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    • 6. 发明授权
    • Device for heat-treating sheet metal strips
    • 热处理金属板条的装置
    • US08877120B2
    • 2014-11-04
    • US13501555
    • 2010-09-17
    • Robert EbnerEduard Morbitzer
    • Robert EbnerEduard Morbitzer
    • C21D9/54F27D99/00F23C3/00
    • F27D99/0006F23C3/002F27D99/0035
    • A device is described for heat-treating sheet metal strips (6), comprising at least one radiant tube unit (1) which has three tubes disposed in a common plane parallel to the sheet metal strip (6), namely a middle tube (2) that can be connected to a burner and two outer tubes (3) that are connected at both ends to the middle tube (2) by means of tube bends (4), and a bearing (8) on the side of the radiant tube unit (1) opposite the burner for a bearing journal (9) connected to the two tube bends (4) between the middle tube (2) on the one hand and the two outer tubes (3) on the other hand, the bearing journal engaging in a journal receptacle (10) of the bearing (8) in an axially displaceable manner. In order to provide advantageous constructional conditions it is proposed that an insert (16) forming a sliding layer (15) is provided in the support area of the bearing journal (9) between the journal receptacle (10) of the bearing (8) and the bearing journal (9).
    • 描述了一种用于热处理金属片(6)的装置,其包括至少一个辐射管单元(1),其具有设置在与金属板条(6)平行的公共平面中的三个管,即中间管(2) ),其可以连接到燃烧器和两个外管(3),两个外管(3)通过管弯头(4)两端连接到中管(2),并且在辐射管侧面上的轴承(8) 另一方面与中间管(2)和两个外管(3)之间连接到两个管弯头(4)的轴承轴颈(9)相对的燃烧器相对的单元(1),另一方面轴承轴颈 以可轴向移动的方式接合轴承(8)的轴颈座(10)。 为了提供有利的结构条件,提出在轴承(8)的轴颈容座(10)和轴承(8)的轴颈容座(10)和轴承座(9)的轴承座(10)的支撑区域中,形成滑动层(15)的插入件(16) 轴承日志(9)。
    • 7. 发明授权
    • Heat treatment apparatus and method for heating substrate by light-irradiation
    • 热处理装置及通过光照射加热基板的方法
    • US08835813B2
    • 2014-09-16
    • US13759658
    • 2013-02-05
    • Shinichi Kato
    • Shinichi Kato
    • F27D11/12F27D19/00F27D99/00H01L21/67
    • F27D11/12F27D19/00F27D99/0006H01L21/67115H01L21/67248
    • A light-emission output of a flash lamp for performing a light-irradiation heat treatment on a substrate in which impurities are implanted is increased up to a target value L1 over a period of time from 1 to 100 milliseconds, is kept for 5 to 100 milliseconds within a fluctuation range of plus or minus 30% from the target value L1, and is then attenuated from the target value L1 to zero over a period of time from 1 to 100 milliseconds. That is, compared with conventional flash lamp annealing, the light-emission output of the flash lamp is increased more gradually, is kept to be constant for a certain period of time, and is then decreased more gradually. As a result, a total heat amount of a surface of the substrate increases compared with the conventional case, but a surface temperature thereof rises more gradually and then drops more gradually compared with the conventional case.
    • 用于对其中注入杂质的衬底进行光照射热处理的闪光灯的发光输出在1至100毫秒的时间段内增加到目标值L1,保持为5至100 在距离目标值L1的正或负30%的波动范围内的毫秒,然后在1至100毫秒的时间段内从目标值L1衰减到零。 也就是说,与传统的闪光灯退火相比,闪光灯的发光输出逐渐增加,保持恒定一段时间,然后逐渐减小。 结果,与常规情况相比,基板表面的总热量增加,但是与常规情况相比,表面温度逐渐上升,然后逐渐下降。
    • 9. 发明申请
    • DIFFUSION FURNACE
    • 扩散炉
    • US20140117005A1
    • 2014-05-01
    • US14148214
    • 2014-01-06
    • TANGTECK EQUIPMENT INC.
    • MING-HUI YUCHIA-JUNG KAOA-TZU CHENWANG-TSUNG LIANGCHANG-FA CHEN
    • H01L21/67
    • H01L21/67098F27B17/0025F27D99/0006
    • A diffusion furnace in the shape of polygonal-prism, including two end frame plates arranged in opposite basal planes of the diffusion furnace and a plurality of heating panels connected between the two end frame plates. Each heating panel includes at least one beam connected between the two end frame plates and a plurality of heating block interconnected in succession along and secured to the respective beam. Each heating block includes a block body, at least one heating element arranged on one side of the block body and amounting assembly mounted on the opposite side of the block body for securing the heating element. Thus, the disclosed diffusion furnace can be customized to satisfy different measurements requirement and can be easily decomposed for repair.
    • 一种扩散炉,其形状为多边形棱镜,包括布置在扩散炉的相对基面上的两个端框架板和连接在两个端框架板之间的多个加热板。 每个加热面板包括连接在两个端框架板之间的至少一个梁和连续相互连接并固定到相应梁的多个加热块。 每个加热块包括块体,至少一个加热元件,其布置在块体的一侧,并且组装组件安装在块体的相对侧上,用于固定加热元件。 因此,所公开的扩散炉可以定制以满足不同的测量要求,并且可以容易地分解以进行修复。