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    • 10. 发明授权
    • Method of recovering ammonia and method of recycling ammonia by using the same
    • 回收氨的方法和使用该方法回收氨
    • US08889090B2
    • 2014-11-18
    • US13901684
    • 2013-05-24
    • Japan Pionics Co., Ltd.
    • Kansei IzakiMasanori IwakiToshio Akiyama
    • B01D53/46B01D53/58C01C1/00C01C1/12F25J3/08
    • F25J3/08C01C1/12Y02P20/129Y10S438/905
    • There are provided methods capable of easily and efficiently recovering and recycling ammonia from exhaust gas containing a small amount of ammonia, the exhaust gas being exhausted from a production process of a gallium nitride compound semiconductor. The method of recovering ammonia includes filtering exhaust gas containing ammonia, hydrogen, nitrogen, and a solid compound with a filter to remove the solid compound from the exhaust gas; pressurizing and cooling the filtered exhaust gas with a heat pump to liquefy ammonia contained in the filtered exhaust gas; and separating liquefied ammonia from hydrogen and nitrogen to recover liquefied ammonia. The method of recycling ammonia includes evaporating recovered liquid ammonia; mixing the evaporated ammonia with another crude ammonia to obtain mixed gas; purifying the mixed gas; and supplying the purified gas to the production process of a gallium nitride compound semiconductor.
    • 提供了能够容易且有效地从含有少量氨的废气中回收和回收氨的方法,废气从氮化镓化合物半导体的生产过程中排出。 回收氨的方法包括用过滤器过滤含有氨,氢,氮和固体化合物的废气以从废气中除去固体化合物; 用热泵对过滤的废气进行加压和冷却,以液化所含过滤废气中的氨; 并将液氨与氢气和氮气分离,回收液氨。 回收氨的方法包括蒸发回收的液氨; 将蒸发的氨与另一种粗氨混合以获得混合气体; 净化混合气体; 并将净化气体供给到氮化镓系化合物半导体的制造工序中。