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    • 1. 发明申请
    • METHOD OF MANUFACTURING SILICON CARBIDE SINGLE CRYSTAL INGOT
    • US20190194819A1
    • 2019-06-27
    • US16221671
    • 2018-12-17
    • SHOWA DENKO K.K.
    • Yohei Fujikawa
    • C30B23/00C30B29/36C30B35/00
    • C30B23/002C30B29/36C30B35/002
    • The present invention provides a method including: a temperature raising step of raising a temperature in a crystal growing furnace with a silicon carbide raw material and a silicon carbide seed crystal arranged therein to a crystal growing temperature; a single crystal growing step of maintaining the crystal growing temperature and causing a silicon carbide single crystal to grow on the silicon carbide seed crystal; and a temperature lowering step of lowering the temperature in the crystal growing furnace from the crystal growing temperature to stop growth of the silicon carbide single crystal, in which the method further comprises, between the single crystal growing step and the temperature lowering step, a temperature lowering preparation step of maintaining the temperature in the crystal growing furnace at the crystal growing temperature and causing concentration of nitrogen gas in the crystal growing furnace to increase to be higher than concentration of nitrogen gas in the temperature raising step and in the single crystal growing step, and in which the concentration of the nitrogens gas in the crystal growing furnace in the temperature lowering step is higher than the concentration of the nitrogen gas in the temperature raising step and the single crystal growing step.
    • 10. 发明申请
    • METHOD OF MANUFACTURING COMPOSITE CRUCIBLE
    • 制造复合材料的方法
    • US20160115625A1
    • 2016-04-28
    • US14979431
    • 2015-12-27
    • SUMCO CORPORATION
    • Toshiaki SUDOKen KITAHARATakuma YOSHIOKA
    • C30B35/00C03B19/09
    • C03B19/095C30B15/10C30B29/06C30B35/002Y02P40/57Y10T117/10
    • A method of manufacturing a composite crucible includes: supplying mullite material powder to an upper region of a mold, and supplying second silica powder to a lower region provided below the upper region while rotating the mold; supplying third silica powder on an inner surface side of a layer made of the mullite material powder and the second silica powder; heating and fusing the mullite material powder, the second silica powder, and the third silica powder to form an opaque vitreous silica layer provided on the outer surface of the crucible, a transparent vitreous silica layer provided on an inner surface side of the crucible, and a mullite reinforcement layer provided on the outer surface side of an upper end portion of the crucible.
    • 制造复合坩埚的方法包括:将莫来石材料粉末供给到模具的上部区域,并且在旋转模具的同时将第二二氧化硅粉末供给到设置在上部区域下方的下部区域; 在由莫来石材料粉末和第二二氧化硅粉末制成的层的内表面侧上供给第二二氧化硅粉末; 加热熔融莫来石材料粉末,第二二氧化硅粉末和第三二氧化硅粉末,以形成设置在坩埚外表面上的不透明玻璃状二氧化硅层,设置在坩埚内表面侧的透明氧化硅玻璃层,以及 在所述坩埚的上端部的外表面侧设置的莫来石加强层。