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    • 5. 发明申请
    • Strain detector and pressure sensor
    • 应变检测器和压力传感器
    • US20050193836A1
    • 2005-09-08
    • US11066907
    • 2005-02-25
    • Naoki YoshidaHiroshi KodamaHiroshi Nagasaka
    • Naoki YoshidaHiroshi KodamaHiroshi Nagasaka
    • G01L9/00H01L29/84G01L9/06
    • G01L9/0051Y10T29/49103
    • A thin-film resistor (5) provided on a strain-generating part (2) via an insulating film (4) and an electrode thin-film (6) including an electrode pad (10) arranged in the thin-film resistor (5) are provided. The thin-film resistor (5) includes a strain-detecting thin-film resistive part (8) and an electrode connection (9) connected to the resistive part (8). The electrode connection (9) is formed to extend to the electrode pad (10). The electrode pad (10) includes an external-connection bonding area (12) and a testing probe area (13) formed at different positions. The electrode pad (10) is disposed on a tubular rigid body (1) provided at the outer peripheral edge of a strain-generating part (2).
    • 一种薄膜电阻器(5),其通过绝缘膜(4)设置在应变产生部件(2)上;以及电极薄膜(6),其包括配置在薄膜电阻器(5)中的电极焊盘 )。 薄膜电阻器(5)包括应变检测薄膜电阻部分(8)和连接到电阻部分(8)的电极连接(9)。 电极连接(9)形成为延伸到电极焊盘(10)。 电极焊盘(10)包括形成在不同位置的外部连接接合区域(12)和测试探针区域(13)。 电极焊盘(10)设置在设置在应变产生部(2)的外周缘的管状刚体(1)上。
    • 6. 发明授权
    • Method of manufacturing strain-detecting devices
    • 制造应变检测装置的方法
    • US06865799B2
    • 2005-03-15
    • US10255620
    • 2002-09-27
    • Yukihiko HataKunihiro YamauraHiroshi Nagasaka
    • Yukihiko HataKunihiro YamauraHiroshi Nagasaka
    • G01L9/04G01L1/22G01L9/00H01C17/28
    • G01L1/2287G01L9/0051Y10T29/43Y10T29/49007Y10T29/49103Y10T29/49877Y10T29/49998
    • A method of manufacturing strain-detecting devices is provided. First, plural cylindrical substrates, each of which has one end closed by a diaphragm, are fixedly placed at predetermined positions of a fixing plate. A positioning marker is previously given to the fixing plate. The fixing plate having the substrates is then assembled into a jig. The jig sustains the substrates so that an outer surface of the diaphragm of each substrate is held at the same level. Through positioning the substrates, all the diaphragms are then positioned in place in a plane direction of the fixing plate with reference to the positioning marker. A strain gage portion is simultaneously formed on each of all the diaphragms. The fixing plate is then disassembled from the jig. In this step, the substrates with the strain gage portions, i.e., strain-detecting devices, are separated from the fixing plate.
    • 提供一种制造应变检测装置的方法。 首先,将固定在固定板的预定位置的多个圆筒状基板固定在固定板的规定位置。 预先将定位标记给定影板。 然后将具有基板的固定板组装成夹具。 夹具维持基板,使得每个基板的隔膜的外表面保持在相同的水平。 通过定位基板,将所有的隔膜相对于定位标记物定位在固定板的平面方向的适当位置。 所有隔膜中的每一个同时形成应变计部分。 然后将固定板从夹具上拆下。 在该步骤中,具有应变计部分的基底,即应变检测装置,与固定板分离。
    • 9. 发明授权
    • Strain detector and pressure sensor
    • 应变检测器和压力传感器
    • US07194923B2
    • 2007-03-27
    • US11066907
    • 2005-02-25
    • Naoki YoshidaHiroshi KodamaHiroshi Nagasaka
    • Naoki YoshidaHiroshi KodamaHiroshi Nagasaka
    • G01L9/06
    • G01L9/0051Y10T29/49103
    • A thin-film resistor (5) provided on a strain-generating part (2) via an insulating film (4) and an electrode thin-film (6) including an electrode pad (10) arranged in the thin-film resistor (5) are provided. The thin-film resistor (5) includes a strain-detecting thin-film resistive part (8) and an electrode connection (9) connected to the resistive part (8). The electrode connection (9) is formed to extend to the electrode pad (10). The electrode pad (10) includes an external-connection bonding area (12) and a testing probe area (13) formed at different positions. The electrode pad (10) is disposed on a tubular rigid body (1) provided at the outer peripheral edge of a strain-generating part (2).
    • 一种薄膜电阻器(5),其通过绝缘膜(4)设置在应变产生部件(2)上;以及电极薄膜(6),其包括配置在薄膜电阻器(5)中的电极焊盘 )。 薄膜电阻器(5)包括应变检测薄膜电阻部分(8)和连接到电阻部分(8)的电极连接(9)。 电极连接(9)形成为延伸到电极焊盘(10)。 电极焊盘(10)包括形成在不同位置的外部连接接合区域(12)和测试探针区域(13)。 电极焊盘(10)设置在设置在应变产生部(2)的外周缘的管状刚体(1)上。