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    • 15. 发明授权
    • Run-to-run controller for use in microelectronic fabrication
    • 运行控制器用于微电子制造
    • US06587744B1
    • 2003-07-01
    • US09599357
    • 2000-06-20
    • Kevin D. StoddardBradley D. SchulzeKonstantinos Tsakalis
    • Kevin D. StoddardBradley D. SchulzeKonstantinos Tsakalis
    • G06F1900
    • G05B19/41885G05B2219/31086G05B2219/31104G05B2219/31422G05B2219/32388Y02P90/14Y02P90/20Y02P90/26Y02P90/285
    • A automated run-to-run controller for controlling manufacturing processes comprises set of processing tools, a set of metrology tools for taking metrology measurements from the processing tools, and a supervising station for managing and controlling the processing tools. The supervising station comprises an interface for receiving metrology data from the metrology tools and a number of variable parameter tables, one for each of the processing tools, collectively associated with a manufacturing process recipe. The supervising station also includes one or more internal models which relate received metrology data to one or more variables for a processing tool, and which can modify variables stored in the variable parameter table to control the process tools using feedback and/or feed-forward control algorithms. Feed-forward control algorithms may, in certain embodiments, be used to adjust process targets for closed loop feedback control. The supervising station may have a user interface by which different feedback or feed-forward model formats (single or multi-variate) may be interactively selected based upon experimental or predicted behavior of the system, and may also permit users to utilize their own models for run-to-run control.
    • 用于控制制造过程的自动运行控制控制器包括一组处理工具,一组用于从处理工具进行度量测量的计量工具,以及用于管理和控制处理工具的监控站。 监督站包括用于从计量工具接收测量数据的接口和多个可变参数表,每个可变参数表与制造过程配方共同关联的每个处理工具。 监督站还包括一个或多个内部模型,将接收到的计量数据与处理工具的一个或多个变量相关联,并且可以修改存储在可变参数表中的变量,以使用反馈和/或前馈控制来控制过程工具 算法。 在某些实施例中,可以使用前馈控制算法来调整闭环反馈控制的过程目标。 监督站可以具有用户界面,通过该用户界面可以基于系统的实验或预测行为来交互地选择不同的反馈或前馈模型格式(单变量或多变量),并且还可以允许用户利用它们自己的模型 运行控制。
    • 19. 发明授权
    • Method for material handling, materials handling cell and electric motor therefor
    • 材料处理方法,材料处理单元和电动机
    • US07844358B2
    • 2010-11-30
    • US11851387
    • 2007-09-06
    • Hardy Jeske
    • Hardy Jeske
    • G06F19/00B65G1/04
    • G05B19/41895G05B2219/31002G05B2219/31008G05B2219/32388Y02P90/285Y02P90/60
    • The invention relates to a method for materials handling via a number of materials handling cells by passing on materials handling containers, in which each materials handling cell includes a first electric motor and a first control unit, in which each materials handling container is assigned at least one data element including at least information about the way or the destination of the materials handling container, in which the data element is passed on to the next materials handling cell and stored there in the control unit, when the materials handling container is passed on there, and where the evaluation of the data element and the control of its passing on is performed in the first control unit contained in the first electric motor, as well as to a materials handling cell and to an electric motor therefor.
    • 本发明涉及一种用于通过传送材料处理容器的多种材料处理材料的材料处理方法,其中每个材料处理单元包括第一电动机和第一控制单元,其中每个材料处理容器至少被分配 一个数据元素至少包括关于材料处理容器的方式或目的地的信息,其中当材料处理容器在那里传递时,数据元素被传递到下一个材料处理单元并存储在控制单元中 ,并且在包含在第一电动机中的第一控制单元以及材料处理单元及其电动机中执行数据元素的评估和其传递的控制。
    • 20. 发明申请
    • METHOD FOR MATERIAL HANDLING, MATERIALS HANDLING CELL AND ELECTRIC MOTOR THEREFOR
    • 材料处理方法,材料处理单元及其电动机
    • US20080077254A1
    • 2008-03-27
    • US11851387
    • 2007-09-06
    • Hardy Jeske
    • Hardy Jeske
    • G05B19/02B60P1/00
    • G05B19/41895G05B2219/31002G05B2219/31008G05B2219/32388Y02P90/285Y02P90/60
    • The invention relates to a method for materials handling via a number of materials handling cells (C1, C2, C3, C4) by passing on materials handling containers (Cont), in which each materials handling cell (C1, C2, C3, C4) includes a first electric motor and a first control unit, in which each materials handling container (Cont) is assigned at least one data element including at least information about the way or the destination of the materials handling container (Cont), that the data element is passed on to the next materials handling cell (C1, C2, C3, C4) and stored there in the control unit, when the materials handling container (Cont) is passed on there, and that the evaluation of the data element and the control of its passing on is performed in the first control unit contained in the first electric motor, as well as to a materials handling cell and an electric motor therefor.
    • 本发明涉及一种通过传送材料处理容器(Cont)的多种材料处理细胞(C 1,C 2,C 3,C 4)的材料处理方法,其中每个材料处理池(C 1,C 2,C 3,C 4)包括第一电动机和第一控制单元,其中每个材料处理容器(Cont)被分配至少一个数据元素,至少包括关于材料处理容器的途径或目的地的信息 (Cont),当材料处理容器(Cont)在那里传递时,数据元素被传递到下一个材料处理单元(C 1,C 2,C 3,C 4)并存储在控制单元中 并且在包含在第一电动机中的第一控制单元以及材料处理单元和电动机中执行数据元素的评估和其传递的控制。