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    • 6. 发明授权
    • System for applying recipe of semiconductor manufacturing apparatus
    • 应用半导体制造装置配方的系统
    • US06000830A
    • 1999-12-14
    • US840453
    • 1997-04-18
    • Atsushi AsanoYoshikatsu Miura
    • Atsushi AsanoYoshikatsu Miura
    • G06F19/00
    • G05B19/41855G05B2219/31088G05B2219/45031H01L21/67276Y02P90/185Y02P90/20
    • A system for applying recipes of semiconductor manufacturing apparatuses includes a plurality of apparatus controllers respectively arranged for semiconductor manufacturing apparatus, a host computer commonly connected to the apparatus controllers to store process recipes, and a group controller which is commonly connected to the apparatus controllers through a channel different from channels which connect the apparatus controllers to the host computer, and is connected to the host computer through a dedicated channel to directly exchange information with the host computer. The host computer sends process recipes to the respective apparatus controllers, writes/reads out a recipe in/from the group controller through the dedicated channel, and reads out a recipe history therefrom through the dedicated channel. The apparatus controllers respectively operate the semiconductor manufacturing apparatuses on the basis of the process recipes sent from the host computer. The group controller stores a history of a process recipe used by the semiconductor manufacturing apparatus.
    • 用于应用半导体制造装置的配方的系统包括分别布置用于半导体制造装置的多个装置控制器,与设备控制器共同连接以存储处理配方的主计算机,以及通过连接到装置控制器的组控制器 通道不同于将设备控制器连接到主机的通道,并且通过专用通道连接到主计算机,以直接与主机交换信息。 主计算机将处理配方发送到相应的装置控制器,通过专用信道在组控制器中/从组控制器读出配方,并通过专用信道读出配方历史。 设备控制器基于从主计算机发送的处理配方分别操作半导体制造设备。 组控制器存储半导体制造装置使用的处理配方的历史。
    • 10. 发明申请
    • Method for maintaining and managing a manufacturing facility
    • 维护和管理制造设施的方法
    • US20040073576A1
    • 2004-04-15
    • US10466329
    • 2003-12-02
    • Klaus-Peter LindnerMichael Herzog
    • G06F017/00
    • G05B19/4185G05B2219/31088G05B2219/31121G05B2219/31135G05B2219/31166G05B2219/34038Y02P90/14Y02P90/18
    • The invention relates to a method for maintaining and managing a manufacturing facility with a plurality of field devices (F) that are connected to a guide system (L) via a data bus (D). The inventive method is characterized in that information of at least the field devices that are required for the maintenance and management of the manufacturing facility are electronically acquired across the entire life cycle of the respective field device and are stored via intranet or internet access in a central data bank that is accessible for selected users. The user inquires the maintenance or management criteria via intranet or internet access to the central data bank (Z). In this manner, all information required for the maintenance and management of the manufacturing facility are made available to selected users in a simple way.
    • 本发明涉及一种用于通过数据总线(D)连接到引导系统(L)的多个现场设备(F)来维护和管理制造设施的方法。 本发明的方法的特征在于,在各个现场设备的整个生命周期内电子地获取至少对维护和管理制造设施所需的现场设备的信息,并通过内联网或因特网接入存储在中央 可供所选用户访问的数据库。 用户通过内部网或互联网访问中央数据库(Z)查询维护或管理标准。 以这种方式,可以以简单的方式为所选用户提供维护和管理制造设施所需的所有信息。