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1. 发明授权

US07533582B2 Force detector and acceleration detector and method of manufacturing the same 失效
公开(公告)号：US07533582B2
公开(公告)日：2009-05-19
申请号：US12075916
申请日：2008-03-14
申请人： Kazuhiro Okada
发明人： Kazuhiro Okada
IPC分类号： G01L5/04
CPC分类号： G01P15/18 , G01L1/144 , G01L5/165 , G01L5/167 , G01P15/0802 , G01P15/0922 , G01P15/105 , G01P15/125 , G01P2015/084 , Y10S73/04 , Y10T29/43 , Y10T29/49005 , Y10T29/49007
摘要： An electrode layer is formed on the upper surface of a first substrate, and a processing for partially removing the substrate is carried out in order to allow the substrate to have flexibility. To the lower surface of the first substrate, a second substrate is connected. Then, by cutting the second substrate, a working body and a pedestal are formed. On the other hand, a groove is formed on a third substrate. An electrode layer is formed on the bottom surface of the groove. The third substrate is connected to the first substrate so that both the electrodes face to each other with a predetermined spacing therebetween. Finally, the first, second and third substrates are cut off every respective unit regions to form independent sensors, respectively. When an acceleration is exerted on the working body, the first substrate bends. As a result, the distance between both the electrodes changes. Thus, an acceleration exerted is detected by changes in an electrostatic capacitance between both the electrodes.

2. 发明授权

US07458254B2 Apparatus for evaluating piezoelectric film, and method for evaluating piezoelectric film 有权
标题翻译：用于评价压电膜的装置，以及用于评价压电膜的方法
公开(公告)号：US07458254B2
公开(公告)日：2008-12-02
申请号：US11512328
申请日：2006-08-30
申请人： Toshihisa Anazawa , Mineharu Tsukada
发明人： Toshihisa Anazawa , Mineharu Tsukada
IPC分类号： G01B21/30 , G01L25/00
CPC分类号： G01B7/06 , G01Q70/06 , Y10S73/04
摘要： There are provided an apparatus for evaluating a piezoelectric film, which contains: a detection unit containing a pair of probes, each probe containing a cantilever and a probe tip; and an evaluation unit, wherein the detection unit is configured to respectively place the probe tips on both surfaces of a sample comprising a piezoelectric film so as to detect a displacement magnitude of the pair of probes, and the evaluation unit is configured to evaluate either or both a deformation and a displacement of the piezoelectric film based upon the detected displacement magnitude of the pair of probes, and a method for evaluating a piezoelectric film by using the apparatus for evaluating a piezoelectric film.
摘要翻译：提供了一种用于评估压电膜的装置，其包括：包含一对探针的检测单元，每个探针包含悬臂和探针末端; 以及评估单元，其中所述检测单元被配置为分别将探针尖端放置在包括压电膜的样本的两个表面上，以便检测所述一对探针的位移幅度，并且所述评估单元被配置为评估任一个或基于检测到的一对探针的位移量，压电膜的变形和位移，以及通过使用压电膜评估装置评价压电膜的方法。

3. 发明申请

US20070227235A1 Apparatus for evaluating piezoelectric film, and method for evaluating piezoelectric film 有权
标题翻译：用于评价压电膜的装置，以及用于评价压电膜的方法
公开(公告)号：US20070227235A1
公开(公告)日：2007-10-04
申请号：US11512328
申请日：2006-08-30
申请人： Toshihisa Anazawa , Mineharu Tsukada
发明人： Toshihisa Anazawa , Mineharu Tsukada
IPC分类号： G01B5/28
CPC分类号： G01B7/06 , G01Q70/06 , Y10S73/04
摘要： There are provided an apparatus for evaluating a piezoelectric film, which contains: a detection unit containing a pair of probes, each probe containing a cantilever and a probe tip; and an evaluation unit, wherein the detection unit is configured to respectively place the probe tips on both surfaces of a sample comprising a piezoelectric film so as to detect a displacement magnitude of the pair of probes, and the evaluation unit is configured to evaluate either or both a deformation and a displacement of the piezoelectric film based upon the detected displacement magnitude of the pair of probes, and a method for evaluating a piezoelectric film by using the apparatus for evaluating a piezoelectric film.
摘要翻译：提供了一种用于评估压电膜的装置，其包括：包含一对探针的检测单元，每个探针包含悬臂和探针末端; 以及评估单元，其中所述检测单元被配置为分别将探针尖端放置在包括压电膜的样本的两个表面上，以便检测所述一对探针的位移幅度，并且所述评估单元被配置为评估任一个或基于检测到的一对探针的位移量，压电膜的变形和位移，以及通过使用压电膜评估装置评价压电膜的方法。

4. 发明申请

US20050276721A1 Method and apparatus for controlling the concentration of a sterilant chemical in a fluid 审中-公开
标题翻译：用于控制灭菌剂化学品在流体中的浓度的方法和装置
公开(公告)号：US20050276721A1
公开(公告)日：2005-12-15
申请号：US10853084
申请日：2004-05-25
申请人： Michael Centanni
发明人： Michael Centanni
IPC分类号： A61L2/00 , A61L2/20 , A61L2/24 , A61L9/00 , A62B7/08 , B01D11/04 , G05B1/00 , G05D11/13
CPC分类号： A61L2/208 , A61L2/202 , A61L2/206 , A61L2/24 , A61L2202/14 , G05D11/132 , Y10S73/02 , Y10S73/04 , Y10S588/90
摘要： A sterilization system that includes a sensor for determining the concentration of a liquid sterilant in a sterilant fluid. The sterilant fluid is comprised of a blend of sterilant fluids from a plurality of sterilant supplies. The concentration of the liquid sterilant differs in each of the sterilant supplies. The sensor allows a controllable concentration of liquid sterilant to be supplied to a vaporizer.
摘要翻译：一种消毒系统，包括用于确定灭菌液中液体灭菌剂浓度的传感器。消毒液由来自多个消毒剂的灭菌剂流体的混合物组成。液体灭菌剂的浓度在每种消毒剂中不同。传感器允许液体灭菌剂的可控浓度被提供给蒸发器。

5. 发明授权

US06237417B1 Apparatus for measuring impedance of a resonant structure 失效
标题翻译：用于测量谐振结构的阻抗的装置
公开(公告)号：US06237417B1
公开(公告)日：2001-05-29
申请号：US09297986
申请日：1999-07-29
申请人： Anthony Lonsdale , Bryan Lonsdale
发明人： Anthony Lonsdale , Bryan Lonsdale
IPC分类号： G01H1300
CPC分类号： G01R27/26 , Y10S73/04
摘要： Apparatus for measuring the value of a physical quantity which affects the impedance of an electrically resonant structure, the apparatus comprising an electrically resonant structure, an RF electrical energy source, a bidirectional RF transmission line connecting the source to the structure, the directional coupler detecting the voltage or phase of a reflected signal returned from the resonant structure characterised in that the resonant structure is substantially non energy radiating and, at a given frequency of the source, has an impedance which varies continuously as a function of the value of the physical quantity. Typically the electrically resonant structure is at least partially composed of piezoelectric material.
摘要翻译：用于测量影响电谐振结构的阻抗的物理量的值的装置，该装置包括电谐振结构，RF电能源，将源连接到结构的双向RF传输线，定向耦合器检测从谐振结构返回的反射信号的电压或相位，其特征在于谐振结构基本上不是能量辐射的，并且在源的给定频率处具有作为物理量的值的函数连续变化的阻抗。通常，电谐振结构至少部分地由压电材料构成。

6. 发明授权

US5682000A Sensor using piezoelectric elements 失效
标题翻译：传感器采用压电元件
公开(公告)号：US5682000A
公开(公告)日：1997-10-28
申请号：US701964
申请日：1996-08-23
申请人： Kazuhiro Okada
发明人： Kazuhiro Okada
IPC分类号： G01L1/16 , G01L5/16 , G01P15/09 , G01P15/18 , G01R33/02 , G01L3/00
CPC分类号： G01L5/167 , G01P2015/084 , Y10S73/04
摘要： The periphery of a disk having flexibility is fixed to a sensor casing, and a force applied to the central portion is detected. A doughnut disk-shaped piezoelectric element is positioned on the upper surface of the disk, and upper electrode layers indicated by patterns of D1 to D6 are formed on the upper surface of the piezoelectric element. Further, lower electrode layers similarly having pattern of D1 to D6 are formed on the lower surface of the piezoelectric element, and the lower surface of the lower electrode layer is fixed on the upper surface of the disk. Six detection elements D1 to D6 are formed each of which is constituted by a of upper and lower electrode layers and a portion of piezoelectric element put therebetween. Thus, force components exerted at an origin defined in the central portion of the disk in respective axes directions of X, Y, Z can be detected based on charges produced in detection elements D1, D2, detection elements D3, D4, and detection elements D5, D6, respectively.
摘要翻译：具有柔性的盘的周边固定到传感器外壳，并且检测施加到中心部分的力。圆环形压电元件位于盘的上表面上，在压电元件的上表面上形成由D1至D6的图案表示的上电极层。此外，在压电元件的下表面上形成类似地具有D1至D6图案的下电极层，并且下电极层的下表面固定在盘的上表面上。形成六个检测元件D1至D6，每个检测元件由上下电极层和放置在其间的压电元件的一部分构成。因此，可以基于在检测元件D1，D2，检测元件D3，D4和检测元件D5中产生的电荷来检测施加在盘的中心部分中的原点在X，Y，Z的各个轴线方向上的力分量，D6。

7. 发明授权

US5674742A Microfabricated reactor 失效
标题翻译：微型反应堆
公开(公告)号：US5674742A
公开(公告)日：1997-10-07
申请号：US483448
申请日：1995-06-06
申请人： M. Allen Northrup , Richard M. White
发明人： M. Allen Northrup , Richard M. White
IPC分类号： C12N15/09 , B01J19/00 , B01L3/00 , B01L7/00 , B01L9/00 , C12M1/00 , C12M1/34 , C12M1/36 , C12Q1/68 , G01N1/00 , G01N29/02 , G01N35/00 , G01N37/00 , C12M1/38
CPC分类号： B01L7/52 , B01F11/0266 , B01F13/0059 , B01J19/0093 , B01L3/502707 , B01L3/50273 , B01L7/525 , G01N29/022 , G01N35/00 , B01J2219/00828 , B01J2219/00831 , B01J2219/00873 , B01J2219/00889 , B01J2219/00891 , B01J2219/0093 , B01J2219/00932 , B01J2219/00934 , B01J2219/00952 , B01L2300/1827 , B01L2400/0406 , B01L2400/0436 , B01L9/527 , G01N2035/00237 , G01N2035/00554 , G01N2291/02466 , G01N2291/0256 , G01N2291/0421 , G01N35/1079 , Y10S73/04
摘要： An integrated microfabricated instrument for manipulation, reaction and detection of microliter to picoliter samples. The instrument is suited for biochemical reactions, particularly DNA-based reactions such as the polymerase chain reaction, that require thermal cycling since the inherently small size of the instrument facilitates rapid cycle times. The integrated nature of the instrument provides accurate, contamination-free processing. The instrument may include reagent reservoirs, agitators and mixers, heaters, pumps, and optical or electromechanical sensors. Ultrasonic Lamb-wave devices may be used as sensors, pumps and agitators.
摘要翻译：用于微升至微升玻璃样品的操作，反应和检测的集成微加工仪器。该仪器适用于生化反应，特别是基于DNA的反应，如聚合酶链反应，需要热循环，因为仪器固有的小尺寸便于快速循环。仪器的综合性能提供了准确，无污染的处理。仪器可以包括试剂储存器，搅拌器和混合器，加热器，泵以及光学或机电传感器。超声波兰波装置可用作传感器，泵和搅拌器。

8. 发明授权

US5587601A Support structure for a semiconductor pressure transducer 失效
标题翻译：半导体压力传感器的支撑结构
公开(公告)号：US5587601A
公开(公告)日：1996-12-24
申请号：US465120
申请日：1995-06-05
申请人： Anthony D. Kurtz
发明人： Anthony D. Kurtz
IPC分类号： G01L9/00 , H01L29/82
CPC分类号： G01L19/146 , G01L19/0038 , G01L19/147 , G01P2015/084 , Y10S73/04
摘要： A pressure sensor assembly including semiconductor transducer elements disposed upon a diaphragm support structure, wherein the support structure is comprised of a plurality of substrate layers anodically bonded together. A groove is disposed in the support structure creating an area of reduced thickness within the support structure. The ares of reduced thickness acts as a stress concentration region. As such, the transducer elements are disposed within the ares of reduced thickness so as to efficiently monitor any deformations experienced by the support structure. The groove that creates the ares of reduced thickness is formed in each of the substrate layers, prior to bonding into the overall structure, as such a very accurately tolerance groove can be formed into the structure which greatly increases the reliability of the structure.
摘要翻译：包括设置在隔膜支撑结构上的半导体换能器元件的压力传感器组件，其中所述支撑结构由阳极结合在一起的多个基底层组成。凹槽设置在支撑结构中，在支撑结构内形成厚度减小的区域。厚度减小的部分作为应力集中区域。因此，换能器元件设置在厚度减小的区域内，以便有效地监视支撑结构所经历的任何变形。在结合到整个结构中之前，在每个基底层中形成有减小厚度的凹槽，因此可以将非常精确的公差凹槽形成为大大提高结构可靠性的结构。

9. 发明授权

US5585571A Method and apparatus for measuring strain 失效
标题翻译：测量应变的方法和装置
公开(公告)号：US5585571A
公开(公告)日：1996-12-17
申请号：US923960
申请日：1992-10-15
申请人： Anthony Lonsdale , Bryan Lonsdale
发明人： Anthony Lonsdale , Bryan Lonsdale
IPC分类号： G01L1/00 , G01L1/16 , G01L3/10 , G01L3/02
CPC分类号： G01L1/165 , B60C23/0428 , G01L3/10 , Y10S73/04
摘要： A method of, and apparatus for, measuring dynamic torque transmitted by a shaft having an axis of rotation is characterised by the steps of:1 locating on the shaft (S) a pair of transducers (T, T1, T2), each comprising an SAW resonator, as a complementary pair so that for a first direction of rotation (K) of the shaft (S) about the axis (A) one transducer (T1) is under compression and the other (T2) in tension and for a reverse direction of rotation of the shaft the one transducer (T1) is in tension and the other (T2) in compression, a signal input (C1) and a signal output (C2, C3) for either each transducer or a single signal output for a signal derived from both transducers, the signal input and signal output or outputs being located at discrete locations on or near the outside of the shaft (S) for rotation therewith,2 causing a driving signal to be applied to the signal input (C1);3 detecting at each or the signal outlet (C2, C3) at least an output resonant frequency of the transducer (T, T1, T2) when driven by the driving signal; and4 processing the output resonant frequency signal of each or both transducers to derive information as to the strain generated in the transducer (T1, T2) induced by stress in the shaft (S) due to dynamic torque transmitted by the shaft (S).The invention further provides for various output signals to be provided relating to dynamic torque with or without temperature compensation and/or representation.
摘要翻译： PCT No.PCT / GB91 / 00328 Sec。 371日期：1992年10月15日 102（e）日期1992年10月15日PCT 1991年3月4日PCT公布。 WO91 / 13832 PCT出版物 1991年9月19日，一种用于测量由具有旋转轴线的轴传递的动态扭矩的方法和装置的特征在于：1定位在轴（S）上的一对换能器（T，T1，T2 ），每个包括SAW谐振器作为互补对，使得对于绕轴（A）的轴（S）的第一旋转方向（K），一个换能器（T1）处于压缩状态，另一个（T2）在张力，并且对于轴的旋转方向，一个换能器（T1）处于张紧状态，另一个（T2）压缩，信号输入（C1）和信号输出（C2，C3），用于每个换能器或单个信号输出用于从两个换能器导出的信号，信号输入和信号输出或输出位于轴（S）外部或附近的离散位置，用于与其一起旋转，从而使驱动信号施加到信号输入（C1）; 3在由驱动信号驱动时，在每个或信号出口（C2，C3）处至少检测换能器（T，T1，T2）的输出谐振频率; 以及4处理每个或两个换能器的输出谐振频率信号以导出由于由轴（S）传递的动态转矩引起的由轴（S）中的应力引起的在换能器（T1，T2）中产生的应变的信息。本发明进一步提供有关具有或不具有温度补偿和/或表示的动态转矩的各种输出信号。

10. 发明授权

US5581021A Method and apparatus for optimizing piezoelectric surface asperity detection sensor 失效
标题翻译：用于优化压电表面粗糙度检测传感器的方法和装置
公开(公告)号：US5581021A
公开(公告)日：1996-12-03
申请号：US482536
申请日：1995-06-07
申请人： Karl A. Flechsig , Chih-Kung Lee , Sylvia L. Lee , Ullal V. Nayak , Timothy C. O'Sullivan
发明人： Karl A. Flechsig , Chih-Kung Lee , Sylvia L. Lee , Ullal V. Nayak , Timothy C. O'Sullivan
IPC分类号： G01H11/08 , G11B33/10 , G01B5/28 , H01L41/047
CPC分类号： G11B33/10 , G01H11/08 , Y10S73/04
摘要： Disclosed is a method and apparatus for sensing the vibrational response of a slider of predetermined dimensions during contact with one or more surface asperities on a recording surface, separating the response into its individual bending mode frequency component responses, determining one or more bending mode frequency responses which display monotonic behavior with increasing asperity interference, and designing a mode selection sensor optimized to detect the monotonic bending mode frequency identified. The mode enhanced sensor is designed by first analyzing the stress distribution of the slider corresponding to the monotonic bending mode frequency, identifying regions of the slider which experience substantially positive or substantially negative stress, and partitioning the upper conductive layer of a piezoelectric sensor to form a partitions corresponding to each of the identified regions. The sensor may be further enhanced by tailoring the partitions to exclude undesirable stress contributions.
摘要翻译：公开了一种用于在与记录表面上的一个或多个表面粗糙度接触期间感测预定尺寸的滑块的振动响应的方法和装置，将响应分离成其单独的弯曲模式频率分量响应，确定一个或多个弯曲模式频率响应其显示单调性行为随着越来越严重的干扰，并且设计了优化以检测所识别的单调弯曲模式频率的模式选择传感器。通过首先分析对应于单调弯曲模式频率的滑块的应力分布来设计模式增强传感器，识别经历基本上正的或基本上负的应力的滑块的区域，以及分隔压电传感器的上导电层以形成对应于每个识别的区域的分区。可以通过调整隔板以排除不期望的应力贡献来进一步增强传感器。

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