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1. 发明申请

US20180350670A1 METHOD AND APPARATUS FOR REMOTE PLASMA TREATMENT FOR REDUCING METAL OXIDES ON A METAL SEED LAYER 审中-公开
公开(公告)号：US20180350670A1
公开(公告)日：2018-12-06
申请号：US15828286
申请日：2017-11-30
申请人： Lam Research Corporation
发明人： Tighe A. Spurlin , George Andrew Antonelli , Natalia V. Doubina , James E. Duncan , Jonathan David Reid , David W. Porter
IPC分类号： H01L21/768 , C23C18/16 , H01J37/32 , C23C18/18 , C25D17/00 , C25D5/42 , C25D5/40 , C25D5/34 , H01L21/687 , H01L21/67 , H01L21/02
CPC分类号： H01L21/76873 , C23C18/1619 , C23C18/1675 , C23C18/1851 , C23C18/1865 , C23C18/1868 , C25D5/34 , C25D5/40 , C25D5/42 , C25D17/001 , H01J37/32357 , H01L21/02063 , H01L21/02068 , H01L21/67115 , H01L21/68742 , H01L21/76861 , H01L21/76874
摘要： Method and apparatus for reducing metal oxide surfaces to modified metal surfaces and cooling the metal surfaces are disclosed. By exposing a metal oxide surface to remote plasma, the metal oxide surface on a substrate can be reduced to pure metal. A remote plasma apparatus can treat the metal oxide surface as well as actively cool, load/unload, and move the substrate within a single standalone apparatus. The remote plasma apparatus can be configured to actively cool the substrate during and/or after reducing the metal oxide to pure metal using an active cooling system. The active cooling system can include one or more of an actively cooled pedestal, an actively cooled showerhead, and one or more cooling gas inlets for delivering cooling gas to cool the substrate.

2. 发明授权

US09953866B1 Methods for forming a barrier layer with periodic concentrations of elements and structures resulting thereform 有权
公开(公告)号：US09953866B1
公开(公告)日：2018-04-24
申请号：US14080257
申请日：2013-11-14
申请人： Lam Research Corporation
发明人： Igor C. Ivanov
IPC分类号： C23C18/16 , H01L21/768
CPC分类号： H01L21/76841 , B82Y30/00 , C23C18/1619 , C23C18/1651 , C23C18/1682 , C23C18/1683 , C25D5/08 , C25D7/12 , C25D17/001 , C25D21/10 , H01L21/288 , H01L21/6715 , H01L21/76801 , H01L21/76826 , H01L21/76829 , H01L21/76834 , H01L21/76843 , H01L21/76846 , H01L21/76849 , H01L21/76858 , H01L21/76864 , H01L21/76867 , H01L21/76877 , H01L23/53238 , H01L2924/0002 , Y10T428/12 , Y10T428/12458 , Y10T428/24479 , Y10T428/24612 , H01L2924/00
摘要： A method is provided which includes dispensing and removing different deposition solutions during an electroless deposition process to form different sub-films of a composite layer. Another method includes forming a film by an electroless deposition process and subsequently annealing the microelectronic topography to induce diffusion of an element within the film. Yet another method includes reiterating different mechanisms of deposition growth, namely interfacial electroless reduction and chemical adsorption, from a single deposition solution to form different sub-films of a composite layer. A microelectronic topography resulting from one or more of the methods includes a film formed in contact with a structure having a bulk concentration of a first element. The film has periodic successions of regions each comprising a region with a concentration of a second element greater than a set amount and a region with a concentration of the second element less than the set amount.

3. 发明授权

US09890459B2 Roll-to-roll electroless plating system with spreader duct 有权
公开(公告)号：US09890459B2
公开(公告)日：2018-02-13
申请号：US15604972
申请日：2017-05-25
申请人： Eastman Kodak Company
发明人： Gary P. Wainwright , Shawn A. Reuter
IPC分类号： C23C18/16 , C23C18/18 , C23C18/38 , C23C18/32 , C23C18/42
CPC分类号： C23C18/1862 , C23C18/1619 , C23C18/1628 , C23C18/1669 , C23C18/1675 , C23C18/1683 , C23C18/32 , C23C18/38 , C23C18/42
摘要： A roll-to-roll electroless plating system including a reservoir containing a plating solution. A web advance system advances a web of substrate though the plating solution in the reservoir along a web advance direction, wherein a plating substance in the plating solution is plated onto predetermined locations on a surface of the web of substrate. A pump circulates plating solution from an output of the reservoir to an inlet of the reservoir located below the web of substrate. A spreader duct includes a channel that is in fluidic communication with the inlet of the reservoir, wherein the channel is positioned below the web of substrate and includes at least one outlet disposed beyond the first edge or the second edge of the web of substrate and has no outlets disposed immediately below the web of substrate.

4. 发明授权

US09865501B2 Method and apparatus for remote plasma treatment for reducing metal oxides on a metal seed layer 有权
公开(公告)号：US09865501B2
公开(公告)日：2018-01-09
申请号：US14086770
申请日：2013-11-21
申请人： Lam Research Corporation
发明人： Tighe A. Spurlin , George Andrew Antonelli , Natalia Doubina , James E. Duncan , Jonathan D. Reid , David Porter
IPC分类号： H01L21/768 , H01L21/02 , H01L21/67 , H01L21/687 , C23C18/18 , C25D5/34 , C25D5/40 , C25D5/42 , C25D17/00 , C23C18/16 , H01J37/32
CPC分类号： H01L21/76873 , C23C18/1619 , C23C18/1675 , C23C18/1851 , C23C18/1865 , C23C18/1868 , C25D5/34 , C25D5/40 , C25D5/42 , C25D17/001 , H01J37/32357 , H01L21/02063 , H01L21/02068 , H01L21/67115 , H01L21/68742 , H01L21/76861 , H01L21/76874
摘要： Method and apparatus for reducing metal oxide surfaces to modified metal surfaces are disclosed. By exposing a metal oxide surface to a remote plasma, the metal oxide surface on a substrate can be reduced to pure metal and the metal reflowed. A remote plasma apparatus can treat the metal oxide surface as well as cool, load/unload, and move the substrate within a single standalone apparatus. The remote plasma apparatus includes a processing chamber and a controller configured to provide a substrate having a metal seed layer in a processing chamber, form a remote plasma of a reducing gas species where the remote plasma includes radicals, ions, and/or ultraviolet (UV) radiation from the reducing gas species, and expose a metal seed layer of the substrate to the remote plasma to reduce oxide of the metal seed layer to metal and to reflow the metal.

5. 发明授权

US09771655B2 Web transport system including fluid shield 有权
公开(公告)号：US09771655B2
公开(公告)日：2017-09-26
申请号：US14812119
申请日：2015-07-29
申请人： Eastman Kodak Company
发明人： Robert R. Bettin , Kelvin P. Hill , Gary P. Wainwright , James Douglas Shifley
IPC分类号： B05C3/02 , C23C18/16 , B05C3/12
CPC分类号： C23C18/1664 , B05C3/02 , B05C3/125 , B65H20/14 , B65H23/24 , B65H23/26 , B65H2301/3112 , B65H2301/51422 , B65H2404/1364 , B65H2404/62 , B65H2406/211 , C23C18/1619 , C23C18/1632
摘要： A web transport system for transporting a web of media along a web-transport path includes a fluid bar for guiding the web of media, and first and second fluid shields positioned proximate to first and second ends of the fluid bar. A liquid is pumped through holes in an exterior bearing surface of the fluid bar into a region between the web of media and the bearing surface of the fluid bar, thereby pushing the web of media away from the fluid bar. The fluid shields are positioned to redirect fluid that is ejected from the region between the web of media and the bearing surface of the fluid bar along the edges of the web of media.

6. 发明申请

US20170226411A1 ELECTRICALLY CONDUCTIVE PROPPANT AND METHODS FOR ENERGIZING AND DETECTING SAME IN A SINGLE WELLBORE 审中-公开
公开(公告)号：US20170226411A1
公开(公告)日：2017-08-10
申请号：US15498266
申请日：2017-04-26
申请人： CARBO CERAMICS INC.
发明人： Chad CANNAN , Lewis BARTEL , Todd ROPER
IPC分类号： C09K8/80 , G01V3/26 , E21B47/09 , E21B43/26 , E21B43/267
CPC分类号： C09K8/805 , C23C18/1619 , C23C18/1639 , C23C18/1889 , C23C18/34 , C23C18/40 , E21B43/267 , G01V3/26
摘要： Electrically conductive proppant and methods for energizing and detecting the electrically conductive proppant in a single wellbore are disclosed. The methods can include performing numerical simulations solving Maxwell's equations of electromagnetism for electric and/or magnetic fields to determine temporal characteristics of an optimum input wave form and a recording sensor location to be used in a wellbore that extends into a subterranean formation having a fracture that is at least partially filled with proppant and an electrically conductive material, wherein the numerical simulations are based upon an earth model determined from geophysical logs and/or geological information. The method can also include electrically energizing a casing of the wellbore, measuring three dimensional (x, y, and z) components of electric and/or magnetic field responses in the wellbore, and determining a location of the electrically conductive proppant through comparison of the electric and/or magnetic field responses to the numerical simulations.

7. 发明申请

US20170121822A1 PLATING APPARATUS, PLATING METHOD AND RECORDING MEDIUM 审中-公开
公开(公告)号：US20170121822A1
公开(公告)日：2017-05-04
申请号：US15333303
申请日：2016-10-25
申请人： Tokyo Electron Limited
发明人： Nobutaka Mizutani , Mitsuaki Iwashita , Yuichiro Inatomi
IPC分类号： C23C18/16 , C23C18/52 , C23C18/31
CPC分类号： C23C18/1619 , C23C18/1675 , C23C18/1676 , C23C18/168 , C23C18/1683 , C23C18/31 , C23C18/52
摘要： A plating apparatus can suppress a time period during which a plating liquid is used in a plating from being reduced. In the plating apparatus 1, after a plating liquid supply unit 53 supplies, to a substrate W1, a plating liquid which exerts a preset plating performance within a preset concentration range and which has an initial temperature adjusted to be lower than a preset plating temperature; and an initial concentration adjusted such that a concentration of the plating liquid at a moment when a temperature of the plating liquid has reached the preset plating temperature is equal to or higher than a lower limit of the preset concentration range and equal to or below a median value of the preset concentration range, a plating liquid heating unit 63 heats the plating liquid supplied to the substrate W1 to the preset plating temperature.

8. 发明申请

US20170121221A1 APPARATUS AND METHOD FOR FABRICATING METAL-COATED OPTICAL FIBER 审中-公开
公开(公告)号：US20170121221A1
公开(公告)日：2017-05-04
申请号：US15316996
申请日：2015-06-09
申请人： AFL TELECOMMUNICATIONS LLC
发明人： Matsuhiro Miyamoto
IPC分类号： C03C25/10 , G02B6/02 , B05C3/172 , C03C25/16 , C03C25/68
CPC分类号： C03C25/1063 , B05C3/172 , B05C5/00 , C03C25/10 , C03C25/1068 , C03C25/16 , C03C25/68 , C23C18/1619 , C23C18/1628 , G02B6/00 , G02B6/02395
摘要： Apparatus and method for producing metal-coated optical fiber is provided. One step of such a method comprises providing a length of optical fiber having a glass fiber with or without a carbon layer surrounded by a polymeric, thermoplastic resin or wax coating. The optical fiber is passed through a series of solution baths such that the fiber will contact the solution in each bath for a predetermined dwell time, the series of solution baths or thermal tooling effecting removal of the polymer, thermoplastic resin or wax coating and subsequent electroless plating of metal on the glass fiber. The optical fiber is collected after metal plating so that a selected quantity of said metal-coated optical fiber is gathered. At least one of the solution baths comprises a coiled tube containing the process solution through which the glass fiber passes. Aspects of the present invention are also applicable to conventional metal wire where it is desirable to reduce physical length of the process line.

9. 发明申请

US20160369405A1 METHOD AND APPARATUS FOR PREPARING COATED PARTICLES 审中-公开
标题翻译：制备涂层颗粒的方法和装置
公开(公告)号：US20160369405A1
公开(公告)日：2016-12-22
申请号：US14899099
申请日：2014-06-18
申请人： NEXEON LIMITED
发明人： David William Bent
IPC分类号： C23C18/42 , C23C18/16
CPC分类号： C23C18/42 , B01J2/006 , C23C18/08 , C23C18/1619 , C23C18/1635 , C23C18/1639 , C23C18/1676 , C23C18/168 , C23C18/1689 , C23C18/54
摘要： The present invention relates to a method of forming a metal coated particle, to metal coated particles prepared according to the method and the use of these metal coated particles. The method comprising the steps of:providing a source of base particles to be coated; providing a source of a metal-comprising coating particles; and feeding the base particles specified in step (a) and the source of metal comprising coating particles specified in step (b) into a continuous reactor including heat exchange means to cause contact of the base particles with the source of coating particles thereby to form the metal coated particles. The coated particles include a homogeneous coating and can be used in a variety of applications.
摘要翻译：形成金属涂覆颗粒的方法包括以下步骤：提供待涂覆的基础颗粒源; 提供含金属的涂层颗粒的来源; 并将步骤（a）中规定的基础颗粒和包含步骤（b）中规定的涂布颗粒的金属源进料到包括热交换装置的连续反应器中，以使基础颗粒与涂层颗粒的源接触，从而形成金属涂层颗粒。基础颗粒可以选自硅，锗，锡，铝，镓，锌等，并且金属包覆颗粒的来源可以选自银，铜，铂，铁，钴，铑，钒，镍，钌，铱和金。涂覆的颗粒包括均匀的涂层并且可以用于各种应用中。还示出了覆膜颗粒和用于执行该方法的装置。

10. 发明申请

US20160359171A1 METHOD OF PRODUCING CORE-SHELL CATALYST 有权
标题翻译：生产核壳催化剂的方法
公开(公告)号：US20160359171A1
公开(公告)日：2016-12-08
申请号：US15170075
申请日：2016-06-01
申请人： TOYOTA JIDOSHA KABUSHIKI KAISHA
发明人： Shotaro ISHIKAWA
IPC分类号： H01M4/86 , H01M4/92
CPC分类号： H01M4/8657 , B22F1/025 , B22F2999/00 , C23C18/1619 , C23C18/1635 , C23C18/1637 , C23C18/1682 , C23C18/42 , C23C18/54 , H01M4/926 , B22F1/02 , B22F9/24
摘要： A copper-coated palladium-containing particle dispersion in which copper-coated palladium-containing particles, which are obtained by coating surfaces of palladium-containing particles with copper, are dispersed is prepared, a platinum ion-containing solution is prepared, and a shell is formed by mixing the copper-coated palladium-containing particle dispersion and the platinum ion-containing solution with each other in a microreactor to displace copper of the copper-coated palladium-containing particle surfaces with platinum. The microreactor includes at least a first supply flow path, a second supply flow path, a joint portion in which the first supply flow path and the second supply flow path are joined to each other, and a discharge flow path. An orifice portion is provided midway in the discharge flow path. A pressure applied to the orifice portion in the displacement step is 2 MPa or higher.
摘要翻译：制备其中分散有铜包覆的含钯颗粒的铜包覆的含钯颗粒分散体，其通过用铜涂覆含钯颗粒的表面而被分散，制备含铂离子的溶液，是通过将铜包覆的含钯颗粒分散体和含铂离子的溶液在微反应器中彼此混合而形成的，以用铂取代涂有铜的含钯颗粒表面的铜。微反应器至少包括第一供给流路，第二供给流路，第一供给流路和第二供给流路彼此接合的接合部以及排出流路。在排出流路的中途设置有孔部。在位移步骤中施加到孔口部分的压力为2MPa以上。

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