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71. 发明授权

US6154472A High efficiency decoupled tuning configuration intracavity doubled laser and method 有权
标题翻译：高效去耦调谐配置腔内双激光和方法
公开(公告)号：US6154472A
公开(公告)日：2000-11-28
申请号：US150436
申请日：1998-09-09
申请人： Neil MacKinnon , Ping Xie
发明人： Neil MacKinnon , Ping Xie
IPC分类号： H01S3/098 , H01S3/109 , H01S3/10
CPC分类号： H01S3/109 , H01S3/08036 , H01S3/08054
摘要： As will be described in more detail hereinafter, an intracavity doubled single longitudinal mode laser is disclosed which provides stable (i.e., low amplitude variation in its output beam intensity), efficient operation in conjunction with a highly advantageous decoupled alignment configuration. An associated method is also disclosed. A lasant material is positioned in the light path of the laser for producing light at a desired fundamental wavelength and possibly other, unwanted wavelengths. Polarizing means is also positioned in the light path for polarizing the desired fundamental wavelength and the unwanted wavelengths of light. In addition to the polarizing means, birefringent means is positioned in the light path on one side of the polarizing means for selectively subjecting the unwanted wavelengths to losses in cooperation with the polarizing means such that the unwanted wavelengths are extinguished while the desired fundamental wavelength is subjected to a level of loss above a lasing threshold so that the desired fundamental wavelength lases. A type I doubling material is adjustably arranged in the light path for producing the doubled frequency light at twice the frequency of the desired fundamental frequency passing therethrough and for adjustment of phase matching which establishes an efficiency at which the doubled light frequency is produced. The birefringent means and the type I doubling material are arranged on opposite sides of the polarizing means along the light path so as to substantially decouple wavelength selection performed by adjusting the birefringent means from the phase matching adjustment performed by adjusting the type I doubling material.
摘要翻译：如将在下文中更详细地描述的，公开了腔内加倍的单纵模激光器，其提供稳定（即，其输出光束强度中的低幅度变化），有效操作以及高度有利的解耦对准配置。还公开了一种相关联的方法。一种农药材料位于激光的光路中，用于产生所需基本波长和可能的其他不需要的波长的光。偏振装置也位于光路中，用于偏振所需的基本波长和不想要的波长的光。除了偏振装置之外，双折射装置位于偏振装置的一侧的光路中，用于选择性地使不期望的波长与偏振装置协调地损失，使得不期望的波长在所需的基本波长受到影响时熄灭达到高于激光阈值的水平，使得期望的基本波长发生变化。 I型双重材料可调节地布置在光路中，用于产生通过其所需基频的两倍频率的双频光，并且用于调整相位匹配，从而确定产生双倍光频率的效率。双折射装置和I型双重材料沿着光路布置在偏振装置的相对侧上，从而通过调节I型双重材料进行的相位匹配调整，基本上使通过调节双折射装置执行的波长选择去耦合。

72. 发明授权

US6130902A Solid state laser chip 失效
标题翻译：固态激光芯片
公开(公告)号：US6130902A
公开(公告)日：2000-10-10
申请号：US85326
申请日：1998-05-26
申请人： Yutaka Shimoji
发明人： Yutaka Shimoji
IPC分类号： H01S3/02 , H01S3/04 , H01S3/042 , H01S3/0941 , H01S3/109 , H01S5/022
CPC分类号： H01S3/042 , H01S3/025 , H01S3/0405 , H01S3/08031 , H01S3/09415 , H01S3/1062 , H01S3/109
摘要： A laser amplification system includes a pumping diode laser, a gain laser crystal, a moveable wedged shaped etalon for wavelength selection, a non-linear crystal for wavelength conversion, such that each optical component has independent temperature control means. A single mode operation is achieved of up to 100 Watts output power with a minimum noise by stabilizing the optimum temperature of the optical media and the optical pathlength of the etalon. All components are disposed on a single metal substrate having a high thermal conductivity and a low thermal expansion coefficient. The system operates to amplify a laser from another source with high efficiency and low noise when the etalon and nonlinear crystal are absent.
摘要翻译：激光放大系统包括泵浦二极管激光器，增益激光晶体，用于波长选择的可移动楔形标准具，用于波长转换的非线性晶体，使得每个光学部件具有独立的温度控制装置。通过稳定光学介质的最佳温度和标准具的光程长度，实现高达100瓦的输出功率，具有最小噪声的单模操作。所有组分都设置在具有高导热性和低热膨胀系数的单一金属基底上。当标准具和非线性晶体不存在时，该系统用于以高效率和低噪声从另一种源放大激光。

73. 发明授权

US6128030A Semiconductor exposure device 失效
标题翻译：半导体曝光装置
公开(公告)号：US6128030A
公开(公告)日：2000-10-03
申请号：US13944
申请日：1998-01-27
申请人： Hiroki Kikuchi , Yushi Kaneda , Masato Hamatani
发明人： Hiroki Kikuchi , Yushi Kaneda , Masato Hamatani
IPC分类号： G03F7/20 , H01L21/027 , H01S3/10 , H01S3/109 , H01S3/11 , B41J2/47
CPC分类号： G03F7/70575 , G03F7/70091 , G03F7/70208 , G03F7/70583
摘要： A semiconductor light exposure device reducing coherency of laser light to an appropriate value by a simplified structure without producing speckles. The semiconductor light exposure device includes an ultraviolet light generating device, a uniform illumination device having the operation of inducing an optical path length difference and a projection device for projecting the laser light from the uniform illumination device. The ultraviolet light generating device includes an Nd:YAG Q-switch laser unit with a wavelength of 1064 nm, oscillated with a longitudinal single mode, a phase modulation unit or phase-modulating the fundamental laser light outgoing from the Nd:YAG Q-switch laser unit with voltage signals having plural frequency components, and a wavelength conversion unit for converting the wavelength of the fundamental laser light phase-modulated by the phase modulation unit into an ultraviolet laser light with a wavelength of 213 nm as a fifth harmonics.
摘要翻译：半导体曝光装置通过简化的结构将激光的相干性降低到适当的值，而不产生斑点。半导体曝光装置包括紫外线发生装置，具有诱导光程长度差的操作的均匀照明装置和用于投射来自均匀照明装置的激光的投影装置。紫外线发生装置具有波长为1064nm的Nd：YAG Q开关激光单元，以纵向单模振荡，相位调制单元或相位调制从Nd：YAG Q开关输出的基本激光具有多个频率分量的电压信号的激光单元和用于将由相位调制单元相位调制的基波激光的波长转换为波长为213nm的紫外激光作为五次谐波的波长转换单元。

74. 发明授权

US6125130A Method of reducing amplitude noise of solid lasers with resonator-internal frequency doubling, and an arrangement for carrying out this method 失效
标题翻译：利用谐振器内部倍频减小固体激光器的振幅噪声的方法，以及用于执行该方法的装置
公开(公告)号：US6125130A
公开(公告)日：2000-09-26
申请号：US142949
申请日：1999-04-07
申请人： Nikolaus Schmitt , Gunter Toesko , Josef Schalk , Susanne Nikolov
发明人： Nikolaus Schmitt , Gunter Toesko , Josef Schalk , Susanne Nikolov
IPC分类号： H01S3/13 , H01S3/109 , H01S3/136 , H01S3/137
CPC分类号： H01S3/136 , H01S3/109 , H01S3/137
摘要： The invention concerns a method of reducing the amplitude noise of solid lasers (e.g. Nd-YAG, Nd:YAlO, Nd:YLF, Nd:YVO.sub.3, etc.) with resonator-internal frequency doubling (for example by KTP, LBO, BBO, KNbO3, LiNbO.sub.3, etc.). According to the invention, some of the frequency-doubled ejected laser radiation or the fundamental wave radiation is guided onto a photodetector (in particular a photodiode) whose electrical output signal undergoes bandpass filtering which filters out a frequency range typical of the noise. This output signal, optionally after rectification, quadrature and/or integration, is then subjected to temperature regulation or control which corrects the temperature of the frequency-doubling crystal such that the output signal is minimized after the bandpass filter and thus the amplitude noise of the laser radiation is minimized.
摘要翻译： PCT No.PCT / EP97 / 01364 Sec。 371日期1999年4月7日 102（e）1999年4月7日PCT 1997年3月19日PCT公布。公开号WO97 / 35369 日期1997年9月25日本发明涉及一种降低固体激光器（例如Nd-YAG，Nd：YAlO，Nd：YLF，Nd：YVO3等）的振幅噪声的方法，其具有谐振器内部倍频（例如通过KTP ，LBO，BBO，KNbO 3，LiNbO 3等）。根据本发明，一些频率倍增的激光辐射或基波辐射被引导到其电输出信号进行带通滤波的光电检测器（特别是光电二极管），该滤波器滤除噪声典型的频率范围。该输出信号，可选地在整流，正交和/或积分之后进行温度调节或控制，其校正倍频晶体的温度，使得输出信号在带通滤波器之后被最小化，并且因此导致振幅噪声激光辐射最小化。

75. 发明授权

US6104734A Solid state laser apparatus 失效
标题翻译：固态激光装置
公开(公告)号：US6104734A
公开(公告)日：2000-08-15
申请号：US326979
申请日：1999-06-03
申请人： Tadao Ino , Hirofumi Sukeda , Hideki Saga , Hiroshi Toyama , Tsuyoshi Miyai
发明人： Tadao Ino , Hirofumi Sukeda , Hideki Saga , Hiroshi Toyama , Tsuyoshi Miyai
IPC分类号： G02F1/01 , G02F1/03 , G02F1/11 , H01S3/00 , H01S3/109 , H01S3/10
CPC分类号： G02F1/0121 , H01S3/005 , G02F1/0327 , G02F1/113 , H01S2301/02 , H01S3/109
摘要： In order to eliminate noise of a solid state laser apparatus generating a blue light wave, the solid state laser apparatus comprises a solid state laser light source, an optical modulator having a light modulating function and outputting the modulated light therefrom as a desired light output, a photo-detector converting one part of output light from the solid state laser light source to an electrical signal, an electrical circuit detecting a noise component from the electrical signal and moving the phase of an electrical signal corresponding to the noise component, and a controller for applying the output signal of the electrical circuit to the optical modulator so as to substantially eliminate light of the blue light wave corresponding to the noise component so as to provide the desired light output from the optical modulator.
摘要翻译：为了消除产生蓝色光波的固态激光装置的噪声，固态激光装置包括固态激光光源，具有光调制功能的光调制器，并将其中的调制光输出为期望的光输出，将来自固体激光光源的一部分输出光转换成电信号的光检测器，从电信号检测噪声分量并移动与噪声分量对应的电信号的相位的电路，以及控制器用于将电路的输出信号施加到光调制器，以便基本上消除对应于噪声分量的蓝光波的光，从而提供来自光调制器的所需光输出。

76. 发明授权

US6101201A Solid state laser with longitudinal cooling 有权
标题翻译：固态激光器纵向冷却
公开(公告)号：US6101201A
公开(公告)日：2000-08-08
申请号：US130378
申请日：1998-08-06
申请人： David E. Hargis , Sven E. Nelte
发明人： David E. Hargis , Sven E. Nelte
IPC分类号： H01S3/02 , H01S3/04 , H01S3/042 , H01S3/06 , H01S3/082 , H01S3/0941 , H01S3/109
CPC分类号： H01S3/0627 , H01S3/042 , H01S3/082 , H01S3/109 , H01S3/02 , H01S3/025 , H01S3/0405 , H01S3/0604 , H01S3/0612 , H01S3/09415
摘要： An optically-pumped laser comprises a laser cavity, a solid-state gain medium and an optically transparent heat sink (OTH) situated within the laser cavity. The gain medium and OTH are thermally coupled and at least one of the solid-state gain medium and the OTH has an etalon structure thereby improving laser efficiency. The OTH advantageously provides effective heat transfer and permits higher average power operation, particularly for thin solid-state laser materials. A metallic heat sink may be thermally coupled to the OTH to improve heat transfer. In some embodiments, the laser is end-pumped with optical pump radiation through the OTH. A second intracavity OTH may be thermally coupled to the gain medium opposite the first OTH to provide longitudinal heat transfer in both directions. A frequency-converted laser may be provided by using a nonlinear material longitudinally cooled on each end by intracavity OTHs, at least one of which comprises an etalon structure. In some frequency-converted laser embodiments, first and second converted beams are output from the laser cavity along separate optical paths in a manner that advantageously prevents intracavity interference between the two converted beams.
摘要翻译：光泵浦激光器包括激光腔，固态增益介质和位于激光腔内的光学透明散热器（OTH）。增益介质和OTH热耦合，固态增益介质和OTH中的至少一个具有标准具结构，从而提高激光效率。 OTH有利地提供有效的热传递并且允许更高的平均功率操作，特别是对于薄的固态激光材料。金属散热器可以热耦合到OTH以改善热传递。在一些实施例中，激光器通过OTH的光泵浦辐射端泵浦。第二腔内OTH可以热耦合到与第一OTH相对的增益介质，以在两个方向上提供纵向热传递。可以通过使用通过腔内OTH在每个端部纵向冷却的非线性材料来提供频率转换的激光器，其中至少一个包括标准具结构。在一些频率转换的激光器实施例中，第一和第二转换的光束以有利地防止两个转换的光束之间的腔内干涉的方式沿着分开的光学路径从激光腔输出。

77. 发明授权

US6094445A High-efficiency cavity doubling laser 失效
标题翻译：高效空腔加倍激光
公开(公告)号：US6094445A
公开(公告)日：2000-07-25
申请号：US148875
申请日：1998-09-08
申请人： Yung-Fu Chen , Chi-Luen Wang , Chien Yen-Jen , Jang Chaur-Sen
发明人： Yung-Fu Chen , Chi-Luen Wang , Chien Yen-Jen , Jang Chaur-Sen
IPC分类号： H01S3/109 , H01S3/10
CPC分类号： H01S3/109
摘要： A high-efficiency cavity doubling laser according to the invention contains a laser diode, a laser crystal and a non-linear crystal, is characterized in having a first gap between the laser diode and the laser crystal and a second gap between the laser crystal and the non-linear crystal. Therefore, heat created by the laser crystal can be dissipated by the air gaps and cannot be directly conducted to the laser diode and the non-linear crystal. Furthermore, the thermal distortion of the laser crystal can be compensated by adjusting the position of the non-linear crystal, thereby increasing the efficiency of the laser.
摘要翻译：根据本发明的高效腔体倍增激光器包含激光二极管，激光晶体和非线性晶体，其特征在于在激光二极管和激光晶体之间具有第一间隙，并且激光晶体和非线性晶体。因此，由激光晶体产生的热可以由气隙消散，不能直接传导到激光二极管和非线性晶体。此外，可以通过调整非线性晶体的位置来补偿激光晶体的热变形，从而提高激光器的效率。

78. 发明授权

US6088379A Ultraviolet laser apparatus and semiconductor exposure apparatus 失效
标题翻译：紫外线激光装置和半导体曝光装置
公开(公告)号：US6088379A
公开(公告)日：2000-07-11
申请号：US94210
申请日：1998-06-09
申请人： Soichi Owa , Tomoko Ohtsuki
发明人： Soichi Owa , Tomoko Ohtsuki
IPC分类号： G01M11/02 , G02F1/35 , G02F1/37 , G03F7/20 , H01L21/027 , H01S3/108 , H01S3/109 , H01S3/16 , H01S3/23 , H01S3/082
CPC分类号： H01S3/082 , G02F1/3534 , G03F7/70025 , G03F7/706 , H01S3/109 , G02F2001/3546 , H01S3/08 , H01S3/0813 , H01S3/094038 , H01S3/1625 , H01S3/2383
摘要： An ultraviolet laser apparatus which generates laser light at 193 nm to 213 nm with high temporal and spatial coherence and relatively high power is disclosed. The UV laser apparatus provides a light source for an exposure device for optical lithography and an aberration measurement interferometer that measures lens wave front aberration. The laser apparatus disclosed herein comprises two lasers having laser resonators that are coincident along a portion of their respective optical paths. A nonlinear optical crystal is located along the shared optical path portion for sum frequency generation of the light of the respective lasers.
摘要翻译：公开了一种具有高时空相干性和相对较高功率的193nm至213nm的激光的紫外线激光装置。 UV激光装置提供用于光学光刻的曝光装置的光源和测量透镜波前像差的像差测量干涉仪。本文公开的激光装置包括具有激光谐振器的两个激光器，其沿着它们各自的光路的一部分重合。沿着共享光路部分设置非线性光学晶体，以对各激光器的光进行和频生成。

79. 发明授权

US6047010A Second harmonic generator and laser applied units 失效
标题翻译：二次谐波发生器和激光应用单元
公开(公告)号：US6047010A
公开(公告)日：2000-04-04
申请号：US598846
申请日：1996-02-09
申请人： Satoshi Makio , Tsuyoshi Miyai , Yasunori Furukawa , Masayoshi Sato
发明人： Satoshi Makio , Tsuyoshi Miyai , Yasunori Furukawa , Masayoshi Sato
IPC分类号： H01S3/109 , H01S3/10
CPC分类号： H01S3/109 , H01S3/0401 , H01S3/042 , H01S3/08036 , H01S3/09415 , H01S3/1062
摘要： A second harmonic generator comprising a semiconductor laser as an excitation light source and a resonator having a solid laser crystal excited by the excitation light source, a control element for controlling the wavelength of a first oscillation wave generated from the solid laser crystal and a nonlinear crystal for wavelength converting the first oscillation wave as a fundamental wave into a second harmonic wave as a second oscillation wave, wherein the components of the resonator are arranged in the order of a first laser mirror, solid laser crystal, wavelength control element, nonlinear crystal and second laser mirror from the input side of the excitation light.
摘要翻译：一种二次谐波发生器，包括作为激发光源的半导体激光器和由激发光源激发的固体激光晶体的谐振器，用于控制从固体激光晶体产生的第一振荡波的波长的控制元件和非线性晶体用于将作为基波的第一振荡波波长转换成作为第二振荡波的二次谐波，其中谐振器的分量按照第一激光镜，固体激光晶体，波长控制元件，非线性晶体和第二激光镜从激励光的输入侧。

80. 发明授权

US5991318A Intracavity frequency-converted optically-pumped semiconductor laser 有权
公开(公告)号：US5991318A
公开(公告)日：1999-11-23
申请号：US179022
申请日：1998-10-26
申请人： Andrea Caprara , Juan L. Chilla , Luis A. Spinelli
发明人： Andrea Caprara , Juan L. Chilla , Luis A. Spinelli
IPC分类号： G02F1/37 , H01S3/108 , H01S3/109 , H01S5/024 , H01S5/04 , H01S5/06 , H01S5/14 , H01S5/18 , H01S5/183 , H01S5/323 , H01S3/10
CPC分类号： H01S5/041 , H01S5/141 , H01S3/082 , H01S3/09415 , H01S3/1083 , H01S3/109 , H01S5/18383
摘要： An intracavity, frequency-doubled, external-cavity, optically-pumped semiconductor laser in accordance with the present invention includes a monolithic surface-emitting semiconductor layer structure including a Bragg mirror portion and a gain portion. An external mirror and the Bragg-mirror portion define a laser resonant-cavity including the gain-portion of the semiconductor layer structure. A birefringent filter is located in the resonant-cavity for selecting a frequency of the laser-radiation within a gain bandwidth characteristic of semiconductor structure. An optically-nonlinear crystal is located in the resonant-cavity between the birefringent filter and the external mirror and arranged to double the selected frequency of laser-radiation.

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