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    • 2. 发明公开
    • VACUUM EXHAUST SYSTEM
    • US20230400868A1
    • 2023-12-14
    • US18245080
    • 2021-10-01
    • Edwards Japan Limited
    • Manabu Nonaka
    • G05D7/06
    • G05D7/0688H01L21/67017
    • A vacuum exhaust system is provided which can reduce a size of a pump or a valve, and can thin the pipe diameter, and can perform highly efficient exhaust making the best use of exhaust characteristics of the pump from high vacuum to the large flow region. The process gas used in a vacuum chamber passes through a regulating valve, and reaches a first branch pipe. The passage on the side indicated with A in the drawing of the first branch pipe is connected with an inlet port of a second pump. On the other hand, the passage indicated with B in the drawing of the first branch pipe is provided with a bypass valve. Then, the downstream of an outlet port of the second pump and the downstream of the bypass valve are connected with a first pump via a second branch pipe. In the low and medium vacuum regions (at the time of large flow rate exhaust), the bypass valve is opened. At this time, the gas is exhausted through both the passage A including the second pump therethrough and a passage B. Then, when exhaust under medium and high vacuum conditions lower than that is performed, the bypass valve is closed, thereby performing exhaust through the passage A. As a result of this, the pipe of the passage B can be thinned.
    • 7. 发明申请
    • PERFORMANCE MONITORING OF PUMP-VALVE SYSTEM
    • 泵阀系统性能监测
    • US20170045897A1
    • 2017-02-16
    • US15306417
    • 2014-04-29
    • METSO FLOW CONTROL OY
    • Jouni PYÖTSIÄMats FRIMAN
    • G05D7/06F04B51/00F16K37/00
    • G05D7/0635F04B51/00F04D15/0022F16K37/0041F16K37/005G05B19/0426G05D7/0688G06Q10/0639G06Q50/06G06Q50/28Y02P80/10Y02P90/82Y04S10/56
    • A pumping energy savings estimator is provided which, based on valve opening data collected for a control valve of a pump-valve system operating in an industrial process, determines an actual maximum (Δporg, ˜50% open) of valve operating region of the control valve of the pump-valve system. User can select a new maximum (Δpnew, ˜70% open) of valve operating region for the control valve. Then the estimator, based on the determined actual maximum of valve operating region and the selected new maximum of valve operating region, energy saving potential (Δpsave) in the pump-valve system. The potential energy savings may be put into practice by replacing the original pump with a new smaller pump, or more preferably, replacing or processing the impeller of the original pump, such that the control valve will operate with the selected new optimal maximum opening of valve operating region.
    • 提供了一种抽水节能估算器,其基于为在工业过程中操作的泵阀系统的控制阀收集的阀开度数据确定控制器的阀操作区域的实际最大值(Δporg,〜50%打开) 泵阀系统的阀门。 用户可以为控制阀选择阀门操作区域的新最大值(Δpnew,〜70%打开)。 然后,估计器根据确定的阀门操作区域的实际最大值和阀门操作区域的选定新的最大值,泵阀系统中的节能潜力(Δpsave)。 通过用新的更小的泵更换原始泵,或者更优选地更换或处理原始泵的叶轮,可以实现潜在的节能,使得控制阀将以选定的新的最佳最大开度 经营区域。