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    • 10. 发明申请
    • PRISM COUPLED SILICON ON INSULATOR SENSOR
    • 绝缘子传感器上的PRISM耦合硅
    • US20100290037A1
    • 2010-11-18
    • US12671234
    • 2007-08-15
    • Dan-xia XuAdam DensmoreAndre DelagePavel ChebenSiegfried Janz
    • Dan-xia XuAdam DensmoreAndre DelagePavel ChebenSiegfried Janz
    • G01N21/41
    • G01N21/552
    • Methods and devices related to a sensor element for use in the detection and monitoring of molecular interactions. The sensor element uses a silicon-on-insulator wafer optically coupled to a silicon prism. The wafer has a thin silicon film top layer, a silicon substrate layer, and a buried silicon dioxide layer sandwiched between the silicon film and substrate layers. The wafer is coupled to the prism on the wafer's substrate side while the interactions to be monitored are placed on the wafer's silicon film side. An incident beam is directed at the prism and the incident angle is adjusted until the beam optically couples to the silicon film's optical waveguide mode. When this occurs, a decrease in the intensity of the reflected beam can be detected. The molecular interactions affect the phase velocity or wave vector of the propagating mode. Similarly, instead of measuring the incident angle at which optical coupling occurs, the phase of the reflected beam may be measured.
    • 与用于检测和监测分子相互作用的传感器元件相关的方法和装置。 传感器元件使用与硅棱镜光学耦合的绝缘体上硅晶片。 晶片具有薄的硅膜顶层,硅衬底层和夹在硅膜和衬底层之间的掩埋的二氧化硅层。 晶片在晶片的衬底侧与棱镜耦合,同时要监测的相互作用被放置在晶片的硅膜侧。 入射光束被引导到棱镜,并且调整入射角直到光束光耦合到硅膜的光波导模式。 当发生这种情况时,可以检测到反射光束的强度的降低。 分子相互作用影响传播模式的相速度或波矢量。 类似地,不是测量发生光耦合的入射角,而是可以测量反射光束的相位。