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    • 92. 发明授权
    • Resonance device and filter including the same
    • 共振装置和滤波器包括相同
    • US09209505B2
    • 2015-12-08
    • US14288635
    • 2014-05-28
    • Innertron, Inc.
    • Soo Duk SeoHak Rae ChoMoon Bong Ko
    • H03H11/00H01P1/20
    • H01P1/2053H01P1/20
    • A resonance device including a plurality of signal input/output ports, further including: a plurality of resonators arranged in a state of being spaced apart from each other; and a notch resonator formed at a side of the plurality of resonators, wherein the notch resonator includes: a laminated part having a laminated structure formed by layering a plurality of conductive layers; a first transmitting layer connected to one of the plurality of conductive layers; and a bridge connected between the first transmitting layer and one of the plurality of resonators, wherein one of the plurality of signal input/output ports is connected to the bridge.
    • 一种包括多个信号输入/输出端口的谐振装置,还包括:以彼此间隔开的状态布置的多个谐振器; 以及形成在所述多个谐振器的一侧的陷波谐振器,其中所述切口谐振器包括:层叠部,其具有通过层叠多个导电层而形成的层叠结构; 连接到所述多个导电层之一的第一透射层; 连接在所述第一透射层和所述多个谐振器中的一个之间的桥,其中所述多个信号输入/输出端口中的一个连接到所述桥。
    • 95. 发明申请
    • Impedance-Matching Network Using BJT Switches in Variable-Reactance Circuits
    • 阻抗匹配网络在可变电抗电路中使用BJT开关
    • US20120188007A1
    • 2012-07-26
    • US13010647
    • 2011-01-20
    • Gideon J. Van ZylGennady G. Gurov
    • Gideon J. Van ZylGennady G. Gurov
    • H03H11/00H03K3/00
    • H03H11/30H01J37/32183H03H5/12H03H7/38H03K17/16H03K17/60H03K17/68H05H1/46H05H2001/4682
    • This disclosure describes systems, methods, and apparatuses for impedance-matching radio frequency power transmitted from a radio frequency generator to a plasma load in a semiconductor processing chamber. Impedance-matching can be performed via a match network having a variable-reactance circuit. The variable-reactance circuit can comprise one or more reactive elements all connected to a first terminal and selectively shorted to a second terminal via a switch. The switch can comprise a bipolar junction transistor (BJT) or insulated gate bipolar transistor (IGBT) controlled via bias circuitry. In an on-state, the BJT base-emitter junction is forward biased, and AC is conducted between a collector terminal and a base terminal. Thus, AC passes through the BJT primarily from collector to base rather than from collector to emitter. Furthermore, the classic match network topology used with vacuum variable capacitors can be modified such that voltages do not overload the BJT's in the modified topology.
    • 本公开描述了用于将从射频发生器发送的射频功率阻抗匹配到半导体处理室中的等离子体负载的系统,方法和装置。 可以通过具有可变电抗电路的匹配网络来执行阻抗匹配。 可变电抗电路可以包括一个或多个无功元件,其全部连接到第一端子,并经由开关选择性地短路到第二端子。 开关可以包括通过偏置电路控制的双极结型晶体管(BJT)或绝缘栅双极晶体管(IGBT)。 在导通状态下,BJT基极 - 发射极结正向偏置,并且AC在集电极端子和基极端子之间传导。 因此,AC主要通过BJT从集电器到基极而不是从集电极到发射极。 此外,可以修改与真空可变电容器一起使用的经典匹配网络拓扑,使得电压不会在修改的拓扑中使BJT过载。
    • 98. 发明申请
    • RESISTOR CIRCUIT
    • 电阻电路
    • US20090284311A1
    • 2009-11-19
    • US11911637
    • 2006-05-25
    • Koichi Ito
    • Koichi Ito
    • H03H11/00
    • H03H11/245H03F1/56H03F3/45183H03F2203/45638H03F2203/45641H03F2203/45686H03F2203/45691
    • Operations as a variable resistor are favorably realized even when a drain-source voltage of a variable MOS resistor and that of a reference MOS resistor are not the same.A gate voltage Vp12 of the variable MOS resistor is controlled with reference to a gate voltage Vp11 which is controlled such that a voltage generated in the reference MOS resistor is controlled to be the same as a reference voltage. A resistor is connected in parallel with the reference MOS resistor between the drain and source thereof, the resistor including resistor bodies R11 and R12 having the same resistance connected in series. Half of a drain-source voltage Vds of the reference MOS resistor is detected at an intermediate point of the resistor having resistor bodies connected in series. The gate voltage Vp12 of the variable resistor is obtained by subtracting Vds/2 from the gate voltage Vp11 of the reference MOS resistor.
    • 即使当可变MOS电阻器和参考MOS电阻器的漏极 - 源极电压不相同时,也可以实现作为可变电阻器的操作。 参考栅极电压Vp11控制可变MOS电阻器的栅极电压Vp12,栅极电压Vp11被控制为使得参考MOS电阻器中产生的电压被控制为与参考电压相同。 电阻器与漏极和源极之间的参考MOS电阻并联连接,电阻器包括具有相同电阻串联连接的电阻体R11和R12。 在具有串联连接的电阻体的电阻器的中间点处检测参考MOS电阻器的漏极 - 源极电压Vds的一半。 可变电阻器的栅极电压Vp12通过从参考MOS电阻器的栅极电压Vp11减去Vds / 2来获得。