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    • 10. 发明授权
    • Scanning probe microscope
    • 扫描探针显微镜
    • US5496999A
    • 1996-03-05
    • US320490
    • 1994-10-11
    • Frederick I. LinkerMichael D. KirkJohn D. AlexanderSang-il ParkSung-il ParkIan R. SmithPeter R. Swift
    • Frederick I. LinkerMichael D. KirkJohn D. AlexanderSang-il ParkSung-il ParkIan R. SmithPeter R. Swift
    • G01Q10/02G01Q10/04G01Q10/06G01Q20/00G01Q30/02G01Q30/06G01Q60/10G01Q60/24G01Q70/02G02B21/00H01J37/26
    • G01Q10/04B82Y35/00G01Q10/06G01Q20/02G01Q30/025G01Q70/02G02B21/002Y10S977/851Y10S977/86Y10S977/873
    • A scanning probe microscope having numerous advantages is disclosed. Respective scanning force and scanning tunneling probes are removably mounted in the head using kinematic mounting techniques so that they may be substituted for one another without the need to adjust the cantilever deflection sensor. A linear position-sensitive photodetector in the deflection sensor eliminates further the need for adjustments. A motorized, non-stacked x,y coarse movement stage is kinematically positioned with respect to the base and features a minimized mechanical loop to reduce thermal and vibrational effects on the position of the sample. A z coarse movement stage positions the head kinematically with respect to the base and includes a motorized drive means which allows the height, tilt and pitch of the probe to be adjusted. The scanner includes x,y and z sample position detectors which provide an accurate measurement of the position of the sample with respect to the probe. The z position detector provides an output which is exclusive of sample tilt and which may be used as an output of the scanning probe microscope. The outputs of the x,y and z position detectors may also be connected in feedback loops with the controller to improve the performance of the scanning probe microscope.
    • 公开了具有许多优点的扫描探针显微镜。 使用运动学安装技术将各扫描力和扫描隧道探针可拆卸地安装在头部中,使得它们可以彼此替代,而不需要调整悬臂偏转传感器。 偏转传感器中的线性位置敏感光电检测器进一步消除了对调整的需要。 机动的,非堆叠的x,y粗移动台相对于基座运动地定位,并具有最小化的机械回路,以减少对样品位置的热和振动影响。 z粗移动台将头相对于基座运动地定位,并且包括允许调节探头的高度,倾斜和俯仰的电动驱动装置。 扫描器包括x,y和z采样位置检测器,其提供样品相对于探针的位置的精确测量。 z位置检测器提供的输出不包括样品倾斜,可用作扫描探针显微镜的输出。 x,y和z位置检测器的输出也可以与控制器连接在反馈回路中,以提高扫描探针显微镜的性能。