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    • 2. 发明申请
    • TIME-REVERSAL OF VARIANCE-ENCODED LIGHT (TROVE)
    • 变形灯(TROVE)的时间反转
    • US20140118739A1
    • 2014-05-01
    • US14070045
    • 2013-11-01
    • California Institute of Technology
    • Benjamin JudkewitzYing Min WangRoarke HorstmeyerChanghuei Yang
    • G01N21/49
    • G01N21/49G01N21/1702G01N21/1717G01N21/4795G01N21/6456G01N29/2418G01N2021/1708G01N2021/1727G01N2021/516
    • A method and apparatus for irradiating a scattering medium with increased resolution. The method includes transmitting EM radiation from an Electromagnetic (EM) radiation source to a target inside a scattering medium, wherein the target encodes the EM radiation with a variance structure to form encoded EM radiation; measuring, in a detector, transmitted EM radiation comprising at least a portion of the encoded EM radiation transmitted through and exiting the scattering medium; decoding the transmitted EM radiation, comprising EM fields, in a computer, comprising selecting one or more of the EM fields having the variance structure; and irradiating the scattering medium with time reversed EM radiation from a spatial light modulator (SLM), the time reversed EM radiation generated from time reversing the EM fields having the variance structure, thereby forming a focus of the time reversed EM radiation in the scattering medium with the increased resolution.
    • 用于以更高分辨率照射散射介质的方法和装置。 该方法包括将EM辐射从电磁(EM)辐射源传输到散射介质内的目标,其中目标编码具有方差结构的EM辐射以形成编码的EM辐射; 在检测器中测量透射的EM辐射,所述EM辐射包括通过和离开所述散射介质的编码的EM辐射的至少一部分; 在计算机中对包括EM场的所发射的EM辐射进行解码,包括选择具有方差结构的一个或多个EM场; 以及从空间光调制器(SLM)向时间反转的EM辐射照射散射介质,时间反转的EM辐射是从具有方差结构的EM场反转的时间产生的,由此形成时间反射的EM辐射在散射介质中的焦点 随着分辨率的提高。
    • 3. 发明授权
    • Light scattering particle detector for wafer processing equipment
    • 光散射粒子检测器用于晶圆加工设备
    • US4739177A
    • 1988-04-19
    • US907776
    • 1986-09-16
    • Peter Borden
    • Peter Borden
    • G01N15/02G01N21/51G01N21/53G01N15/06G01N15/07G01N21/49
    • G01N21/53G01N2015/0238G01N2021/516
    • A particle detector includes a laser, a beam shaping lens, and a pair of mirrors which reflect the shaped laser beam back and forth between the mirrors a selected number of times in order to create a sheet of light or light net between the mirrors. The path of the beam is terminated by a beam stop which contains a photodiode to monitor beam intensity and thereby system alignment. Light scattered by a particle falling through the sheet of light is gathered and transmitted to a photodiode. A peak detector provides a measure of the peak intensity of light scattered by such a particle to a microprocessor, which counts the number of particles falling through the light net in a selected time interval. The microprocessor also uses the peak intensity to estimate the size of the particle.
    • 粒子检测器包括激光器,光束整形透镜和一对反射镜,其在反射镜之间来回反射成形激光束选定的次数,以便在反射镜之间产生一张光或光网。 光束的路径由包含用于监测光束强度并由此进行系统对准的光电二极管的光束停止端接。 被落在薄片上的颗粒散射的光被聚集并传输到光电二极管。 峰值检测器提供了这样的颗粒散射到微处理器的光的峰值强度的量度,该微处理器对在选定时间间隔内通过光网落下的颗粒数进行计数。 微处理器还使用峰值强度来估计粒子的大小。
    • 4. 发明申请
    • EXHAUST GAS ANALYZER AND EXHAUST GAS ANALYZING METHOD
    • 排气分析仪和排气分析方法
    • US20090229250A1
    • 2009-09-17
    • US12159042
    • 2006-12-27
    • Masahiro YamakageKatsutoshi GotoYoshihiro DeguchiKenji MutaAkio Kondou
    • Masahiro YamakageKatsutoshi GotoYoshihiro DeguchiKenji MutaAkio Kondou
    • F01N3/00G01N21/00
    • G01N21/532G01N15/0205G01N21/3504G01N2015/0693G01N2021/4726G01N2021/516
    • An exhaust gas analyzer and an exhaust gas analyzing method capable of analyzing the concentration of particulate matter contained in exhaust gas from an internal combustion in real time are provided. The exhaust gas analyzer includes: an exhaust gas passage hole 21 through which the exhaust gas from the internal combustion is introduced; an optical fiber 25 that applies the laser light in a direction perpendicular to a flow of the exhaust gas flowing through the exhaust gas passage hole; a detector 26 that receives the laser light that has passed through the exhaust gas; a photodetector 71 that receives Mie scattered light generated from particulate matter PM contained in the exhaust gas by irradiating the particulate matter with the laser light; and a personal computer 45 as a calculation unit that calculates a concentration of a component in the exhaust gas based on photoreceiving data of a transmitted light intensity obtained from the detector 26, and calculates a concentration of the particulate matter contained in the exhaust gas based on actual measurement data of a scattered light intensity obtained by the photodetector 71.
    • 提供能够实时分析来自内燃的废气中所含有的颗粒物质的浓度的废气分析装置和废气分析方法。 废气分析装置包括:引入来自内燃的废气的排气通路孔21; 光纤25,其在垂直于流过排气通路孔的排气流动的方向上施加激光; 接收已经通过排气的激光的检测器26; 光检测器71,通过用激光照射颗粒物质来接收由废气中所含的颗粒物质PM产生的散射光; 以及个人计算机45作为计算单元,其基于从检测器26获得的透射光强度的光接收数据来计算废气中的分量的浓度,并且基于以下方式计算废气中所含的颗粒物质的浓度: 由光电检测器71获得的散射光强度的实际测量数据。
    • 8. 发明授权
    • Exhaust gas analyzer and exhaust gas analyzing method
    • 废气分析仪和废气分析方法
    • US07926332B2
    • 2011-04-19
    • US12159042
    • 2006-12-27
    • Masahiro YamakageKatsutoshi GotoYoshihiro DeguchiKenji MutaAkio Kondou
    • Masahiro YamakageKatsutoshi GotoYoshihiro DeguchiKenji MutaAkio Kondou
    • G01M15/10
    • G01N21/532G01N15/0205G01N21/3504G01N2015/0693G01N2021/4726G01N2021/516
    • An exhaust gas analyzer and an exhaust gas analyzing method capable of analyzing the concentration of particulate matter contained in exhaust gas from an internal combustion in real time are provided. The exhaust gas analyzer includes: an exhaust gas passage hole 21 through which the exhaust gas from the internal combustion is introduced; an optical fiber 25 that applies the laser light in a direction perpendicular to a flow of the exhaust gas flowing through the exhaust gas passage hole; a detector 26 that receives the laser light that has passed through the exhaust gas; a photodetector 71 that receives Mie scattered light generated from particulate matter PM contained in the exhaust gas by irradiating the particulate matter with the laser light; and a personal computer 45 as a calculation unit that calculates a concentration of a component in the exhaust gas based on photoreceiving data of a transmitted light intensity obtained from the detector 26, and calculates a concentration of the particulate matter contained in the exhaust gas based on actual measurement data of a scattered light intensity obtained by the photodetector 71.
    • 提供能够实时分析来自内燃的废气中所含有的颗粒物质的浓度的废气分析装置和废气分析方法。 废气分析装置包括:引入来自内燃的废气的排气通路孔21; 光纤25,其在垂直于流过排气通路孔的排气流动的方向上施加激光; 接收已经通过排气的激光的检测器26; 光检测器71,通过用激光照射颗粒物质来接收由废气中所含的颗粒物质PM产生的散射光; 以及个人计算机45作为计算单元,其基于从检测器26获得的透射光强度的光接收数据来计算废气中的分量的浓度,并且基于以下方式计算废气中所含的颗粒物质的浓度: 由光电检测器71获得的散射光强度的实际测量数据。
    • 9. 发明授权
    • Measuring instrument for determining the scattering and absorption
coefficient of the atmosphere
    • 用于确定大气的散射和吸收系数的测量仪器
    • US5024526A
    • 1991-06-18
    • US333392
    • 1989-04-05
    • Heribert von Redwitz
    • Heribert von Redwitz
    • G01J5/42G01N21/51G01N21/53
    • G01N21/53G01J5/42G01N2021/516G01N2021/6469G01N21/538G01N2201/1285
    • A measuring instrument for simultaneous in situ determination of the spectral scatting and absorption coefficient, which can also be called an extinction meter, has a modulated light source and an optical system encompassing the hemisphere; the optical system has a multiply folded ray path with a focal point in the volume to be measured, and through this system the measurement signal is projected to detectors. The scattering measurement signals, which are maximally enlarged in this way, are then separated from those for the absorption. The extinction meter also has not only an integrating nephelometer for monitoring purposes but also a transmission meter for low transmission factors. Because of the small three-dimensional size and the streamlined shape of the measuring portion of the extinction meter, the extinction meter can be carried in aircraft and surface vehicles. Because of the disposition of the optical system, the error in the measurement values is negligible, in comparison with other instruments with which only the scattering coefficient can be determined. Moreover, the calibration value during a measurement phase can be determined both automatically and manually. Contamination of the instrument with gas to be measured is reduced, by the stabilization of a turbulence ring by means of baffles. Moreover, interference with the flowing aerosol on the part of the instrument is largely eliminated via a hoop-like hood functioning like a wing-tip slot.
    • 用于同时原位测定光谱散射和吸收系数的测量仪器(也称为消光计)具有调制光源和包围半球的光学系统; 该光学系统具有在要测量的体积中具有焦点的多重折叠的光线路径,并且通过该系统将测量信号投影到检测器。 然后以这种方式最大化地扩散的散射测量信号与用于吸收的散射测量信号分开。 灭火表不仅具有用于监测目的的积分浊度计,而且还具有低传输系数的传输仪表。 由于消光表的测量部分具有小的三维尺寸和流线型的形状,所以消光计可以被携带在飞机和地面车辆中。 由于光学系统的配置,与其中只能确定散射系数的其他仪器相比,测量值的误差可以忽略不计。 此外,可以自动和手动地确定测量阶段期间的校准值。 通过挡板稳定湍流环,仪器与待测气体的污染减少。 此外,通过像翼尖槽一样的环形罩大大消除了对仪器部分流动的气溶胶的干扰。