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81. 发明授权

US07612355B2 Optoelectronic tweezers for microparticle and cell manipulation 有权
标题翻译：用于微粒和细胞操作的光电镊子
公开(公告)号：US07612355B2
公开(公告)日：2009-11-03
申请号：US11105304
申请日：2005-04-12
申请人： Ming Chiang Wu , Pei Yu Chiou , Aaron T. Ohta
发明人： Ming Chiang Wu , Pei Yu Chiou , Aaron T. Ohta
IPC分类号： G01N21/86 , G01V8/00
CPC分类号： B03C5/026 , B01L3/502761 , B01L2400/0454 , G01N2035/1046
摘要： An optical image-driven light induced dielectrophoresis (DEP) apparatus and method are described which provide for the manipulation of particles or cells with a diameter on the order of 100 μm or less. The apparatus is referred to as optoelectric tweezers (OET) and provides a number of advantages over conventional optical tweezers, in particular the ability to perform operations in parallel and over a large area without damage to living cells. The OET device generally comprises a planar liquid-filled structure having one or more portions which are photoconductive to convert incoming light to a change in the electric field pattern. The light patterns are dynamically generated to provide a number of manipulation structures that can manipulate single particles and cells or groups of particles/cells. The OET preferably includes a microscopic imaging means to provide feedback for the optical manipulation, such as detecting position and characteristics wherein the light patterns are modulated accordingly.
摘要翻译：描述了一种光学图像驱动的光诱导介电电泳（DEP）装置和方法，其提供对具有大约100μm或更小的直径的颗粒或细胞的操纵。该设备被称为光电镊子（OET），并且提供了许多优于常规光学镊子的优点，特别是并行地和大面积地进行操作而不损坏活细胞的能力。 OET装置通常包括具有一个或多个光电导体部分的平面液体填充结构，以将入射光转换成电场图案的变化。动态地产生光图案以提供可操纵单个颗粒和细胞或颗粒/细胞组的多个操作结构。 OET优选地包括用于为光学操作提供反馈的微观成像装置，例如检测位置和特性，其中相应地调制光图案。

82. 发明授权

US07573054B2 Edge exposure apparatus, coating and developing apparatus, and edge exposure method 有权
标题翻译：边缘曝光装置，涂层显影装置和边缘曝光方法
公开(公告)号：US07573054B2
公开(公告)日：2009-08-11
申请号：US11417163
申请日：2006-05-04
申请人： Yasuharu Iwashita , Ichiro Shimomura
发明人： Yasuharu Iwashita , Ichiro Shimomura
IPC分类号： G01V8/00
CPC分类号： G03F7/2022 , G03F7/2026 , G03F7/2028 , H01L21/67005
摘要： The present invention includes a first and a second optical path forming member arranged within a path of light beams from a light source; a first mounting table provided such that the edge portion of the substrate is located within an application region of the light beams from an outlet side of the first optical path forming member, and a second mounting table provided such that the edge portion of the substrate is located within an application region of the light beams from an outlet side of the second optical path forming member, each of the mounting tables being configured to be rotatable about a vertical axis while mounting the substrate thereon; and a light blocking means for blocking application of light from each of the first and second optical path forming members. A common light source can be used to perform edge exposure for the substrates on the first and second mounting tables, for example, at the same time, so that a high processing ability can be offered and an increase in size of the apparatus can be prevented.
摘要翻译：本发明包括设置在来自光源的光束的路径内的第一和第二光路形成部件; 第一安装台，其设置成使得基板的边缘部分位于来自第一光路形成构件的出口侧的光束的施加区域内;以及第二安装台，其被设置为使得基板的边缘部分位于来自所述第二光路形成构件的出口侧的光束的施加区域内，每个所述安装台构造成能够围绕垂直轴线旋转，同时将所述基板安装在其上; 以及阻挡来自第一和第二光路形成构件中的每一个的光的遮光装置。通常的光源可以用于对第一和第二安装台上的基板进行边缘曝光，例如同时，从而可以提供高的处理能力并且可以防止装置的尺寸的增加。

83. 发明授权

US07569843B2 Method for processing receiver signal and optical sensor 失效
标题翻译：处理接收机信号和光学传感器的方法
公开(公告)号：US07569843B2
公开(公告)日：2009-08-04
申请号：US11135671
申请日：2005-05-24
申请人： Lutz Lohmann
发明人： Lutz Lohmann
IPC分类号： G01N21/86 , G01V8/00
CPC分类号： G01V8/20 , H03K17/943 , H03K2217/94114
摘要： The invention relates to a method for processing a receiver output signal, as well as to an optical sensor. The first method step relates to storing the course of a receiver output signal. In a second method step, the receiver output signal is scanned in a predetermined time interval Δt. The subsequent scanning step relates to correlating the values obtained during the scanning with a filtering matrix, consisting of a sequence of matrix values, for generating a filtered receiver output signal that consists of a discrete sequence of receiver output signal values. In a final method step, the filtered receiver output signal is evaluated with at least one threshold value for generating an object detection signal.
摘要翻译：本发明涉及一种用于处理接收机输出信号的方法以及光学传感器。第一种方法步骤涉及存储接收器输出信号的过程。在第二方法步骤中，以预定时间间隔Deltat扫描接收器输出信号。随后的扫描步骤涉及将扫描期间获得的值与由矩阵值序列组成的滤波矩阵相关，以产生由接收机输出信号值的离散序列组成的滤波接收机输出信号。在最后的方法步骤中，用至少一个用于生成对象检测信号的阈值来评估滤波的接收器输出信号。

84. 发明授权

US07564557B2 Apparatus and methods for detecting overlay errors using scatterometry 有权
标题翻译：使用散射法检测重叠误差的装置和方法
公开(公告)号：US07564557B2
公开(公告)日：2009-07-21
申请号：US11926603
申请日：2007-10-29
申请人： Walter D. Mieher , Ady Levy , Boris Golovanesky , Michael Friedmann , Ian Smith , Michael E. Adel , Anatoly Fabrikant
发明人： Walter D. Mieher , Ady Levy , Boris Golovanesky , Michael Friedmann , Ian Smith , Michael E. Adel , Anatoly Fabrikant
IPC分类号： G01B11/00 , G01B11/14 , G01B11/04 , G01B11/08 , G01N21/00 , G01N23/00 , G01N21/86 , G21K7/00 , G01V8/00
CPC分类号： G03F9/7088 , G01N21/956 , G01N2021/213 , G03F7/70625 , G03F7/70633 , G03F7/70683 , G03F9/7049 , G03F9/7084
摘要： Disclosed is a combined scatterometry mark comprising a scatterometry critical dimension (CD) or profile target capable of being measured to determine CD or profile information and a scatterometry overlay target disposed over the scatterometry CD or profile target, the scatterometry overlay target cooperating with the scatterometry CD or profile target to form a scatterometry mark capable of being measured to determine overlay.
摘要翻译：公开了一种组合的散射测量标记，其包括能够被测量以确定CD或轮廓信息的散射关键维度（CD）或轮廓目标，以及布置在散射测量CD或轮廓目标上的散射测绘覆盖目标，散射测绘覆盖目标与散射光谱CD 或轮廓目标以形成能够被测量以确定覆盖的散射测量标记。

85. 发明授权

US07554676B2 Positional measurement system and lens for positional measurement 失效
标题翻译：位置测量系统和位置测量镜头
公开(公告)号：US07554676B2
公开(公告)日：2009-06-30
申请号：US10940766
申请日：2004-09-15
申请人： Yasuji Seko
发明人： Yasuji Seko
IPC分类号： G01B11/14 , G01C3/00 , G01C5/00 , G01J5/02 , G01N21/86 , G01V8/00 , G01S3/02 , G01S5/14 , H04B7/185 , G02B17/00
CPC分类号： G01S5/16 , G01B11/002
摘要： A positional measurement system includes an electromagnetic wave source which emits an electromagnetic wave, a lens system which has a first lens surface, an electromagnetic wave shield section provided around a center axis of the first lens surface, and a second lens surface, and causes the electromagnetic wave having entered by way of the first lens surface exclusive of the electromagnetic wave shield section to exit from the second lens surface, to form an electromagnetic wave concentrated area at a position opposite the electromagnetic wave source, a receiving device which detects the electromagnetic wave concentrated area formed by the lens system, and a computing device which measures a position of the electromagnetic wave source based on information detected by the receiving device on the electromagnetic wave concentrated area.
摘要翻译：位置测量系统包括发射电磁波的电磁波源，具有第一透镜表面的透镜系统，围绕第一透镜表面的中心轴线设置的电磁波屏蔽部分和第二透镜表面，并且使得通过第一透镜表面而不是电磁波屏蔽部分进入的电磁波从第二透镜表面离开，在与电磁波源相对的位置处形成电磁波集中区域，检测电磁波的接收装置由透镜系统形成的集中区域，以及基于接收装置在电磁波集中区域检测出的信息来测量电磁波源的位置的计算装置。

86. 发明申请

US20090072170A1 Spatial Information Detection System 有权
标题翻译：空间信息检测系统
公开(公告)号：US20090072170A1
公开(公告)日：2009-03-19
申请号：US11918745
申请日：2006-04-17
申请人： Fumikazu Kurihara , Yuji Takada , Yusuke Hashimoto , Fumi Tsunesada
发明人： Fumikazu Kurihara , Yuji Takada , Yusuke Hashimoto , Fumi Tsunesada
IPC分类号： G01V8/00 , H01L27/00
CPC分类号： G01V8/20 , G01S7/4918 , G01S17/36 , G01S17/87 , G01S17/89
摘要： A spatial information detection system is provided, which is capable of, even when detecting spatial information from a common target space by use of a plurality of detection devices, achieving accurate detection without causing interference between the detection devices. Each of the detection devices has a light emitting source for projecting light intensity-modulated with a modulation period into the target space, a photodetector for receiving light from the target space, and an evaluation portion for detecting the spatial information of the target space from a change between the light projected from the light emitting source and the light received by the photodetector. The system comprises a timing control portion for controlling the timings of projecting the lights from the light emitting sources such that a light projection period of the light emitting source of one of the detection devices does not overlap with the light projection period of the light emitting source of another detection device.
摘要翻译：提供了一种空间信息检测系统，其能够即使在通过使用多个检测装置检测来自公共目标空间的空间信息的情况下也能够实现准确的检测而不会引起检测装置之间的干扰。每个检测装置具有用于将调制周期强度调制的光投射到目标空间中的发光源，用于从目标空间接收光的光检测器，以及用于从目标空间中检测目标空间的空间信息的评估部在从发光源投射的光与由光电检测器接收的光之间变化。该系统包括定时控制部分，用于控制从发光源投射光的定时，使得一个检测装置的发光源的光投射周期与发光源的光投射周期不重叠的另一个检测装置。

87. 发明授权

US07502127B2 Sensor device and stage device 有权
标题翻译：传感器装置和舞台装置
公开(公告)号：US07502127B2
公开(公告)日：2009-03-10
申请号：US11588271
申请日：2006-10-27
申请人： Wei Gao , Satoshi Kiyono , Yoshiyuki Tomita , Toru Hirata , Yoji Watanabe , Kennichi Makino
发明人： Wei Gao , Satoshi Kiyono , Yoshiyuki Tomita , Toru Hirata , Yoji Watanabe , Kennichi Makino
IPC分类号： G01B11/14 , G01B11/02 , G01B11/26 , G01C1/00 , G01D5/36 , G01N21/86 , G01V8/00
CPC分类号： G03F7/70758 , G01D5/28 , G01D5/38 , G03F7/70775
摘要： According to one aspect of the invention, there is provided a sensor device which is capable of detecting a state of a movable stage using an easily manufacturable reference grating and capable of improving the accuracy of detection. The sensor device comprises a reference grating which has a configuration that is varied periodically in a two-dimensional direction. A light source emits light to the reference grating. A spectral unit has a plurality of openings to convert the light emitted by the light source into a plurality of light beams through the plurality of openings. A detector unit has a photodetector to receive collectively reflected light beams reflected by the reference grating. The detector unit is provided to detect a state of a movable body relative to the reference grating based on a change of the reflected light beams received by the photodetector.
摘要翻译：根据本发明的一个方面，提供了一种传感器装置，其能够使用易于制造的参考光栅来检测可移动台的状态，并且能够提高检测精度。传感器装置包括具有沿二维方向周期性变化的构造的参考光栅。光源向参考光栅发射光。光谱单元具有多个开口，用于将由光源发射的光转换成通过多个开口的多个光束。检测器单元具有用于接收由参考光栅反射的共同反射的光束的光电检测器。检测器单元被设置为基于由光电检测器接收的反射光束的变化来检测可移动体相对于参考光栅的状态。

88. 发明授权

US07498578B2 Method and system for calibrating a reflection infrared densitometer in a digital image reproduction machine 有权
标题翻译：在数字图像再现机中校准反射红外光密度计的方法和系统
公开(公告)号：US07498578B2
公开(公告)日：2009-03-03
申请号：US10899810
申请日：2004-07-27
申请人： Mark A. Scheuer , Patricia J. Donaldson , Douglas A. Kreckel
发明人： Mark A. Scheuer , Patricia J. Donaldson , Douglas A. Kreckel
IPC分类号： G01J5/02 , G01V8/00 , G01N21/55 , G03G15/00
CPC分类号： G03G15/5041
摘要： An enhanced toner area coverage (ETAC) sensor may be calibrated to adjust for changes in LED intensity by determining a functional relationship between specular developed mass per unit area (DMA) values and diffuse readings obtained from the sensor. Specular and diffuse readings are obtained from an ETAC sensor that senses reflected light from toner patches generated with incrementally increasing densities on the photoreceptor belt. The specular readings in a particular range and their corresponding diffuse readings are selected for the calibration computations. Reflected ratios are computed from the specular readings and used to determine specular DMAs. The specular DMAs and selected diffuse readings define a set of points for which a functional relationship is determined.
摘要翻译：可以通过确定每单位面积（DMA）值的镜面开发质量和从传感器获得的漫射读数之间的函数关系来校准增强的调色剂区域覆盖（ETAC）传感器以调整LED强度的变化。从ETAC传感器获得镜面和漫射读数，ETAC传感器感测在感光带上逐渐增加的密度产生的调色剂贴片的反射光。选择特定范围内的镜面读数及其对应的漫射读数进行校准计算。反射率由镜面读数计算，用于确定镜面DMA。镜面DMA和选定的漫射读数定义了一组确定功能关系的点。

89. 发明授权

US07450247B2 Automated product profiling apparatus and product slicing system using same 有权
标题翻译：自动产品分析仪器和产品切片系统使用相同
公开(公告)号：US07450247B2
公开(公告)日：2008-11-11
申请号：US11100720
申请日：2005-04-07
申请人： Glenn Sandberg , Scott A. Lindee , Salvatore Lamartino , Robert Bania
发明人： Glenn Sandberg , Scott A. Lindee , Salvatore Lamartino , Robert Bania
IPC分类号： G01B11/24 , G01B11/30 , G01N9/04 , G01N21/86 , G06M7/00 , H01J40/14 , G01V8/00 , A23N4/04 , B26D5/00 , A22C18/00 , A22C21/00 , A22C25/00
CPC分类号： G01B11/245 , A22C17/0033 , A22C17/0086 , A22C17/02 , B26D5/007 , B26D5/32 , B26D7/0625 , B26D7/0641 , B26D7/30 , B26D2210/02 , G01N21/84 , G01N2021/177 , G01N2021/8416 , G01N2021/845 , G01N2021/8908 , G01N2201/102 , Y10T83/04 , Y10T83/182 , Y10T83/531
摘要： A system, suitable for high-speed operation, by which raw product (45), such as a slab of meat, can be accurately processed, such as by slicing into segments of desired weight, comprises a product profiling apparatus (15). The product profiling apparatus (15) measures the profile of the physical process. The product profiling apparatus (15) includes line lasers (75, 85) for directing a line of light across the upper and lower surfaces of the product (45) and visual image cameras (80, 90) directed toward the profile surface to capture, at fixed increments, the product profile. The product may also be weighed and the product density determined from the overall profile measurements. A controller (150) receives this data, and instructs the physical process accordingly.
摘要翻译：一种适于高速操作的系统，可以通过将诸如肉类的原料（45）等精加工的原料（例如通过切成所需重量的片段）包括产品成型装置（15）而进行。产品成型设备（15）测量物理过程的轮廓。产品成型设备（15）包括用于将光线引导穿过产品（45）的上表面和下表面的直线激光器（75,85）和指向轮廓表面的视觉摄像机（80,90）以固定的增量，产品简介。也可以将产品称重，并根据总体轮廓测量确定产品密度。控制器（150）接收该数据，并相应地指示物理处理。

90. 发明申请

US20080179552A1 Imaging scan engine and method of manufacture 有权
标题翻译：成像扫描引擎和制造方法
公开(公告)号：US20080179552A1
公开(公告)日：2008-07-31
申请号：US11700846
申请日：2007-01-31
申请人： Edward D. Barkan , Mark Drzymala
发明人： Edward D. Barkan , Mark Drzymala
IPC分类号： G01N21/86 , G01V8/00
CPC分类号： G06K7/10722 , G06K7/10732 , G06K7/1098
摘要： A scan engine (15) includes illumination sources (48, 50) for projecting a light beam (40) upon a target object, a focusing lens (44) that receives a reflected light (34) of the target object and focuses a reflected image (35) as it passes through the focusing lens (44) along an optical axis (A-A), and a linear sensor (46) that receives the reflected image (35) from the focusing lens (44). The linear sensor (46) provides a signal (59) representing the reflected image (34). A circuit board (16) is integrally connected to the illumination sources (48, 50) and the linear sensor (46).
摘要翻译：扫描引擎（15）包括用于将光束（40）投射到目标物体上的照明源（48,50），接收目标物体的反射光（34）并聚焦反射图像的聚焦透镜（44）（35），其沿着光轴（AA）穿过聚焦透镜（44）;以及线性传感器（46），其从聚焦透镜（44）接收反射图像（35）。线性传感器（46）提供表示反射图像（34）的信号（59）。电路板（16）一体地连接到照明源（48,50）和线性传感器（46）。

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