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    • 1. 发明授权
    • Electroacoustic transducer having compression screw mechanical bias
    • 具有压缩螺杆机械偏置的电声换能器
    • US06829198B1
    • 2004-12-07
    • US09416113
    • 1999-10-04
    • Robert S. JanusMichael D. JevnagerRaymond P. Pineault
    • Robert S. JanusMichael D. JevnagerRaymond P. Pineault
    • H04R1700
    • G01V1/38G01V1/04H04R1/44
    • An electro acoustic transducer has a housing having an axial threaded bore. A transducer driver element is axially aligned in the bore and has a first end mounted on an electrically conductive holder that is axially displaceable by a conductive screw member. A hemisphere on the other end of the driver element contacts a diaphragm for radiating acoustic signals. An electrical connector has a conductive coil spring coupled to the screw member and is electrically connected to the first end of the driver element via the coil spring, screw member, holder, and mounting plug. Another electrical connector is connected to the other end of the driver element via a conductive front plate, diaphragm, and hemisphere in one embodiment or a flexible lead in another embodiment. In both embodiments, the electrical connectors couple electrical driving signals to the driver elements to cause the driver elements to mechanically vibrate.
    • 电声换能器具有具有轴向螺纹孔的壳体。 传感器驱动元件在孔中轴向对准,并且具有安装在导电保持器上的第一端,其可由导电螺钉构件轴向移动。 驱动元件另一端的一个半球与隔膜接触,用于辐射声信号。 电连接器具有联接到螺钉构件的导电螺旋弹簧,并且经由螺旋弹簧,螺钉构件,保持器和安装插头电连接到驱动元件的第一端。 另一个电连接器在一个实施例中通过导电前板,隔膜和半球连接到驱动元件的另一端或另一实施例中的柔性引线。 在两个实施例中,电连接器将电驱动信号耦合到驱动元件以使驱动元件机械地振动。
    • 6. 发明授权
    • Method of forming electrode pattern of surface acoustic wave device
    • 形成表面声波装置电极图案的方法
    • US06760960B2
    • 2004-07-13
    • US10246624
    • 2002-09-19
    • Kenji SakaguchiToshiyuki Fuyutsume
    • Kenji SakaguchiToshiyuki Fuyutsume
    • H04R1700
    • H03H3/08G03F7/091Y10T29/42Y10T29/49401
    • A method of forming an electrode pattern of a surface acoustic wave device easily and reliably prevents the occurrence of an abnormality in the shape of a resist pattern. In the electrode pattern forming method, a resist layer is formed on a top surface of a piezoelectric substrate, and then exposed to ultraviolet rays through a photomask provided above the top surface of the piezoelectric substrate to form a resist pattern on the surface of the piezoelectric substrate. Furthermore, a conductor film is formed on the top surface of the piezoelectric substrate, and the resist pattern is removed by a liftoff method to form an electrode pattern of the surface acoustic wave device. Exposure is performed using ultraviolet rays having a wavelength which is completely absorbed into the piezoelectric substrate without reaching the bottom surface of the piezoelectric substrate.
    • 形成表面声波装置的电极图案的方法容易且可靠地防止抗蚀剂图案的形状发生异常。 在电极图案形成方法中,在压电基板的上表面上形成抗蚀剂层,然后通过设置在压电基板的顶表面上方的光掩模进行紫外线曝光,以在压电基板的表面上形成抗蚀剂图案 基质。 此外,在压电基板的顶面上形成导体膜,通过剥离法除去抗蚀剂图案,形成表面声波装置的电极图案。 使用具有完全吸收到压电基板中的波长的紫外线进行曝光,而不到达压电基板的底面。
    • 8. 发明授权
    • Microfabricated acoustic transducer with suppressed substrate modes
    • 具有抑制衬底模式的微型声学传感器
    • US06714484B2
    • 2004-03-30
    • US10280317
    • 2002-10-25
    • Igal LadabaumPaul A. Wagner
    • Igal LadabaumPaul A. Wagner
    • H04R1700
    • B06B1/0681B06B2201/76
    • A microfabricated acoustic transducer with suppressed substrate modes includes a diaphragm containing an upper electrode suspended above a substrate containing a lower electrode; the substrate may or may not contain electronic circuits. The substrate modes are suppressed by either thinning the substrate such that a longitudinal ringing mode occurs outside of the frequency band of interest or applying a judiciously designed damping material that absorbs acoustic energy from the substrate on the backside of the transducer substrate, or by both thinning the substrate and applying the damping material. The damping material has an acoustic impedance that matches the acoustic impedance of the substrate and is lossy.
    • 具有抑制衬底模式的微加压声换能器包括:隔膜,其包含悬浮在含有下电极的衬底上方的上电极; 衬底可以包含或可以不包含电子电路。 通过使衬底变薄来抑制衬底模式,使得纵向振铃模式发生在感兴趣的频带之外,或施加明智地设计的阻尼材料,其从换能器衬底的背面上的衬底吸收声能,或者通过减薄 衬底和施加阻尼材料。 阻尼材料具有与基底的声阻抗匹配的声阻抗并且是有损耗的。