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1. 发明授权

US11585717B2 Method for calibrating plurality of chamber pressure sensors and substrate processing system 有权
公开(公告)号：US11585717B2
公开(公告)日：2023-02-21
申请号：US16806628
申请日：2020-03-02
申请人： Tokyo Electron Limited
发明人： Risako Matsuda , Norihiko Amikura , Kazuyuki Miura , Keita Shouji
IPC分类号： G01L27/00 , G01F3/22 , G01F5/00 , H01L21/67 , H01L21/66
摘要： In a substrate processing system according to an exemplary embodiment, gas supply units are configured to supply gases to chambers through first gas flow channels thereof, respectively. Chamber pressure sensors are configured to measure pressures in the chambers. A second gas flow channel is connected to the first gas flow channel of each of the gas supply units. A reference pressure sensor is configured to measure a pressure in the second gas flow channel. In a method according to an exemplary embodiment, each of the chamber pressure sensors is calibrated by using a measurement value thereof and a measurement value of the reference pressure sensor which are obtained in a state where pressures in a corresponding chamber, the first gas flow channel of a corresponding gas supply unit, and the second gas flow channel are maintained.

2. 发明申请

US20230019724A1 GAS APPLIANCE FAILURE DIAGNOSIS SYSTEM 有权
公开(公告)号：US20230019724A1
公开(公告)日：2023-01-19
申请号：US17757715
申请日：2021-01-14
申请人： Panasonic Intellectual Property Management Co. Ltd.
发明人： TADANORI SHIRASAWA , MITSUO YOKOHATA
IPC分类号： G01F15/063 , G01F3/22 , F23K5/00
摘要： A gas meter (10) includes a normal measurement mode in which the flow rate is measured in a predetermined sampling period and a detailed measurement mode in which the flow rate is measured in a sampling period shorter than the predetermined sampling period in the normal measurement mode. A center device (40) gives an instruction to the gas meter (10) to measure the flow rate in the detailed measurement mode. The center device (40) further collects flow rate data measured in the detailed measurement mode from the gas meter (10), and generates, based on the collected flow rate data, failure diagnosis information for diagnosing a failure in a gas appliance. With this configuration, the failure part in the gas appliance can be remotely identified, which accelerates the repair work.

3. 发明授权

US11530943B2 Techniques for checking state of analyzers 有权
公开(公告)号：US11530943B2
公开(公告)日：2022-12-20
申请号：US17066692
申请日：2020-10-09
申请人： Roche Diagnostics Operations, Inc.
发明人： Stefan Quint , Dieter Kempken
IPC分类号： G01F25/20 , G01F3/22 , G01N35/10
摘要： An automated method for detecting and/or monitoring a state of a degasser of an analyzer is provided, the degasser including a container configured to be evacuated. The method includes obtaining a time series of values indicative of pressures inside the container. The time series spans a period during which the container is evacuated or pressurized. The method further includes determining a liquid level state of the degasser which is determined by an amount of liquid present in the container based on the time series.

4. 发明申请

US20190024891A1 FLOW MEASUREMENT DEVICE 审中-公开
公开(公告)号：US20190024891A1
公开(公告)日：2019-01-24
申请号：US16070535
申请日：2016-11-15
申请人： Panasonic Intellectual Property Management Co., Ltd.
发明人： YUSUKE KITANO , MITSUO YOKOHATA
IPC分类号： F23N5/18 , G01F1/66 , G01F3/22
摘要： Flow measurement device includes flow rate measurement unit, arithmetic unit that calculates a difference value between a the first flow rate value and a second flow rate value, and difference value conversion unit that calculates a flow rate ratio, based on the difference value. In addition, flow measurement device includes appliance characteristic extraction unit that extracts at least one appliance characteristic quantity indicating a characteristic of a flow rate change, and that extracts a value calculated from a first flow rate value and a second flow rate value, as at least one appliance characteristic quantity, in a case where the flow rate ratio falls within a reference range. Furthermore, flow measurement device includes appliance inherent characteristic information holding unit that holds one or more appliance inherent characteristic quantities indicating a characteristic flow rate state of a specific gas appliance, and appliance discrimination unit that discriminates a gas appliance, based on a comparison between the appliance characteristic quantity and the appliance inherent characteristic quantity.

5. 发明授权

US10175079B2 Encoder device and fluid meter comprised thereof 有权
公开(公告)号：US10175079B2
公开(公告)日：2019-01-08
申请号：US14646829
申请日：2014-06-06
申请人： Dresser, Inc.
发明人： Giuseppe Triaca , Gary Martin Lawlor , Franco Morosini
IPC分类号： G01F3/22 , G01F15/14
摘要： An encoder device and a fluid meter incorporating the encoder device is disclosed herein, wherein the fluid meter can embody a gas meter that monitors supply of gas to a consumer. The encoder device is configured to generate a signal with information that quantifies the supply of gas, for example, by associating the movement of a moveable element with a volume of fluid that flows through the gas meter The gas meter can include a metrological part with a housing that forms an interior space that wholly encloses the encoder device therein and can also be configured with an input/output member that conducts the signal from inside of the interior space to outside of the housing.

6. 发明申请

US20190003866A1 FLOW RATE MEASUREMENT DEVICE 审中-公开
公开(公告)号：US20190003866A1
公开(公告)日：2019-01-03
申请号：US16065136
申请日：2016-11-15
申请人： Panasonic Intellectal Propety Management Co., Ltd.
发明人： YUSUKE KITANO , MITSUO YOKOHATA
IPC分类号： G01F1/74 , F23N5/18 , G01F1/66 , G01F3/22
摘要： Flow rate measurement device includes flow rate measurement unit that measures a flow rate of gas at a prescribed time interval, and arithmetic unit that calculates a characteristic flow rate from the flow rates measured within a predetermined period, and calculates a ratio of each flow rate measured at multiple times within the predetermined period with respect to the characteristic flow rate. In addition, flow rate measurement device includes appliance characteristic extraction unit that extracts an appliance characteristic quantity which indicates a characteristic of a flow rate change in currently using gas appliances within the predetermined period, the appliance characteristic quantity being the ratio or information obtained from the ratio, and appliance inherent characteristic information holding unit that holds an appliance inherent characteristic quantity indicating a characteristic flow rate state of a specific gas appliance. Furthermore, flow rate measurement device includes appliance discrimination unit that discriminates the currently using gas appliance by comparing the appliance characteristic quantity with the appliance inherent characteristic quantity.

7. 发明申请

US20170074702A1 ENCODER DEVICE AND FLUID METER COMPRISED THEREOF 审中-公开
标题翻译：编码器装置及其包含的流量计
公开(公告)号：US20170074702A1
公开(公告)日：2017-03-16
申请号：US14646829
申请日：2014-06-06
申请人： DRESSER, INC.
发明人： Giuseppe Triaca , Gary Martin Lawlor , Franco Morosini
IPC分类号： G01F3/22
CPC分类号： G01F3/226 , G01F15/14
摘要： Embodiments of an encoder device and a fluid meter incorporating the encoder device, wherein the fluid meter can embody a gas meter that monitors supply of gas to a consumer. The encoder device is configured to generate a signal with information that quantifies the supply of gas, for example, by associating the movement of a moveable element with a volume of fluid that flows through the gas meter. In one example, the gas meter can include a metrological part with a housing that forms an interior space that wholly encloses the encoder device therein. This embodiment can also be configured with an input/output member that conducts the signal from inside of the interior space to outside of the housing.
摘要翻译：编码器装置和包括编码器装置的流量计的实施例，其中流体计可以包括监测向消费者供应气体的气量计。编码器装置被配置为产生具有量化气体供应的信息的信号，例如通过将可移动元件的运动与流过燃气表的流体体积相关联。在一个示例中，燃气表可以包括具有外壳的计量部件，该壳体形成将编码器装置完全包围在其中的内部空间。该实施例还可以配置有将信号从内部空间内部传导到壳体外部的输入/输出构件。

8. 发明授权

US09222819B2 Tracking and controlling fluid delivery from chamber 有权
标题翻译：跟踪和控制从腔室输送液体
公开(公告)号：US09222819B2
公开(公告)日：2015-12-29
申请号：US13487000
申请日：2012-06-01
申请人： Christian A. Gutierrez , Ellis Meng
发明人： Christian A. Gutierrez , Ellis Meng
IPC分类号： G01F3/22 , B67D1/04 , B67D1/08 , G01F3/20 , G01F11/08 , G01M3/16 , G01M3/40
CPC分类号： G01F3/227 , B67D1/0437 , B67D1/0855 , G01F3/20 , G01F11/086 , G01M3/16 , G01M3/40
摘要： Electrochemical impedance may be used for accurate and real-time tracking and control of fluid delivery from fluid-filled chambers, such as from drug delivery devices. At least two measurement electrodes may be placed within the chamber in contact with the fluid to be sensed. Application of a small alternating current using these electrodes through the fluid/drug may allow measurement of electrochemical impedance. Volumetric changes of the compressible chamber due to movement of at least one surface within the compressible chamber (such as an actuating bellows or flexible diaphragm), may induce changes in the measured electrochemical impedance. Measuring these changes may allow for tracking of ejected liquid volumes from the compressible chamber. By taking the time-derivative of this signal, the rate of volume change can be tracked and therefore the rate of ejected fluid (flow rate) can be deduced.
摘要翻译：电化学阻抗可用于精确和实时跟踪和控制从填充液体的腔室（例如来自药物输送装置）的流体输送。至少两个测量电极可以放置在室内与要感测的流体接触。使用这些电极通过流体/药物施加小的交流电流可以测量电化学阻抗。由于可压缩室内的至少一个表面的移动（例如致动波纹管或柔性隔膜），可压缩室的体积变化可能引起测量的电化学阻抗的变化。测量这些变化可以允许跟踪来自可压缩室的喷射液体体积。通过采用该信号的时间导数，可以跟踪体积变化率，因此可以推导出喷射流体的速率（流量）。

9. 发明申请

US20150153211A1 FLUID METER DEVICE 有权
标题翻译：流量计装置
公开(公告)号：US20150153211A1
公开(公告)日：2015-06-04
申请号：US14410937
申请日：2013-06-25
申请人： Panasonic Intellectual Property Management Co., Ltd.
发明人： Hirokazu Gotou , Akihisa Adachi , Yuji Fujii , Yuji Nakabayashi , Yukio Sakaguchi , Yasuharu Kawano , Aoi Watanabe
IPC分类号： G01F3/22
CPC分类号： G01F3/22 , G01F1/66 , G01F5/00 , G01F15/04 , G01F15/07
摘要： A gas meter device of the present invention comprises plural measurement fluid passages provided in parallel between an inlet into which a fluid flows, and an outlet from which the fluid flows out; flow value measuring sections provided in the measurement fluid passages, respectively, and configured to obtain flow values of fluids flowing through the measurement fluid passages, respectively; memories configured to store coefficient data which are values corresponding to the measurement fluid passages, respectively and indicating a relation between the flow values of the fluids flowing through the measurement fluid passages, respectively, and a total flow value of the fluid flowing from the inlet to the outlet; and total flow value estimation sections configured to estimate total flow values of the fluids based on the flow values obtained by the flow value measuring sections, respectively, and the coefficient data stored in the memories. This makes it possible to reduce time required for adjustment work in manufacturing steps of the fluid meter device assembled by connecting the plural measurement fluid passages in parallel.
摘要翻译：本发明的燃气表装置包括在流体流入的入口与流体从其流出的出口平行设置的多个测量流体通道; 分别设置在测量流体通道中的流量值测量部分，并且被配置为分别获得流过测量流体通道的流体的流量值; 存储器，被配置为分别存储与测量流体通道相对应的值的系数数据，并且分别指示流过测量流体通道的流体的流量与从入口流动的流体的总流量值出口; 以及总流量值估计部分，被配置为分别基于由流量值测量部分获得的流量值和存储在存储器中的系数数据来估计流体的总流量值。这使得可以减少通过并联连接多个测量流体通道而组装的流体计量装置的制造步骤中调整工作所需的时间。

10. 发明申请

US20100138167A1 FLOW RATE MEASUREMENT APPARATUS, PROGRAM THEREOF, FLOW RATE MEASUREMENT METHOD, AND FLUID SUPPLY SYSTEM 审中-公开
标题翻译：流量测量装置，其程序，流量测量方法和流体供应系统
公开(公告)号：US20100138167A1
公开(公告)日：2010-06-03
申请号：US12597598
申请日：2008-04-25
申请人： Daisuke Bessyo , Hajime Miyata , Youichi Itou
发明人： Daisuke Bessyo , Hajime Miyata , Youichi Itou
IPC分类号： G01F3/22
CPC分类号： F23N5/184 , F23K2900/05001 , F23N1/002 , F23N5/242 , F23N2005/185 , F23N2031/18 , G01F1/66 , G01F1/667 , G01F15/068 , G01F25/0053
摘要： There is provided a technique for accurately identifying an appliance which uses the fluid from a viewpoint of the range of a change in flow rate value. An ultrasonic flow rate measuring device 7 measures a flow rate value of gas flowing in a flow passage 6 of a gas meter 16, and a measured flow rate information storage section 8 stores a measured flow rate value. A measured flow rate value difference calculation section 9 calculates a measured flow rate value difference within a predetermined period corresponding to an amount of change occurred in a measured flow rate value. An appliance identifying section 11 identifies an appliance which uses the fluid or leakage by determining whether or not the measured flow rate value difference is a predetermined threshold or less.
摘要翻译：提供了从流量值的变化范围的观点来准确地识别使用流体的器具的技术。超声波流量测量装置7测量在燃气表16的流路6中流动的气体的流量值，测量流量信息存储部8存储测量的流量值。测量流量值差计算部9计算与测定流量值中发生的变化量对应的规定期间内的测定流量值差。设备识别部分11通过确定测量的流量值差异是否为预定阈值或更小来识别使用流体或泄漏的器具。

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