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1. 发明授权

US11232924B2 Method of operating a charged particle gun, charged particle gun, and charged particle beam device 有权
公开(公告)号：US11232924B2
公开(公告)日：2022-01-25
申请号：US17075905
申请日：2020-10-21
申请人： ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
发明人： Dieter Winkler
IPC分类号： H01J3/02 , H01J37/073
摘要： A charged particle gun for a charged particle beam device is described. The charged particle gun includes a gun housing; an emitter provided in the gun housing, the emitter being configured to emit a charged particle beam along an axis; an emitter power supply connected to the emitter; a trapping electrode provided in the gun housing, the trapping electrode at least partially surrounding the axis; a trapping power supply connected to the trapping electrode; and a shielding element shielding an electrostatic field of the trapping electrode from the axis during operation of the gun housing.

2. 发明授权

US11177114B1 Electrode arrangement, contact assembly for an electrode arrangement, charged particle beam device, and method of reducing an electrical field strength in an electrode arrangement 有权
公开(公告)号：US11177114B1
公开(公告)日：2021-11-16
申请号：US17022078
申请日：2020-09-15
申请人： ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
发明人： Matthias Firnkes , Florian Lampersberger , Carlo Salvesen
IPC分类号： H01J37/00 , H01J37/317 , H01J37/09 , H01J37/244 , H01J37/12
摘要： An electrode arrangement for acting on a charged particle beam in a charged particle beam apparatus is described. The electrode arrangement includes a first electrode with a first opening for the charged particle beam; a first spacer element positioned in a first recess provided in the first electrode on a first electrode side for aligning the first electrode relative to a second electrode, the first spacer element having a first blind hole; a first conductive shield provided in the first blind hole; and a contact assembly protruding from the first electrode into the first blind hole for ensuring an electrical contact between the first electrode and the first conductive shield. Further, a contact assembly for such an electrode arrangement, a charged particle beam device with such an electrode arrangement, as well as a method of reducing an electrical field strength in an electrode arrangement are described.

3. 发明申请

US20210257182A1 CHARGED PARTICLE BEAM DEVICE WITH INTERFEROMETER FOR HEIGHT MEASUREMENT 有权
公开(公告)号：US20210257182A1
公开(公告)日：2021-08-19
申请号：US16793314
申请日：2020-02-18
申请人： ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
发明人： John Breuer , Rony Reuveni , Alexander Goldenstein
IPC分类号： H01J37/22 , H01J37/26 , H01J37/28 , G01B11/06
摘要： A method of operating a charged particle beam device is disclosed, including focusing a charged particle beam onto a sample with an objective lens assembly; passing a reflected light beam through a bore of the objective lens assembly to an interferometer; and interferometrically determining a z-position of the sample with the interferometer. A charged particle beam device is disclosed, including a charged particle beam generator which has a charged particle source. A charged particle path for the charged particle beam extends through a bore of an objective lens assembly toward a sample stage. An interferometer is arranged to receive a reflected light beam which passes through the bore of the objective lens assembly.

4. 发明授权

US09847208B1 Electron beam device, cold field emitter, and method for regeneration of a cold field emitter 有权
公开(公告)号：US09847208B1
公开(公告)日：2017-12-19
申请号：US15233092
申请日：2016-08-10
申请人： ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
发明人： Pavel Adamec
IPC分类号： H01J1/144 , H01J1/15 , H01J37/073 , H01J37/147 , H01J37/244 , H01J37/28
CPC分类号： H01J37/073 , H01J37/147 , H01J37/244 , H01J37/28 , H01J2203/0204
摘要： The present disclosure provides an electron beam device (500) for inspecting a sample (10) with an electron beam, comprising an electron beam source comprising a cold field emitter (100) for emitting an electron beam, electron beam optics for directing and focusing the electron beam onto the sample (10), and a detector device (540) for detecting secondary charged particles generated by impingement of the electron beam on the sample (10). The cold field emitter (100) includes an emitter tip (110), a base arrangement (120) configured for supporting the emitter tip (110) and comprising a first base element (122) and a second base element (124), and a filament (130) having at least a first filament portion (132) and a second filament portion (134) attaching the emitter tip (110) to the base arrangement (120), wherein the first filament portion (132) extends between the emitter tip (110) and the first base element (122) and the second filament portion (134) extends between the emitter tip (110) and the second base element (124), wherein a length (L) of each of the first filament portion (132) and the second filament portion (134) is 4 mm or less, and wherein a diameter of a cross-section of each of the first filament portion (132) and the second filament portion (134) is 0.13 mm or less.

5. 发明授权

US09673017B1 Housing device for magnetic shielding, housing arrangement for magnetic shielding, charged particle beam device, and method of manufacturing a housing device 有权
公开(公告)号：US09673017B1
公开(公告)日：2017-06-06
申请号：US14947723
申请日：2015-11-20
申请人： ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
发明人： Pavel Adamec
IPC分类号： H01J37/00 , H01J37/09 , H01J37/28
CPC分类号： H01J37/09 , H01J2237/0264 , H01J2237/28
摘要： A housing device for providing a magnetic shielding of a charged particle beam is described. The housing device includes a housing element configured to at least partially enclose a charged particle beam propagation path and comprising a magnetic shielding material, wherein the housing element includes an inner surface directed toward the charged particle beam propagation path, an outer surface directed away from the charged particle beam propagation path and at least one edge region with an edge surface connecting the inner surface with the outer surface; and a contacting element comprising a conductive material and fixed to the at least one edge region in at least one of a form-fit connection and a bonded connection. Further, a housing arrangement including two or more electrically contacting housing devices, a charged particle beam device with a housing device, and methods of manufacturing a housing device are described.

6. 发明授权

US09472373B1 Beam separator device, charged particle beam device and methods of operating thereof 有权
标题翻译：光束分离装置，带电粒子束装置及其操作方法
公开(公告)号：US09472373B1
公开(公告)日：2016-10-18
申请号：US14828181
申请日：2015-08-17
申请人： ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
发明人： Stefan Lanio , John Breuer , Jürgen Frosien , Matthias Firnkes , Johannes Hopster
IPC分类号： H01J37/147 , H01J37/12 , H01J37/28 , H01J37/153
CPC分类号： H01J37/1472 , H01J37/12 , H01J37/147 , H01J37/153 , H01J37/28 , H01J2237/12 , H01J2237/152 , H01J2237/1532 , H01J2237/1534 , H01J2237/2538
摘要： A beam separator device (200) is described. The beam separator device (200) includes a first deflector (112) providing a first magnetic deflection field (B1) for deflecting a charged particle beam (101) propagating along a beam entrance axis (A1) by a first deflection angle (α1); a second deflector (114) arranged downstream from the first deflector (112) providing a second magnetic deflection field (B2) for deflecting the charged particle beam by a second deflection angle (α2) in the direction of an intermediate beam axis (A2), wherein the second deflector (114) is configured for deflecting the charged particle beam (102) re-entering the beam separator device (200) along the intermediate beam axis (A2) by a third deflection angle (α3); a third deflector (212) arranged downstream from the second deflector (114) providing a third magnetic deflection field (B2) for deflecting the charged particle beam (102) by a fourth deflection angle (α4) in the direction of a beam exit axis (A3); a first rotation-free lens to be arranged at a first crossover (X1) of the charged particle beam between the first deflector (112) and the second deflector (114) for at least partially compensating for a dispersion introduced by at least one of the first deflector and the second deflector; and a second rotation-free lens to be arranged at a second crossover (X2) of the charged particle beam between the second deflector (114) and the third deflector (212) for at least partially compensating for a dispersion introduced by at least one of the second deflector and the third deflector.
摘要翻译：光束分离装置（200）被描述。分束器装置（200）包括第一偏转器（112），其提供第一磁偏转场（B1），用于使沿着光束入射轴线（A1）传播的带电粒子束（101）偏转第一偏转角（α1）; 第二偏转器（114）布置在第一偏转器（112）的下游，提供用于使带电粒子束沿中间光束轴线（A2）的方向偏转第二偏转角（α2）的第二磁偏转场（B2）其中所述第二偏转器（114）构造成用于使沿着所述中间光束轴线（A2）重新进入所述光束分离器装置（200）的带电粒子束（102）偏转第三偏转角（α3）; 布置在第二偏转器（114）的下游的第三偏转器（212）提供第三磁偏转场（B2），用于使带电粒子束（102）沿光束出射轴线的方向偏转第四偏转角（α4） A3）; 布置在第一偏转器（112）和第二偏转器（114）之间的带电粒子束的第一交叉（X1）处的第一无旋转透镜，用于至少部分补偿由至少一个第一偏转器和第二偏转器; 以及第二无旋转透镜，被布置在所述带电粒子束在所述第二偏转器（114）和所述第三偏转器（212）之间的第二交叉（X2）处，用于至少部分地补偿由所述第二偏转器第二偏转器和第三偏转器。

7. 发明授权

US09330884B1 Dome detection for charged particle beam device 有权
公开(公告)号：US09330884B1
公开(公告)日：2016-05-03
申请号：US14538338
申请日：2014-11-11
申请人： ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
发明人： Jürgen Frosien
IPC分类号： H01J37/147 , H01J37/244 , H01J37/05
CPC分类号： H01J37/244 , H01J37/05 , H01J2237/1508 , H01J2237/28
摘要： According to an embodiment, a method of operating a charged particle beam device is provided. The charged particle beam device includes a beam separation unit, a first optical component distanced from the beam separation unit and a second optical component distanced from the beam separation unit and distanced from the first optical component. The method includes generating a primary charged particle beam. The method further includes generating a first electric field and a first magnetic field in the beam separation unit. The method further includes guiding the primary charged particle beam through the beam separation unit in which the first electric field and the first magnetic field are generated, wherein a travel direction of the primary charged particle beam leaving the beam separation unit is aligned with a first target axis under the influence of the first electric field and the first magnetic field. The method further includes generating a secondary charged particle beam by impingement of the primary charged particle beam onto a sample. The method further includes separating the secondary charged particle beam from the primary charged particle beam in the beam separation unit, wherein the secondary charged particle beam is deflected under the influence of the first electric field and the first magnetic field to travel from the beam separation unit to the first optical component. The method further includes generating a second electric field and a second magnetic field in the beam separation unit. The method further includes guiding the primary charged particle beam through the beam separation unit in which the second electric field and the second magnetic field are generated, wherein the travel direction of the primary charged particle beam leaving the beam separation unit is aligned with the first target axis under the influence of the second electric field and the second magnetic field. The method further includes separating the secondary charged particle beam from the primary charged particle beam in the beam separation unit, wherein the secondary charged particle beam is deflected under the influence of the second electric field and the second magnetic field to travel from the beam separation unit to the second optical component.

8. 发明授权

US09202666B1 Method for operating a charged particle beam device with adjustable landing energies 有权
公开(公告)号：US09202666B1
公开(公告)日：2015-12-01
申请号：US14340335
申请日：2014-07-24
申请人： ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
发明人： Jürgen Frosien
IPC分类号： H01J37/00 , H01J37/147 , H01J37/28
CPC分类号： H01J37/147 , H01J37/28 , H01J2237/1508
摘要： A method of operating a charged particle beam device is provided. The charged particle beam device includes a beam separator that defines an optical axis, and includes a magnetic beam separation portion and an electrostatic beam separation portion. The method includes generating a primary charged particle beam, and applying a voltage to a sample, the voltage being set to a first value to determine a first landing energy of the primary charged particle beam. The method further includes creating an electric current in the magnetic beam separation portion, the current being set to a first value to generate a first magnetic field, and applying a voltage to the electrostatic beam separation portion, the voltage being set to a first value to generate a first electric field. The method includes guiding the primary charged particle beam to the beam separator, wherein the primary charged particle beam enters the beam separator at a first angle relative to the optical axis and, under the influence of the first magnetic field and the first electric field, leaves the beam separator at a second angle relative to the optical axis. The method includes generating a secondary charged particle beam by impingement of the primary charged particle beam on the sample to which the voltage with the first value is applied, and separating the secondary charged particle beam from the primary charged particle beam in the beam separator, wherein the secondary charged particle beam enters the beam separator at a third angle relative to the optical axis and, under the influence of the first magnetic field and the first electric field, leaves the beam separator at a fourth angle relative to the optical axis. The first angle and the fourth angle are different. The method further includes applying the voltage to the sample, the voltage being set to a second value to determine a second landing energy of the primary charged particle beam, creating the electric current in the magnetic beam separation portion, the electric current being set to a second value to generate a second magnetic field, applying the voltage to the electrostatic beam separation portion, the voltage being set to a second value to generate a second electric field, guiding the primary charged particle beam to the beam separator, wherein the primary charged particle beam enters the beam separator at the first angle relative to the optical axis and, under the influence of the second magnetic field and the second electric field, leaves the beam separator at the second angle relative to the optical axis, generating the secondary charged particle beam by impingement of the primary charged particle beam on the sample to which the voltage with the second value is applied, and separating the secondary charged particle beam from the primary charged particle beam in the beam separator, wherein the secondary charged particle beam enters the beam separator at the third angle relative to the optical axis and, under the influence of the second magnetic field and the second electric field, leaves the beam separator at the fourth angle relative to the optical axis.

9. 发明授权

US08987692B2 High brightness electron gun, system using the same, and method of operating thereof 有权
标题翻译：高亮度电子枪，使用它的系统及其操作方法
公开(公告)号：US08987692B2
公开(公告)日：2015-03-24
申请号：US14203377
申请日：2014-03-10
申请人： ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik GmbH
发明人： Pavel Adamec
IPC分类号： H01J37/073 , H01J37/317 , H01J37/26 , H01J1/304 , H01J37/063
CPC分类号： H01J37/073 , H01J1/304 , H01J37/063 , H01J37/26 , H01J37/28 , H01J37/3174 , H01J2237/063 , H01J2237/06325
摘要： A charged particle beam source device adapted for generating a charged particle beam is provided. The charged particle beam source device includes an emitter tip adapted for providing charged particles. Furthermore, an extractor electrode having an aperture opening is provided for extracting the charged particles from the emitter tip. An aperture angle of the charged particle beam is 2 degrees or below the aperture angle being defined by a width of the aperture opening and a distance between the emitter tip and the extractor electrode, wherein the distance between the emitter tip and the extractor electrode is a range from 0.1 mm to 2 mm.
摘要翻译：提供适于产生带电粒子束的带电粒子束源装置。带电粒子束源装置包括适于提供带电粒子的发射极尖端。此外，提供具有孔口的提取器电极，用于从发射极尖端提取带电粒子。带电粒子束的孔径角为孔径角为2度或以下，由孔径的宽度和发射极尖端和提取器电极之间的距离限定，其中发射极尖端和提取器电极之间的距离为范围从0.1 mm到2 mm。

10. 发明授权

US08816270B2 Octopole device and method for spot size improvement 有权
标题翻译：八极杆装置和点尺寸改进方法
公开(公告)号：US08816270B2
公开(公告)日：2014-08-26
申请号：US13663692
申请日：2012-10-30
申请人： Aleksandra Kramer , Stefan Lanio
发明人： Aleksandra Kramer , Stefan Lanio
IPC分类号： G01D18/00 , G21K1/093
CPC分类号： G21K1/093 , H01J37/153 , H01J2237/1532 , H01J2237/1534 , H01J2237/28
摘要： A method of compensating mechanical, magnetic and/or electrostatic inaccuracies in a scanning charged particle beam device is described. The method includes an alignment procedure, wherein the following steps are conducted: compensating 4-fold astigmatism with an element having at least 8-pole compensation capability, wherein the aligning and compensating steps of the alignment procedure act on a charged particle beam with beam dimensions in two orthogonal directions each of at least 50 μm and coaxially aligned with at least the element having at least the 8-pole compensation capability.
摘要翻译：描述了在扫描带电粒子束装置中补偿机械，磁性和/或静电不准确性的方法。该方法包括对准过程，其中进行以下步骤：用具有至少8极补偿能力的元件补偿4折像散，其中对准过程的对准和补偿步骤作用于具有束尺寸的带电粒子束在至少50μm的两个正交方向上，并且至少与具有至少8极补偿能力的元件同轴对准。

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