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1. 发明授权

US06803774B2 MEMS varactor for measuring RF power 失效
标题翻译：用于测量射频功率的MEMS变容二极管
公开(公告)号：US06803774B2
公开(公告)日：2004-10-12
申请号：US10253383
申请日：2002-09-23
申请人： Chul Hong Park
发明人： Chul Hong Park
IPC分类号： G01R2726
CPC分类号： G01R21/10
摘要： A meter for measuring the root-mean-squared potential of an AC signal characterized by a frequency f is disclosed. The meter includes first and second capacitors. The AC signal is applied to the first capacitor, which includes first and second plates separated by a distance that depends on the root-mean-squared potential of the AC signal, but not on changes in the AC signal that occur over a time of 1/f. The second capacitor has first and second plates separated by a distance that depends on the separation of the first and second plates in the first capacitor. A detection circuit measures the capacitance of the second capacitor. The first plate of the first capacitor is preferably connected to the first plate of the second capacitor by a non-conducting mechanical link.
摘要翻译：公开了一种用于测量以频率f为特征的AC信号的均方根电位的仪表。仪表包括第一和第二电容器。交流信号被施加到第一电容器，该电容器包括第一和第二板，其间隔一定距离，该距离取决于交流信号的均方根电位，但不包括在1个时间内发生的交流信号的变化 /F。第二电容器具有分隔第一和第二板在第一电容器中的间隔的距离的第一和第二板。检测电路测量第二电容器的电容。第一电容器的第一板优选地通过不导电的机械连接件连接到第二电容器的第一板。

2. 发明授权

US06801044B2 Universal electromagnetic resonance system for detecting and measuring local non-uniformities in metal and non-metal objects 失效
标题翻译：通用电磁共振系统，用于检测和测量金属和非金属物体的局部非均匀性
公开(公告)号：US06801044B2
公开(公告)日：2004-10-05
申请号：US10654759
申请日：2003-09-05
申请人： Boris Kesil , Leonid Velikov , Yuri Vorobyev
发明人： Boris Kesil , Leonid Velikov , Yuri Vorobyev
IPC分类号： G01R2726
CPC分类号： G01B7/105
摘要： A universal electromagnetic resonance system is aimed at detecting and measuring local non-uniformities in objects made from conductive or non-conductive materials. The system comprises a composite measuring unit composed of two identical and symmetrically arranged individual oscillation circuits with measurement elements in the form of identical and symmetrically arranged inductive coils or capacitor chips. The unit is connected to an impedance analyzer for supplying RF current and for measuring the voltage signal in the oscillation circuit. Since all the elements of individual oscillation circuits are identical, in the case of non-uniformity of the object on the scanned area, the parameters of the resonance will hanged. This change will violate the symmetry in the operation of the individual oscillation circuits. The variation in measured signal can be calibrated in terms of the target parameter or characteristic of the object.
摘要翻译：通用电磁共振系统旨在检测和测量由导电材料或非导电材料制成的物体中的局部不均匀性。该系统包括由两个相同和对称布置的各个振荡电路组成的复合测量单元，其具有相同和对称布置的感应线圈或电容器芯片形式的测量元件。该单元连接到用于提供RF电流并用于测量振荡电路中的电压信号的阻抗分析器。由于各个振荡电路的所有元件是相同的，所以在被扫描区域上的物体不均匀的情况下，谐振的参数将被悬挂。这种变化将违反各个振荡电路的操作对称性。测量信号的变化可以根据目标参数或对象的特性进行校准。

3. 发明授权

US06791343B2 Modeling miller effect in static timing analysis 失效
标题翻译：在静态时序分析中建模米勒效应
公开(公告)号：US06791343B2
公开(公告)日：2004-09-14
申请号：US10305806
申请日：2002-11-27
申请人： Kumarswamy Ramarao , Matthew J. Page
发明人： Kumarswamy Ramarao , Matthew J. Page
IPC分类号： G01R2726
CPC分类号： G06F17/5036 , G06F17/5031
摘要： A method is contemplated. According to the method, capacitances in a first resistance/capacitance (RC) extraction corresponding to a circuit are modified. Each capacitance is modified to estimate Miller effect on that capacitance. A ratio of a total capacitance on a first wire after the modification in the first RC extraction to a total capacitance on the first wire before the modification in the first RC extraction is calculated. Capacitances in a second RC extraction that are coupled to the first wire are modified according to the ratio. The second RC extraction is a reduced extraction as compared to the first RC extraction. A timing analysis is performed for the circuit using the second RC extraction with capacitances modified to estimate Miller effect.
摘要翻译：考虑一种方法。根据该方法，修改对应于电路的第一电阻/电容（RC）提取中的电容。修改每个电容以估计米勒对该电容的影响。计算在第一RC提取中的修改之后的第一线上的总电容与第一RC提取之前的修改之前的第一线上的总电容的比率。耦合到第一导线的第二RC提取中的电容根据该比率被修改。与第一次RC提取相比，第二次RC提取是减少的提取。使用经修改的电容的第二RC提取对电路执行时序分析，以估计米勒效应。

4. 发明授权

US06788074B2 System and method for using a capacitance measurement to monitor the manufacture of a semiconductor 有权
标题翻译：使用电容测量来监测半导体制造的系统和方法
公开(公告)号：US06788074B2
公开(公告)日：2004-09-07
申请号：US10176888
申请日：2002-06-21
申请人： Robin C. Sarma , Michael J. McNutt , Yu-Sang Lin
发明人： Robin C. Sarma , Michael J. McNutt , Yu-Sang Lin
IPC分类号： G01R2726
CPC分类号： H01L22/20 , H01L22/34 , H01L2924/0002 , H01L2924/00
摘要： A method for measuring a capacitance of a semiconductor is provided that includes positioning a measurement circuit in a scribe line area associated with the semiconductor. The scribe line area is indicative of a delineation that separates one or more portions of the semiconductor. A capacitance of one or more elements included within the one or more portions of the semiconductor is then measured using the measurement circuit. The method also includes comparing the capacitance measurement of the one or more elements included within the one or more portions of the semiconductor to a reference set of capacitance values such that a parameter associated with a manufacturing process that generated the semiconductor may be checked.
摘要翻译：提供了一种用于测量半导体的电容的方法，其包括将测量电路定位在与半导体相关联的划线区域中。划线区域表示分离半导体的一个或多个部分的描绘。然后使用测量电路测量包括在半导体的一个或多个部分内的一个或多个元件的电容。该方法还包括将包含在半导体的一个或多个部分中的一个或多个元件的电容测量值与参考电容值组进行比较，使得可以检查与生成半导体的制造工艺相关联的参数。

5. 发明授权

US06781387B2 Inspection method using penetrant and dielectrometer 失效
标题翻译：使用渗透剂和电导率计的检验方法
公开(公告)号：US06781387B2
公开(公告)日：2004-08-24
申请号：US10225406
申请日：2002-08-20
申请人： Neil J. Goldfine , Darrell E. Schlicker , Markus Zahn , Wayne D. Ryan , Ian C. Shay , Andrew Washabaugh
发明人： Neil J. Goldfine , Darrell E. Schlicker , Markus Zahn , Wayne D. Ryan , Ian C. Shay , Andrew Washabaugh
IPC分类号： G01R2726
CPC分类号： G01V3/088 , G01V3/104
摘要： Described is an inspection method for detecting defects in dielectic test materials using a penetrant material and a dielectric sensor. The penetrant material provides differing dielectric properties from test material and improves the dielectric contrast between defects substantially filled by the penetrant and the test material. The penetrant can be a liquid, such as water, or a powder, as long as it provides a substantially different complex permittivity than the test material.
摘要翻译：描述了使用渗透材料和电介质传感器检测介电试验材料中的缺陷的检查方法。渗透材料提供与测试材料不同的介电性能，并改善基本上由渗透剂填充的缺陷和测试材料之间的介电对比度。渗透剂可以是液体，例如水或粉末，只要其提供与测试材料基本上不同的复介电常数即可。

6. 发明授权

US06777957B1 Test structure to measure interlayer dielectric effects and breakdown and detect metal defects in flash memories 失效
标题翻译：用于测量层间电介质效应和击穿并检测闪存中的金属缺陷的测试结构
公开(公告)号：US06777957B1
公开(公告)日：2004-08-17
申请号：US10174734
申请日：2002-06-18
申请人： Nian Yang , Zhigang Wang , John Jianshi Wang
发明人： Nian Yang , Zhigang Wang , John Jianshi Wang
IPC分类号： G01R2726
CPC分类号： H01L27/11521 , G11C16/04 , G11C29/50 , G11C2029/0403 , G11C2029/5002 , H01L22/34 , H01L27/115 , H01L2924/3011
摘要： An apparatus for testing a dielectric property of a material constituting the interlayer dielectric of a flash memory device is formed by a layer (122) of the dielectric material disposed throughout a test structure (200) representative of the flash memory device and a plurality of conductors (117A, 117B, 117C) disposed within that layer (122) or a pair of planar conductors (402, 404; 502, 503; 504, 505; 506, 507; 508, 509) deposited such that the conductors (402, 404; 502, 503; 504, 505; 506, 507; 508, 509) are substantially parallel to each other and the layer (122) of dielectric material is disposed throughout a test structure (400, 500) so as to separate the conductors (402, 404; 502, 503; 504, 505; 506, 507; 508, 509), the test structure (400, 500) functioning as a capacitor. The apparatus may also test a conductive property of a material constituting the conducting lines of a flash memory device by disposing a conductor (801, 901) through the dielectric material (122).
摘要翻译：用于测试构成闪速存储器件的层间电介质的材料的介电性能的装置由设置在表示闪速存储器件的测试结构（200）内的介电材料层（122）和多个导体（122A），或者一对平面导体（402,404; 502,503,504,505,506,507,508,509），这些导体（402,404） ; 502,503,504,505,506,507,508,509,506,507,508,505,506,507,508,505,505,505,508,505,509,506,507,508,505,509,508,509,508,509,508,509,505,505,509,508,509,508,509,505,505,509,505,505,509,505,505,509,505,505,509,50 所述测试结构（400,500）用作电容器，所述测试结构（400,500）用作电容器（402,404; 502,503,504,505,506,507,508,509）。该设备还可以通过将电介质材料（122）布置在导体（801,901）上来测试构成闪存器件的导线的材料的导电性能。

7. 发明授权

US06753676B1 RF test probe 失效
标题翻译：射频测试探头
公开(公告)号：US06753676B1
公开(公告)日：2004-06-22
申请号：US09656933
申请日：2000-09-07
申请人： Robert Evan Myer
发明人： Robert Evan Myer
IPC分类号： G01R2726
CPC分类号： G01R1/06772 , G01R1/06738 , G01R1/07
摘要： An inexpensive RF test probe provides consistent monitoring of an RF signal while having minimal effect on the circuit under test. In one embodiment, an RF test probe comprises a return conductor and a probing conductor. The probing conductor is positioned within an insulator and a termination such as a 50 ohm resistor is electrically positioned between the ground conductor and probing conductor. The probe is used by placing a portion of the insulating material surrounding the probe conductor in contact with a circuit such as an RF microstrip carrying an RF signal to be monitored.
摘要翻译：廉价的RF测试探头提供对RF信号的一致监视，同时对被测电路的影响最小。在一个实施例中，RF测试探针包括返回导体和探测导体。探测导体位于绝缘体内，诸如50欧姆电阻器的终端电气地定位在接地导体和探测导体之间。通过将探针导体周围的绝缘材料的一部分放置在与诸如携带要监测的RF信号的RF微带电路等接触的位置来使用探针。

8. 发明授权

US06750659B2 Inherently stable electrostatic actuator technique which allows for full gap deflection of the actuator 有权
标题翻译：固有稳定的静电致动器技术，其允许致动器的完全间隙偏转
公开(公告)号：US06750659B2
公开(公告)日：2004-06-15
申请号：US10170311
申请日：2002-06-13
申请人： Terence J. Murphy
发明人： Terence J. Murphy
IPC分类号： G01R2726
CPC分类号： H01H59/0009
摘要： A electrostatic sensing device for sensing a voltage from a electrostatic device, includes a first actuator having a first membrane and a first electrode, the first membrane being moveable and a second actuator having a second membrane and a second electrode, the second membrane being moveable. Additionally, a control device controls the first actuator and the second actuator to alternatively charge the first actuator with a first charge and the second actuator with a second charge, and a circuit outputs a first voltage linearly based on the first charge and a second voltage linearly based on the second charge.
摘要翻译：一种用于感测来自静电装置的电压的静电感测装置，包括具有第一膜和第一电极的第一致动器，第一膜可移动，第二致动器具有第二膜和第二电极，第二膜可移动。此外，控制装置控制第一致动器和第二致动器，以第一充电交替地对第一致动器充电，并且第二致动器具有第二充电，并且电路基于第一电荷和第二电压线性地输出第一电压基于第二次收费。

9. 发明授权

US06717419B1 Liquid dielectric capacitor for film thickness mapping 失效
标题翻译：液体介质电容器用于膜厚度映射
公开(公告)号：US06717419B1
公开(公告)日：2004-04-06
申请号：US10165687
申请日：2002-06-07
申请人： Bharat Bhushan , Christopher D. Hahm
发明人： Bharat Bhushan , Christopher D. Hahm
IPC分类号： G01R2726
CPC分类号： H02J1/10 , G01Q10/06 , G11B2005/001
摘要： The present invention includes capacitive film thickness measurement devices and measurement systems. The invention also includes machines or instruments using those aspects of the invention. The present invention additionally includes methods and procedures using those devices of the present invention. The present invention discloses a capacitance measurement device and technique useful in determining lubricant film thickness on substrates such as magnetic thin-film rigid disks. Using the present invention, variations in lubricant thickness on the Angstrom scale or less may be measured quickly and nondestructively.
摘要翻译：本发明包括电容膜厚度测量装置和测量系统。本发明还包括使用本发明的这些方面的机器或仪器。本发明另外包括使用本发明的那些装置的方法和程序。本发明公开了一种用于确定诸如磁性薄膜刚性盘的衬底上的润滑剂膜厚度的电容测量装置和技术。使用本发明，可以快速且非破坏性地测量润滑剂厚度在埃刻度或更小的变化。

10. 发明授权

US06707307B1 Fluid sensor 有权
标题翻译：流体传感器
公开(公告)号：US06707307B1
公开(公告)日：2004-03-16
申请号：US09642015
申请日：2000-08-21
申请人： Ronald A. McFarlane , Gail S. Gabel
发明人： Ronald A. McFarlane , Gail S. Gabel
IPC分类号： G01R2726
CPC分类号： G01N22/00
摘要： A sensor for measuring the dielectric constant of a fluid uses time of flight measurements. The sensor has a conduit for the fluid, preferably a transmission line. The dielectric constant of the fluid affects tranmission of electrical energy along the transmission line. An electrical generator, having as output an electrical transient, is operably connected to one end of the transmission line for transmitting the electrical transient along the conduit, where propagation of the electrical conduit is affected by the fluid. A receiver is connected to the other end of the conduit for detecting electrical transients that have passed along the conduit from the electrical generator. A processor is operably connected to the electrical generator and to the receiver, the processor being programmed to cause an electrical transient to be generated by the electrical generator for passage along the conduit and determine the dielectric constant of the fluid from characteristics of the electrical transient detected at the receiver.
摘要翻译：用于测量流体介电常数的传感器使用飞行时间测量。传感器具有用于流体的导管，优选地是传输线。流体的介电常数影响传输线上电能的传播。具有电瞬态输出的发电机可操作地连接到传输线的一端，用于沿导管传送电瞬变，其中电导管的传播受到流体的影响。接收器连接到管道的另一端，用于检测沿着导管从发电机通过的电瞬变。处理器可操作地连接到发电机和接收器，处理器被编程为使得电气发生器产生电瞬态以沿着导管通过，并根据检测到的电气瞬变的特性确定流体的介电常数在接收器。

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