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61. 发明授权

US08377501B2 Coating and developing system control method of controlling coating and developing system 有权
标题翻译：涂料开发系统控制方法
公开(公告)号：US08377501B2
公开(公告)日：2013-02-19
申请号：US12438031
申请日：2007-09-11
申请人： Yasushi Hayashida , Yoshitaka Hara , Tomohiro Kaneko
发明人： Yasushi Hayashida , Yoshitaka Hara , Tomohiro Kaneko
IPC分类号： C23C16/52 , C23C14/54
CPC分类号： H01L21/67745 , H01L21/67178 , H01L21/67276
摘要： A coating and developing system and control method is provided. The system and control method curtails the amount of time for which a substrate is held with no purpose while improving the throughput of the coating and developing system. An inspection station through which a substrate processed in a processing station is transferred to a carrier station includes a plurality of different inspection modules respectively taking different inspection times, a buffer unit for temporarily holding a substrate and a substrate carrying means controlled by a controller. When the inspection module is engaged in inspecting a substrate, the substrate carrying means carries another substrate to be inspected by the same inspection module to the buffer unit and the substrate is held in the buffer unit. Thus, the holding of wafers in the inspection modules can be suppressed and the throughput can be improved.
摘要翻译：提供涂层和显影系统和控制方法。该系统和控制方法在提高涂层和显影系统的生产量的同时，无需目的地限制基材保持的时间。将在处理站中处理的基板通过其传送到承载站的检查站包括分别采取不同检查时间的多个不同检查模块，用于临时保持基板的缓冲单元和由控制器控制的基板承载装置。当检查模块接合检查基板时，基板承载装置将待检查的另一基板由相同的检查模块携带到缓冲单元，并且基板保持在缓冲单元中。因此，可以抑制检查模块中的晶片的保持，并且可以提高生产量。

62. 发明申请

US20120283096A1 AGENT FOR IMPROVING PLANT GROWTH, SEEDS, AND METHOD FOR IMPROVING PLANT GROWTH 审中-公开
标题翻译：改善植物生长，种子和改善植物生长的方法的代理
公开(公告)号：US20120283096A1
公开(公告)日：2012-11-08
申请号：US13520198
申请日：2011-01-26
申请人： Yoshitaka Hara
发明人： Yoshitaka Hara
IPC分类号： A01C1/06 , A01N59/16 , A01P1/00 , C01D1/02 , C01G39/02 , C01F5/00 , C01C1/00 , C01B25/18 , C01B33/00 , C01G39/00 , C01F11/02 , C01B25/45 , C01G41/02 , C22C27/04 , A01N59/26
CPC分类号： A01N59/16 , A01N59/02 , C05D9/02
摘要： The present invention relates to (i) a plant growth-improving agent containing a growth-improving component that increases a concentration of an oxoanion in an area around a plant, the oxoanion being heavier than a sulfate ion and containing four oxygen atoms, (ii) a seed to which such a plant growth-improving agent has been applied, and (iii) a plant growth-improving method including a cultivating step of growing a plant in the presence of such a growth-improving component.
摘要翻译：本发明涉及（i）含有生长改善成分的植物生长改善剂，其增加植物周围区域中氧阴离子的浓度，氧阴离子比硫酸根离子重，含有四个氧原子，（ii ）施用这种植物生长改善剂的种子，和（iii）植物生长改良方法，其包括在这种生长改良成分存在下栽培植物的栽培步骤。

63. 发明申请

US20120164572A1 COATING METHOD, COATING DEVICE, AND STORAGE MEDIUM 有权
标题翻译：涂料方法，涂料装置和储存介质
公开(公告)号：US20120164572A1
公开(公告)日：2012-06-28
申请号：US13336373
申请日：2011-12-23
申请人： Akira MIYATA , Yoshitaka HARA , Kouji FUJIMURA
发明人： Akira MIYATA , Yoshitaka HARA , Kouji FUJIMURA
IPC分类号： G03F7/004 , B05C11/10
CPC分类号： H01L21/6715
摘要： A device to form a coating film which can quickly coat a substrate of a follow-up lot after coating a preceding lot. The device is configured such that nozzles for a preceding lot and a following lot are integrated into a common movement mechanism and moved between an upper side of a liquid processing unit and a standby area. A coating method includes sucking air into the nozzle for the preceding lot to form an upper gas layer, sucking a solvent for the preceding lot in the standby area to form a thinner layer, and sucking air into the nozzle for the preceding lot to form a lower gas layer within the nozzle, and thus forming a state that a solvent layer is interposed between the upper gas layer and the lower gas layer.
摘要翻译：一种形成涂膜的装置，其可以在涂覆前面的批次之后快速地涂覆后续批次的基材。该装置被构造成使得用于先前批次和后续批次的喷嘴被集成到公共运动机构中并且在液体处理单元的上侧和待机区域之间移动。涂布方法包括将空气吸入前述批次的喷嘴中以形成上部气体层，在备用区域吸取前一批料的溶剂以形成更薄的层，并将空气吸入前一批料的喷嘴中以形成从而形成在上部气体层和下部气体层之间插入溶剂层的状态。

64. 发明授权

US08025023B2 Coating and developing system, coating and developing method and storage medium 有权
标题翻译：涂层和显影系统，涂层和显影方法和存储介质
公开(公告)号：US08025023B2
公开(公告)日：2011-09-27
申请号：US11826438
申请日：2007-07-16
申请人： Yasushi Hayashida , Yoshitaka Hara
发明人： Yasushi Hayashida , Yoshitaka Hara
IPC分类号： B05B7/00
CPC分类号： H01L21/67276 , G02F1/1303 , G05B19/41865 , G05B2219/31428 , G05B2219/32097 , G05B2219/45031 , H01L21/67745 , Y02P90/20
摘要： Wafers A1 to A10 of a first lot A and wafers B1 to B10 of a second lot B are processed by a second heating unit at different temperatures, respectively. A wafer W is carried in a processing block included in coating and developing system along a route passing a temperature control unit CPL2, a coating unit BCT, a heating unit LHP2, a temperature control unit CPL3, a coating unit COT, a heating unit LHP3, and a cooling unit COL in that order. The process temperature of the heating unit LHP3 is changed after the last wafer A10 of the first lot A has been processed by the heating unit LHP3. The wafers of the second lot B are carried according to a carrying schedule such that carrying cycles succeeding a carrying cycle in which the first substrate B1 of the second lot B is carried to the second temperature conditioning unit CPL3 carry the substrates B of the second lot B succeeding the first substrate B1 and processed by a heating process by the heating unit LHP2 in due order to a buffer unit BF2, and the wafers B held in the buffer unit BF2 are carried in due order to the downstream modules after the process temperature of the heating unit LHP3 has been changed.
摘要翻译：第一批次A的晶片A1至A10和第二批次B的晶片B1至B10分别由不同温度的第二加热单元处理。沿着通过温度控制单元CPL2，涂布单元BCT，加热单元LHP2，温度控制单元CPL3，涂布单元COT，加热单元LHP3的路线，在包括在涂布显影系统中的处理块中承载晶片W. ，以及冷却单元COL。在第一批次A的最后一个晶片A10已被加热单元LHP3处理之后，加热单元LHP3的处理温度改变。第二批次B的晶片根据携带时间表进行，使得在第二批次B的第一基板B1被承载到第二温度调节单元CPL3的承载循环之后的承载循环携带第二批次的基板B B在第一衬底B1之后，并且通过加热单元LHP2按照缓冲单元BF2进行加热处理，并且保持在缓冲单元BF2中的晶片B在处理温度为加热单元LHP3已被改变。

65. 发明申请

US20110217473A1 WET PROCESSING APPARATUS, WET PROCESSING METHOD AND STORAGE MEDIUM 有权
标题翻译：湿处理设备，湿处理方法和储存介质
公开(公告)号：US20110217473A1
公开(公告)日：2011-09-08
申请号：US13037624
申请日：2011-03-01
申请人： Naofumi KISHITA , Kouji Fujimura , Yoshitaka Hara
发明人： Naofumi KISHITA , Kouji Fujimura , Yoshitaka Hara
IPC分类号： B05D1/30 , B05C11/00 , B05D1/00
CPC分类号： B05D1/02 , B05C11/00 , B05D1/00 , B05D1/30
摘要： A wet processing apparatus for wet-processing substrates can suppress the reduction of throughput when some component part thereof becomes unserviceable. The wet processing apparatus includes a first nozzle unit and a second nozzle unit. When the wet processing apparatus operates in a normal mode, a substrate carrying mechanism is controlled so as to deliver substrates alternately to processing units of a first group and those of a second group so that the substrates are processed sequentially in order. When the processing units of the first group (the second group) are unserviceable due to the inoperativeness of the substrate holders, a processing liquid supply system or a nozzle support mechanism, the nozzle unit for the processing units of the second group (the first group) is moved to process substrates by the serviceable ones of the first group (the second group).
摘要翻译：用于湿处理基板的湿式处理装置可以抑制当其一部分成为不可用时的吞吐量的降低。湿式处理装置包括第一喷嘴单元和第二喷嘴单元。当湿法处理装置以正常模式操作时，控制基板承载机构以将基板交替地传送到第一组和第二组的处理单元，使得依次顺序地处理基板。当第一组（第二组）的处理单元由于基板保持器的不能操作而不能使用时，处理液体供应系统或喷嘴支撑机构，用于第二组（第一组）的处理单元的喷嘴单元）被移动到由第一组（第二组）中可用的基板处理衬底。

66. 发明申请

US20110053495A1 COMMUNICATION APPARATUS AND WIRELESS COMMUNICATION SYSTEM 审中-公开
标题翻译：通信设备和无线通信系统
公开(公告)号：US20110053495A1
公开(公告)日：2011-03-03
申请号：US12990894
申请日：2009-06-19
申请人： Yoshitaka Hara , Tomoya Yamaoka
发明人： Yoshitaka Hara , Tomoya Yamaoka
IPC分类号： H04B7/14 , H04B7/00
CPC分类号： H04B7/15542 , H04B7/12 , H04B7/2606 , H04L5/0007 , H04L5/0023 , H04L5/0032 , H04L5/0037 , H04L5/0048 , H04L5/006 , H04W72/00 , H04W84/047
摘要： A communication apparatus constitutes a wireless communication system with a base station and a terminal station, and relays and transfers a signal transmitted and received between the base station and the terminal station. The communication apparatus uses a frequency different from that at a time of reception to amplify and transfer the received signal, when having received a signal transmitted from the base station or the terminal station.
摘要翻译：通信装置构成具有基站和终端站的无线通信系统，并且中继和传送在基站与终端站之间发送和接收的信号。在接收到从基站或终端发送的信号时，通信装置使用与接收时不同的频率来放大并传送接收信号。

67. 发明申请

US20110032494A1 APPARATUS AND METHOD OF APPLICATION AND DEVELOPMENT 有权
标题翻译：装置和应用与开发方法
公开(公告)号：US20110032494A1
公开(公告)日：2011-02-10
申请号：US12909191
申请日：2010-10-21
申请人： Nobuaki MATSUOKA , Shinichi Hayashi , Yasushi Hayashida , Yoshitaka Hara
发明人： Nobuaki MATSUOKA , Shinichi Hayashi , Yasushi Hayashida , Yoshitaka Hara
IPC分类号： G03B27/32
CPC分类号： H01L21/6715 , H01L21/67225 , Y10T29/49004 , Y10T29/49126 , Y10T29/49155 , Y10T29/53174 , Y10T29/53187 , Y10T29/532
摘要： A block for coating film formation and a block for a development process are stacked. A delivery stage to effect delivery of a substrate with a transportation unit for use in a block is provided for each process block at the carrier block side to constitute a shelf-type delivery stage group. A vertical transportation unit is provided to transport a substrate between the delivery stages in the delivery stage group. A substrate inspection unit is disposed at an upper empty space of the carrier block. A substrate is input to the substrate inspection unit directly by the vertical transportation unit or via a delivery stage in the delivery stage group. The substrate inspection unit may be disposed in the delivery stage group.
摘要翻译：层叠用于涂膜成膜的块和显影处理用块。针对载体块侧的每个处理块提供了用于在块中使用的运输单元实现基板输送的输送阶段，以构成货架式输送阶段组。提供垂直运输单元以在输送台组中的输送台之间输送基底。衬底检查单元设置在承载块的上空空间。基板由垂直运输单元直接输送到基板检查单元，或通过输送台组中的输送台输入。基板检查单元可以设置在输送台组中。

68. 发明授权

US07880859B2 Substrate processing system and substrate processing method 有权
标题翻译：基板加工系统和基板加工方法
公开(公告)号：US07880859B2
公开(公告)日：2011-02-01
申请号：US12621252
申请日：2009-11-18
申请人： Yasushi Hayashida , Shinichi Hayashi , Yoshitaka Hara
发明人： Yasushi Hayashida , Shinichi Hayashi , Yoshitaka Hara
IPC分类号： H01L21/20
CPC分类号： H01L21/67276 , H01L21/67288 , Y10S414/135
摘要： A substrate processing system processes a plurality of substrates in a single-substrate processing mode by a plurality of processes and provided with a plurality of modules respectively for carrying out processes. When a defect is found in a substrate, a defective processing unit that caused the defect can be easily found out. The substrate processing system and a substrate processing method to be carried out by the substrate processing system can suppress the reduction of throughput when a large number of substrates are to be processed. The substrate processing system is provided with a plurality of modules for processing a plurality of substrates (W) in a single-substrate processing mode by a plurality of processes and includes a substrate carrying means (A4) for carrying a substrate (W) from a sending module to a receiving module, and a control means (6) for controlling the substrate carrying means (A4) on the basis of one of at least two carrying modes each assigning receiving modules to sending modules. The control means (6) changes the carrying mode in effect for the other carrying mode upon the reception of a carrying mode change command while substrates are being processed and makes the substrate carrying means (A4) carry substrates in the carrying mode newly brought into effect.
摘要翻译：基板处理系统通过多个处理以单基板处理模式处理多个基板，并且分别具有用于执行处理的多个模块。当在基板中发现缺陷时，可以容易地发现引起缺陷的缺陷处理单元。基板处理系统和由基板处理系统执行的基板处理方法可以抑制当要处理大量基板时的吞吐量的降低。基板处理系统设置有多个模块，用于通过多个处理以单基板处理模式来处理多个基板（W），并且包括用于承载基板（W）的基板承载装置（A4）发送模块到接收模块，以及控制装置（6），用于基于至少两种携带模式中的一种来控制基板承载装置（A4），每个模式分配接收模块到发送模块。控制装置（6）在基板被处理时接收到承载模式改变命令时改变其他承载模式的承载模式，并使基板承载装置（A4）在新生效的承载模式中承载基板。

69. 发明申请

US20100201509A1 COLLISION AVOIDANCE ASSISTING SYSTEM FOR VEHICLE 有权
标题翻译：车辆避碰辅助系统
公开(公告)号：US20100201509A1
公开(公告)日：2010-08-12
申请号：US12699207
申请日：2010-02-03
申请人： Yoshitaka HARA , Yuji Hosoda , Masashi Koga
发明人： Yoshitaka HARA , Yuji Hosoda , Masashi Koga
IPC分类号： B60Q1/00
CPC分类号： G08G1/166
摘要： A collision avoidance assisting system for a vehicle, for expecting a risk of colliding upon a moving object (or a moving obstacle), including a pedestrian, more correctly, but without annoying a driver, excessively, by estimating the risk to be excessively high, comprises a moving object detecting means for detecting a moving object existing on periphery of the vehicle; a footway boundary detecting means for detecting a position and a configuration of a footway boundary object on periphery of the vehicle; a risk estimation means for estimating a risk that the moving object detected by said moving object detecting means collides on the vehicle; and an alarm means for calling an attention to a driver of the vehicle, upon basis of the risk of collision estimated by the risk estimation means, wherein the risk of collision between the moving object, which is detected by the moving object detecting means, and that vehicle is estimated by taking at least the position information of the moving object, the position information of the footway boundary object and conditions of the circumferences thereof.
摘要翻译：一种用于车辆的防碰撞辅助系统，通过估计过高的风险，期望更准确地，但不会使驾驶员烦恼的行人对运动物体（或移动障碍物）的碰撞的风险过大，包括用于检测存在于车辆周边上的运动物体的运动物体检测装置; 行车道边界检测装置，用于检测车辆周边上的行人路边界物体的位置和构造; 用于估计由所述移动物体检测装置检测到的移动物体与车辆碰撞的风险的风险估计装置; 以及基于由风险估计装置估计的碰撞的风险，引起对车辆驾驶员的注意的报警装置，其中由运动对象检测装置检测到的运动物体之间的碰撞风险与通过至少获取移动物体的位置信息，行人道边界物体的位置信息和其周边的条件来估计该车辆。

70. 发明申请

US20090196203A1 WIRELESS COMMUNICATION SYSTEM AND COMMUNICATION CONTROL METHOD 失效
标题翻译：无线通信系统和通信控制方法
公开(公告)号：US20090196203A1
公开(公告)日：2009-08-06
申请号：US12303371
申请日：2007-07-05
申请人： Akinori Taira , Yasunori Katou , Yoshitaka Hara
发明人： Akinori Taira , Yasunori Katou , Yoshitaka Hara
IPC分类号： H04J3/00 , H04L27/28
CPC分类号： H04W52/42 , H04B7/0617 , H04L1/0003 , H04L1/0009 , H04L1/1607 , H04L1/1829 , H04W16/02 , H04W16/28 , H04W72/1273
摘要： The present invention relates to a wireless communication system that performs data communication using a spatial multiplex transmission scheme. A mobile station includes a transmission weight calculating unit that calculates a transmission weight and a beam information notifying signal generating unit that transmits a known signal for generating partial space information at a base station side. A base station includes a scheduling unit (DL spatial scheduling unit (17), UL spatial scheduling unit (18), and beam information notifying signal response vector estimating unit (20)) that generates the partial space information based on a received first known signal, and performs downstream scheduling and upstream scheduling based on the partial space information, and a scheduling result transmitting unit (UL control information generating unit (14) and transmission weight calculating unit (19)) that transmits a packet including an upstream scheduling result.
摘要翻译：无线通信系统技术领域本发明涉及使用空间复用传输方式进行数据通信的无线通信系统。移动站包括计算发送权重的发送权重计算单元和在基站侧发送用于生成部分空间信息的已知信号的波束信息通知信号生成单元。基站包括基于接收的第一已知信号生成部分空间信息的调度单元（DL空间调度单元（17），UL空间调度单元（18）以及波束信息通知信号响应向量估计单元（20）），并且基于部分空间信息执行下行调度和上行调度，以及发送包括上行调度结果的分组的调度结果发送单元（UL控制信息生成单元（14）和发送权重计算单元（19））。

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