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    • 2. 发明申请
    • Silica glass crucible
    • 二氧化硅玻璃坩埚
    • US20040187771A1
    • 2004-09-30
    • US10801683
    • 2004-03-17
    • JAPAN SUPER QUARTZ CORPORATION
    • Yoshiyuki TsujiToshio Tsujimoto
    • B32B001/08
    • C03C19/00B24C1/08C03C15/00C30B15/10Y10T117/1032Y10T117/108Y10T428/13Y10T428/131
    • To provide a silica glass crucible, wherein there are no problems of generating a sinking and buckling when said crucible is used for pulling up silicon single crystal at a high temperature. The silica glass crucible used for pulling up the silicon single crystal, wherein at least an outer surface of a wall part of the crucible is covered with fine grooves having a length of less than 200 nullm, a width of less than 30 nullm and a depth of from more than 3 nullm to less than 30 nullm. Preferably, said fine groves are formed by carrying out a sand-blast treatment and a hydrofluoric acid etching and exist on more than 10% of the outer surface of the crucible, and a sliding frictional coefficient of the outer surface of the crucible to a carbon at 1500 degree C. is more than 0.6.
    • 为了提供一种二氧化硅玻璃坩埚,其中当在高温下使用所述坩埚拉起硅单晶时,不存在产生下沉和翘曲的问题。 用于提升硅单晶的二氧化硅玻璃坩埚,其中坩埚的壁部的至少外表面被细长的小于200μm的细槽,宽度小于30μm,深度 从3岁以上到30岁以下的妈妈。 优选地,通过进行喷砂处理和氢氟酸蚀刻而形成所述细小花纹,并且存在于坩埚的外表面的10%以上,坩埚的外表面的滑动摩擦系数为碳 在1500摄氏度,大于0.6。
    • 6. 发明申请
    • Reforming process of quartz glass crucible
    • 石英玻璃坩埚改造工艺
    • US20040050099A1
    • 2004-03-18
    • US10628350
    • 2003-07-29
    • JAPAN SUPER QUARTZ CORPORATION
    • Masanori FukuiMasaru Satoh
    • C03B019/00
    • C03B32/00C03B19/095C03B29/02C30B15/10
    • A reforming process of a quartz glass crucible in which the quartz glass crucible is reformed by an arc discharge generated by electrodes positioned around a rotational axis and configured to heat an inside surface of the crucible while the crucible is rotated. The process includes arranging electrodes in an electrode structure such that neighboring electrodes are positioned at regular intervals in a ring-like configuration; forming a stable ring-like arc between the neighboring electrodes, without generating a continuous arc between electrodes facing each other across a central portion of the ring-like configuration; heating the inside surface of the crucible; and removing a foreign substance located on the inside surface of the crucible or a bubble located under the inside surface of the crucible.
    • 一种石英玻璃坩埚的重整工艺,其中石英玻璃坩埚通过由位于旋转轴线周围的电极产生的电弧放电而重构,并且构造成在坩埚旋转的同时加热坩埚的内表面。 该方法包括在电极结构中布置电极,使得相邻的电极以规定的间隔以环状构造定位; 在相邻电极之间形成稳定的环状电弧,而不会在环状构造的中心部分彼此面对的电极之间产生连续的电弧; 加热坩埚的内表面; 并且去除位于坩埚内表面上的异物或位于坩埚内表面下方的气泡。