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    • 10. 发明申请
    • RADIATION IMAGE SENSOR
    • 辐射图像传感器
    • US20160315108A1
    • 2016-10-27
    • US15102376
    • 2014-11-28
    • HAMAMATSU PHOTONICS K.K.
    • Kazuki FUJITAMinoru ICHIKAWAHarumichi MORI
    • H01L27/148H01L27/146
    • H01L27/148H01L27/14634H01L27/14636
    • A radiation image sensor includes a charge generation section and, a circuit board accumulating and transferring charge generated in the charge generation section. The circuit board includes a semiconductor substrate, a capacitive section accumulating the charge generated in the charge generation section, and a MOS transistor in the semiconductor substrate. The MOS transistor includes one end connected to the capacitive section and another end connected to a wire transferring the charge. The capacitive section includes a partial region of the semiconductor substrate, a conductor layer disposed on the partial region and electrically connected to the charge generation section, and an insulating layer interposed between the partial region and the conductor layer.
    • 辐射图像传感器包括电荷产生部分和积累并传送在电荷产生部分中产生的电荷的电路板。 电路板包括半导体衬底,积聚电荷产生部分中产生的电荷的电容部分和半导体衬底中的MOS晶体管。 MOS晶体管包括连接到电容部分的一端和连接到传送电荷的电线的另一端。 电容部分包括半导体衬底的部分区域,设置在部分区域上并电连接到电荷产生部分的导体层,以及插入在部分区域和导体层之间的绝缘层。