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    • 6. 发明授权
    • High voltage high package pressure semiconductor package
    • 高压高封装压力半导体封装
    • US08237171B2
    • 2012-08-07
    • US12658576
    • 2010-02-09
    • Tracy Autry
    • Tracy Autry
    • H01L29/15
    • H01L23/20H01L23/051H01L23/10H01L2924/0002H01L2924/00
    • A hermetically sealed integrated circuit package that includes a cavity housing a semiconductor die, whereby the cavity is pressurized during assembly and when formed. The invention prevents the stress on a package created when the package is subject to high temperatures at atmospheric pressure and then cooled from reducing the performance of the die at high voltages. By packaging a die at a high pressure, such as up to 50 PSIG, in an atmosphere with an inert gas, and providing a large pressure in the completed package, the dies are significantly less likely to arc at higher voltages, allowing the realization of single die packages operable up to at least 1200 volts. Moreover, the present invention is configured to employ brazed elements compatible with Silicon Carbide dies which can be processed at higher temperatures.
    • 一种密封的集成电路封装,其包括容纳半导体管芯的腔体,由此在组装期间和形成时腔体被加压。 本发明防止了当封装在大气压下经受高温然后在高电压下降低管芯的性能而被冷却时产生的封装上的应力。 通过在具有惰性气体的气氛中在高压(例如高达50PSIG)下封装模具,并且在完成的封装中提供大的压力,模具在较高的电压下显着地不太可能发生电弧,从而允许实现 单片封装最多可操作至少1200伏。 此外,本发明被配置为使用与可在较高温度下处理的碳化硅模具相容的钎焊元件。
    • 8. 发明授权
    • Packaging of electronic chips with air-bridge structures
    • 用气桥结构包装电子芯片
    • US07335965B2
    • 2008-02-26
    • US10931510
    • 2004-09-01
    • Paul A. Farrar
    • Paul A. Farrar
    • H01L29/00H01L23/48
    • H01L23/5329H01L21/7682H01L23/20H01L23/3677H01L23/4821H01L23/5222H01L23/66H01L2924/0002H01L2924/1433Y10S438/977H01L2924/00
    • A circuit assembly for fabricating an air bridge structure and a method of fabricating an integrated circuit package capable of supporting a circuit assembly including an air bridge structure. A circuit assembly comprises an electronic chip and a conductive structure embedded in a plurality of materials having a plurality of vaporization temperatures. The plurality of materials is formed on the electronic chip and the conductive structure is coupled to the electronic chip. To fabricate the circuit assembly, a support structure, including interstices, is formed on an electronic chip. The interstices of the support structure are filled with a material having a vaporization temperature that is less than the vaporization temperature of the support structure. Conductive structures are embedded in the support structure and the material, and a connective structure is mounted on the support structure. Finally, the material is removed from the interstices by heating the circuit assembly.
    • 一种用于制造空气桥结构的电路组件和制造能够支撑包括空气桥结构的电路组件的集成电路封装的方法。 电路组件包括电子芯片和嵌入多个具有多个蒸发温度的材料中的导电结构。 多个材料形成在电子芯片上,并且导电结构耦合到电子芯片。 为了制造电路组件,在电子芯片上形成包括间隙的支撑结构。 支撑结构的间隙填充有气化温度小于支撑结构的汽化温度的材料。 导电结构嵌入在支撑结构和材料中,并且连接结构安装在支撑结构上。 最后,通过加热电路组件从空隙中移除材料。