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51. 发明申请

US20050117163A1 High sensitivity scanning probe system 失效
标题翻译：高灵敏度扫描探针系统
公开(公告)号：US20050117163A1
公开(公告)日：2005-06-02
申请号：US10726276
申请日：2003-12-02
申请人： Tuck Ng , Hui Chua , Osami Sasaki
发明人： Tuck Ng , Hui Chua , Osami Sasaki
IPC分类号： G01Q20/02 , G01Q30/02 , G01Q60/24 , G01B9/02
CPC分类号： G01Q20/02
摘要： The present invention provides a hybrid optical and interferometric atomic force microscope system (40) for monitoring a cantilever probe (46). A light source (42) provides a light beam which is focussed on the back of the cantilever probe (46). The light reflected off the probe is split into two beams of different path lengths and are recombined to form an interference beam (58). This interference beam (58) is passed through a grating (102) having substantially the same period and orientation as the interference beam pattern. The light transmitted through the grating (102) illuminates a photodetector (122) to give a signal according to the intensity of the light falling on the photodetector. The photodetector output signal is sent to a positioning system (126), which in turn gives a signal to the piezoelectric system (54) so that the probe (46) follows the sample (50) surface. This signal is integrated as a function of position across the scanned area to represent a characteristic of the sample surface. An array of light beams, cantilever probes and photodetectors are also provided, and a plurality of characteristics may be obtained by performing a single scan on the sample surface. Actuators are also provided on the grating (102) and mirrors in the interferometer (60, 60a, 60b) to modulate the fringes of the interference beam (58) and cancel out noise in the microscope system (40).
摘要翻译：本发明提供一种用于监测悬臂探头（46）的混合光学和干涉原子力显微镜系统（40）。光源（42）提供聚焦在悬臂探头（46）背面的光束。从探头反射的光被分成不同路径长度的两个光束，并且被重组以形成干涉光束（58）。该干涉光束（58）通过具有与干涉光束图案基本相同的周期和取向的光栅（102）。透过光栅（102）的光照射光电检测器（122），以根据落在光电检测器上的光的强度给出信号。光电检测器输出信号被发送到定位系统（126），该定位系统又向压电系统（54）提供信号，使得探头（46）跟随样品（50）表面。该信号作为穿过扫描区域的位置的函数被积分，以表示样品表面的特征。还提供了一组光束，悬臂探针和光电检测器，并且可以通过在样品表面上执行单次扫描来获得多个特性。激光器还设置在光栅（102）和干涉仪（60,60a，60b）中的反射镜上，以调制干涉光束（58）的边缘并消除显微镜系统（40）中的噪声。

52. 发明授权

US06891159B2 Converting scanning electron microscopes 失效
标题翻译：转换扫描电子显微镜
公开(公告)号：US06891159B2
公开(公告)日：2005-05-10
申请号：US10610345
申请日：2003-06-30
申请人： Anjam Khursheed , Thiam Leong Thong
发明人： Anjam Khursheed , Thiam Leong Thong
IPC分类号： G01N23/00 , G01Q30/02 , G21K7/00 , H01J37/28
CPC分类号： H01J37/28 , H01J2237/2802
摘要： A device for converting a scanning electron microscope (SEM) to a scanning transmission electron microscope (STEM) is adapted to be mounted on a conventional SEM. The device has a casing mountable on the SEM and provides support for a specimen to be scanned by a beam of primary electrons exiting the objective lens of the SEM. The casing defines a pathway allowing transmission electrons that have passed through the specimen to be detected. The device may have a magnet mountable on the casing for generating a transverse magnetic field to deflect the transmission electrons within the casing. A magnetic lens may be mounted within the casing for focusing the beam of primary electrons onto the specimen. The secondary electron detector of the SEM may be used to detect secondary electrons emitted from a target excited by the transmitted electrons. Alternatively, an electron detector may be mounted within the casing for detecting the transmitted electrons.
摘要翻译：用于将扫描电子显微镜（SEM）转换成扫描透射电子显微镜（STEM）的装置适于安装在传统的SEM上。该装置具有可安装在SEM上的壳体，并且通过离开SEM的物镜的一次电子束来扫描样品的支撑。壳体限定允许透射通过要检测的样品的电子的途径。该装置可以具有可安装在壳体上的磁体，用于产生横向磁场以使壳体内的透射电子偏转。磁性透镜可以安装在壳体内，用于将一次电子束聚焦到样品上。 SEM的二次电子检测器可以用于检测从被透射电子激发的靶发射的二次电子。或者，可以在壳体内安装电子检测器，以检测发射的电子。

53. 发明授权

US06885000B1 Method and apparatus to correct for stage motion in E-beam inspection 有权
标题翻译：在电子束检查中校正舞台运动的方法和装置
公开(公告)号：US06885000B1
公开(公告)日：2005-04-26
申请号：US10702270
申请日：2003-11-06
申请人： David L. Adler
发明人： David L. Adler
IPC分类号： G01Q10/00 , G01Q30/02 , G01N23/22 , H01J37/26 , G01N21/00 , H01J37/244
CPC分类号： H01J37/26 , G01N23/22 , H01J2237/226 , H01J2237/2446 , H01J2237/24495 , H01J2237/2817
摘要： One embodiment disclosed relates to an apparatus for inspecting a substrate. The apparatus includes at least an illumination system, a stage, a multiple-pixel detector, an imaging system, a deflector, and a deflector controller. The illumination system is configured to expose at least a portion of the substrate to an incident beam which causes said portion to emit radiation. The stage holds the substrate and moves the substrate relative to the beam during said exposure of the substrate. The imaging system images the emitted radiation onto the multi-pixel detector, which includes an array of detector elements configured to detect the emitted radiation. The deflector is configured to deflect the emitted radiation under control of the deflector controller. The deflection is controlled so as to compensate for the motion of the substrate relative to the beam.
摘要翻译：所公开的一个实施例涉及用于检查基板的装置。该装置至少包括照明系统，舞台，多像素检测器，成像系统，偏转器和偏转器控制器。照明系统被配置为将衬底的至少一部分暴露于引起所述部分发射辐射的入射光束。在所述衬底的曝光期间，所述台架保持所述衬底并相对于所述光束移动所述衬底。成像系统将发射的辐射成像到多像素检测器上，该多像素检测器包括被配置为检测发射的辐射的检测器元件的阵列。偏转器被配置为在偏转器控制器的控制下偏转发射的辐射。控制偏转以补偿基板相对于梁的运动。

54. 发明申请

US20050061975A1 Electron microscope observation system and observation method 有权
标题翻译：电子显微镜观察系统及观察方法
公开(公告)号：US20050061975A1
公开(公告)日：2005-03-24
申请号：US10963815
申请日：2004-10-14
申请人： Hideo Todokoro
发明人： Hideo Todokoro
IPC分类号： G01N23/04 , G01Q10/00 , G01Q30/02 , G01Q30/04 , H01J37/302 , H01J37/304 , G01N23/00
CPC分类号： H01J37/3023 , G01N23/04 , H01J37/304 , H01J2237/304 , H01J2237/30411 , H01J2237/30416
摘要： An electron microscope observation system and an observation method are provided. According to one aspect of the invention, an observation appointment and approval screen is displayed on the two image display units, and the sample preparation-processed in the observation center side based on an instruction given from the operation center is loaded, and observation of the sample is executed based on sample observation condition information to output image information, and the observation image is displayed on the two image display units, and charge processing is executed based on a content level of the observation including preparation processing of the sample and occupying hours of the electron microscope to display the charge processing result.
摘要翻译：提供电子显微镜观察系统和观察方法。根据本发明的一个方面，在两个图像显示单元上显示观察约会和批准屏幕，并且基于从操作中心给出的指令来加载在观察中心侧处理的样本，并且观察基于样本观察条件信息执行样本以输出图像信息，并且将观察图像显示在两个图像显示单元上，并且基于包括样本的准备处理和观察时间的观察的内容水平执行计费处理电子显微镜显示充电处理结果。

55. 发明授权

US06864481B2 Probe for scanning probe microscope 有权
标题翻译：探针扫描探针显微镜
公开(公告)号：US06864481B2
公开(公告)日：2005-03-08
申请号：US10308796
申请日：2002-12-03
申请人： Takashi Kaito , Masatoshi Yasutake , Tatsuya Adachi
发明人： Takashi Kaito , Masatoshi Yasutake , Tatsuya Adachi
IPC分类号： G01B21/30 , G01Q30/02 , G01Q60/38 , G01Q70/00 , G01Q70/10 , G01Q70/14 , G01Q90/00 , G01N23/00 , G21K7/00
CPC分类号： G01Q60/38 , G01Q70/12 , Y10S977/875
摘要： A probe for a scanning probe microscope has a cantilever portion and a microscopic probe portion formed of a solid columnar tip at a distal end of the cantilever portion by deposition using an organic gas decomposed by a focused ion beam inside a vacuum chamber. The probe is sufficiently narrow and has high abrasion resistance and rigidity. The tip may be grown to extend from the cantilever portion at an angle shifted by an angle at which the cantilever portion is inclined during scanning of the probe portion across a sample surface, so that the columnar tip is perpendicular to the sample surface during the scanning. The tip may be formed of a conductive material such as tungsten of diamond-like carbon by FIB-CVD.
摘要翻译：用于扫描探针显微镜的探针具有悬臂部分和微观探针部分，其通过使用在真空室内聚焦的离子束分解的有机气体沉积而在悬臂部分的远端由固体柱状尖端形成。探头足够窄，具有高耐磨性和刚性。在扫描探针部分穿过样品表面扫描期间，尖端可以以悬臂部分倾斜一个角度移动的角度从悬臂部分延伸，使得柱状尖端在扫描期间垂直于样品表面。尖端可以由诸如金刚石状碳的钨的导电材料通过FIB-CVD形成。

56. 发明申请

US20050040343A1 Electron beam writing equipment and electron beam writing method 有权
标题翻译：电子束写入设备和电子束写入方法
公开(公告)号：US20050040343A1
公开(公告)日：2005-02-24
申请号：US10951769
申请日：2004-09-29
申请人： Yasunari Sohda , Hiroya Ohta , Osamu Kamimura , Susumu Gotoh
发明人： Yasunari Sohda , Hiroya Ohta , Osamu Kamimura , Susumu Gotoh
IPC分类号： G03F7/20 , G01Q30/02 , H01J37/147 , H01J37/304 , H01J37/305 , H01J37/317 , H01L21/027 , G21G5/00
CPC分类号： H01J37/3174 , B82Y10/00 , B82Y40/00 , H01J37/3045 , H01J37/3177 , H01J2237/3045
摘要： Electron beam writing equipment has an electron source and an electron optics system for scanning an electron beam emitted from the electron source on a sample via deflection means having at least two different deflection speeds. An objective lens is used to form a desired pattern on the sample The electron beam is moved by high speed scanning with the deflection means to repeat formation of a patterned beam. The electron beam is moved on the mark for beam correction by low speed scanning with the deflection means in synchronization with one cycle of the repetition. The position or the deflection distance of the electron beam or blanking time is corrected using detectors for back scattered or secondary electrons.
摘要翻译：电子束写入设备具有电子源和电子光学系统，用于通过具有至少两个不同偏转速度的偏转装置扫描从电子源在样品上发射的电子束。使用物镜在样品上形成期望的图案电子束通过用偏转装置的高速扫描移动，以重复形成图案化的束。电子束通过与偏转装置的低速扫描同步于重复的一个周期而在标记上移动以进行光束校正。使用用于背散射或二次电子的检测器校正电子束的位置或偏转距离或消隐时间。

57. 发明授权

US06855926B2 Instrument and method for combined surface topography and spectroscopic analysis 失效
标题翻译：组合表面形貌和光谱分析的仪器和方法
公开(公告)号：US06855926B2
公开(公告)日：2005-02-15
申请号：US10182168
申请日：2001-01-31
申请人： Richard Edward Palmer , Krister Svensson , Peter Georg Laitenberger , Frederic Festy , Brian John Eves
发明人： Richard Edward Palmer , Krister Svensson , Peter Georg Laitenberger , Frederic Festy , Brian John Eves
IPC分类号： G01N23/20 , G01Q30/02 , G01Q60/10 , G01Q60/12 , H01J47/00 , G01N23/00 , G21K7/00
CPC分类号： G01Q60/16 , G01Q30/02
摘要： A combined surface topography and spectroscopic analysis instrument comprises a scanning tunnelling microscope tip (12); and a sample carrier (58) which supports a sample (10) so that a surface thereto to be analyzed is presented towards the tip (12). The sample carrier (58) and the tip (12) are relative movable to enable the distance between the tip (12) and the surface to be varied in use and the sample surface to be scanned in two dimensions by the tip (12). An electronic analyzer is positioned to detect electrons from the tip (12) which have been back-scattered off the sample surface. A voltage controller (59) enables selective operation of the tip (12) in a first voltage range in scanning tunnelling mode, to enable spatial resolution imaging of the sample surface, and in a second, higher, voltage range in electron field emission mode whereby to permit the electron analyzer to analyze the back-scattered electrons. The electron analyzer is positioned so as to detect back-scattered electrons travelling at an angle of less than 20° with respect to the sample surface.
摘要翻译：组合表面形貌和光谱分析仪器包括扫描隧道显微镜尖端（12）; 以及支撑样品（10）的样品载体（58），使得要分析的表面朝向尖端（12）呈现。样品载体（58）和尖端（12）是可相对移动的，以使尖端（12）和表面之间的距离在使用中变化，并且样品表面将被二尖头（12）扫描。定位电子分析仪以检测来自尖端（12）的电子，这些电子已从样品表面反向散射。电压控制器（59）使得能够在扫描隧道模式中的第一电压范围内选择性地操作尖端（12），以便能够进行样品表面的空间分辨率成像，并且在电子场发射模式的第二，更高电压范围内，由此以允许电子分析仪分析反向散射的电子。电子分析仪被定位成能够检测相对于样品表面以小于20°的角度行进的反向散射电子。

58. 发明申请

US20050023462A1 Tailoring domain engineered structures in ferroelectric materials 失效
标题翻译：铁电材料裁剪领域工程结构
公开(公告)号：US20050023462A1
公开(公告)日：2005-02-03
申请号：US10859046
申请日：2004-06-01
申请人： Gil Rosenman , Yossi Rosenwaks , Ronen-Pavel Urenski
发明人： Gil Rosenman , Yossi Rosenwaks , Ronen-Pavel Urenski
IPC分类号： G01Q30/02 , G01Q30/08 , G01Q30/20 , G01Q70/10 , G01Q80/00 , G21K7/00
CPC分类号： G02F1/3558 , G01Q80/00 , Y10S977/863 , Y10S977/869
摘要： Scanning probe apparatus, comprising: a) a tip-electrode which is coupled to be maintained at a first potential; b) a counter-electrode which is positioned in proximity with the tip electrode and which is coupled to be maintained at a second potential differing from the first potential by a value greater than approximately 150 volts; and c) positioning instrumentation, which is adapted to maintain the tip-electrode at a distance from a surface while scanning the tip-electrode parallel to the surface, and controls the position of the tip-electrode in a scanning direction parallel to the surface to within a resolution sufficient so that the apparatus can be used as a scanning probe microscope.
摘要翻译：扫描探针装置，包括：a）连接以保持在第一电位的尖端电极; b）对置电极，其位于尖端电极附近并被耦合以保持在不同于第一电位的第二电位大于约150伏特的值; 以及c）定位仪器，其适于在平行于表面扫描尖端电极时将尖端电极保持在离开表面一定距离处，并且在平行于表面的扫描方向上控制尖端电极的位置在足够的分辨率中，使得该装置可以用作扫描探针显微镜。

59. 发明申请

US20050006604A1 Charged particle beam control element, method of fabricating charged particle beam control element, and charged particle beam apparatus 有权
标题翻译：带电粒子束控制元件，带电粒子束控制元件的制造方法和带电粒子束装置
公开(公告)号：US20050006604A1
公开(公告)日：2005-01-13
申请号：US10899041
申请日：2004-07-27
申请人： Yukiharu Okubo
发明人： Yukiharu Okubo
IPC分类号： G01Q30/02 , H01J37/12 , H01J37/147 , H01J3/14 , G21K5/10 , H01J37/08
CPC分类号： H01J37/1477
摘要： A charged particle beam control method and apparatus emit a charged particle beam from a charged particle gun, and then accelerate and guide the charged particle beam toward a surface of a sample to be irradiated using a primary column. The primary column controls the charged particle beam using a charged particle beam controlling element that has a cylindrical insulating base and a plurality of electrodes formed on an internal surface of the cylindrical insulating base. In addition, a portion of the internal surface of the cylindrical insulating base separates the plurality of electrodes electrically, and the internal surface of the cylindrical insulating base is not exposed to the charged particle beam.
摘要翻译：带电粒子束控制方法和装置从带电粒子枪发射带电粒子束，然后使用主色谱柱将带电粒子束加速并引导到待照射样品的表面。主列使用具有圆柱形绝缘基底和形成在圆柱形绝缘基底的内表面上的多个电极的带电粒子束控制元件来控制带电粒子束。此外，圆筒形绝缘基体的内表面的一部分电分离多个电极，圆柱形绝缘基底的内表面不暴露于带电粒子束。

60. 发明申请

US20050006582A1 Electron microscopy system, electron microscopy method and focusing system for charged particles 有权
公开(公告)号：US20050006582A1
公开(公告)日：2005-01-13
申请号：US10825240
申请日：2004-04-16
申请人： Michael Steigerwald , Erik Essers
发明人： Michael Steigerwald , Erik Essers
IPC分类号： G01Q30/02 , H01J37/05 , H01J37/12 , H01J37/153 , H01J37/28 , G01N23/00
CPC分类号： H01J37/28 , H01J37/05 , H01J37/12 , H01J37/153
摘要： An electron microscopy system and an electron microscopy method for detection of time dependencies of secondary electrons generated by primary electrons is provided, in which the primary electron pulses are directed onto a sample surface and electrons emanating from the sample surface are detected, time resolved. To this end the system comprises in particular a cavity resonator. A cavity resonator can also be used to reduce aberrations of focusing lenses.

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