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21. 发明授权

US09766266B2 Method of advancing a probe tip of a scanning microscopy device towards a sample surface, and device therefore 有权
公开(公告)号：US09766266B2
公开(公告)日：2017-09-19
申请号：US15306742
申请日：2015-04-28
申请人： Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
发明人： Hamed Sadeghian Marnani , Geerten Frans Ijsbrand Kramer , Teunis Cornelis van den Dool
IPC分类号： G01Q20/00 , G01Q10/00 , G01Q60/24 , G01Q10/06 , B82Y35/00
CPC分类号： G01Q10/06 , B82Y35/00
摘要： The invention is directed at a method of advancing a probe tip of a probe of a scanning microscopy device towards a sample surface. The scanning microscopy device comprises the probe for scanning the sample surface for mapping nanostructures on the sample surface. The probe tip of the probe is mounted on a cantilever arranged for bringing the probe tip in contact with the sample surface. The method comprises controlling, by a controller, an actuator system of the device for moving the probe to the sample surface, and receiving, by the controller, a sensor signal indicative of at least one operational parameter of the probe for providing feedback to perform said controlling. The method further comprises maintaining, during said controlling, an electric field between the sample surface and the probe tip, and evaluating the sensor signal indicative of the at least one operational parameter for determining an influence on said probe by said electric field, for determining proximity of the sample surface relative to the probe tip. The invention is further directed at a scanning microscopy device comprising a probe for scanning a sample surface for mapping nanostructures thereon.

22. 发明授权

US09689891B2 Automatic gain tuning in atomic force microscopy 有权
公开(公告)号：US09689891B2
公开(公告)日：2017-06-27
申请号：US13117238
申请日：2011-05-27
申请人： Christopher Ryan Moon
发明人： Christopher Ryan Moon
IPC分类号： G01Q60/24 , G01Q10/06 , B82Y35/00 , G01Q60/36
CPC分类号： G01Q10/065 , B82Y35/00 , G01Q60/363
摘要： A method for optimizing loop gain of an atomic force microscope (AFM) apparatus includes determining a change in gain of the physical system and adjusting a controller frequency response of the controller in an AFM loop to compensate for the determined change in gain. The AFM loop has a corresponding loop response that includes the product of the controller frequency response and a physical system response of the physical system.

23. 发明授权

US09678103B2 Automatic tuning of atomic force microscope 有权
公开(公告)号：US09678103B2
公开(公告)日：2017-06-13
申请号：US13283756
申请日：2011-10-28
申请人： Daniel Y Abramovitch , Christopher Ryan Moon
发明人： Daniel Y Abramovitch , Christopher Ryan Moon
IPC分类号： G05B13/02 , G01Q10/06 , B82Y35/00 , G01Q20/02 , G01Q60/24
CPC分类号： G01Q10/065 , B82Y35/00 , G01Q20/02 , G01Q60/24
摘要： An atomic force microscope (AFM) comprises a physical system and a controller comprising a plurality of digital filters and configured to control the physical system. The AFM is tuned by performing automatic loop shaping on a loop response defined by a frequency response of the physical system and a frequency response of the controller, and adjusting a gain of the controller according to a peak in a magnitude of the loop response.

24. 发明授权

US09671424B2 Methods and systems for optimizing frequency modulation atomic force microscopy 有权
公开(公告)号：US09671424B2
公开(公告)日：2017-06-06
申请号：US14384791
申请日：2013-03-13
申请人： The Royal Institution for the Advancement of Learning/McGill University
发明人： Aleksander Labuda , Peter Grutter , Yoichi Miyahara , William Paul , Antoine Roy-Gobeil
IPC分类号： G01Q60/24 , G01Q30/06 , G01Q60/34
CPC分类号： G01Q60/24 , G01Q30/06 , G01Q60/34
摘要： Energy dissipation measurements in Frequency Modulation-Atomic Force Microscopy (FM-AFM) should provide additional information for dynamic force measurements as well as energy dissipation maps for robust material properties imaging as they should not be dependent directly upon the cantilever surface interaction regime. However, unexplained variabilities in experimental data have prevented progress in utilizing such energy dissipation studies. The inventors have demonstrated that the frequency response of the piezoacoustic cantilever excitation system, traditionally assumed flat, can actually lead to surprisingly large apparent damping by the coupling of the frequency shift to the drive-amplitude signal. Accordingly, means for correcting this source of apparent damping are presented allowing dissipation measurements to be reliably obtained and quantitatively compared to theoretical models. The methods are non-destructive and can be both easily and routinely integrated into FM-AFM measurements within vacuum environments where measurements exploiting prior art solutions cannot be performed.

25. 发明申请

US20160362338A1 USE OF STEROLS AS AN ADDITIVE IN ASPHALT BINDER 审中-公开
标题翻译：使用甾体作为添加剂在ASPHALT BINDER
公开(公告)号：US20160362338A1
公开(公告)日：2016-12-15
申请号：US15179858
申请日：2016-06-10
申请人： ALM Holding Company , Ergon Asphalt & Emulsions, Inc.
发明人： Gerald H. Reinke , Gaylon L. Baumgardner , Andrew Hanz
IPC分类号： C04B26/26 , C04B24/00 , G01Q60/24 , C04B24/02
CPC分类号： C04B26/26 , C08L91/00 , C08L95/00 , C08L2207/22 , C08L2555/34 , C08L2555/64 , Y02W30/95 , C04B18/167
摘要： Disclosed are asphalt binder compositions that include an anti-aging additive. The anti-aging additive improves various rheological properties. Methods of making such asphalt binder compositions and pavements are disclosed.
摘要翻译：公开了包括抗老化添加剂的沥青粘合剂组合物。抗老化添加剂可改善各种流变性能。公开了制备这种沥青粘合剂组合物和路面的方法。

26. 发明授权

US09442132B2 Atomic force microscope drying system and atomic force microscope 有权
标题翻译：原子力显微镜干燥系统和原子力显微镜
公开(公告)号：US09442132B2
公开(公告)日：2016-09-13
申请号：US14626612
申请日：2015-02-19
申请人： National Tsing Hua University
发明人： Fan-Gang Tseng , Joe-Ming Chang
IPC分类号： G01Q60/24 , G01Q30/12 , B82Y35/00
CPC分类号： G01Q30/12 , B82Y35/00
摘要： A drying system, which can be implemented in an atomic force microscopy (AFM) machine according to the invention, includes an elastomer having elasticity and disposed between an AFM scan head device and a platen to form a chamber. A sample supporting substrate is disposed in the chamber and for placement of a specimen. A gas inlet pipeline extends from an outside of the chamber to an inside of the chamber to introduce a drying gas into the chamber. A gas outlet pipeline extends from the inside of the chamber to the outside of the chamber to exhaust the drying gas out of the chamber. Using the mechanism of introducing and exhausting the drying gas can exhaust the moisture out of the chamber, so that the relative humidity (RH) is decreased below 5% and a constant internal pressure is held in the space to become stable.
摘要翻译：可以在根据本发明的原子力显微镜（AFM）机器中实施的干燥系统包括弹性体，其具有弹性并且设置在AFM扫描头装置和压板之间以形成室。样品支撑衬底设置在腔室中并用于放置样品。气体入口管道从腔室的外部延伸到腔室的内部，以将干燥气体引入腔室。气体出口管道从腔室的内部延伸到腔室的外部，以将干燥气体排出腔室。使用引入和排出干燥气体的机构可以将水分从室中排出，使得相对湿度（RH）降低到5％以下，并且在该空间内保持恒定的内部压力以变得稳定。

27. 发明授权

US09279828B2 Sample fixing member for atomic force microscope 有权
标题翻译：原子力显微镜样品固定件
公开(公告)号：US09279828B2
公开(公告)日：2016-03-08
申请号：US14374733
申请日：2013-01-29
申请人： NITTO DENKO CORPORATION
发明人： Youhei Maeno , Yoshinori Suzuki
IPC分类号： G01Q30/20 , C01B31/02 , G01Q60/24 , B82Y15/00
CPC分类号： G01Q30/20 , C01B32/16 , C01B2202/08 , Y10S977/752
摘要： Provided is a sample fixing member for an atomic force microscope capable of reducing the drift amount of a sample during measurement. A sample fixing member for an atomic force microscope of the present invention includes a fibrous columnar structure including a plurality of fibrous columnar objects each having a length of 200 μm or more.
摘要翻译：本发明提供一种能够减少测定时的样品的漂移量的原子力显微镜用样品固定构件。本发明的原子力显微镜用样品固定构件包括具有长度为200μm以上的多个纤维状柱状体的纤维状柱状结构体。

28. 发明授权

US09262819B1 System and method for estimating spatial characteristics of integrated circuits 有权
标题翻译：用于估计集成电路空间特性的系统和方法
公开(公告)号：US09262819B1
公开(公告)日：2016-02-16
申请号：US14497969
申请日：2014-09-26
申请人： GLOBALFOUNDRIES INC.
发明人： Taher E. Kagalwala , Narender Rana , Yunlin Zhang
IPC分类号： G06K9/00 , G06T7/00 , H01J37/28 , G01N23/225 , G01Q60/24
CPC分类号： G01N23/225 , G01Q60/24 , G06T7/001 , G06T2207/10061 , G06T2207/20084 , G06T2207/30148 , H01J37/28 , H01J2237/24592 , H01J2237/2816 , H01J2237/2817
摘要： Methods of the present disclosure can include a method for estimating a spatial characteristic of an integrated circuit (IC), the method comprising: calculating a correlation between a dimension of a photoresist layer and exposure to a scanning electron microscope (SEM) for at least one reference IC pattern in the photoresist layer, the correlation providing a relationship between the dimension of the photoresist and the spatial characteristic, wherein the calculating is based on: an SEM image of the at least one reference IC pattern produced from reducing the dimension of the photoresist layer with the SEM from an initial value to a reduced value, the initial value of the dimension, and the reduced value of the dimension; and estimating the spatial characteristic of a target IC based on the correlation.
摘要翻译：本公开的方法可以包括用于估计集成电路（IC）的空间特性的方法，所述方法包括：计算光致抗蚀剂层的尺寸和暴露于扫描电子显微镜（SEM）之间的相关性至少一个所述相关性提供光致抗蚀剂的尺寸与空间特性之间的关系，其中所述计算基于：通过减小光致抗蚀剂的尺寸而产生的至少一个参考IC图案的SEM图像层的SEM从初始值到减小的值，维度的初始值和尺寸的减小值; 以及基于所述相关性来估计目标IC的空间特性。

29. 发明申请

US20160025771A1 SCANNING PROBE MICROSCOPE HEAD DESIGN 有权
标题翻译：扫描探针显微镜头设计
公开(公告)号：US20160025771A1
公开(公告)日：2016-01-28
申请号：US14805679
申请日：2015-07-22
申请人： Angstrom Science, Inc.
发明人： Andrew Norman Erickson , Stephen Bradley Ippolito , Kyle Alfred Hofstatter
IPC分类号： G01Q20/02 , G01Q60/38 , G01Q60/24 , G02B6/26 , G02B6/255
CPC分类号： G01Q20/02 , G01Q60/24 , G01Q60/38 , G02B6/2551 , G02B6/262
摘要： A SPM head incorporates a probe and a cantilever on which the probe is mounted. The cantilever has a planar reflecting surface proximate a free end of the cantilever. The cantilever extends from a mechanical mount and a single-mode optical fiber is supported by the mechanical mount to provide a beam axis at an angle away from normal relative to the reflecting surface.
摘要翻译： SPM头包含探头和安装探头的悬臂。悬臂具有靠近悬臂的自由端的平面反射表面。悬臂从机械安装座延伸，并且单模光纤由机械安装座支撑，以提供与相对于反射表面成一定角度的光束轴。

30. 发明申请

US20150192604A1 HOLDER FOR PROBE MICROSCOPE, PROBE MICROSCOPE AND SPECIMEN MEASUREMENT METHOD 审中-公开
标题翻译：探针显微镜，探针显微镜和样本测量方法
公开(公告)号：US20150192604A1
公开(公告)日：2015-07-09
申请号：US14417407
申请日：2012-07-27
申请人： Tsuyoshi Yamamoto , Seiji Heike , Akira Nambu , Tomihiro Hashizume , Hideaki Koizumi
发明人： Tsuyoshi Yamamoto , Seiji Heike , Akira Nambu , Tomihiro Hashizume , Hideaki Koizumi
IPC分类号： G01Q30/20 , G01Q60/24
CPC分类号： G01Q30/20 , G01Q30/02 , G01Q30/10 , G01Q30/14 , G01Q60/24
摘要： At the time of carrying out measurement of a biological tissue with a probe microscope, measurement is to be realized while maintain survival conditions for a cell.As a holder for the probe microscope, a measurement holder including: a container in which a measurement object is housed; a first cover section which covers at least a part of the measurement object and has an aperture for inserting a measurement probe; and a second cover section which is connected to the first cover section, covers the container, and has an aperture for inserting the measurement probe, is used.
摘要翻译：在用探针显微镜进行生物体组织的测定时，要保持细胞的生存条件，进行测定。作为探针显微镜的保持器，测量保持器包括：容纳测量对象的容器; 第一覆盖部分，其覆盖所述测量对象的至少一部分并且具有用于插入测量探针的孔; 并且连接到第一盖部分的第二盖部分覆盖容器，并且具有用于插入测量探针的孔。

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