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1. 发明授权

US10748734B2 Multi-cathode EUV and soft x-ray source 有权
公开(公告)号：US10748734B2
公开(公告)日：2020-08-18
申请号：US15256692
申请日：2016-09-05
申请人： Mark F Eaton , Robert J. Hollingsworth
发明人： Mark F Eaton , Robert J. Hollingsworth
IPC分类号： H01J35/06 , H01J35/08 , H01J29/08 , G03F7/20 , G21K1/06
摘要： An efficient source of EUV or SXR flux uses multiple e-beams from multiple cathodes to impact a wide anode target with a flux-generating surface to generate flux over a wide area. The conversion efficiency of e-beam power to flux power may be improved by the direction of the e-beams towards the anode target at shallow or grazing incidence angles or the use of mirrored anode surfaces which reflect EUV or SXR. The source is enclosed in a vacuum chamber and performs work such as the penetration of photoresist on a semiconductor wafer in vacuum.

2. 发明申请

US20180158640A1 FIELD EMISSION APPARATUS 审中-公开
公开(公告)号：US20180158640A1
公开(公告)日：2018-06-07
申请号：US15835073
申请日：2017-12-07
申请人： ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
发明人： Young Chul CHOI , Yoon-Ho SONG , Hyo Jin JEON , Jun Tae KANG , Sora PARK , Jeong Woong LEE , Eunsol GO , Min-Sik SHIN , Jae-Woo KIM , Jin-Woo JEONG , Ji-Hwan YEON , Sunghee KIM
IPC分类号： H01J29/62 , H01J29/08 , H01J35/06
摘要： Disclosed is a field emission apparatus. The apparatus comprises a cathode electrode and an anode electrode spaced apart from each other, an emitter on the cathode electrode, a gate electrode between the cathode and anode electrodes and including at least one gate aperture overlapping the emitter, and an electron transmissive sheet on the gate electrode and including a plurality of fine openings overlapping the gate aperture.

3. 发明申请

US20140285085A1 STREAK TUBE 有权
公开(公告)号：US20140285085A1
公开(公告)日：2014-09-25
申请号：US14354942
申请日：2012-08-07
申请人： Katsuyuki Kinoshita
发明人： Katsuyuki Kinoshita
IPC分类号： H01J31/42 , H01J29/08
CPC分类号： H01J31/42 , G01J11/00 , G01J2011/005 , H01J29/08 , H01J29/74 , H01J29/92 , H01J31/50
摘要： A steak tube has a container with an entrance plate and an output plate, a photocathode disposed in the container and configured to emit electrons according to light to be measured, the light having been incident through the entrance plate, and a sweep electrode disposed in the container, having a pair of deflection plates for generating an electric field and a connection lead connected to each deflection plate, and configured to sweep the electrons in a sweep direction along the output plate. An opposing of edges of the deflection plate in a direction of the output plate are formed so as to extend in a direction from the entrance plate to the output plate, the connection lead has a first connection portion electrically connected to the deflection plate, and the first connection portion is connected to the opposing of edges.
摘要翻译：牛排管具有容器，该容器具有入口板和输出板，光电阴极设置在容器中并且被配置为根据被测量的光发射电子，入射到入射板的光和设置在其中的扫掠电极容器，具有用于产生电场的一对偏转板和连接到每个偏转板的连接引线，并且被配置为沿着输出板沿扫掠方向扫掠电子。沿着输出板的方向偏转板的边缘相对地形成为从从入口板向输出板的方向延伸，连接引线具有电连接到偏转板的第一连接部分，并且第一连接部分连接到边缘的相对侧。

4. 发明授权

US08440981B2 Compact pyroelectric sealed electron beam 有权
标题翻译：紧凑型热电密封电子束
公开(公告)号：US08440981B2
公开(公告)日：2013-05-14
申请号：US13159304
申请日：2011-06-13
申请人： Leslie Bromberg , Ching Wu
发明人： Leslie Bromberg , Ching Wu
IPC分类号： H01J37/06 , H01J29/08
CPC分类号： H01J49/147
摘要： A non-radioactive source for Atmospheric Pressure Ionization is described. The electron-beam sealed tube uses a pyroelectric crystal(s). One end of the crystal is grounded while the other end has a metallic cap with sharp feature to generate an electron beam of a given energy. The rate of heating and/or cooling of the crystal is used to control the current generated from a tube. A heating and/or cooling element such as a Peltier element is useful for controlling the rate of cooling of the crystal. A thin window that is transparent to electrons but impervious to gases is needed in order to prolong the life of the tube and allow the extraction of the electrons. If needed, multiple crystals with independent heaters can be used to provide continuous operation of the device. Dielectric shielding of the pyroelectric crystal is used to minimize discharge of the crystal.
摘要翻译：描述了用于大气压电离的非放射源。电子束密封管使用热电晶体。晶体的一端接地，而另一端具有尖锐特征的金属盖，以产生给定能量的电子束。使用晶体的加热和/或冷却速度来控制从管产生的电流。诸如珀尔帖元件的加热和/或冷却元件可用于控制晶体的冷却速率。需要对电子透明但不透气体的薄窗，以延长管的寿命并允许电子的提取。如果需要，可以使用具有独立加热器的多个晶体来提供设备的连续操作。热电晶体的介电屏蔽用于使晶体的放电最小化。

5. 发明授权

US08129892B2 Light emitter substrate and image displaying apparatus using the same 失效
标题翻译：发光体基板和使用其的图像显示装置
公开(公告)号：US08129892B2
公开(公告)日：2012-03-06
申请号：US12482854
申请日：2009-06-11
申请人： Yukihiro Inoue
发明人： Yukihiro Inoue
IPC分类号： H01J29/08 , H01J1/62
CPC分类号： H01J29/04 , H01J31/127 , H01J2329/0497
摘要： In a light emitter substrate which has a resistor for connecting electrodes adjacent in a row direction, it aims to improve withstand discharge performance of the resistor. In the substrate comprising a substrate, plural light emitting members which are positioned in matrix on the substrate, plural electrodes each of which covers at least one of the light emitting members and which are positioned in matrix, and a row-direction striped resistor which is positioned between the electrodes adjacent in a column direction and connects the electrodes adjacent in a row direction and the column direction, a row-direction separated distance Gx′ between the electrodes adjacent in the row direction at a connecting portion between the electrodes and the resistor is made larger than a row-direction separated distance Gx between the electrodes adjacent in the row direction at a portion covering the light emitting members (Gx′>Gx).
摘要翻译：在具有用于连接沿行方向相邻的电极的电阻器的发光体基板中，旨在提高电阻器的耐受放电性能。在包括基板的基板中，位于基板上的矩阵状的多个发光部件，分别覆盖至少一个发光部件并位于矩阵状态的多个电极以及位于矩阵状的行方向条状电阻器位于沿列方向相邻的电极之间，并且在行方向和列方向上相邻的电极，在电极和电阻器之间的连接部分处的行方向上相邻的电极之间的行方向分离距离Gx' 在覆盖发光部件（Gx'> Gx）的部分的行方向上相邻的电极之间大于行方向分离距离Gx。

6. 发明授权

US07572522B2 Luminescent device 有权
标题翻译：发光装置
公开(公告)号：US07572522B2
公开(公告)日：2009-08-11
申请号：US10026064
申请日：2001-12-21
申请人： Satoshi Seo , Shunpei Yamazaki
发明人： Satoshi Seo , Shunpei Yamazaki
IPC分类号： H01J1/62 , H01J29/08 , B32B7/02
CPC分类号： H01L51/002 , H01L51/5012 , Y10S428/917 , Y10T428/24942 , Y10T428/26 , Y10T428/265
摘要： Interfaces between layers in a light emitting element are eliminated by using a light emitting element with a mixed region including a hole transporting material and an electron transporting material The light emitting element may further comprise a region with a dopant. By using this light emitting element, an organic luminescent element of low power consumption and long life is achieved, and the light emitting element can be used to manufacture a luminescent device and an electric appliance.
摘要翻译：通过使用具有包括空穴传输材料和电子传输材料的混合区域的发光元件来消除发光元件中的层之间的接触。发光元件还可以包括具有掺杂剂的区域。通过使用该发光元件，实现了低功耗，长寿命的有机发光元件，发光元件可用于制造发光装置和电器。

7. 发明授权

US06867537B2 Image-forming apparatus having vent tube and getter 失效
标题翻译：具有排气管和吸气剂的成像装置
公开(公告)号：US06867537B2
公开(公告)日：2005-03-15
申请号：US09361963
申请日：1999-07-28
申请人： Yasue Sato , Shinichi Kawate , Kazuyuki Ueda
发明人： Yasue Sato , Shinichi Kawate , Kazuyuki Ueda
IPC分类号： H01J9/18 , H01J9/24 , H01J9/385 , H01J29/02 , H01J29/08 , H01J29/86 , H01J29/87 , H01J31/08 , H01J31/12 , G01J1/62 , G01J1/304
CPC分类号： H01J9/242 , H01J9/385 , H01J29/028 , H01J29/864 , H01J31/127 , H01J2329/8625
摘要： An image-forming apparatus has a rear plate including electron-emitting devices formed thereon, a face plate including a fluorescent film formed thereon and being disposed to face the rear plate, flat plate spacers disposed between the rear plate and the face plate, and an outer frame surrounding peripheral edges of the rear plate and the face plate. Electrons emitted from the electron-emitting devices are irradiated to the fluorescent film to thereby display an image under condition where an inner space of a container constructed by the rear plate, the face plate and the outer frame is evacuated through a vent tube into a depressurized state. The vent tube is attached to a side of the outer frame that is positioned across an imaginary extension of the flat-plate spacer in the longitudinal direction thereof, or to the face plate or the rear plate in the vicinity of that side of the outer frame. With such arrangements, evacuation conductance is increased to reduce an evacuation time, and a higher vacuum level is achieved in the container so that an image can be stably displayed for a long time.
摘要翻译：图像形成装置具有包括形成在其上的电子发射器件的后板，包括形成在其上并设置成面向后板的荧光膜的面板，设置在后板和面板之间的平板间隔件，外框围绕后板和面板的周边边缘。从电子发射器件发射的电子被照射到荧光膜上，从而在由后板，面板和外框架构成的容器的内部空间通过排气管排出到减压的状态下显示图像州。排气管附接到外框架的横向于平板隔离件的纵向方向的假想延伸部分的侧面，或者连接到外框架的该侧附近的面板或后板。通过这样的布置，提高排气电导以减少排气时间，并且在容器中实现更高的真空度，使得图像可以长时间稳定地显示。

8. 发明授权

US6127774A Field emission display devices 有权
公开(公告)号：US6127774A
公开(公告)日：2000-10-03
申请号：US311501
申请日：1999-05-13
申请人： John L. Janning
发明人： John L. Janning
IPC分类号： H01J3/02 , H01J29/02 , H01J29/06 , H01J29/08 , H01J29/46 , H01J31/12 , H01J19/24
CPC分类号： H01J29/085 , H01J29/023 , H01J29/06 , H01J29/467 , H01J3/022 , H01J31/123 , H01J31/127 , H01J2201/32
摘要： Cathodoluminescent field emission display devices feature phosphor biasing, amplification material layers for secondary electron emissions, oxide secondary emission enhancement layers, and ion barrier layers of silicon nitride, to provide high-efficiency, high-brightness field emission displays with improved operating characteristics and durability. The amplification materials include copper-barium, copper-beryllium, gold-barium, gold-calcium, silver-magnesium and tungsten-barium-gold, and other high amplification factor materials fashioned to produce high-level secondary electron emissions within a field emission display device. For enhanced secondary electron emissions, an amplification material layer can be coated with a near mono-molecular film consisting essentially of an oxide of barium, beryllium, calcium, magnesium or strontium. Use of a high amplification factor film as a phosphor biasing electrode, and variability of the phosphor biasing potential to achieve brightness or gray scale control are further described in the disclosure.

9. 发明授权

US6087766A Field emission display devices 有权
标题翻译：场发射显示装置
公开(公告)号：US6087766A
公开(公告)日：2000-07-11
申请号：US311500
申请日：1999-05-13
申请人： John L. Janning
发明人： John L. Janning
IPC分类号： H01J3/02 , H01J29/02 , H01J29/06 , H01J29/08 , H01J29/46 , H01J31/12 , H01J19/24
CPC分类号： H01J29/085 , H01J29/023 , H01J29/06 , H01J29/467 , H01J3/022 , H01J31/123 , H01J31/127 , H01J2201/32
摘要： Cathodoluminescent field emission display devices feature phosphor biasing, amplification material layers for secondary electron emissions, oxide secondary emission enhancement layers, and ion barrier layers of silicon nitride, to provide high-efficiency, high-brightness field emission displays with improved operating characteristics and durability. The amplification materials include copper-barium, copper-beryllium, gold-barium, gold-calcium, silver-magnesium and tungsten-barium-gold, and other high amplification factor materials fashioned to produce high-level secondary electron emissions within a field emission display device. For enhanced secondary electron emissions, an amplification material layer can be coated with a near mono-molecular film consisting essentially of an oxide of barium, beryllium, calcium, magnesium or strontium. Use of a high amplification factor film as a phosphor biasing electrode, and variability of the phosphor biasing potential to achieve brightness or gray scale control are further described in the disclosure.
摘要翻译：阴极发光场致发射显示装置具有荧光偏置，用于二次电子发射的放大材料层，氧化物二次发射增强层和氮化硅的离子阻挡层，以提供具有改进的操作特性和耐久性的高效率，高亮度场致发射显示器。扩增材料包括铜 - 钡，铜 - 铍，金 - 钡，金 - 钙，银 - 镁和钨 - 钡 - 金，以及其他高放大因子材料，用于在场发射显示器内产生高级二次电子发射设备。对于增强的二次电子发射，可以用基本上由钡，铍，钙，镁或锶的氧化物组成的近单分子膜涂覆扩增材料层。在本公开中进一步描述了使用高放大因子膜作为荧光体偏置电极，以及荧光体偏置电位的变化以实现亮度或灰度级控制。

10. 发明授权

US6046539A Use of sacrificial masking layer and backside exposure in forming openings that typically receive light-emissive material 失效
标题翻译：在形成通常接收发光材料的开口中使用牺牲掩模层和背面曝光
公开(公告)号：US6046539A
公开(公告)日：2000-04-04
申请号：US846522
申请日：1997-04-29
申请人： Duane A. Haven , Arthur J. Learn , John D. Porter
发明人： Duane A. Haven , Arthur J. Learn , John D. Porter
IPC分类号： G03F7/20 , H01J9/227 , H01J29/08 , H01J29/32 , H01J29/87 , H01J31/12 , H01J29/10 , H01J1/62 , H01J31/00 , H01J63/04
CPC分类号： H01J29/085 , H01J31/127
摘要： Openings are created in a structure by a process in which a plate is furnished with a sacrificial patterned masking layer divided into multiple laterally separated mask portions. A primary layer of actinic material is provided over the masking layer and in space between the mask portions. Material of the primary layer not shadowed by a mask formed with the mask portions is backside exposed to actinic radiation. Material of the primary layer not exposed to the radiation is removed. Segments of the masking layer not covered by exposed material of the primary layer are then removed. Consequently, openings extend through the primary layer where the segments of the masking layer have been removed. The process is typically employed in forming an optical device such as a flat-panel cathode-ray tube display in which the openings in the primary layer receive light-emissive material.
摘要翻译：通过其中板配备有划分成多个横向分离的掩模部分的牺牲图案化掩模层的工艺在结构中产生开口。在掩模层之上和掩模部分之间的空间中提供光化材料的主层。未被掩模部分形成的掩模遮蔽的主层的材料背面暴露于光化辐射。不暴露于辐射的主层的材料被去除。然后去除未被主层的暴露材料覆盖的掩蔽层的部分。因此，开口延伸穿过主层，其中掩模层的段被去除。该方法通常用于形成诸如平板阴极射线管显示器的光学装置，其中初级层中的开口接收发光材料。

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