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1. 发明申请

US20180364564A1 ON-AXIS ILLUMINATION AND ALIGNMENT FOR CHARGE CONTROL DURING CHARGED PARTICLE BEAM INSPECTION 审中-公开
公开(公告)号：US20180364564A1
公开(公告)日：2018-12-20
申请号：US15643271
申请日：2017-07-06
申请人： APPLIED MATERIALS ISRAEL LTD. , ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
发明人： Alex Goldenshtein , Stefan Lanio
IPC分类号： G03F1/86 , H01J37/304 , G03F9/00 , H01J37/30 , H01J37/317 , H01J37/22
CPC分类号： G03F1/86 , G03F9/7073 , H01J37/222 , H01J37/3007 , H01J37/3045 , H01J37/3174 , H01J2237/063 , H01J2237/30433
摘要： A charged particle beam apparatus includes a charged particle source configured to generate charged particles, an electrode configured to accelerate the charged particles to form a charged particle beam, a bender unit configured to adjust a path of the charged particle beam, and an objective lens configured to focus the charged particle beam onto a spot on a sample. The charged particle beam passes through a bore of the objective lens as the charged particle beam propagates from the charged particle source to the sample. The apparatus also includes a light source configured to generate a light beam, and a mirror disposed within the bender unit and arranged to direct the light beam to the spot on the sample.

2. 发明授权

US09472373B1 Beam separator device, charged particle beam device and methods of operating thereof 有权
标题翻译：光束分离装置，带电粒子束装置及其操作方法
公开(公告)号：US09472373B1
公开(公告)日：2016-10-18
申请号：US14828181
申请日：2015-08-17
申请人： ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
发明人： Stefan Lanio , John Breuer , Jürgen Frosien , Matthias Firnkes , Johannes Hopster
IPC分类号： H01J37/147 , H01J37/12 , H01J37/28 , H01J37/153
CPC分类号： H01J37/1472 , H01J37/12 , H01J37/147 , H01J37/153 , H01J37/28 , H01J2237/12 , H01J2237/152 , H01J2237/1532 , H01J2237/1534 , H01J2237/2538
摘要： A beam separator device (200) is described. The beam separator device (200) includes a first deflector (112) providing a first magnetic deflection field (B1) for deflecting a charged particle beam (101) propagating along a beam entrance axis (A1) by a first deflection angle (α1); a second deflector (114) arranged downstream from the first deflector (112) providing a second magnetic deflection field (B2) for deflecting the charged particle beam by a second deflection angle (α2) in the direction of an intermediate beam axis (A2), wherein the second deflector (114) is configured for deflecting the charged particle beam (102) re-entering the beam separator device (200) along the intermediate beam axis (A2) by a third deflection angle (α3); a third deflector (212) arranged downstream from the second deflector (114) providing a third magnetic deflection field (B2) for deflecting the charged particle beam (102) by a fourth deflection angle (α4) in the direction of a beam exit axis (A3); a first rotation-free lens to be arranged at a first crossover (X1) of the charged particle beam between the first deflector (112) and the second deflector (114) for at least partially compensating for a dispersion introduced by at least one of the first deflector and the second deflector; and a second rotation-free lens to be arranged at a second crossover (X2) of the charged particle beam between the second deflector (114) and the third deflector (212) for at least partially compensating for a dispersion introduced by at least one of the second deflector and the third deflector.
摘要翻译：光束分离装置（200）被描述。分束器装置（200）包括第一偏转器（112），其提供第一磁偏转场（B1），用于使沿着光束入射轴线（A1）传播的带电粒子束（101）偏转第一偏转角（α1）; 第二偏转器（114）布置在第一偏转器（112）的下游，提供用于使带电粒子束沿中间光束轴线（A2）的方向偏转第二偏转角（α2）的第二磁偏转场（B2）其中所述第二偏转器（114）构造成用于使沿着所述中间光束轴线（A2）重新进入所述光束分离器装置（200）的带电粒子束（102）偏转第三偏转角（α3）; 布置在第二偏转器（114）的下游的第三偏转器（212）提供第三磁偏转场（B2），用于使带电粒子束（102）沿光束出射轴线的方向偏转第四偏转角（α4） A3）; 布置在第一偏转器（112）和第二偏转器（114）之间的带电粒子束的第一交叉（X1）处的第一无旋转透镜，用于至少部分补偿由至少一个第一偏转器和第二偏转器; 以及第二无旋转透镜，被布置在所述带电粒子束在所述第二偏转器（114）和所述第三偏转器（212）之间的第二交叉（X2）处，用于至少部分地补偿由所述第二偏转器第二偏转器和第三偏转器。

3. 发明申请

US20160240347A1 SIGNAL CHARGED PARTICLE DEFLECTION DEVICE, SIGNAL CHARGED PARTICLE DETECTION SYSTEM, CHARGED PARTICLE BEAM DEVICE AND METHOD OF DETECTION OF A SIGNAL CHARGED PARTICLE BEAM 有权
标题翻译：信号充电颗粒偏转装置，信号充电颗粒检测系统，充电颗粒光束装置和检测信号充电颗粒光束的方法
公开(公告)号：US20160240347A1
公开(公告)日：2016-08-18
申请号：US15044510
申请日：2016-02-16
申请人： ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
发明人： Matthias Firnkes , Stefan Lanio
IPC分类号： H01J37/147 , H01J37/12
CPC分类号： H01J37/1472 , H01J2237/151 , H01J2237/28
摘要： A signal charged particle deflection device for a charged particle beam device is provided. The signal charged particle deflection device includes a beam bender configured for deflecting the signal charged particle beam, wherein the beam bender includes a first electrode and a second electrode providing an optical path for the signal charged particle beam therebetween, wherein the first electrode has a first cross section in a plane perpendicular to the optical path, and the second electrode has a second cross section in the plane perpendicular to the optical path, and wherein a first part of the first cross section and a second part of the second cross section provide the optical path therebetween, and wherein the first part and the second part are different in shape.
摘要翻译：提供一种用于带电粒子束装置的信号带电粒子偏转装置。信号带电粒子偏转装置包括被配置为偏转信号带电粒子束的光束弯曲器，其中光束弯曲器包括第一电极和第二电极，该第一电极和第二电极为它们之间的信号带电粒子束提供光路，其中第一电极具有第一在垂直于光路的平面中的横截面，并且第二电极在垂直于光路的平面中具有第二横截面，并且其中第一横截面的第一部分和第二横截面的第二部分提供光路之间，其中第一部分和第二部分的形状不同。

4. 发明授权

US09697983B1 Thermal field emitter tip, electron beam device including a thermal field emitter tip and method for operating an electron beam device 有权
公开(公告)号：US09697983B1
公开(公告)日：2017-07-04
申请号：US15056244
申请日：2016-02-29
申请人： ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
发明人： Stefan Lanio , Aleksandra Kramer , John Breuer
IPC分类号： H01J37/073 , H01J1/16 , H01J19/10 , H01J9/02
CPC分类号： H01J37/073 , H01J1/16 , H01J9/02 , H01J9/04 , H01J19/10 , H01J19/82 , H01J37/065 , H01J37/3178 , H01J2201/19 , H01J2237/06308 , H01J2237/06341
摘要： An electron beam device for inspecting a sample with an electron beam is described. The electron beam device includes an electron beam source including a thermal field emitter, which includes an emitter tip having an emission facet configured for electron emission, wherein the emission facet has an emission facet width; and a first side facet and a second side facet, wherein an edge facet is formed between the first side facet and the second side facet, which has an edge facet width. The edge facet width is between 20% and 40% of the emission facet width. The electron beam source further includes an extractor device; and a heating device for heating the thermal field emitter. The electron beam device further includes electron beam optics and a detector device for detecting secondary charged particles generated at an impingement or hitting of the primary electron beam on the sample.

5. 发明授权

US09666405B1 System for imaging a signal charged particle beam, method for imaging a signal charged particle beam, and charged particle beam device 有权
公开(公告)号：US09666405B1
公开(公告)日：2017-05-30
申请号：US15046905
申请日：2016-02-18
申请人： ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
发明人： Stefan Lanio , Jürgen Frosien , Matthias Firnkes , Benjamin John Cook
IPC分类号： H01J37/147 , H01J37/29 , H01J37/244 , H01J37/12
CPC分类号： H01J37/244 , H01J2237/24465 , H01J2237/2449 , H01J2237/24592
摘要： The present disclosure provides a system for imaging a signal charged particle beam emanating from a sample by impingement of a primary charged particle beam. The system includes a detector arrangement having a first detection element for detecting a first signal charged particle sub-beam of the signal charged particle beam originating from a first spot on the sample and a second detection element for detecting a second signal charged particle sub-beam of the signal charged particle beam originating from a second spot on the sample, wherein the first detection element and the second detection element are separated from each other, and signal charged particle optics. The signal charged particle optics includes a coil configured to generate a magnetic field having a magnetic field component parallel to a longitudinal axis of the coil, wherein the magnetic field acts on the first signal charged particle sub-beam and the second signal charged particle sub-beam propagating along the longitudinal axis, and wherein an aspect ratio of the coil is at least 1, and a controller configured to adjust the magnetic field of the coil such that the first signal charged particle sub-beam is directed towards the first detection element and the second signal charged particle sub-beam is directed towards the second detection element.

6. 发明授权

US10699867B2 Simplified particle emitter and method of operating thereof 有权
公开(公告)号：US10699867B2
公开(公告)日：2020-06-30
申请号：US15970440
申请日：2018-05-03
申请人： ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
发明人： Stefan Lanio , Jürgen Frosien
IPC分类号： H01J37/063 , H01J37/06 , H01J37/08 , H01J37/09 , H01J37/16
摘要： An emitter assembly for emitting a charged particle beam along an optical axis is described. The emitter assembly being housed in a gun chamber and includes an emitter having an emitter tip, wherein the emitter tip is positioned at a first plane perpendicular to the optical axis and wherein the emitter is configured to be biased to a first potential, an extractor having an opening, wherein the opening is positioned at a second plane perpendicular to the optical axis and wherein the extractor is configured to be biased to a second potential, wherein the second plane has a first distance from the first plane of 2.25 mm and above.

7. 发明授权

US10103004B2 System and method for imaging a secondary charged particle beam with adaptive secondary charged particle optics 有权
公开(公告)号：US10103004B2
公开(公告)日：2018-10-16
申请号：US14790950
申请日：2015-07-02
申请人： ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
发明人： Matthias Firnkes , Stefan Lanio , Dieter Winkler
IPC分类号： H01J37/244 , H01J37/26 , H01J37/22 , H01J37/09 , H01J37/12 , H01J37/145
摘要： A method of imaging a secondary charged particle beam emanating from a sample by impingement of a primary charged particle beam is provided. The method includes setting a first operating parameter to a first value. The first operating parameter is selected from a group including: landing energy of the primary charged particle beam on the sample, extraction field strength for the secondary charged particle beam at the sample, magnetic field strength of an objective lens that focuses the primary charged particle beam onto the sample, and working distance of the objective lens from the sample. The method further includes controlling, while the first operating parameter is set to the first value, the excitation of a first lens and of a second lens to map the secondary charged particle beam onto a first region on an aperture plate. The first region overlaps with a first opening of the aperture plate and with a second opening of the aperture plate. The method further includes setting the first operating parameter to a second value different from the first value. The method further includes controlling, while the first operating parameter is set to the second value, the excitation of the first lens and of the second lens to map the secondary charged particle beam onto the first region on the aperture plate.

8. 发明授权

US11094501B2 Secondary charged particle imaging system 有权
公开(公告)号：US11094501B2
公开(公告)日：2021-08-17
申请号：US16688985
申请日：2019-11-19
申请人： ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
发明人： Matthias Firnkes , Florian Lampersberger , Stefan Lanio
IPC分类号： H01J37/244 , H01J37/10
摘要： A secondary charged particle imaging system comprising: a backscattered electron detector module, wherein the backscattered electron detector module is rotatable between a first angular position and a second angular position about an axis.

9. 发明申请

US20210151284A1 SECONDARY CHARGED PARTICLE IMAGING SYSTEM 有权
公开(公告)号：US20210151284A1
公开(公告)日：2021-05-20
申请号：US16688985
申请日：2019-11-19
申请人： ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
发明人： Matthias Firnkes , Florian Lampersberger , Stefan Lanio
IPC分类号： H01J37/244 , H01J37/10
摘要： A secondary charged particle imaging system comprising: a backscattered electron detector module, wherein the backscattered electron detector module is rotatable between a first angular position and a second angular position about an axis.

10. 发明授权

US10991544B2 Charged particle beam device, objective lens module, electrode device, and method of inspecting a specimen 有权
公开(公告)号：US10991544B2
公开(公告)日：2021-04-27
申请号：US16425094
申请日：2019-05-29
申请人： ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
发明人： Matthias Firnkes , John Breuer , Florian Lampersberger , Hanno Kaupp , Stefan Lanio
IPC分类号： H01J37/285 , H01J37/317 , H01J37/145
摘要： A charged particle beam device for inspecting a specimen is described. The charged particle beam device includes a beam source for emitting a charged particle beam, an electrode for influencing the charged particle beam, and a damping unit provided on the electrode for damping vibrations of the electrode. Further, an objective lens module with an electrode is described, wherein a damping unit is provided on the electrode. Further, an electrode device is described, wherein a mass damper is mounted on a disk-shaped electrode body of the electrode device.

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