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1. 发明授权

US11201032B2 Electron emitter and method of fabricating same 有权
公开(公告)号：US11201032B2
公开(公告)日：2021-12-14
申请号：US17022504
申请日：2020-09-16
申请人： ASML NETHERLANDS B.V.
发明人： Juying Dou , Zheng Fan , Tzu-Yi Kuo , Zhongwei Chen
IPC分类号： H01J37/073 , H01J9/04 , H01J37/065 , H01J1/304 , H01J1/14 , H01J9/02 , H01J37/26
摘要： Electron emitters and method of fabricating the electron emitters are disclosed. According to certain embodiments, an electron emitter includes a tip with a planar region having a diameter in a range of approximately (0.05-10) micrometers. The electron emitter tip is configured to release field emission electrons. The electron emitter further includes a work-function-lowering material coated on the tip.

2. 发明授权

US09646796B1 Carburized lutetium oxide doped molybdenum cathode and its fabrication method 有权
公开(公告)号：US09646796B1
公开(公告)日：2017-05-09
申请号：US14218680
申请日：2014-03-18
申请人： BEIJING UNIVERSITY OF TECHNOLOGY
发明人： Jin-Shu Wang , Wei Liu , Li-Ran Dong , Qiang Wang , Xiang Liu , Fan Zhou , Mei-Ling Zhou , Tie-Yong Zuo
IPC分类号： H01J19/06 , H01K1/04 , H01J1/14 , H01J1/28 , H01J1/142 , H01J1/20 , H01J9/04
CPC分类号： H01J1/28 , H01J1/14 , H01J1/142 , H01J1/20 , H01J9/042
摘要： A method of manufacturing carburized Lu2O3 doped Mo cathodes for thermionic emission for magnetrons is described. The Lu2O3 doped Mo powder is prepared by sol-gel method. The powder is reduced thoroughly in hydrogen atmosphere. Afterwards, the powder is die-pressed into pellets, followed by sintering in hydrogen and carburization in activated carbon powder to obtain the carburized Lu2O3 doped Mo cathode.

3. 发明申请

US20160329184A1 ARRAY OF CARBON NANOTUBE MICRO-TIP STRUCTURES 有权
标题翻译：碳纳米管微型结构阵列
公开(公告)号：US20160329184A1
公开(公告)日：2016-11-10
申请号：US15214779
申请日：2016-07-20
申请人： Tsinghua University , HON HAI PRECISION INDUSTRY CO., LTD.
发明人： YANG WEI , SHOU-SHAN FAN
IPC分类号： H01J1/14 , H01J1/304 , H01J9/04
CPC分类号： H01J1/14 , H01J1/3044 , H01J9/042 , H01J37/073 , H01J63/02 , H01J63/06 , H01J2201/196 , H01J2201/30411 , H01J2201/30469 , H01J2237/06316 , H01J2237/06333 , H01J2237/06341 , H01J2237/26 , H01J2237/28 , H01J2329/0455 , Y10T428/24132
摘要： An array of carbon nanotube micro-tip structure includes an insulating substrate and a plurality of patterned carbon nanotube film structures. The insulating substrate includes a surface. The surface includes an edge. A plurality of patterned carbon nanotube film structures spaced from each other. Each of the plurality of patterned carbon nanotube film structures is partially arranged on the surface of the insulating substrate. Each of the plurality of patterned carbon nanotube film structures comprises two strip-shaped arms joined together forming a tip portion protruding and suspending from the edge of the surface of the insulating substrate. Each of the two strip-shaped arms comprises a plurality of carbon nanotubes parallel to the surface of the insulating substrate.
摘要翻译：碳纳米管微尖端结构的阵列包括绝缘基板和多个图案化的碳纳米管薄膜结构。绝缘基板包括表面。表面包括边缘。多个图案化的碳纳米管薄膜结构彼此间隔开。多个图案化碳纳米管膜结构中的每一个部分地布置在绝缘基板的表面上。多个图案化碳纳米管膜结构中的每一个包括两个连接在一起的条形臂，形成从绝缘基板的表面的边缘突出并悬挂的末端部分。两个条形臂中的每一个包括平行于绝缘基板的表面的多个碳纳米管。

4. 发明授权

US09443691B2 Electron emission surface for X-ray generation 有权
标题翻译：用于X射线产生的电子发射表面
公开(公告)号：US09443691B2
公开(公告)日：2016-09-13
申请号：US14144187
申请日：2013-12-30
申请人： General Electric Company
发明人： Vance Scott Robinson , Carey Shawn Rogers , Sergio Lemaitre , Mark Alan Frontera , Sergiy Zalyubovskiy , Xi Zhang
IPC分类号： H01J35/06 , H01J29/48 , H01J29/04 , H01L23/367 , H01L23/373 , H01J3/26 , H01J29/00 , H01L33/44 , H01L33/64 , H01L23/31 , H01J1/14 , H01J1/15
CPC分类号： H01J29/484 , H01J1/14 , H01J1/15 , H01J3/26 , H01J29/006 , H01J29/04 , H01J29/485 , H01J35/06 , H01L23/3178 , H01L23/367 , H01L23/373 , H01L23/3736 , H01L23/3738 , H01L33/44 , H01L33/641 , H01L33/642 , H01L2924/0002 , Y10T428/24612 , Y10T428/24802 , Y10T428/24826 , Y10T428/24942 , Y10T428/2495 , H01L2924/00
摘要： Embodiments of the disclosure relate to electron emitters for use in conjunction with X-ray emitting devices. In certain embodiments the emitter includes features that prevent, limit, or control deflection of the electron emitter at operating temperatures. In this manner, the electron emitter may be kept substantially flat or at a desired curvature during operation.
摘要翻译：本公开的实施例涉及与X射线发射装置结合使用的电子发射器。在某些实施例中，发射器包括防止，限制或控制电子发射器在工作温度下的偏转的特征。以这种方式，电子发射器可以在操作期间保持基本上平坦或处于期望的曲率。

5. 发明授权

US09165737B2 High-brightness, long life thermionic cathode and methods of its fabrication 有权
标题翻译：高亮度，长寿命的热离子阴极及其制造方法
公开(公告)号：US09165737B2
公开(公告)日：2015-10-20
申请号：US13644281
申请日：2012-10-04
申请人： NuFlare Technology, Inc.
发明人： Victor Katsap
IPC分类号： H01J19/04 , H01J1/14 , H01J1/13 , H01J9/04 , H01J1/148 , H01J37/065
CPC分类号： H01J1/14 , H01J1/148 , H01J9/04 , H01J37/065 , H01J2237/06308
摘要： An improved cathode comprises a cone-shaped emitter with a carbon-based coating applied to the emitter cone surface, in which there is a narrow annular gap between the emitter body and the carbon coating. The gap prevents direct contact between the carbon coating and the crystalline emitting material, thereby preventing damaging interactions and extending the useful lifetime of the cathode.
摘要翻译：改进的阴极包括锥形发射器，其具有施加到发射体锥表面的碳基涂层，其中在发射体和碳涂层之间存在窄的环形间隙。间隙防止碳涂层和结晶发射材料之间的直接接触，从而防止损坏相互作用并延长阴极的使用寿命。

6. 发明授权

US08866371B2 Electric field discharge-type electron source 有权
标题翻译：电场放电型电子源
公开(公告)号：US08866371B2
公开(公告)日：2014-10-21
申请号：US14239144
申请日：2012-09-24
申请人： Hitachi High-Technologies Corporation
发明人： Souichi Katagiri , Takashi Ohshima , Sukehiro Ito
IPC分类号： H01J1/14 , H01J19/06 , H01K1/04
CPC分类号： H01J37/073 , H01J1/16 , H01J1/3044 , H01J9/025 , H01J9/04 , H01J37/06 , H01J2237/06316 , H01J2237/06341
摘要： Increasing the volume or weight of zirconia which is a diffusion and supply source, to extend the life of a field-emission type electron source causes a problem that the diffusion and supply source itself or a tungsten needle is easily subjected to damage. As another problem, although it is considered to form the diffusion and supply source using a thin film to avoid the above-described problem, it is difficult to stably obtain practical life exceeding 8,000 hours. It has been found that practical life exceeding 8,000 hours is stably obtained by providing a field-emission type electron source that has no chips or cracks in a diffusion and supply source and that can extend life with a little bit of an increase in the amount of the diffusion and supply source.
摘要翻译：增加作为扩散源和供应源的氧化锆的体积或重量，延长场致发射型电子源的寿命引起扩散和供给源本身或钨针容易受到损伤的问题。作为另一个问题，虽然考虑使用薄膜形成扩散和供应源以避免上述问题，但是难以稳定地获得超过8000小时的实际寿命。已经发现，通过提供在扩散和供给源中不产生切屑或裂纹的场发射型电子源，可以稳定地获得超过8000小时的实际寿命，并且可以延长使用寿命，同时增加使用量扩散和供应源。

7. 发明授权

US08247958B2 System, method and apparatus for multi-beam lithography including a dispenser cathode for homogeneous electron emission 有权
标题翻译：用于多光束光刻的系统，方法和装置，包括用于均匀电子发射的分配器阴极
公开(公告)号：US08247958B2
公开(公告)日：2012-08-21
申请号：US12750619
申请日：2010-03-30
申请人： Stijn Willem Herman Karel Steenbrink , Pieter Kruit
发明人： Stijn Willem Herman Karel Steenbrink , Pieter Kruit
IPC分类号： H01J19/14 , H01J1/20 , H01J1/14 , H01J1/28
CPC分类号： H01J37/065 , B82Y10/00 , B82Y40/00 , H01J1/28 , H01J37/3177 , H01J2237/3175 , H01J2237/31754 , H01J2237/31774
摘要： A dispenser cathode which is comprises an emission surface, a reservoir for material releasing, when heated, work-function-lowering particles, and at least one passage for allowing diffusion of work-function-lowering particles from said reservoir to said emission surface, and emission surface comprising at least one emission area and at least one non-emission area covered with emission-suppressing material and surrounding each emission area, said non-emission area comprising at least one passage connecting said reservoir with said non-emission area and debouching within a diffusion length distance from an emission area for allowing diffusion of work-function-lowering particles from said reservoir to said emission area.
摘要翻译：分配器阴极，其包括排放表面，用于材料释放的储存器，当加热时，功能降低颗粒和用于允许功能降低颗粒从所述储存器扩散到所述排放表面的至少一个通道，以及发射表面包括至少一个发射区域和被发射抑制材料覆盖并围绕每个发射区域的至少一个非发射区域，所述非发射区域包括将所述储层与所述非发射区域连接的至少一个通道并在与发射区域的扩散长度距离，用于允许作业功能降低颗粒从所述储存器扩散到所述发射区域。

8. 发明申请

US20120194057A1 ELECTRON EMITTING BODY AND X-RAY EMITTING DEVICE 审中-公开
标题翻译：电子发射体和X射线发射装置
公开(公告)号：US20120194057A1
公开(公告)日：2012-08-02
申请号：US13380741
申请日：2010-02-23
申请人： Ryouichi Suzuki , Yoshihisa Ishiguro , Masanori Haba
发明人： Ryouichi Suzuki , Yoshihisa Ishiguro , Masanori Haba
IPC分类号： H01J1/14
CPC分类号： H01J35/065 , H01J2201/30469 , H01J2235/068
摘要： Provided are an electron emitting body having a high electron beam density and an X-ray emitting device embedding the electron emitting body. The electron emitting body has a substrate, the surface of which forms a concave surface, and a carbon film comprising a large number of projections made of carbon and expanded two-dimensionally. The carbon crystal grows such that first a swell portion (22) gradually becomes larger and then a needle-like portion (23) grows from the head of the swell portion (22). The needle-like portion (23) has a graphene sheet obliquely wound therearound in a multi-layer fashion and has a hollow inside. The axis of a carbon projection (21) thus formed is substantially orthogonal to a line tangent to the concave surface (11), so that the axes of a plurality of the carbon projections (21) intersect with each other at the focal point (F) of the concave surface (11).
摘要翻译：提供具有高电子束密度的电子发射体和嵌入电子发射体的X射线发射装置。电子发射体具有其表面形成凹面的基板和由碳制成的多个突起二维膨胀的碳膜。碳晶体生长成使得首先使隆起部分（22）逐渐变大，然后从该隆起部分（22）的头部开始形成针状部分（23）。针状部（23）具有以多层方式倾斜缠绕的石墨烯片，在其内部具有中空。这样形成的碳突起（21）的轴线基本上垂直于与凹面（11）相切的线，使得多个碳突起（21）的轴线在焦点（F）处彼此相交）的凹面（11）。

9. 发明授权

US08022609B2 Thermal field emission cathode 有权
标题翻译：热场发射阴极
公开(公告)号：US08022609B2
公开(公告)日：2011-09-20
申请号：US12145036
申请日：2008-06-24
申请人： Zhong-Wei Chen , Juying Dou
发明人： Zhong-Wei Chen , Juying Dou
IPC分类号： H01J1/14 , H01J19/08
CPC分类号： H01J37/063 , H01J1/16 , H01J3/027 , H01J37/065 , H01J2237/06316 , H01J2237/06375
摘要： A thermal field emission cathode which is employed in an electron microscope, a critical dimension examine tool, an electron beam lithograph machine, an electron beam tester and other electron beam related systems as an electron source is disclosed. Embodiments disclose changing coating shape, coating position and shorten emitter length to extend the lifetime of the field emission cathode.
摘要翻译：公开了一种在电子显微镜中使用的热场发射阴极，临界尺寸检查工具，电子束光刻机，电子束测试仪和其他电子束相关系统作为电子源。实施例公开了改变涂层形状，涂层位置和缩短发射极长度以延长场致发射阴极的寿命。

10. 发明申请

US20110169390A1 MAGNETRON, MAGNETRON CATHODE BODY MANUFACTURING METHOD, AND CATHODE BODY 审中-公开
标题翻译： MAGNETRON，MAGNETRON CATHODE BODY MANUFACTURING METHOD AND CATHODE BODY
公开(公告)号：US20110169390A1
公开(公告)日：2011-07-14
申请号：US13063583
申请日：2009-09-17
申请人： Tadahiro Ohmi , Tetsuya Goto
发明人： Tadahiro Ohmi , Tetsuya Goto
IPC分类号： H01J7/26 , H01J1/14 , H01J1/00 , H01J9/04
CPC分类号： H01J25/587 , H01J23/05
摘要： It is an object of the present invention to obtain a cathode body capable of maintaining a long service life even when a high current flows therethrough. According to the present invention, it is possible to obtain a magnetron cathode body including, as a base material, a high-melting-point metal containing an electron emission material, and rare-earth boride coating a surface thereof. As the electron emission material and the high-melting-point metal, La2O3 and W are desirable, respectively. As the rare-earth boride, LaB6 is preferable.
摘要翻译：本发明的目的是获得即使当高电流流经时也能够保持长使用寿命的阴极体。根据本发明，可以获得包含作为基材的含有电子发射材料的高熔点金属和涂覆其表面的稀土硼化物的磁控阴极体。作为电子发射材料和高熔点金属，分别需要La 2 O 3和W。作为稀土硼化物，优选LaB6。

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