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1. 发明申请

US20140346368A1 GUN CONFIGURED TO GENERATE CHARGED PARTICLES 有权
标题翻译： GUN配置生成充电颗粒
公开(公告)号：US20140346368A1
公开(公告)日：2014-11-27
申请号：US14284128
申请日：2014-05-21
申请人： NATIONAL UNIVERSITY OF SINGAPORE
发明人： Anjam KHURSHEED
IPC分类号： H01J3/18 , H01J3/20
CPC分类号： H01J3/18 , H01J3/021 , H01J3/027 , H01J3/20 , H01J37/063 , H01J37/065 , H01J37/26 , H01J2237/06333 , H01J2237/0635 , H01J2237/1534
摘要： A gun configured to generate charged particles, comprising a ring-cathode (200) electrically configured to generate a charged particle beam; a lens arranged to focus the charged particle beam on a specimen; and at least one correction focusing electrode (1406) arranged to generate at least one electrostatic/magnetic field to further divergently/convergently focus the charged particle beam for correcting in-plane geometric aberrations associated with the lens, the focusing being based on the in-plane geometric aberrations associated with the lens. A related method is also disclosed.
摘要翻译：一种配置成产生带电粒子的枪，包括电气配置以产生带电粒子束的环形阴极（200）; 透镜，布置成将带电粒子束聚焦在样本上; 以及至少一个校正聚焦电极（1406），其布置成产生至少一个静电/磁场，以进一步发散/收敛地聚焦带电粒子束，用于校正与透镜相关联的面内几何像差，与透镜相关的平面几何像差。还公开了相关方法。

2. 发明授权

US08835867B2 Multi-axis magnetic lens for focusing a plurality of charged particle beams 有权
标题翻译：用于聚焦多个带电粒子束的多轴磁性透镜
公开(公告)号：US08835867B2
公开(公告)日：2014-09-16
申请号：US13741654
申请日：2013-01-15
申请人： Hermes-Microvision, Inc.
发明人： Zhongwei Chen , Weiming Ren , Xuedong Liu
IPC分类号： H01J3/14 , H01J3/26 , H01J49/42
CPC分类号： H01J3/22 , B82Y10/00 , B82Y40/00 , H01F7/0205 , H01J3/20 , H01J37/14 , H01J37/3177 , H01J2237/1415 , H05K9/00
摘要： A cellular-type PD unit is proposed and a plurality of the cellular-type PD units is used in pairs in a multi-axis magnetic lens for focusing a plurality of charged beams. First type PD units or second type PD units (called as hybrid PD unit as well) can be applied to cellular-type PD units to flexibly construct sub-lenses. Furthermore, magnetic shielding plates with a plurality of through openings can be placed above and/or below the multi-axis magnetic lens to make magnetic flux leaking out of the multi-axis magnetic lens vanish away rapidly outside the magnetic shielding plates.
摘要翻译：提出了一种蜂窝型PD单元，并且多个蜂窝型PD单元成对地用于多轴磁性透镜中以聚焦多个带电波束。可以将第一类PD单元或第二类PD单元（也称为混合PD单元）应用于蜂窝型PD单元以灵活地构建子透镜。此外，具有多个通孔的磁屏蔽板可以放置在多轴磁性透镜的上方和/或下方，以使从多轴磁性透镜泄漏的磁通在磁屏蔽板之外快速消失。

3. 发明申请

US20080191144A1 NON-AXISYMMETRIC CHARGED-PARTICLE BEAM SYSTEM 失效
标题翻译：非轴对称粒子束系统
公开(公告)号：US20080191144A1
公开(公告)日：2008-08-14
申请号：US11968833
申请日：2008-01-03
申请人： Ronak J. Bhatt , Chiping Chen , Jing Zhou
发明人： Ronak J. Bhatt , Chiping Chen , Jing Zhou
IPC分类号： H01J1/50 , H05H7/00
CPC分类号： H01J27/02 , G21K1/093 , H01J3/02 , H01J3/12 , H01J3/20 , H01J29/64
摘要： The charged-particle beam system includes a non-axisymmetric diode forms a non-axisymmetric beam having an elliptic cross-section. A focusing element utilizes a magnetic field for focusing and transporting the non-axisymmetric beam, wherein the non-axisymmetric beam is approximately matched with the channel of the focusing element.
摘要翻译：带电粒子束系统包括非轴对称二极管形成具有椭圆截面的非轴对称束。聚焦元件利用磁场来聚焦和传送非轴对称光束，其中非轴对称光束与聚焦元件的通道近似匹配。

4. 发明授权

US07381967B2 Non-axisymmetric charged-particle beam system 失效
标题翻译：非轴对称带电粒子束系统
公开(公告)号：US07381967B2
公开(公告)日：2008-06-03
申请号：US11145804
申请日：2005-06-06
申请人： Ronak J. Bhatt , Chiping Chen , Jing Zhou
发明人： Ronak J. Bhatt , Chiping Chen , Jing Zhou
IPC分类号： B01D59/44 , H01J49/00
CPC分类号： H01J27/02 , G21K1/093 , H01J3/02 , H01J3/12 , H01J3/20 , H01J29/64
摘要： The charged-particle beam system includes a non-axisymmetric diode forms a non-axisymmetric beam having an elliptic cross-section. A focusing element utilizes a magnetic field for focusing and transporting the non-axisymmetric beam, wherein the non-axisymmetric beam is approximately matched with the channel of the focusing element.
摘要翻译：带电粒子束系统包括非轴对称二极管形成具有椭圆截面的非轴对称束。聚焦元件利用磁场来聚焦和传送非轴对称光束，其中非轴对称光束与聚焦元件的通道近似匹配。

5. 发明授权

US07005789B2 Method and apparatus for magnetic focusing of off-axis electron beam 有权
标题翻译：离轴电子束磁聚焦的方法和装置
公开(公告)号：US07005789B2
公开(公告)日：2006-02-28
申请号：US10996180
申请日：2004-11-22
申请人： Mark J. Cattelino , Fred I. Friedlander
发明人： Mark J. Cattelino , Fred I. Friedlander
IPC分类号： H01J29/70
CPC分类号： H01J23/0876 , H01J3/20 , H01J23/087
摘要： Axially symmetric magnetic fields are provided about the longitudinal axis of each beam of a multi-beam electron beam device. The magnetic field symmetry is independent of beam voltage, beam current and applied magnetic field strength. A flux equalizer assembly is disposed between the cathodes and the anodes and near the cathodes of a multi-beam electron beam device. The assembly includes a ferromagnetic flux plate completely contained within the magnetic focusing circuit of the device. The flux plate includes apertures for each beam of the multi-beam device. A flux equalization gap or gaps are disposed in the flux plate to provide a perturbation in the magnetic field in the flux plate which counters the asymmetry induced by the off-axis position of the beam. The gaps may be implemented in a number of ways all of which have the effect of producing a locally continuously varying reluctance that locally counters the magnetic field asymmetry. The flux equalizer assembly prevents or substantially reduces beam twist and maintains all of the electron beams of the device as linear beams.
摘要翻译：围绕多光束电子束装置的每个光束的纵向轴线提供轴向对称的磁场。磁场对称性与束电压，束电流和施加的磁场强度无关。通量均衡器组件设置在阴极和阳极之间以及多束电子束装置的阴极附近。组件包括完全包含在装置的磁聚焦电路内的铁磁通量板。磁通板包括用于多光束装置的每个光束的孔。磁通平衡间隙或间隙设置在磁通板中，以在磁通板中的磁场中产生扰动，其反映由波束的离轴位置引起的不对称性。间隙可以以多种方式实现，其中所有这些都具有产生局部连续变化的磁阻的作用，其局部地反映磁场不对称性。通量均衡器组件防止或基本上减少光束扭曲，并将器件的所有电子束保持为线性光束。

6. 发明申请

US20190057833A1 Charged Particle Source 审中-公开
公开(公告)号：US20190057833A1
公开(公告)日：2019-02-21
申请号：US16042871
申请日：2018-07-23
申请人： Hermes Microvision, Inc.
发明人： Shuai LI
IPC分类号： H01J37/143 , H01J37/28 , H01J37/09 , H01J3/20 , H01J37/065 , H01J37/14 , H01J37/063
CPC分类号： H01J37/143 , H01J3/20 , H01J37/063 , H01J37/065 , H01J37/09 , H01J37/14 , H01J37/28 , H01J2237/0453 , H01J2237/063 , H01J2237/06308 , H01J2237/06375 , H01J2237/0653 , H01J2237/083 , H01J2237/141 , H01J2237/1415 , H01J2237/2806 , H01J2237/2817
摘要： This invention provides a charged particle source, which comprises an emitter and means fo generating a magnetic field distribution. The magnetic field distribution is minimum, about zero, or preferred zero at the tip of the emitter, and along the optical axis is maximum away from the tip immediately. In a preferred embodiment, the magnetic field distribution is provided by dual magnetic lens which provides an anti-symmetric magnetic field at the tip, such that magnetic field at the tip is zero.

7. 发明授权

US09812283B2 Charged particle source 有权
公开(公告)号：US09812283B2
公开(公告)日：2017-11-07
申请号：US15404440
申请日：2017-01-12
申请人： Hermes Microvision Inc.
发明人： Shuai Li
IPC分类号： H01J37/143 , H01J37/28 , H01J3/20 , H01J37/09
CPC分类号： H01J37/143 , H01J3/20 , H01J37/063 , H01J37/065 , H01J37/09 , H01J37/14 , H01J37/28 , H01J2237/0453 , H01J2237/063 , H01J2237/06308 , H01J2237/06375 , H01J2237/0653 , H01J2237/083 , H01J2237/141 , H01J2237/1415 , H01J2237/2806 , H01J2237/2817
摘要： This invention provides a charged particle source, which comprises an emitter and means of generating a magnetic field distribution. The magnetic field distribution is minimum, about zero, or preferred zero at the tip of the emitter, and along the optical axis is maximum away from the tip immediately. In a preferred embodiment, the magnetic field distribution is provided by dual magnetic lens which provides an anti-symmetric magnetic field at the tip, such that magnetic field at the tip is zero.

8. 发明授权

US09093243B2 Gun configured to generate charged particles 有权
标题翻译：枪被配置成产生带电粒子
公开(公告)号：US09093243B2
公开(公告)日：2015-07-28
申请号：US14284128
申请日：2014-05-21
申请人： NATIONAL UNIVERSITY OF SINGAPORE
发明人： Anjam Khursheed
IPC分类号： H01J37/26 , H01J3/18 , H01J3/20 , H01J3/02
CPC分类号： H01J3/18 , H01J3/021 , H01J3/027 , H01J3/20 , H01J37/063 , H01J37/065 , H01J37/26 , H01J2237/06333 , H01J2237/0635 , H01J2237/1534
摘要： A gun configured to generate charged particles, comprising a ring-cathode (200) electrically configured to generate a charged particle beam; a lens arranged to focus the charged particle beam on a specimen; and at least one correction focusing electrode (1406) arranged to generate at least one electrostatic/magnetic field to further divergently/convergently focus the charged particle beam for correcting in-plane geometric aberrations associated with the lens, the focusing being based on the in-plane geometric aberrations associated with the lens. A related method is also disclosed.
摘要翻译：一种配置成产生带电粒子的枪，包括电气配置以产生带电粒子束的环形阴极（200）; 透镜，布置成将带电粒子束聚焦在样本上; 以及至少一个校正聚焦电极（1406），其布置成产生至少一个静电/磁场，以进一步发散/收敛地聚焦带电粒子束，用于校正与透镜相关联的面内几何像差，与透镜相关的平面几何像差。还公开了相关方法。

9. 发明申请

US20130181138A1 Multi-axis Magnetic Lens for Focusing a Plurality of Charged Particle Beams 有权
标题翻译：用于聚焦多个带电粒子束的多轴磁镜
公开(公告)号：US20130181138A1
公开(公告)日：2013-07-18
申请号：US13741654
申请日：2013-01-15
申请人： HERMES-MICROVISION, INC.
发明人： Zhongwei Chen , Weiming Ren , Xuedong Liu
IPC分类号： H01J3/22 , H01F7/02 , H05K9/00 , H01J3/20
CPC分类号： H01J3/22 , B82Y10/00 , B82Y40/00 , H01F7/0205 , H01J3/20 , H01J37/14 , H01J37/3177 , H01J2237/1415 , H05K9/00
摘要： A cellular-type PD unit is proposed and a plurality of the cellular-type PD units is used in pairs in a multi-axis magnetic lens for focusing a plurality of charged beams. First type PD units or second type PD units (called as hybrid PD unit as well) can be applied to cellular-type PD units to flexibly construct sub-lenses. Furthermore, magnetic shielding plates with a plurality of through openings can be placed above and/or below the multi-axis magnetic lens to make magnetic flux leaking out of the multi-axis magnetic lens vanish away rapidly outside the magnetic shielding plates.
摘要翻译：提出了一种蜂窝型PD单元，并且多个蜂窝型PD单元成对地用于多轴磁性透镜中以聚焦多个带电波束。可以将第一类PD单元或第二类PD单元（也称为混合PD单元）应用于蜂窝型PD单元以灵活地构建子透镜。此外，具有多个通孔的磁屏蔽板可以放置在多轴磁性透镜的上方和/或下方，以使从多轴磁性透镜泄漏的磁通在磁屏蔽板之外快速消失。

10. 发明申请

US20050167608A1 Method and apparatus for magnetic focusing of off-axis electron beam 有权
公开(公告)号：US20050167608A1
公开(公告)日：2005-08-04
申请号：US10996180
申请日：2004-11-22
申请人： Mark Cattelino , Fred Friedlander
发明人： Mark Cattelino , Fred Friedlander
IPC分类号： H01J23/087 , G01K1/08 , H01J3/14 , H01J3/20 , H01J25/10 , H01J29/00 , H01J29/46 , H01J29/70
CPC分类号： H01J23/0876 , H01J3/20 , H01J23/087
摘要： Axially symmetric magnetic fields are provided about the longitudinal axis of each beam of a multi-beam electron beam device. The magnetic field symmetry is independent of beam voltage, beam current and applied magnetic field strength. A flux equalizer assembly is disposed between the cathodes and the anodes and near the cathodes of a multi-beam electron beam device. The assembly includes a ferromagnetic flux plate completely contained within the magnetic focusing circuit of the device. The flux plate includes apertures for each beam of the multi-beam device. A flux equalization gap or gaps are disposed in the flux plate to provide a perturbation in the magnetic field in the flux plate which counters the asymmetry induced by the off-axis position of the beam. The gaps may be implemented in a number of ways all of which have the effect of producing a locally continuously varying reluctance that locally counters the magnetic field asymmetry. The flux equalizer assembly prevents or substantially reduces beam twist and maintains all of the electron beams of the device as linear beams.

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