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    • 31. 发明授权
    • Method for fabricating semiconductor device with metal line
    • 用金属线制造半导体器件的方法
    • US07648909B2
    • 2010-01-19
    • US11321533
    • 2005-12-30
    • Hae-Jung LeeSang-Hoon ChoSuk-Ki Kim
    • Hae-Jung LeeSang-Hoon ChoSuk-Ki Kim
    • H01L21/4763
    • H01L21/76877H01L21/32115H01L21/32136H01L21/76843H01L21/76849
    • A method for fabricating a semiconductor device includes forming an inter-layer insulation layer on a substrate; forming openings in the inter-layer insulation layer; forming a metal barrier layer in the openings and on the inter-layer insulation layer; forming a first conductive layer on the metal barrier layer and filled in the openings; etching the first conductive layer to form interconnection layers in the openings and to expose portions of the metal barrier layer, the interconnection layers being inside the openings and at a depth from a top of the openings; etching the exposed portions of the metal barrier layer to obtain a sloped profile of the metal barrier layer at top lateral portions of the openings; forming a second conductive layer over the inter-layer insulation layer, the interconnection layers and the metal barrier layer with the sloped profile; and patterning the second conductive layer to form metal lines.
    • 一种制造半导体器件的方法包括在衬底上形成层间绝缘层; 在层间绝缘层中形成开口; 在开口和层间绝缘层上形成金属阻挡层; 在所述金属阻挡层上形成第一导电层并填充在所述开口中; 蚀刻所述第一导电层以在所述开口中形成互连层并且暴露所述金属阻挡层的部分,所述互连层位于所述开口内部以及在距所述开口顶部的深度处; 蚀刻金属阻挡层的暴露部分以在开口的顶侧部分处获得金属阻挡层的倾斜轮廓; 在所述层间绝缘层上形成第二导电层,所述互连层和所述金属阻挡层具有所述倾斜轮廓; 并且图案化第二导电层以形成金属线。
    • 35. 发明授权
    • Semiconductor memory device and its driving method
    • 半导体存储器件及其驱动方法
    • US07821846B2
    • 2010-10-26
    • US12240459
    • 2008-09-29
    • Seok-Cheol Yoon
    • Seok-Cheol Yoon
    • G11C7/10
    • G11C7/1045
    • A semiconductor memory device including a first latch that latches a Mode Register Set (MRS) code consisting of multiple bits in response to an MRS command pulse, a code controller that generates a control signal in response to a code value of preset bits out of an output signal from the first latch, a second latch that selectively latches the output signal from the first latch in response to the control signal and a mode decoder that decodes an output signal from the second latch to output an operation mode.
    • 一种半导体存储器件,包括:第一锁存器,其响应于MRS指令脉冲锁存由多个位组成的模式寄存器组(MRS)代码;代码控制器,其响应于预定位的代码值而生成控制信号 来自第一锁存器的输出信号;响应于控制信号选择性地锁存来自第一锁存器的输出信号的第二锁存器;以及解码来自第二锁存器的输出信号以输出操作模式的模式解码器。
    • 36. 发明授权
    • Semiconductor memory device having test mode for data access time
    • 半导体存储器件具有用于数据存取时间的测试模式
    • US07818526B2
    • 2010-10-19
    • US11022828
    • 2004-12-28
    • Ji-Eun JangKee-Teok Park
    • Ji-Eun JangKee-Teok Park
    • G06F12/00G06F13/00G06F13/28G11C29/00G11C7/00
    • G11C29/02G11C7/1051G11C7/106G11C7/1066G11C29/022G11C29/028G11C29/50012
    • A semiconductor memory device for measuring a data access time by controlling data output operation, including: a pipe latch control unit for generating an input control signal based on a test mode signal; a pipe latch unit for receiving data and controlling the data according to a CAS latency in synchronization with a clock signal at a normal mode or passing the data without synchronization with the clock signal at a test mode based on the input control signal; an output control unit for generating an output node control signal based on the test mode signal; and an output unit for controlling an output data outputted from the pipe latch means according to the CAS latency in synchronization with the clock signal at the normal mode or passing the output data without synchronization with the clock signal at the test mode based on the output node control signal.
    • 一种用于通过控制数据输出操作来测量数据访问时间的半导体存储器件,包括:管锁存器控制单元,用于基于测试模式信号产生输入控制信号; 管道锁存单元,用于基于所述输入控制信号,在测试模式下,与正常模式下的时钟信号同步地接收数据并根据CAS延迟来控制所述数据,或者与所述时钟信号同步地传送所述数据; 输出控制单元,用于基于测试模式信号产生输出节点控制信号; 以及输出单元,用于基于所述输出节点,在与所述正常模式下的所述时钟信号同步地控制从所述管锁存装置输出的输出数据,或者使所述输出数据与所述测试模式下的所述时钟信号同步, 控制信号。
    • 40. 发明授权
    • Semiconductor memory device with signal aligning circuit
    • 具有信号对准电路的半导体存储器件
    • US07804723B2
    • 2010-09-28
    • US11478092
    • 2006-06-30
    • Hwang HurChang-Ho Do
    • Hwang HurChang-Ho Do
    • G11C7/00
    • G11C29/34G11C7/1006G11C7/22G11C8/16G11C29/02G11C29/022G11C29/1201G11C2207/108
    • A signal aligning circuit includes a plurality of pads receiving input signals in parallel 1 bit by 1 bit; a first transferring unit for transferring the input signals as first signals in synchronization with a first clock signal of an internal clock, and transferring the input signals as second signals in synchronization with a second clock signal of the internal clock; a second transferring unit for transferring the first signals in synchronization with the second clock signal of the internal clock; and an aligning unit for aligning the first and second signals transferred from the first and second transferring units and outputting the aligned signal as output signals.
    • 信号对准电路包括多个焊盘,1比特1比特并行地接收输入信号; 第一传送单元,用于将输入信号作为与内部时钟的第一时钟信号同步的第一信号传送,并且将输入信号作为与内部时钟的第二时钟信号同步的第二信号传送; 第二传送单元,用于与所述内部时钟的第二时钟信号同步地传送所述第一信号; 以及对准单元,用于对准从第一和第二传送单元传送的第一和第二信号,并输出对准的信号作为输出信号。