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51. 发明申请

US20090039979A1 MICRO-ELECTROMECHANICAL DEVICE 失效
标题翻译：微电子器件
公开(公告)号：US20090039979A1
公开(公告)日：2009-02-12
申请号：US12095089
申请日：2006-11-08
申请人： Masahiro Tanaka , Takashi Kinoshita , Keitaro Yamashita
发明人： Masahiro Tanaka , Takashi Kinoshita , Keitaro Yamashita
IPC分类号： H03H9/46 , H03H9/70
CPC分类号： H02N1/006 , H03H9/2426 , H03H9/2463 , H03H9/525
摘要： Provided is a micro-electromechanical device capable of processing an electric signal in the high frequency region by a simple device structure. The micro-electromechanical device is formed, including an oscillator element having a plurality of electrodes disposed on a substrate and a beam facing the electrodes to oscillate by electrostatic drive. An input/output of a high frequency signal is applied to one of the combinations of the electrodes and the beam.
摘要翻译：提供一种能够通过简单的装置结构处理高频区域中的电信号的微机电装置。形成微机电装置，其包括具有设置在基板上的多个电极的振荡器元件和面向电极的波束，其通过静电驱动而振荡。高频信号的输入/输出被施加到电极和光束的组合之一。

52. 发明申请

US20080246552A1 Balanced Acoustic Wave Filter Device 有权
标题翻译：平衡声波滤波器
公开(公告)号：US20080246552A1
公开(公告)日：2008-10-09
申请号：US10570371
申请日：2005-07-01
申请人： Teruhisa Shibahara , Seiichi Takahara
发明人： Teruhisa Shibahara , Seiichi Takahara
IPC分类号： H01P5/10 , H03H9/46
CPC分类号： H03H9/0057 , H03H9/0038 , H03H9/02748 , H03H9/14588 , H03H9/14591
摘要： A surface acoustic wave filter device includes an unbalanced terminal, first and second balanced terminals, and first, second and third IDTs. One end of the first IDT and one end of the third IDT are connected to the unbalanced terminal. The second IDT includes first and second divided IDT portions obtained by dividing the IDT in the surface wave propagating direction. The first and second divided IDT portions include sub-divided IDT portions and sub-divided IDT portions obtained by dividing the first and second divided IDT portions and in the crossing width direction. The first and second divided IDT portions are electrically connected in series. The first and second sub-divided IDT portions are electrically connected in series. The first and second sub-divided IDT portions are electrically connected in series. The second sub-divided IDT portion is connected to the first balanced terminal and the second sub-divided IDT portion is connected to the second balanced terminal.
摘要翻译：表面声波滤波器装置包括不平衡端子，第一和第二平衡端子以及第一，第二和第三IDT。第一IDT的一端和第三IDT的一端连接到不平衡终端。第二IDT包括通过在表面波传播方向上划分IDT获得的第一和第二分割IDT部分。第一分割IDT部分和第二分割IDT部分包括通过划分第一和第二分割IDT部分并且在交叉宽度方向上获得的分割的IDT部分和分割的IDT部分。第一和第二分开的IDT部分串联电连接。第一和第二分分割IDT部分串联电连接。第一和第二分分割IDT部分串联电连接。第二分割IDT部分连接到第一平衡端子，第二分分割IDT部分连接到第二平衡端子。

53. 发明申请

US20080218295A1 MEMS resonator array structure and method of operating and using same 有权
标题翻译： MEMS谐振器阵列结构及其操作和使用方法
公开(公告)号：US20080218295A1
公开(公告)日：2008-09-11
申请号：US11809894
申请日：2007-06-01
申请人： Markus Lutz , Aaron Partridge , Zhiyu Pan
发明人： Markus Lutz , Aaron Partridge , Zhiyu Pan
IPC分类号： H03H9/46
CPC分类号： H03H9/2405 , H03H3/0076 , H03H9/02338 , H03H9/02448 , H03H9/2431 , H03H9/462 , H03H9/505 , H03H2009/02354 , H03H2009/0244 , H03H2009/02496 , H03H2009/02503 , H03H2009/02511 , H03H2009/02527
摘要： A plurality of mechanically coupled MEMS resonators that are arranged in an N x M MEMS array structure. Each MEMS resonators includes a plurality of straight (or substantially straight) elongated beam sections that are connected by curved/rounded sections. Each elongated beam section is connected to another elongated beam section at a distal end via the curved/rounded sections thereby forming a geometric shape (e.g., a rounded square). Further, each resonator is mechanically coupled to at least one other adjacent resonator of the array via a resonator coupling section. The resonator coupling sections may be disposed between elongated beam sections of adjacent resonators. The resonators, when induced, oscillate at the same or substantially the same frequency. The resonators oscillate in a combined elongating (or breathing) mode and bending mode; that is, the beam sections exhibit an elongating-like (or breathing-like) motion and a bending-like motion. The one or more of the resonators of the array structure may include one or more nodal points or areas (i.e., portions of the resonator that are stationary, experience little movement, and/or are substantially stationary during oscillation of the resonator/array) in one or more portions or areas of the curved sections of the structure. The nodal points are suitable and/or preferable locations to anchor the resonator/array to the substrate.
摘要翻译：以N×M MEMS阵列结构排列的多个机械耦合的MEMS谐振器。每个MEMS谐振器包括通过弯曲/圆形部分连接的多个直的（或基本上直的）细长的梁部分。每个细长梁部分经由弯曲/圆形部分在远端连接到另一个细长梁部分，从而形成几何形状（例如，圆形方形）。此外，每个谐振器经由谐振器耦合部分机械耦合到阵列的至少一个其它相邻的谐振器。谐振器耦合部分可以设置在相邻谐振器的细长波束部分之间。谐振器在感应时以相同或基本相同的频率振荡。谐振器以组合延长（或呼吸）模式和弯曲模式振荡; 也就是说，梁段呈现伸长状（或呼吸状）运动和弯曲状运动。阵列结构的一个或多个谐振器可以包括一个或多个节点或区域（即谐振器的静止的部分，在谐振器/阵列的振荡期间经历少量运动和/或基本上静止）结构的弯曲部分的一个或多个部分或区域。节点是合适的和/或优选的位置以将谐振器/阵列锚固到基底。

54. 发明申请

US20070222541A1 Electromechanical Filter 有权
标题翻译：机电过滤器
公开(公告)号：US20070222541A1
公开(公告)日：2007-09-27
申请号：US10599957
申请日：2005-04-11
申请人： Yasuyuki Naito
发明人： Yasuyuki Naito
IPC分类号： H03H9/46
CPC分类号： H03H9/2426 , H03H9/02259 , H03H9/2463 , H03H9/462 , H03H9/465 , H03H2009/02496
摘要： An electromechanical filter capable of attaining a size reduction and a higher integration and executing a high-sensitivity signal sensing is provided. A quantum device is used as a sensing portion to implement a fine and highly sensitive sensing. A microvibrator 101 that is able to resonate with an input signal, and a sensing electrode 103 arranged at a predetermined interval to the microvibrator are provided. Since a change in an electrostatic capacity between the microvibrator and the sensing electrode can be sensed, a high-sensitivity sensing mechanism that is hard to realize in the prior art can be achieved.
摘要翻译：提供了能够实现尺寸减小和更高集成度并执行高灵敏度信号感测的机电滤波器。量子器件用作感测部分以实现精细和高度敏感的感测。提供能够与输入信号谐振的微振荡器101和以预定间隔布置到微振荡器的感测电极103。由于可以感测到微振荡器和感测电极之间的静电电容的变化，所以可以实现现有技术难以实现的高灵敏度感测机构。

55. 发明申请

US20070216496A1 Electromechanical Filter 有权
标题翻译：机电过滤器
公开(公告)号：US20070216496A1
公开(公告)日：2007-09-20
申请号：US11569501
申请日：2005-06-02
申请人： Yoshito Nakanishi , Kunihiko Nakamura
发明人： Yoshito Nakanishi , Kunihiko Nakamura
IPC分类号： H03H9/46
CPC分类号： H03H9/2405 , H03H3/0072 , H03H9/02433 , H03H9/462 , H03H2009/02519 , Y10S977/724 , Y10S977/932
摘要： An object is to provide an electromechanical filter which can define a vibration mode so that a vibrator can be excited only in a desired vibration mode, that is, a filter which can suppress any vibration mode other than a desired vibration mode. The electromechanical filter includes a first member for inputting a signal, a second member disposed at a predetermined distance from the first member so as to surround the first member and to be excited due to an electrostatic force caused by the signal input from the first member, and a third member disposed at a predetermined distance from the second member so as to surround the second member and to detect vibration of the second member. The second member is designed to receive an attractive force from the first member and the third member so as to be bound and regulated as to a vibration direction.
摘要翻译：本发明的目的是提供一种能够限定振动模式的机电滤波器，使得振动器仅能够以期望的振动模式被激励，即，可以抑制除期望振动模式之外的任何振动模式的滤波器。机电滤波器包括用于输入信号的第一部件，设置在距第一部件预定距离处的第二部件，以便围绕第一部件并由于由第一部件输入的信号引起的静电力而被激励，以及第三构件，其以与第二构件相隔预定距离的方式设置，以围绕第二构件并且检测第二构件的振动。第二构件被设计成从第一构件和第三构件接收吸引力，以便结合和调节振动方向。

56. 发明授权

US07205867B2 Microelectromechanical resonator structure, and method of designing, operating and using same 有权
公开(公告)号：US07205867B2
公开(公告)日：2007-04-17
申请号：US11132941
申请日：2005-05-19
申请人： Markus Lutz , Aaron Partridge
发明人： Markus Lutz , Aaron Partridge
IPC分类号： H03H9/46
CPC分类号： H03H9/2431 , H03H9/02259 , H03H9/02338 , H03H9/02448 , H03H9/2405 , H03H2009/02354 , H03H2009/02496 , H03H2009/02503 , H03H2009/02511 , H03H2009/02527
摘要： A micromechanical resonator structure including a plurality of straight or substantially straight beam sections that are connected by curved or rounded sections. Each elongated beam section is connected to another elongated beam section at a distal end via the curved or rounded sections thereby forming a geometric shape having at least two elongated beam sections that are interconnected via curved or rounded sections (for example, a rounded triangle shape, rounded square or rectangle shape). The structure includes one or more nodal points or areas (i.e., portions of the resonator structure that are stationary, experience little movement, and/or are substantially stationary during oscillation of the resonator structure) in one or more portions or areas of the curved sections of the structure. The nodal points are suitable and/or preferable locations to anchor the resonator structure to the substrate. In operation, the resonator structure oscillates in a combined elongating (or breathing) mode and bending mode; that is, the beam sections (which oscillate or vibrate at the same frequency) exhibit an elongating-like (or breathing-like) motion and a bending-like motion.

57. 发明授权

US07151424B2 Boundary acoustic wave device 失效
标题翻译：边界声波装置
公开(公告)号：US07151424B2
公开(公告)日：2006-12-19
申请号：US10703922
申请日：2003-11-07
申请人： Hajime Kando
发明人： Hajime Kando
IPC分类号： H03H9/46 , H03H9/64
CPC分类号： H03H9/0222 , H03H9/6483
摘要： A boundary acoustic wave device includes a first boundary acoustic wave element, and a second boundary acoustic wave element disposed on the first boundary acoustic wave element. Each boundary acoustic wave element includes a first solid layer made of a piezoelectric material, a second solid layer made of one of a piezoelectric material and an insulating material, and disposed on the first solid layer, and a boundary acoustic wave exciting interdigital transducer arranged in the boundary between the first and second solid layers.
摘要翻译：弹性边界波装置包括第一弹性边界波元件和设置在第一弹性边界波元件上的第二声界面波元件。每个声弹性元件包括由压电材料制成的第一固体层，由压电材料和绝缘材料中的一种制成的第二固体层，并且设置在第一固体层上，并且布置在边界声波激发叉指换能器第一和第二固体层之间的边界。

58. 发明授权

US07119636B2 Micromechanical resonator device having a desired mode shape 有权
标题翻译：具有期望的模式形状的微机械谐振器装置
公开(公告)号：US07119636B2
公开(公告)日：2006-10-10
申请号：US10990785
申请日：2004-11-17
申请人： Clark T. -C. Nguyen , Yuan Xie
发明人： Clark T. -C. Nguyen , Yuan Xie
IPC分类号： H03H9/02 , H03H9/46 , H03H9/48
CPC分类号： H03H9/2431 , H03H3/0072 , H03H9/2436 , H03H2009/02354 , H03H2009/02503
摘要： A micromechanical resonate device having an extensional wine-glass mode shape is described herein. Different embodiments of the device may employ vibrating polysilicon micromechanical ring resonators, utilizing a unique extensional wine-glass mode shape to achieve lower impedance than previous UHF resonators at frequencies as high as 1.2-GHz with a Q of 3,700, and 1.47-GHz (highest to date for polysilicon micromechanical resonators) with a Q of 2,300. The 1.2-GHz resonator exhibits a measured motional resistance of 560 kΩ with a dc-bias voltage of 20V, which is 6× lower than measured on radial contour mode disk counterparts at the same frequency, and which can be driven down as low as 2 kΩ when a dc-bias voltage of 100V and electrode-to-resonator gap spacing of 460 Å are used. The above high Q and low impedance advantages, together with the multiple frequency, on-chip integration advantages afforded by electrostatically-transduced μmechanical resonators, may be utilized in the front-end RF filtering and oscillator functions needed by wireless communication devices.
摘要翻译：本文描述了具有延伸葡萄酒玻璃模式形状的微机械谐振装置。器件的不同实施例可采用振动多晶硅微机械环谐振器，利用独特的拉伸葡萄酒玻璃模式形状来实现比先前在频率高达1.2GHz的UHF谐振器更低的阻抗，Q为3,700和1.47GHz（最高到目前为止多晶硅微机械谐振器），Q为2,300。 1.2GHz谐振器表现出560 kOmega的测量运动电阻，其直流偏置电压为20V，比相同频率下的径向轮廓模式盘对应器测得的低6倍，可以低至2 kOmega 当使用100V的直流偏置电压和460A的电极到谐振器间隙间隔时。上述高Q和低阻抗优点以及由静电转换的机械谐振器提供的多频率片上集成优点可以用于无线通信设备所需的前端RF滤波和振荡器功能。

59. 发明授权

US07095295B1 Multi-tunable microelectromechanical system (MEMS) resonators 有权
标题翻译：多可调谐微机电系统（MEMS）谐振器
公开(公告)号：US07095295B1
公开(公告)日：2006-08-22
申请号：US10443951
申请日：2003-05-21
申请人： Harold L. Stalford , Michael A. Butler , W. Kent Schubert
发明人： Harold L. Stalford , Michael A. Butler , W. Kent Schubert
IPC分类号： H03H9/46
CPC分类号： H03H9/02409
摘要： A method for tuning a vibratory device including a cantilevered resonator comprising the steps of increasing a voltage V0 supplied to the vibratory device to thereby increase the bandwidth of the vibratory device; and keeping the resonant frequency of the vibratory device at substantially that natural frequency of the cantilevered resonator, wherein the vibratory device comprises: a capacitor including a movable plate and a fixed plate spaced from each other, the movable plate being part of the cantilevered resonator; a voltage source connected to the capacitor for providing voltage V0 across the capacitor to produce an attractive force between movable plate and fixed plate; a circuit connecting the voltage source to the capacitor; and a load resistor in said circuit having a resistance RL satisfying the following equation: μ = ω 0 ⁢ c 0 ⁢ R L ( 1 - λ ) where: μ is at least 10; ω0 is the beam constant for the cantilevered resonator; c0 is the capacitance for the capacitor; and λ is the voltage dependent coupling parameter for voltage V0.
摘要翻译：一种用于调谐包括悬臂谐振器的振动装置的方法，包括以下步骤：增加提供给振动装置的电压V SUB，从而增加振动装置的带宽; 并且将所述振动装置的谐振频率保持在所述悬臂谐振器的基本固有频率，其中所述振动装置包括：包括可移动板和彼此间隔开的固定板的电容器，所述可移动板是所述悬臂谐振器的一部分; 连接到电容器的电压源，用于在电容器之间提供电压V 0以在可动板和固定板之间产生吸引力; 将电压源连接到电容器的电路; 并且所述电路中的负载电阻具有满足以下等式的电阻R L： $< MROW> =（1->其中：mu至少为10; ω= 0是针对悬臂谐振器的光束常数; c <0>电容器的电容; 而λ是电压V 0 0的电压相关耦合参数。$

60. 发明授权

US07068125B2 Temperature controlled MEMS resonator and method for controlling resonator frequency 有权
标题翻译：温度控制MEMS谐振器和谐振器频率控制方法
公开(公告)号：US07068125B2
公开(公告)日：2006-06-27
申请号：US10794976
申请日：2004-03-04
申请人： Markus Lutz , Aaron Partridge
发明人： Markus Lutz , Aaron Partridge
IPC分类号： H03H9/02 , H03H9/46 , H03H3/013
CPC分类号： H03H9/2463 , H01L2224/48091 , H01L2224/48227 , H01L2924/01019 , H01L2924/01057 , H01L2924/01078 , H01L2924/01079 , H03H9/02338 , H03H9/02401 , H03H9/02448 , H03H9/2426 , H03H9/2473 , H03H9/2478 , H03H2009/02496 , H03H2009/02511 , H03H2009/02527 , H01L2924/00014
摘要： There are many inventions described and illustrated herein. In one aspect, the present invention is directed to a temperature compensated microelectromechanical resonator as well as fabricating, manufacturing, providing and/or controlling microelectromechanical resonators having mechanical structures that include integrated heating and/or temperature sensing elements. In another aspect, the present invention is directed to fabricate, manufacture, provide and/or control microelectromechanical resonators having mechanical structures that are encapsulated using thin film or wafer level encapsulation techniques in a chamber, and including heating and/or temperature sensing elements disposed in the chamber, on the chamber and/or integrated within the mechanical structures. Other aspects of the inventions will be apparent from the detailed description and claims herein.
摘要翻译：这里描述和说明了许多发明。一方面，本发明涉及一种温度补偿微机电谐振器，以及制造，制造，提供和/或控制具有包括集成的加热和/或温度感测元件的机械结构的微机电谐振器。在另一方面，本发明涉及制造，制造，提供和/或控制具有机械结构的微机电谐振器，其机械结构使用薄膜或晶片级封装技术在腔室中进行封装，并且包括设置在腔室中的加热和/或温度感测元件室，在室上和/或整合在机械结构内。本发明的其它方面将从本文的详细描述和权利要求中变得显而易见。

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