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    • 1. 发明申请
    • Semiconductor Integrated Circuit for Low and High Voltage Operations
    • 用于低压和高压运行的半导体集成电路
    • US20130308375A1
    • 2013-11-21
    • US13954899
    • 2013-07-30
    • MagSil Corporation
    • Krishnakumar Mani
    • G11C11/16
    • G11C11/165G11C5/06G11C11/161G11C11/1659
    • A semiconductor integrated circuit comprising a first circuit area for a low voltage operation and a second circuit area for a high voltage operation. The circuit areas comprise two vertically stacked backend patterned metal layers that are separated by an inter-metallic dielectric (IMD). The two metal layers and the IMD form a combination that is operable at the low voltage. The first circuit area uses a first portion of the combination for operating at the low voltage and the second circuit area uses a second portion of the combination for routing at the high voltage, the two metal layers in the second portion being interconnected through the IMD by via hole, for withstanding the high voltage. The first portion may comprise an array of magnetic random access memory (MRAM) devices and the second circuit area may comprise a display drive circuit.
    • 一种半导体集成电路,包括用于低电压操作的第一电路区域和用于高电压操作的第二电路区域。 电路区域包括由金属间电介质(IMD)隔开的两个垂直堆叠的后端图案化金属层。 两个金属层和IMD形成在低电压下可操作的组合。 第一电路区域使用组合的第一部分在低电压下操作,并且第二电路区域使用组合的第二部分以高电压路由,第二部分中的两个金属层通过IMD互连通过IMD互连 通孔,用于承受高电压。 第一部分可以包括磁性随机存取存储器(MRAM)装置的阵列,并且第二电路区域可以包括显示驱动电路。
    • 8. 发明申请
    • TOOL FOR ANNEALING OF MAGNETIC STACKS
    • 磁性堆叠退火工具
    • US20150031146A1
    • 2015-01-29
    • US13424337
    • 2012-03-19
    • Krishnakumar Mani
    • Krishnakumar Mani
    • H01L21/263H05B6/10
    • H05B6/10H01L21/67109H01L21/6719
    • In one embodiment of the invention, there is provided a tool for annealing a magnetic stack. The tool includes a housing defining a heating chamber; a holding mechanism to hold at least one wafer in a single line within the heating chamber, a heating mechanism to heat the at least one wafer; and a magnetic field generator to generate a magnetic field whose field lines pass through the single line of wafers during a magnetic annealing process; wherein the holding mechanism comprises a wafer support of holding the single line of wafers between the heating mechanism and the magnetic field generator. The tool may be a rapid thermal processor retrofitted with the magnetic field generator.
    • 在本发明的一个实施例中,提供了一种用于退火磁性堆叠的工具。 该工具包括限定加热室的壳体; 保持机构,用于在所述加热室内的一条线中保持至少一个晶片;加热机构,用于加热所述至少一个晶片; 以及磁场发生器,用于产生磁场,其磁场线在磁退火过程中通过单线晶圆; 其中所述保持机构包括在所述加热机构和所述磁场发生器之间保持单线晶片的晶片支撑件。 该工具可以是用磁场发生器改装的快速热处理器。