereby defining a plurality of channels each leading from each of the MEMS switches; and at least one outlet port along each of the channels distal from the first switching group and in electrical communication with the input port.
摘要翻译：欧姆RF MEMS继电器包括具有电容耦合的衬底，Csub; 串联电耦合的两个致动元件，以便限定通道，其中所述致动元件构造成独立地致动或同时操作。致动元件具有自己的电容耦合，Cgap; 通道上的中点与致动元件电连通; 以及锚固件，其机械地联接到所述基板并且支撑所述致动元件中的至少一个。另外，包括输入端口的欧姆RF MEMS继电器; 多个第一MEMS开关，其构成与所述输入端口电连通的第一开关组，从而限定每个从所述MEMS开关导出的多个通道; 以及沿着远离第一开关组的每个通道的至少一个出口端口，并与输入端口电连通。

5. 发明申请

US20160126045A1 MEMS SWITCH AND METHOD OF MANUFACTURING THE SAME 审中-公开
标题翻译： MEMS开关及其制造方法
公开(公告)号：US20160126045A1
公开(公告)日：2016-05-05
申请号：US14864455
申请日：2015-09-24
申请人： Samsung Electro-Mechanics Co., Ltd.
发明人： Seong Jong CHEON
IPC分类号： H01H59/00 , H01H49/00
CPC分类号： H01H59/0009 , H01H1/0036 , H01H2001/0063 , H01H2001/0084
摘要： A microelectromechanical systems (MEMS) switch includes: a signal line disposed on a substrate; a dielectric member attached to the substrate; support fixtures disposed on the substrate at opposing sides of the signal line; and a membrane having ends fixed to the support fixtures, and a protrusion-recess pattern having a corrugated structure, the membrane being configured to change a capacitance provided by the membrane and the dielectric member by being positioned adjacent to the dielectric member through a downward movement.
摘要翻译：微机电系统（MEMS）开关包括：设置在基板上的信号线; 连接到所述基板的电介质构件; 在信号线的相对侧设置在基板上的支撑固定装置; 以及具有端部固定到所述支撑固定件的膜和具有波纹结构的突出凹部图案，所述膜被配置为通过向下移动来改变由所述膜和所述电介质构件提供的电容，所述电容靠近所述电介质构件。

6. 发明授权

US09070578B2 Electromechanical switching device with 2D layered material surfaces 有权
标题翻译：具有2D层状材料表面的机电式开关装置
公开(公告)号：US09070578B2
公开(公告)日：2015-06-30
申请号：US14449177
申请日：2014-08-01
申请人： International Business Machines Corporation
发明人： Michel Despont , Urs T. Duerig , Daniel Grogg , Armin W. Knoll , Elad Koren
IPC分类号： B81B3/00 , H01L27/092 , B81B7/00 , B81B1/00
CPC分类号： B81B3/0021 , B81B1/006 , H01H1/0094 , H01H1/021 , H01H1/027 , H01H1/50 , H01H2001/0052 , H01H2001/0078 , H01H2001/0084
摘要： The present invention is notably directed to an electromechanical switching device having: two electrodes, including: a first electrode, having layers of a first 2D layered material, which layers exhibit a first surface; and a second electrode, having layers of a second 2D layered material, which layers exhibit a second surface vis-à-vis said first surface; and an actuation mechanism, where: each of the first and second 2D layered materials is electrically conducting; and at least one of said two electrodes is actuatable by the actuation mechanism to modify a distance between the first surface and the second surface, such as to modify an electrical conductivity transverse to each of the first surface and the second surface and thereby enable current modulation between the first electrode and the second electrode.
摘要翻译：本发明特别涉及一种机电开关装置，其具有：两个电极，包括：第一电极，具有第一2D层状材料的层，所述层呈现第一表面; 以及具有第二2D层状材料层的第二电极，所述层相对于所述第一表面呈现第二表面; 以及致动机构，其中：所述第一和第二2D分层材料中的每一个都是导电的; 并且所述两个电极中的至少一个可由所述致动机构致动以修改所述第一表面和所述第二表面之间的距离，例如改变横向于所述第一表面和所述第二表面中的每一个的导电性，从而使得能够进行电流调制在第一电极和第二电极之间。

7. 发明授权

US09018717B2 Pull up electrode and waffle type microstructure 有权
标题翻译：拉起电极和华夫饼型微结构
公开(公告)号：US09018717B2
公开(公告)日：2015-04-28
申请号：US13237261
申请日：2011-09-20
申请人： Richard L. Knipe , Robertus Petrus van Kampen , Anartz Unamuno , Roberto Gaddi
发明人： Richard L. Knipe , Robertus Petrus van Kampen , Anartz Unamuno , Roberto Gaddi
IPC分类号： H01L41/02 , H01H1/00 , H01H59/00
CPC分类号： H01H1/0036 , H01H59/0009 , H01H2001/0084
摘要： The present invention generally relates to MEMS devices and methods for their manufacture. The cantilever of the MEMS device may have a waffle-type microstructure. The waffle-type microstructure utilizes the support beams to impart stiffness to the microstructure while permitting the support beam to flex. The waffle-type microstructure permits design of rigid structures in combination with flexible supports. Additionally, compound springs may be used to create very stiff springs to improve hot-switch performance of MEMS devices. To permit the MEMS devices to utilize higher RF voltages, a pull up electrode may be positioned above the cantilever to help pull the cantilever away from the contact electrode.
摘要翻译：本发明一般涉及MEMS器件及其制造方法。 MEMS器件的悬臂可以具有华夫饼型微结构。华夫饼形微结构利用支撑梁来赋予微结构刚度，同时允许支撑梁弯曲。华夫饼型微结构允许将刚性结构与柔性支撑结合在一起。此外，可以使用复合弹簧来产生非常硬的弹簧以改善MEMS装置的热开关性能。为了允许MEMS器件利用更高的RF电压，可以将上拉电极定位在悬臂上方以帮助将悬臂从接触电极拉出。

8. 发明授权

US08884726B2 Contact structure for electromechanical switch 有权
标题翻译：机电开关接触结构
公开(公告)号：US08884726B2
公开(公告)日：2014-11-11
申请号：US13204668
申请日：2011-08-06
申请人： Richard Loon Sun
发明人： Richard Loon Sun
IPC分类号： H01P1/00 , H01H1/00
CPC分类号： H01H1/0036 , H01H2001/0052 , H01H2001/0084
摘要： A contact structure for electromechanical switch includes a static contact and a moving contact to allow many kinds of actuations and provide great switch characteristics, such as high isolation and low insertion loss, for using in the applicable range from DC to high frequency microwave. In the contact structure, there is a gap disposed between the static contact and the moving contact so that the static contact and the moving contact are parallel with each other.
摘要翻译：用于机电开关的接触结构包括静触点和移动触点，以允许多种致动并提供诸如高隔离度和低插入损耗之类的大的开关特性，用于从DC到高频微波的适用范围。在接触结构中，在静触点和可动触点之间设置间隙，使得静触点和移动触点彼此平行。

9. 发明申请

US20140291136A1 MEMS DEVICE AND MANUFACTURING METHOD THEREOF 有权
标题翻译： MEMS器件及其制造方法
公开(公告)号：US20140291136A1
公开(公告)日：2014-10-02
申请号：US13962909
申请日：2013-08-08
申请人： KABUSHIKI KAISHA TOSHIBA
发明人： Yoshiaki SHIMOOKA
IPC分类号： H01H59/00 , H05K3/32
CPC分类号： H01H59/0009 , H01G5/014 , H01G5/16 , H01H1/0036 , H01H2001/0084 , Y10T29/4913
摘要： According to one embodiment, a MEMS device includes a first electrode formed on a support substrate, a second electrode arranged to face the first electrode and formed to be movable in a facing direction with respect to the first electrode, a beam portion formed on the support substrate and formed to support the second electrode, a cap layer formed to cover the second electrode and beam portion, a plurality of through-holes formed in the cap layer, the through-holes being formed in a portion other than a proximity portion in which a facing distance between the cap layer and a member in the cap layer is not longer than a preset distance, and a sealing layer formed to cover the cap layer and fill the through-holes.
摘要翻译：根据一个实施例，MEMS器件包括形成在支撑衬底上的第一电极，布置成面对第一电极并形成为能够相对于第一电极在相对方向上移动的第二电极，形成在支撑体上的梁部分基板并形成以支撑第二电极，形成为覆盖第二电极和光束部分的盖层，形成在盖层中的多个通孔，所述通孔形成在除邻近部分之外的部分中，其中盖层和盖层中的构件之间的面对距离不大于预设距离，并且形成为覆盖盖层并填充通孔的密封层。

10. 发明授权

US08797127B2 MEMS switch with reduced dielectric charging effect 有权
标题翻译：具有降低介电充电效应的MEMS开关
公开(公告)号：US08797127B2
公开(公告)日：2014-08-05
申请号：US12951492
申请日：2010-11-22
申请人： Chia-Hua Chu , Chung-Hsien Lin , Chun-Wen Cheng
发明人： Chia-Hua Chu , Chung-Hsien Lin , Chun-Wen Cheng
IPC分类号： H01H51/22
CPC分类号： H01H11/00 , H01G5/18 , H01H49/00 , H01H59/0009 , H01H2001/0084 , H01P1/127 , Y10T29/49105
摘要： The present disclosure provides in one embodiment, a semiconductor device that includes a MEMS switch having a substrate, a first dielectric layer disposed above the substrate, and a bottom signal electrode, a bump, and a bottom actuation electrode disposed above the first dielectric layer. The MEMS switch further includes a second dielectric layer enclosing the bottom signal electrode, and a movable member including a top signal electrode disposed above the bottom signal electrode and a top actuation electrode disposed above the bottom actuation electrode and the bump, wherein the top actuation electrode is electrically coupled to the bump. A method of fabricating a MEMS switch is also disclosed.
摘要翻译：本公开在一个实施例中提供了一种半导体器件，其包括具有衬底的MEMS开关，设置在衬底上方的第一电介质层，以及设置在第一电介质层上方的底部信号电极，凸块和底部致动电极。 MEMS开关还包括封装底部信号电极的第二电介质层和包括设置在底部信号电极上方的顶部信号电极的可移动部件和设置在底部致动电极和凸起上方的顶部致动电极，其中顶部致动电极电连接到凸块。还公开了一种制造MEMS开关的方法。

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