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1. 发明授权

US09589731B2 MEMS variable capacitor with enhanced RF performance 有权
标题翻译： MEMS可变电容器具有增强的RF性能
公开(公告)号：US09589731B2
公开(公告)日：2017-03-07
申请号：US14240654
申请日：2012-09-04
申请人： Robertus Petrus Van Kampen , Anartz Unamuno , Richard L. Knipe , Vikram Joshi , Roberto Gaddi , Toshiyuki Nagata
发明人： Robertus Petrus Van Kampen , Anartz Unamuno , Richard L. Knipe , Vikram Joshi , Roberto Gaddi , Toshiyuki Nagata
IPC分类号： H01G5/16 , H01G5/18 , B81B3/00 , B81C1/00
CPC分类号： H01G5/16 , B81B3/0051 , B81C1/00158 , B81C1/00476 , B81C1/00523 , H01G5/18
摘要： In a MEMS device, the manner in which the membrane lands over the RF electrode can affect device performance. Bumps or stoppers placed over the RF electrode can be used to control the landing of the membrane and thus, the capacitance of the MEMS device. The shape and location of the bumps or stoppers can be tailored to ensure proper landing of the membrane, even when over-voltage is applied. Additionally, bumps or stoppers may be applied on the membrane itself to control the landing of the membrane on the roof or top electrode of the MEMS device.
摘要翻译：在MEMS器件中，膜抵住RF电极的方式可能会影响器件性能。放置在RF电极上的撞击器或塞子可用于控制膜的着陆，从而控制MEMS器件的电容。可以调整凸块或塞子的形状和位置，以确保膜的适当着陆，即使施加过电压。此外，凸块或塞子可以施加在膜本身上以控制膜在MEMS装置的顶部或顶部电极上的着陆。

2. 发明授权

US10224164B2 Merged legs and semi-flexible anchoring having cantilevers for MEMS device 有权
公开(公告)号：US10224164B2
公开(公告)日：2019-03-05
申请号：US14240670
申请日：2012-09-04
申请人： Robertus Petrus Van Kampen , Anartz Unamuno , Richard L. Knipe , Roberto Gaddi , Rashed Mahameed
发明人： Robertus Petrus Van Kampen , Anartz Unamuno , Richard L. Knipe , Roberto Gaddi , Rashed Mahameed
IPC分类号： H01H59/00 , B81B7/04 , B81B3/00
摘要： The present invention generally relates to a MEMS device having a plurality of cantilevers that are coupled together in an anchor region and/or by legs that are coupled in a center area of the cantilever. The legs ensure that each cantilever can move/release from above the RF electrode at the same voltage. The anchor region coupling matches the mechanical stiffness in all sections of the cantilever so that all of the cantilevers move together.

3. 发明授权

US09076808B2 RF MEMS isolation, series and shunt DVC, and small MEMS 有权
标题翻译： RF MEMS隔离，串联和并联DVC，以及小型MEMS
公开(公告)号：US09076808B2
公开(公告)日：2015-07-07
申请号：US14240677
申请日：2012-08-31
申请人： Roberto Gaddi , Richard L. Knipe , Robertus Petrus Van Kampen , Anartz Unamuno
发明人： Roberto Gaddi , Richard L. Knipe , Robertus Petrus Van Kampen , Anartz Unamuno
IPC分类号： H03H9/00 , H01L49/02 , H01G5/18 , H01G5/38 , H01G5/40 , H01H59/00 , H03K17/16 , H03K17/687
CPC分类号： H01L28/60 , B81B3/0086 , B81B2201/016 , B81B2207/015 , H01G5/18 , H01G5/38 , H01G5/40 , H01H59/0009 , H03K17/162 , H03K17/6872 , H03K2217/0009 , H03K2217/0036 , H03K2217/009
摘要： The present invention generally relates to an architecture for isolating an RF MEMS device from a substrate and driving circuit, series and shunt DVC die architectures, and smaller MEMS arrays for high frequency communications. The semiconductor device has one or more cells with a plurality of MEMS devices therein. The MEMS device operates by applying an electrical bias to either a pull-up electrode or a pull-down electrode to move a switching element of the MEMS device between a first position spaced a first distance from an RF electrode and a second position spaced a second distance different than the first distance from the RF electrode. The pull-up and/or pull-off electrode may be coupled to a resistor to isolate the MEMS device from the substrate.
摘要翻译：本发明一般涉及用于将RF MEMS器件与衬底以及驱动电路，串联和并联DVC管芯结构隔离的架构，以及用于高频通信的较小的MEMS阵列。该半导体器件具有其中具有多个MEMS器件的一个或多个单元。 MEMS器件通过将电偏压施加到上拉电极或下拉电极来操作，以将MEMS器件的开关元件移动在与RF电极间隔开第一距离的第一位置和间隔第二位置的第二位置距离与RF电极的第一距离不同。上拉和/或下拉电极可以耦合到电阻器以将MEMS器件与衬底隔离。

4. 发明申请

US20140340814A1 MEMS VARIABLE CAPACITOR WITH ENHANCED RF PERFORMANCE 有权
标题翻译：具有增强射频性能的MEMS可变电容器
公开(公告)号：US20140340814A1
公开(公告)日：2014-11-20
申请号：US14240654
申请日：2012-09-04
申请人： Robertus Petrus Van Kampen , Anartz Unamuno , Richard L. Knipe , Vikram Joshi , Roberto Gaddi , Toshiyuki Nagata
发明人： Robertus Petrus Van Kampen , Anartz Unamuno , Richard L. Knipe , Vikram Joshi , Roberto Gaddi , Toshiyuki Nagata
IPC分类号： H01G5/16 , B81C1/00 , B81B3/00
CPC分类号： H01G5/16 , B81B3/0051 , B81C1/00158 , B81C1/00476 , B81C1/00523 , H01G5/18
摘要： In a MEMS device, the manner in which the membrane lands over the RF electrode can affect device performance. Bumps or stoppers placed over the RF electrode can be used to control the landing of the membrane and thus, the capacitance of the MEMS device. The shape and location of the bumps or stoppers can be tailored to ensure proper landing of the membrane, even when over-voltage is applied. Additionally, bumps or stoppers may be applied on the membrane itself to control the landing of the membrane on the roof or top electrode of the MEMS device.
摘要翻译：在MEMS器件中，膜抵住RF电极的方式可能会影响器件性能。放置在RF电极上的撞击器或塞子可用于控制膜的着陆，从而控制MEMS器件的电容。可以调整凸块或塞子的形状和位置，以确保膜的适当着陆，即使施加过电压。此外，凸块或塞子可以施加在膜本身上以控制膜在MEMS装置的顶部或顶部电极上的着陆。

5. 发明申请

US20140300404A1 RF MEMS ISOLATION, SERIES AND SHUNT DVC, AND SMALL MEMS 有权
标题翻译： RF MEMS隔离，串联和分流DVC以及小型MEMS
公开(公告)号：US20140300404A1
公开(公告)日：2014-10-09
申请号：US14240677
申请日：2012-08-31
申请人： Roberto Gaddi , Richard L. Knipe , Robertus Petrus Van Kampen , Anartz Unamuno
发明人： Roberto Gaddi , Richard L. Knipe , Robertus Petrus Van Kampen , Anartz Unamuno
IPC分类号： H01L49/02 , H03K17/687 , H03K17/16
CPC分类号： H01L28/60 , B81B3/0086 , B81B2201/016 , B81B2207/015 , H01G5/18 , H01G5/38 , H01G5/40 , H01H59/0009 , H03K17/162 , H03K17/6872 , H03K2217/0009 , H03K2217/0036 , H03K2217/009
摘要： The present invention generally relates to an architecture for isolating an RF MEMS device from a substrate and driving circuit, series and shunt DVC die architectures, and smaller MEMS arrays for high frequency communications. The semiconductor device has one or more cells with a plurality of MEMS devices therein. The MEMS device operates by applying an electrical bias to either a pull-up electrode or a pull-down electrode to move a switching element of the MEMS device between a first position spaced a first distance from an RF electrode and a second position spaced a second distance different than the first distance from the RF electrode. The pull-up and/or pull-off electrode may be coupled to a resistor to isolate the MEMS device from the substrate.
摘要翻译：本发明一般涉及用于将RF MEMS器件与衬底以及驱动电路，串联和并联DVC管芯结构隔离的架构，以及用于高频通信的较小的MEMS阵列。该半导体器件具有其中具有多个MEMS器件的一个或多个单元。 MEMS器件通过将电偏压施加到上拉电极或下拉电极来操作，以将MEMS器件的开关元件移动在与RF电极间隔开第一距离的第一位置和间隔第二位置的第二位置距离与RF电极的第一距离不同。上拉和/或下拉电极可以耦合到电阻器以将MEMS器件与衬底隔离。

6. 发明申请

US20120068278A1 PULL UP ELECTRODE AND WAFFLE TYPE MICROSTRUCTURE 有权
标题翻译：拉起电极和WAFFLE型微结构
公开(公告)号：US20120068278A1
公开(公告)日：2012-03-22
申请号：US13237261
申请日：2011-09-20
申请人： RICHARD L. KNIPE , Robertus Petrus van Kampen , Anartz Unamuno , Roberto Gaddi
发明人： RICHARD L. KNIPE , Robertus Petrus van Kampen , Anartz Unamuno , Roberto Gaddi
IPC分类号： H01L29/84 , H01L21/62
CPC分类号： H01H1/0036 , H01H59/0009 , H01H2001/0084
摘要： The present invention generally relates to MEMS devices and methods for their manufacture. The cantilever of the MEMS device may have a waffle-type microstructure. The waffle-type microstructure utilizes the support beams to impart stiffness to the microstructure while permitting the support beam to flex. The waffle-type microstructure permits design of rigid structures in combination with flexible supports. Additionally, compound springs may be used to create very stiff springs to improve hot-switch performance of MEMS devices. To permit the MEMS devices to utilize higher RF voltages, a pull up electrode may be positioned above the cantilever to help pull the cantilever away from the contact electrode.
摘要翻译：本发明一般涉及MEMS器件及其制造方法。 MEMS器件的悬臂可以具有华夫饼型微结构。华夫饼形微结构利用支撑梁来赋予微结构刚度，同时允许支撑梁弯曲。华夫饼型微结构允许将刚性结构与柔性支撑结合在一起。此外，可以使用复合弹簧来产生非常硬的弹簧以改善MEMS装置的热开关性能。为了允许MEMS器件利用更高的RF电压，可以将上拉电极定位在悬臂上方以帮助将悬臂从接触电极拉出。

7. 发明授权

US4492264A Centrifugal casting device 失效
标题翻译：离心铸造装置
公开(公告)号：US4492264A
公开(公告)日：1985-01-08
申请号：US391423
申请日：1982-06-23
申请人： Roberto Gaddi
发明人： Roberto Gaddi
IPC分类号： B22D13/04 , B22D15/00 , B60B3/06 , B22D13/10
CPC分类号： B60B3/06 , B22D13/04
摘要： The chill mold is mounted on a support which is rotatable about the vertical axis of its casting cavity and is composed of a lower element, an upper element which has a pouring opening, and four peripheral elements arranged in two opposing pairs. The lower element occupies a casting position on the support and coaxial therewith, the upper element is movable between a casting position in which it overlies the lower element coaxially, and a shakeout position in which it does not interfere with the upward removal of the piece from the mold, and the peripheral elements are displaceable radially on the support to allow their movement from a casting position, in which together they surround the upper and lower element, to a shakeout position in which they are further removed from the axis of rotation. The elements of the chill mold are provided with locking keys which are mutually engageable due to the movement of a first pair of the opposed peripheral elements towards their respective casting positions when the lower and upper elements and the opposed peripheral elements of the other pair are substantially in their respective casting position. Keys are also provided for locking the peripheral elements of the first pair in their respective casting positions.
摘要翻译：冷却模具安装在可围绕其铸造腔的垂直轴线旋转的支撑件上，并且由下部元件，具有倾倒开口的上部元件和以相对对置布置的四个周向元件构成。下部元件占据支撑件上的铸造位置并且与其同轴，上部元件可以在其同轴地覆盖下部元件的铸造位置和在其之间移动，在该摆动位置中，该元件不会干扰该零件的向上移动模具和周边元件在支撑件上径向移位，以允许它们从铸造位置移动，在铸造位置中，它们一起围绕上部和下部元件移动到摇摆位置，在该摆动位置中它们进一步从旋转轴线移除。冷却模具的元件设置有锁定键，当另一对的下部元件和上部元件和相对的外围元件基本相同时，由于第一对相对的周向元件朝向它们各自的铸造位置移动，锁定键可相互接合在各自的铸造位置。还提供了用于在其各自的铸造位置中锁定第一对的周边元件的键。

8. 发明申请

US20140238828A1 MERGED LEGS AND SEMI-FLEXIBLE ANCHORING FOR MEMS DEVICE 审中-公开
标题翻译：用于MEMS器件的合并电路和半灵活安装
公开(公告)号：US20140238828A1
公开(公告)日：2014-08-28
申请号：US14240670
申请日：2012-09-04
申请人： Robertus Petrus Van Kampen , Anartz Unamuno , Richard L. Knipe , Roberto Gaddi , Rashed Mahameed
发明人： Robertus Petrus Van Kampen , Anartz Unamuno , Richard L. Knipe , Roberto Gaddi , Rashed Mahameed
IPC分类号： H01H59/00 , B81B3/00
CPC分类号： H01H59/0009 , B81B3/0097 , B81B7/04 , B81B2201/018 , B81B2203/0109 , B81B2203/0118 , B81B2203/0172 , B81B2203/0307
摘要： The present invention generally relates to a MEMS device having a plurality of cantilevers that are coupled together in an anchor region and/or by legs that are coupled in a center area of the cantilever. The legs ensure that each cantilever can move/release from above the RF electrode at the same voltage. The anchor region coupling matches the mechanical stiffness in all sections of the cantilever so that all of the cantilevers move together.
摘要翻译：本发明一般涉及具有多个悬臂的MEMS装置，所述多个悬臂在锚定区域中耦合在一起，和/或通过腿连接在悬臂的中心区域中。腿部确保每个悬臂可以在相同电压下从RF电极上方移动/释放。锚定区域联接器匹配悬臂的所有部分中的机械刚度，使得所有悬臂移动在一起。

9. 发明授权

US4353406A Metal casting machine 失效
标题翻译：金属铸造机
公开(公告)号：US4353406A
公开(公告)日：1982-10-12
申请号：US184444
申请日：1980-09-05
申请人： Roberto Gaddi
发明人： Roberto Gaddi
IPC分类号： B22D39/02 , B22D41/06
CPC分类号： B22D39/02
摘要： The machine has a casting ladle mounted rotatably on a movable support member which conveys the ladle between a filling station and at least one casting station. The movable member carries a motorized rotary disc cam cooperating with a cam-follower which controls rotations of the ladle. The cam profile includes a larger sector of increasing radius to cause a pouring rotation of the ladle at the casting station and a smaller sector of decreasing radius to cause a return rotation of the ladle to the upright position after casting. The cam has, between the two sections, a profile portion which is re-entrant towards the axis of rotation of the cam and in which the cam-follower is engageable selectively to cause a sharp rotation of the ladle from the upright position to an inverted position, so as to release the skin or crust of solidified metal from the inside of the ladle when the latter is at a cleaning station. Control means are provided for avoiding engagement of the cam-follower in the re-entrant portion at least when the ladle is in the casting station, and for disengaging the cam-follower from the re-entrant portion after the inversion of the ladle.
摘要翻译：机器具有可旋转地安装在可移动的支撑构件上的浇铸钢包，其在加油站和至少一个铸造工位之间输送钢包。可移动构件携带与控制钢包的旋转的凸轮从动件配合的电动旋转盘凸轮。凸轮轮廓包括较大的半径增大的部分，以引起钢包在铸造站处的倾倒旋转和较小的半径范围，从而在铸造之后使钢包返回到直立位置。所述凸轮在所述两个部分之间具有轮廓部分，所述轮廓部分朝向所述凸轮的旋转轴线重新进入，并且所述凸轮从动件可选择性地接合以引起所述钢包从所述直立位置到所述直立位置的急剧旋转位置，以便当钢瓶在清洁站时从钢包的内部释放固化的金属的皮肤或外壳。控制装置被设置用于至少当钢包在铸造工位中时，避免凸轮从动件在重入部分中的接合，并且用于在钢包倒出之后使凸轮从动件从再入口部分脱离。

10. 发明授权

US09373447B2 Routing of MEMS variable capacitors for RF applications 有权
标题翻译：用于RF应用的MEMS可变电容器的布线
公开(公告)号：US09373447B2
公开(公告)日：2016-06-21
申请号：US14239115
申请日：2012-08-17
申请人： Roberto Gaddi , Robertus Petrus Van Kampen , Richard L. Knipe , Anartz Unamuno
发明人： Roberto Gaddi , Robertus Petrus Van Kampen , Richard L. Knipe , Anartz Unamuno
IPC分类号： H01G5/16 , H01G5/38 , H01H59/00 , H01G7/00
CPC分类号： H01G5/16 , H01G5/38 , H01G7/00 , H01H59/0009 , Y10T29/43
摘要： Utilizing a variable capacitor for RF and microwave applications provides for multiple levels of intra-cavity routing that advantageously reduce capacitive coupling. The variable capacitor includes a bond pad that has a plurality of cells electrically coupled thereto. Each of the plurality of cells has a plurality of MEMS devices therein. The MEMS devices share a common RF electrode, one or more ground electrodes and one or more control electrodes. The RF electrode, ground electrodes and control electrodes are all arranged parallel to each other within the cells. The RF electrode is electrically connected to the one or more bond pads using a different level of electrical routing metal.
摘要翻译：利用用于RF和微波应用的可变电容器可提供有利于减少电容耦合的多级腔内路由。可变电容器包括具有与其电耦合的多个单元的接合焊盘。多个单元中的每一个在其中具有多个MEMS器件。 MEMS器件共享公共RF电极，一个或多个接地电极和一个或多个控制电极。 RF电极，接地电极和控制电极都在电池内彼此平行布置。 RF电极使用不同级别的电路由金属电连接到一个或多个接合焊盘。

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