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1. 发明申请

US20180210009A1 MICROFABRICATED OPTICAL PROBE 审中-公开
公开(公告)号：US20180210009A1
公开(公告)日：2018-07-26
申请号：US15808150
申请日：2017-11-09
申请人： Government of the United States of America, as represented by the Secretary of Commerce
发明人： Vladimir A. Aksyuk , Kartik Srinivasan , Thomas Michels
IPC分类号： G01Q70/08 , G01Q70/02 , G02B6/02 , H01L21/67 , G01N21/17 , G03F7/20
CPC分类号： G01Q70/08 , G01N21/17 , G01Q20/04 , G01Q60/22 , G01Q70/02 , G01Q70/10 , G02B6/0208 , G03F7/2049 , H01L21/67
摘要： A microfabricated optical probe includes: a cantilever; an optical waveguide disposed at a periphery of the cantilever and including an optical loop, the optical loop being disposed coplanar with the cantilever; a mechanical support interposed between and interconnecting the cantilever and the optical waveguide with the mechanical support such that the cantilever and optical waveguide move together; and a substrate on which the cantilever is disposed and from which the cantilever and the optical loop protrude, wherein the cantilever and the optical waveguide flex independently of the substrate.

2. 发明申请

US20180172728A1 PHOTONIC PROBE FOR ATOMIC FORCE MICROSCOPY 审中-公开
公开(公告)号：US20180172728A1
公开(公告)日：2018-06-21
申请号：US15799337
申请日：2017-10-31
申请人： Government of the United States of America, as represented by the Secretary of Commerce
发明人： VLADIMIR AKSYUK , MARCELO DAVANCO
IPC分类号： G01Q60/38 , G02B6/293 , G02B6/122
CPC分类号： H01J37/3174 , G01Q20/02 , G01Q20/04 , G01Q60/38 , G02B6/1225 , G02B6/29338 , G02B2006/12138 , H01J37/3026
摘要： A photonic probe for atomic force microscopy includes: a cantilever including: a tip; a wing in mechanical communication with the tip; an extension interposed between the tip and the wing to synchronously communicate motion of the tip with the wing; an optical resonator disposed proximate to the cantilever and that: receives input light; and produces output light, such that: the cantilever is spaced by a gap distance from the optical resonator, wherein the gap distance varies as the cantilever moves relative to the optical resonator, and the output light differs from the input light in response to movement of the cantilever relative to the optical resonator; an optical waveguide in optical communication with the optical resonator and that: provides the input light to the optical resonator; and receives the output light from the optical resonator.

3. 发明申请

US20170113918A1 MICROELECTROMECHANICAL DEVICE AND SYSTEM WITH LOW-IMPEDANCE RESISTIVE TRANSDUCER 有权
公开(公告)号：US20170113918A1
公开(公告)日：2017-04-27
申请号：US15293147
申请日：2016-10-13
申请人： Vmicro , CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE
发明人： Benjamin WALTER , Marc FAUCHER
IPC分类号： B81B3/00
CPC分类号： B81B3/0045 , B81B3/0021 , B81B3/0024 , B81B3/0086 , B81B2201/02 , B81B2201/031 , B81B2203/0118 , G01P15/123 , G01Q10/045 , G01Q20/04
摘要： A microelectromechanical device comprising a mechanical structure extending along a longitudinal direction, linked to a planar substrate by an anchorage situated at one of its ends and able to flex in a plane parallel to the substrate, the mechanical structure comprises a joining portion, which links it to each anchorage and includes a resistive region exhibiting a first and second zone for injecting an electric current to form a resistive transducer, the resistive region extending in the longitudinal direction from an anchorage and arranged so a flexion of the mechanical structure in the plane parallel to the substrate induces a non-zero average strain in the resistive region and vice versa; wherein: the first injection zone is carried by the anchorage; and the second injection zone is carried by a conducting element not fixed to the substrate and extending in a direction, termed lateral, substantially perpendicular to the longitudinal direction.

4. 发明申请

US20160252545A1 Multiple Integrated Tips Scanning Probe Microscope 审中-公开
标题翻译：多个集成提示扫描探针显微镜
公开(公告)号：US20160252545A1
公开(公告)日：2016-09-01
申请号：US15054382
申请日：2016-02-26
申请人： Xallent, LLC
发明人： Kwame Amponsah
IPC分类号： G01Q20/02 , G01Q30/02
CPC分类号： G01Q20/02 , G01Q10/045 , G01Q20/04 , G01Q30/025 , G01Q60/04 , G01Q60/30 , G01Q70/06
摘要： Device and system for characterizing samples using multiple integrated tips scanning probe microscopy. Multiple Integrated Tips (MiT) probes are comprised of two or more monolithically integrated and movable AFM tips positioned to within nm of each other, enabling unprecedented micro to nanoscale probing functionality in vacuum or ambient conditions. The tip structure is combined with capacitive comb structures offering laserless high-resolution electric-in electric-out actuation and sensing capability and novel integration with a Junction Field Effect Transistor for signal amplification and low-noise operation. This “platform-on-a-chip” approach is a paradigm shift relative to current technology based on single tips functionalized using stacks of supporting gear: lasers, nano-positioners and electronics.
摘要翻译：使用多个集成尖端扫描探针显微镜来表征样品的装置和系统。多个集成提示（MiT）探针由两个或多个单片集成和可移动的AFM尖端组成，位于彼此的nm内，在真空或环境条件下实现了前所未有的微纳米级探测功能。尖端结构与提供无激光高分辨率电气输出启动和感测能力的电容梳结构组合，并与用于信号放大和低噪声操作的结型场效应晶体管的新颖集成。这种“片上平台”方法是相对于基于使用支架的激光器，纳米定位器和电子装置的功能化功能化的单一技巧的当前技术的范式转变。

5. 发明授权

US08952891B2 Detecting responses of micro-electromechanical system (MEMS) resonator device 有权
标题翻译：检测微机电系统（MEMS）谐振器装置的响应
公开(公告)号：US08952891B2
公开(公告)日：2015-02-10
申请号：US13469571
申请日：2012-05-11
申请人： Hassan Tanbakuchi , Bernard Legrand , Damien Ducatteau , Didier Theron
发明人： Hassan Tanbakuchi , Bernard Legrand , Damien Ducatteau , Didier Theron
IPC分类号： G01G5/00
CPC分类号： G01Q60/32 , G01Q20/04 , H03H9/2431
摘要： A system for detecting responses of a MEMS resonator device includes first and second signal sources, a signal divider and a frequency mixer. The first signal source provides a first signal and the second signal source provides a second signal that electrostatically drives the MEMS resonator device, causing mechanical vibration. The signal divider divides the first signal into a probe signal and a local oscillator (LO) signal, the probe signal being applied to the MEMS resonator device and reflected by a capacitance of the MEMS resonator device. A reflection coefficient is modulated onto the reflected probe signal at the mechanical resonance frequency by variations in the capacitance induced by the mechanical vibration of the MEMS resonator device. The frequency mixer mixes the reflected probe signal and the LO signal and outputs an intermediate frequency (IF) signal, which represents modulation of the reflection coefficient, providing an image of the mechanical vibration.
摘要翻译：用于检测MEMS谐振器装置的响应的系统包括第一和第二信号源，信号分频器和频率混频器。第一信号源提供第一信号，第二信号源提供静电驱动MEMS谐振器装置的第二信号，引起机械振动。信号分压器将第一信号分成探测信号和本地振荡器（LO）信号，探测信号被施加到MEMS谐振器装置并由MEMS谐振器装置的电容反射。通过由MEMS谐振器装置的机械振动引起的电容的变化，以机械共振频率将反射系数调制到反射的探测信号上。混频器混合反射的探测信号和LO信号，并输出表示反射系数的调制的中频（IF）信号，提供机械振动的图像。

6. 发明申请

US20140196179A1 ULTRA-COMPACT NANOCAVITY-ENHANCED SCANNING PROBE MICROSCOPY AND METHOD 审中-公开
标题翻译：超紧凑型纳米增强扫描探针显微镜和方法
公开(公告)号：US20140196179A1
公开(公告)日：2014-07-10
申请号：US14150389
申请日：2014-01-08
申请人： The Trustees of Columbia University in the City of New York
发明人： Dirk R. ENGLUND
IPC分类号： G01Q70/14 , G01Q10/00
CPC分类号： G01Q70/14 , G01Q10/00 , G01Q20/02 , G01Q20/04 , G01Q70/10
摘要： Techniques for measuring the topography of a surface using a device including a semiconductor slab having a distal end and a base region, and an air slot therein. A sensor tip can be coupled to the slab below the air-slot. A photonic crystal including a lattice pattern with a cavity region defined by a local perturbation in the lattice pattern can be integrated into the semiconductor slab above and below the air slot, thereby providing a split-cavity photonic crystal resonator integrated into the semiconductor slab.
摘要翻译：使用包括具有远端和底部区域的半导体板的装置以及其中的空气槽来测量表面的形貌的技术。传感器尖端可以连接到空气槽下方的板坯。包括具有由格子图案中的局部扰动限定的空腔区域的格子图案的光子晶体可以集成到空气狭缝上方和下方的半导体板中，从而提供集成到半导体板中的分裂腔光子晶体谐振器。

7. 发明授权

US08091143B2 Atomic force microscopy probe 有权
标题翻译：原子力显微镜探针
公开(公告)号：US08091143B2
公开(公告)日：2012-01-03
申请号：US12598490
申请日：2008-04-23
申请人： Marc Faucher , Lionel Buchaillot , Jean-Pierre Aime , Bernard Louis Amand Legrand , Gerard Couturier
发明人： Marc Faucher , Lionel Buchaillot , Jean-Pierre Aime , Bernard Louis Amand Legrand , Gerard Couturier
IPC分类号： G01N13/16 , H01L29/84 , H03H9/00
CPC分类号： G01Q20/04 , G01Q30/12 , G01Q60/32 , G01Q60/38
摘要： A probe for atomic force microscopy (SM) comprising a micromechanical resonator (RMM) and a tip for atomic force microscopy (P1) projecting from said resonator, the probe being characterized in that: it also includes means (EL1) for selectively exciting a volume mode of oscillation of said resonator (RMM); and in that said tip for atomic force microscopy (P1, P1′) projects from said resonator substantially in correspondence with an antinode point (PV1) of said volume mode of oscillation. An atomic force microscope including such a probe (SM′). A method of atomic force microscopy including the use of such a probe.
摘要翻译：一种用于原子力显微镜（SM）的探针，其包括微机械谐振器（RMM）和用于从所述谐振器突出的原子力显微镜（P1）的尖端，所述探针的特征在于：其还包括用于选择性地激发体积的装置（EL1）所述谐振器（RMM）的振荡模式; 并且所述原子力显微镜（P1，P1'）的尖端基本上与所述体积振荡模式的波腹点（PV1）相对应地从所述谐振器突出。包括这种探针（SM'）的原子力显微镜。包括使用这种探针的原子力显微镜的方法。

8. 发明授权

US07997125B2 Miniaturized spring element and method for producing the spring element 有权
标题翻译：微型弹簧元件及弹簧元件的制造方法
公开(公告)号：US07997125B2
公开(公告)日：2011-08-16
申请号：US12184679
申请日：2008-08-01
申请人： Alexander Kaya , Michael Huth
发明人： Alexander Kaya , Michael Huth
IPC分类号： G01Q60/40 , G01Q70/14
CPC分类号： G01Q20/04 , Y10S977/89 , Y10S977/956
摘要： A miniaturized spring element is intended to be particularly suitable for use as a beam probe or cantilever for detecting atomic or molecular forces, in particular in an atomic force microscope, and, to this end, is intended to make it possible to detect its deflection in a particularly reliable manner and with high resolution. For this purpose, the spring element contains a basic body which is formed from a matrix containing embedded nanoparticles or defects. The spring element is produced using the principle of local deposition with focused energetic particles or electromagnetic waves or by pyrolytically induced deposition.
摘要翻译：旨在特别适合用作用于检测原子力或分子力的光束探测器或悬臂的微型弹簧元件，特别是在原子力显微镜中，并且为此，旨在使其可以检测其中的偏转特别可靠的方式和高分辨率。为此，弹簧元件包含由包含嵌入的纳米颗粒或缺陷的基体形成的基体。使用具有聚焦能量粒子或电磁波的局部沉积或通过热解诱导沉积的原理制造弹簧元件。

9. 发明授权

US07992431B2 Piezoelectric microcantilevers and uses in atomic force microscopy 有权
标题翻译：压电微悬臂梁和原子力显微镜的应用
公开(公告)号：US07992431B2
公开(公告)日：2011-08-09
申请号：US11946534
申请日：2007-11-28
申请人： Wan Y. Shih , Wei-Heng Shih , Zuyan Shen , Qing Zhu
发明人： Wan Y. Shih , Wei-Heng Shih , Zuyan Shen , Qing Zhu
IPC分类号： G01B5/28
CPC分类号： G01Q60/38 , B82Y35/00 , G01B9/04 , G01Q10/045 , G01Q20/04 , Y10T29/42
摘要： The invention is direct to a piezoelectric microcantilever for static contact and dynamic noncontact atomic force microscopy which may be carried out in solution. The piezoelectric microcantilever, which includes a piezoelectric layer and a non-piezoelectric layer is capable of self actuation and detection. The piezoelectric layer may be constructed from a lead magnesium niobate-lead titanate (Pb(Mg1/3Nb2/3)O3)0.65—(PbTiO3)0.35(PMN0.65-PT0.35)(PMN-PT), zirconate titanate (PZT)/SiO2 or from any lead-free piezoelectric materials such as doped sodium-potassium niobate-lithium niobate. The piezoelectric layers of the microcantilevers may have dielectric constants of from 1600-3000 and thicknesses below 10 μm. Also disclosed are methods for fabricating microcantilever sensors and methods for atomic force microscopy employing the microcantilevers.
摘要翻译：本发明直接用于静态接触和动态非接触原子力显微镜的压电微悬臂梁，其可以在溶液中进行。包括压电层和非压电层的压电微悬臂梁能够自动启动和检测。压电层可以由铌酸铅镁酸铅（Pb（Mg1 / 3Nb2 / 3）O3）0.65-（PbTiO3）0.35（PMN0.65-PT0.35）（PMN-PT），锆钛酸铅（PZT））/ SiO 2或来自任何无铅压电材料如掺杂的铌酸钠 - 铌酸锂 - 铌酸锂。微悬臂梁的压电层可以具有1600-3000的介电常数和低于10μm的厚度。还公开了用于制造微悬臂梁传感器的方法和使用微悬臂梁的原子力显微镜的方法。

10. 发明授权

US07910390B2 Resonant MEMS device that detects photons, particles and small forces 失效
标题翻译：检测光子，粒子和小力的共振MEMS器件
公开(公告)号：US07910390B2
公开(公告)日：2011-03-22
申请号：US12370882
申请日：2009-02-13
申请人： Andrei Pavlov , Yelena Pavlova
发明人： Andrei Pavlov , Yelena Pavlova
IPC分类号： H01L21/00 , H01L29/82
CPC分类号： H03B5/30 , G01J1/42 , G01Q20/04
摘要： A resonant MEMS device that detects photons, particles and small forces including atomic forces is disclosed. The device comprises a planar substrate 1, two electrodes 2 and 3 on top of the substrate, a resonant micro-electromechanical (MEMS) structure 6, such as a cantilever, anchored to first electrode 2 and arranged above the second electrode 3 separated from this electrode with an ultrathin transition layer 5. The resonant MEMS structure is working at its natural resonant frequency. The resonant oscillation of the cantilever can be initiated by applying AC voltage with frequency equaling the resonant frequency of the MEMS structure. A constant voltage is applied between the cantilever and the second electrode. The cantilever oscillates at very small amplitude ranging from few Ångstrom (Å) to several nm. During operation, a constant component of the electrical current is measured between the cantilever and the second electrode 3. The electrical current is a tunnelling current described by quantum mechanical probability with which the electrons can tunnel through the transition layer. The thickness of the transition layer is selected so that at no resonance the constant component of the electrical current is about zero and at resonance the DC electrical current has non-zero value and reaches its maximum. When the cantilever interacts with photons, particles or atoms on surfaces then the MEMS device measures their energies using change in the DC tunnelling current and shift of resonant frequency.
摘要翻译：公开了一种检测光子，微粒和包括原子力的小力的共振MEMS装置。该装置包括平面基板1，在基板顶部的两个电极2和3，固定到第一电极2并布置在与该第一电极2分离的第二电极3上方的诸如悬臂的共振微机电（MEMS）结构6 具有超薄过渡层5的电极。谐振MEMS结构以其固有谐振频率工作。可以通过施加频率等于MEMS结构的谐振频率的交流电压来启动悬臂的谐振振荡。在悬臂和第二电极之间施加恒定电压。悬臂以非常小的振幅振荡，范围从几埃（Å）到几nm。在操作期间，在悬臂和第二电极3之间测量电流的恒定分量。电流是通过量子机械概率描述的隧道电流，电子可以通过该隧道穿过过渡层。选择过渡层的厚度使得在没有谐振的情况下，电流的恒定分量约为零，并且在共振时，DC电流具有非零值并达到其最大值。当悬臂与表面上的光子，粒子或原子相互作用时，MEMS器件使用DC隧道电流的变化和谐振频率的移动来测量其能量。

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