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1. 发明授权

US12051554B2 MEMS switch with multiple pull-down electrodes between terminal electrodes 有权
公开(公告)号：US12051554B2
公开(公告)日：2024-07-30
申请号：US18310243
申请日：2023-05-01
申请人： Qorvo US, Inc.
发明人： Roberto Gaddi
IPC分类号： H01H59/00
CPC分类号： H01H59/0009 , H01H2059/0027 , H01H2059/0072
摘要： The disclosure is directed to microelectromechanical system (MEMS) switches with multiple pull-down electrodes between terminal electrodes to limit off-state capacitance. In exemplary aspects disclosed herein, a plurality of pull-down electrodes are positioned between the input terminal electrode and the output terminal electrode. The plurality of pull-down electrodes are offset from each other to limit off-state capacitance between the input terminal electrode and the output terminal electrode. The separation between the pull-down electrodes disrupts the off-state capacitive path between the input terminal electrode and the output terminal electrode, thereby further insulating the contacts from each other. Limiting off-state capacitance reduces on-state electrical loss and increases off-state electrical isolation for improved performance.

2. 发明申请

US20180033565A1 MEMS SWITCH 审中-公开
公开(公告)号：US20180033565A1
公开(公告)日：2018-02-01
申请号：US15663628
申请日：2017-07-28
申请人： Analog Devices Global
发明人： Padraig Fitzgerald , Jo-ey Wong , Raymond C. Goggin , Bernard Patrick Stenson , Paul Lambkin , Mark Schirmer
IPC分类号： H01H1/00 , H01H59/00
CPC分类号： H01H1/0036 , H01H59/0009 , H01H2001/0084 , H01H2059/0018 , H01H2059/0072
摘要： Several features are disclosed that improve the operating performance of MEMS switches such that they exhibit improved in-service life and better control over switching on and off.

3. 发明授权

US09711291B2 MEMS digital variable capacitor design with high linearity 有权
公开(公告)号：US09711291B2
公开(公告)日：2017-07-18
申请号：US14779542
申请日：2014-04-02
申请人： CAVENDISH KINETICS, INC.
发明人： Richard L. Knipe , Robertus Petrus Van Kampen
IPC分类号： H01G5/18 , B81B3/00 , H01G5/16 , H01H59/00 , H01G5/011 , H01G5/013
CPC分类号： H01G5/18 , B81B3/0051 , B81B3/007 , B81B2201/0221 , H01G5/011 , H01G5/0136 , H01G5/16 , H01H59/0009 , H01H2059/0072
摘要： The present invention generally relates to a MEMS DVC and a method for fabrication thereof. The MEMS DVC comprises a plate movable from a position spaced a first distance from an RF electrode and a second position spaced a second distance from the RF electrode that is less than the first distance. When in the second position, the plate is spaced from the RF electrode by a dielectric layer that has an RF plateau over the RF electrode. One or more secondary landing contacts and one or more plate bend contacts may be present as well to ensure that the plate obtains a good contact with the RF plateau and a consistent Cmax value can be obtained. On the figure PB contact is the plate bend contact, SL contact is the Second Landing contact and the PD electrode is the Pull Down electrode.

4. 发明申请

US20170062165A1 DEVICE WITH SEPARATION LIMITING STANDOFF 审中-公开
标题翻译：具有分离限制的设备
公开(公告)号：US20170062165A1
公开(公告)日：2017-03-02
申请号：US15232871
申请日：2016-08-10
申请人： Innovative Micro Technology
发明人： Christopher S. GUDEMAN , Paul J. RUBEL
IPC分类号： H01H59/00
CPC分类号： H01H59/0009 , H01H2059/0072
摘要： An MEMS device, having two substantially parallel surfaces are separated by an initial distance. At least one of the surfaces includes a raised feature that limits the gap between the surfaces to less than the initial distance when an actuating voltage is applied. In some embodiments, the raised feature limits the gap to about 66% of the initial distance.
摘要翻译：具有两个基本上平行的表面的MEMS器件被分开初始距离。至少一个表面包括凸起特征，其在施加致动电压时将表面之间的间隙限制为小于初始距离。在一些实施例中，凸起特征将间隙限制为初始距离的约66％。

5. 发明申请

US20150311003A1 MEMS Switch 有权
标题翻译： MEMS开关
公开(公告)号：US20150311003A1
公开(公告)日：2015-10-29
申请号：US14262188
申请日：2014-04-25
申请人： Analog Devices Global
发明人： Padraig L. Fitzgerald , Jo-ey Wong , Raymond C. Goggin , Bernard P. Stenson , Paul Lambkin , Mark Schirmer
IPC分类号： H01H1/00 , B81B3/00 , H01H59/00
CPC分类号： H01H1/0036 , H01H59/0009 , H01H2001/0084 , H01H2059/0018 , H01H2059/0072
摘要： Several features are disclosed that improve the operating performance of MEMS switches such that they exhibit improved in-service life and better control over switching on and off.
摘要翻译：公开了几个提高MEMS开关的操作性能的特征，使得它们表现出改善的使用寿命和对开关的更好控制。

6. 发明申请

US20150116893A1 ELECTROSTATIC ACTUATOR, VARIABLE CAPACITANCE CAPACITOR, ELECTRIC SWITCH, AND METHOD FOR DRIVING ELECTROSTATIC ACTUATOR 有权
标题翻译：静电致动器，可变电容电容器，电动开关及驱动静电致动器的方法
公开(公告)号：US20150116893A1
公开(公告)日：2015-04-30
申请号：US14391433
申请日：2012-04-09
申请人： Koji Hanihara
发明人： Koji Hanihara
IPC分类号： H02N1/00 , H01H59/00 , H01G5/16
CPC分类号： H02N1/006 , B81B3/001 , B81B2201/0221 , H01G5/16 , H01H59/00 , H01H2059/0072
摘要： An electrostatic actuator includes: a fixed driving electrode that is disposed on a silicon substrate; a movable driving electrode that is disposed so as to face the fixed driving electrode and approaches the fixed driving electrode with an electrostatic force generated between the movable driving electrode and the fixed driving electrode; and a pair of spacers that comes in contact with the movable driving electrode in an approaching state in which the fixed driving electrode and the movable driving electrode approach each other and forms a prescribed air gap between the fixed driving electrode and the movable driving electrode, wherein each of the spacers has a spacer electrode portion that comes in contact with the movable driving electrode via an insulator and has the same potential as one of the electrodes at least in the approaching state.
摘要翻译：静电致动器包括：设置在硅衬底上的固定驱动电极; 可动驱动电极，其设置成与所述固定驱动电极相对并且在所述可动驱动电极和所述固定驱动电极之间产生静电力而接近所述固定驱动电极; 以及在固定驱动电极和可动驱动电极彼此接近并在固定驱动电极和可动驱动电极之间形成规定的气隙的接近状态下与可动驱动电极接触的一对间隔件，其中，每个间隔物具有通过绝缘体与可动驱动电极接触的间隔电极部分，并且至少在接近状态下具有与电极之一相同的电位。

7. 发明授权

US08203402B2 Electronic device 有权
标题翻译：电子设备
公开(公告)号：US08203402B2
公开(公告)日：2012-06-19
申请号：US11718137
申请日：2005-10-24
申请人： Peter G. Steeneken , Jozef Thomas Martinus Van Beek , Theodoor Rijks
发明人： Peter G. Steeneken , Jozef Thomas Martinus Van Beek , Theodoor Rijks
IPC分类号： H01H51/22
CPC分类号： H01H59/0009 , H01G5/16 , H01G5/40 , H01H1/06 , H01H57/00 , H01H2057/006 , H01H2059/0072
摘要： The electronic device comprising a micro-electromechanical systems (MEMS) element at a first side of a substrate. The MEMS element includes a first electrode and a second electrode, that is part of a movable element and movable towards and from the first electrode between a first and a second position. The second electrode is separated from the first electrode by an air gap in its first position. The movable element includes a mechanical layer and an intermediate layer, in which the second electrode is defined. The second electrode is constituted by a plurality of sections in the intermediate layer, each of which is mechanically connected by a separate vertical interconnect to the mechanical layer.
摘要翻译：该电子设备包括在基板的第一侧的微机电系统（MEMS）元件。 MEMS元件包括第一电极和第二电极，其是可移动元件的一部分并且可在第一和第二位置之间朝向和离开第一电极移动。第二电极通过其第一位置的气隙与第一电极分离。可移动元件包括机械层和中间层，其中限定第二电极。第二电极由中间层中的多个部分构成，每个部分通过单独的垂直互连机械连接到机械层。

8. 发明申请

US20090314616A1 Swtich, Method and System For Switching The State of a Signal Path 审中-公开
标题翻译： Swtich，用于切换信号路径状态的方法和系统
公开(公告)号：US20090314616A1
公开(公告)日：2009-12-24
申请号：US12087962
申请日：2007-01-19
申请人： Joachim Oberhammer
发明人： Joachim Oberhammer
IPC分类号： H01H57/00
CPC分类号： H01H59/0009 , H01H2001/0047 , H01H2059/0072 , H01H2059/0081
摘要： The invention relates to a method, a system and a multi stable arranged to switch the configuration of the signal path for electrical signals comprising a first moving element (12) and a second moving element (14), wherein the first and second element can be arranged into at least two mechanically stable states: a mechanical interlocked state, wherein the first moving element is mechanically interlocked with the second moving element wherein a signal path in the switch is arranged in a closed configuration; and a non interlocked state, wherein the first moving element is separated from the second moving element and the signal path in the switch is arranged in an open configuration; wherein the switch further comprises a fixated electrostatic electrode (10) configured with a first fixated electrode part arranged to actuate and move at least one of the moving elements when an electrical potential difference is applied between the first fixated electrode and at least one of the moving elements, transitioning the moving elements from one state to another.
摘要翻译：本发明涉及一种布置为切换包括第一移动元件（12）和第二移动元件（14）的电信号的信号路径的配置的方法，系统和多稳定性，其中第一和第二元件可以是布置成至少两个机械稳定状态：机械互锁状态，其中所述第一移动元件与所述第二移动元件机械互锁，其中所述开关中的信号路径以闭合配置布置; 和非互锁状态，其中所述第一移动元件与所述第二移动元件分离，并且所述开关中的信号路径布置成打开构造; 其中所述开关还包括固定静电电极（10），所述固定静电电极（10）被配置为当第一固定电极与所述移动的至少一个之间施加电势差时，所述第一固定电极部分被布置成致动和移动所述移动元件中的至少一个，元素，将移动元素从一个状态转移到另一个状态。

9. 发明授权

US07619497B2 Electrostatic relay 失效
标题翻译：静电继电器
公开(公告)号：US07619497B2
公开(公告)日：2009-11-17
申请号：US11237843
申请日：2005-09-29
申请人： Takashi Yuba , Hideki Iwata
发明人： Takashi Yuba , Hideki Iwata
IPC分类号： H01H51/22
CPC分类号： H01H59/0009 , H01H1/18 , H01H1/20 , H01H2001/0068 , H01H2059/0063 , H01H2059/0072
摘要： An electrostatic micro relay, in which the contact gap between moving and fixed contacts may be increased and the reliability and high-performance regarding contacting and separating the moving contact with and from the fixed contact may be improved. In the micro relay according to the invention, as a comb-shaped moving electrode is supported at an obliquely upper position relative to a fixed comb-shaped electrode, the contact gap may be lengthened. When a predetermined voltage is applied between the contacts, the moving electrode is moved obliquely downward toward the fixed electrode such that the contact surface of the moving electrode slidably contacts the contact surface of the fixed electrode. This slidably contact may cause a wiping effect, whereby each contact surface may be kept clean.
摘要翻译：可以增加静电微型继电器，其中移动和固定触点之间的接触间隙可以增加，并且可以提高与固定触点接触和分离移动触点的可靠性和高性能。在根据本发明的微型继电器中，作为梳状移动电极，相对于固定梳状电极在倾斜上部位置被支撑，可以延长接触间隙。当在触点之间施加预定电压时，移动电极向固定电极倾斜向下移动，使得移动电极的接触表面滑动地接触固定电极的接触表面。这种滑动接触可能引起擦拭效果，由此每个接触表面可以保持清洁。

10. 发明申请

US20090127081A1 MEMS SWITCH 有权
标题翻译： MEMS开关
公开(公告)号：US20090127081A1
公开(公告)日：2009-05-21
申请号：US12269146
申请日：2008-11-12
申请人： Mayumi MIKAMI , Konami Izumi
发明人： Mayumi MIKAMI , Konami Izumi
IPC分类号： H01H57/00 , H01L21/3105
CPC分类号： H01H59/0009 , H01H2059/0072
摘要： An object is that contact between an upper switch electrode and a lower switch electrode is not hindered. The present invention relates to a MEMS switch including a substrate; a structural layer with a beam structure in which at least one end is fixed to the substrate; a lower drive electrode layer and a lower switch electrode layer which are provided below the structural layer and on a surface of the substrate; and an upper drive electrode layer and an upper switch electrode layer which are provided on a surface of the structural layer, which is opposite to the substrate, so as to face the lower drive electrode layer and the lower switch electrode layer, respectively, in which the upper switch electrode layer is larger than the lower switch electrode layer.
摘要翻译：目的是不妨碍上开关电极和下开关电极之间的接触。本发明涉及一种包括基板的MEMS开关; 具有梁结构的结构层，其中至少一个端部固定到所述基板; 下部驱动电极层和下部开关电极层，其设置在所述结构层的下方和所述基板的表面上; 以及设置在与基板相对的结构层的表面上的上驱动电极层和上开关电极层，以分别面向下驱动电极层和下开关电极层，其中上开关电极层大于下开关电极层。

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