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    • 3. 发明申请
    • CMOS-BASED PLANAR TYPE SILICON AVALANCHE PHOTO DIODE USING SILICON EPITAXIAL LAYER AND METHOD OF MANUFACTURING THE SAME
    • 使用硅外延层的基于CMOS的平面型硅氧化物照相二极管及其制造方法
    • US20090146238A1
    • 2009-06-11
    • US12195166
    • 2008-08-20
    • Yong Sun YoonKun Sik ParkJong Moon ParkBo Woo KimJin Yeong Kang
    • Yong Sun YoonKun Sik ParkJong Moon ParkBo Woo KimJin Yeong Kang
    • H01L31/103H01L31/18
    • H01L31/107
    • A complementary metal-oxide semiconductor (CMOS)-based planar type avalanche photo diode (APD) using a silicon epitaxial layer and a method of manufacturing the APD, the photo diode including: a substrate; a well layer of a first conductivity type formed in the substrate; an avalanche embedded junction formed in the well layer of the first conductivity type by low energy ion implantation; the silicon epitaxial layer formed in the avalanche embedded junction; a doping area of a second conductivity type opposite to the first conductive type, formed from a portion of a surface of the well layer of the first conductivity type in the avalanche embedded junction and forming a p-n junction; positive and negative electrodes formed on the doping area of the second conductivity type and the well layer of the first conductivity type separated from the doping area of the second conductivity type, respectively; and an oxide layer formed on an overall surface excluding a window where the positive and negative electrodes are formed.
    • 使用硅外延层的基于互补金属氧化物半导体(CMOS)的平面型雪崩光电二极管(APD)和制造该APD的方法,所述光电二极管包括:衬底; 在衬底中形成的第一导电类型的阱层; 通过低能离子注入形成在第一导电类型的阱层中的雪崩嵌入结; 形成在雪崩嵌入结的硅外延层; 由所述第一导电类型的阱层的表面的一部分形成在所述雪崩嵌入结中并形成p-n结的与所述第一导电类型相反的第二导电类型的掺杂区域; 分别形成在第二导电类型的掺杂区域上的正极和负极以及从第二导电类型的掺杂区域分离的第一导电类型的阱层; 以及形成在除了形成正极和负极的窗口之外的整个表面上的氧化物层。
    • 8. 发明授权
    • Method of fabricating T-type gate
    • 制造T型门的方法
    • US07141464B2
    • 2006-11-28
    • US11179983
    • 2005-07-12
    • Jong Moon ParkKun Sik ParkSeong Wook YooYong Sun YoonSang Gi KimYoon Kyu BaeByung Won LimJin Gun KooBo Woo Kim
    • Jong Moon ParkKun Sik ParkSeong Wook YooYong Sun YoonSang Gi KimYoon Kyu BaeByung Won LimJin Gun KooBo Woo Kim
    • H01L21/338
    • H01L21/28587
    • Provided is a method of fabricating a T-type gate including the steps of: forming a first photoresist layer, a blocking layer and a second photoresist layer to a predetermined thickness on a substrate, respectively; forming a body pattern of a T-type gate on the second photoresist layer and the blocking layer; exposing a predetermined portion of the second photoresist layer to form a head pattern of the T-type gate, and performing a heat treatment process to generate cross linking at a predetermined region of the second photoresist layer except for the head pattern of the T-type gate; performing an exposure process on an entire surface of the resultant structure, and then removing the exposed portion; and forming a metal layer of a predetermined thickness on an entire surface of the resultant structure, and then removing the first photoresist layer, the blocking layer, the predetermined region of the second photoresist layer in which the cross linking are generated, and the metal layer, whereby it is possible to readily perform a compound semiconductor device manufacturing process, and to reduce manufacturing cost by means of the increase of manufacturing yield and the simplification of manufacturing processes.
    • 提供一种制造T型栅极的方法,包括以下步骤:分别在衬底上形成预定厚度的第一光致抗蚀剂层,阻挡层和第二光致抗蚀剂层; 在所述第二光致抗蚀剂层和所述阻挡层上形成T型栅极的主体图案; 暴露第二光致抗蚀剂层的预定部分以形成T型栅极的头部图案,并且进行热处理工艺以在除了T型的头部图案之外的第二光致抗蚀剂层的预定区域处产生交联 门; 在所得结构的整个表面上进行曝光处理,然后去除所述暴露部分; 在所得结构的整个表面上形成预定厚度的金属层,然后去除第一光致抗蚀剂层,阻挡层,产生交联的第二光致抗蚀剂层的预定区域和金属层 ,由此可以容易地进行化合物半导体器件制造工艺,并且通过增加制造成品率和简化制造工艺来降低制造成本。
    • 9. 发明授权
    • Capacitor and method for fabricating the same
    • 电容器及其制造方法
    • US06284551B1
    • 2001-09-04
    • US09455791
    • 1999-12-07
    • Won Cheol ChoKun Sik Park
    • Won Cheol ChoKun Sik Park
    • H01L218242
    • H01L21/76844H01L21/76802H01L21/76831H01L21/7687H01L27/10855H01L28/60
    • Capacitor and method for fabricating the same, which can simplify a fabrication process and reduce parasitic capacitances between signal lines, the capacitor including a first insulating layer formed on a substrate, a bitline patterned on the first insulating layer, a second insulating layer formed on the bitline, a first electrode formed on the second insulating layer with slopes at both sides, a dielectric film formed on the first electrode, a node contact formed on one side of the first electrode and in contact with the substrate, and a second electrode formed on the dielectric film and connected with the node contact electrically, and the method including the steps of (1) forming a first insulating layer on a substrate, and patterning a bitline on the first insulating layer, (2) forming a second insulating layer on an entire surface inclusive of the bitline, (3) depositing a first conductive material on the second insulating layer, (4) etching the first conductive material to form a first electrode with a sloped etch surface, (5) depositing a dielectric film on the first electrode, (6) etching the second insulating layer and the first insulating layer in succession to form a contact hole exposing the substrate, (7) depositing and etching a second conductive in the contact hole, to form a node contact, and (8) depositing and etching a third conductive material on the node contact, to form a second electrode.
    • 电容器及其制造方法,其可以简化制造工艺并减少信号线之间的寄生电容,电容器包括形成在衬底上的第一绝缘层,图案化在第一绝缘层上的位线,形成在第一绝缘层上的第二绝缘层 位线,形成在具有两侧斜面的第二绝缘层上的第一电极,形成在第一电极上的电介质膜,形成在第一电极的一侧并与衬底接触的节点接触件,以及形成在第一电极上的第二电极 所述电介质膜与所述节点接触电连接,所述方法包括以下步骤:(1)在衬底上形成第一绝缘层,并对所述第一绝缘层上的位线进行构图,(2)在第一绝缘层上形成第二绝缘层 包括位线的整个表面,(3)在第二绝缘层上沉积第一导电材料,(4)蚀刻第一导电材料以形成 具有倾斜蚀刻表面的第一电极,(5)在所述第一电极上沉积电介质膜,(6)连续蚀刻所述第二绝缘层和所述第一绝缘层以形成暴露所述衬底的接触孔,(7) 蚀刻接触孔中的第二导体,形成节点接触,以及(8)沉积和蚀刻节点接触上的第三导电材料,以形成第二电极。
    • 10. 发明授权
    • CMOS-based planar type silicon avalanche photo diode using silicon epitaxial layer and method of manufacturing the same
    • 使用硅外延层的CMOS基平面型硅雪崩光电二极管及其制造方法
    • US07994553B2
    • 2011-08-09
    • US12195166
    • 2008-08-20
    • Yong Sun YoonKun Sik ParkJong Moon ParkBo Woo KimJin Yeong Kang
    • Yong Sun YoonKun Sik ParkJong Moon ParkBo Woo KimJin Yeong Kang
    • H01L31/062
    • H01L31/107
    • A complementary metal-oxide semiconductor (CMOS)-based planar type avalanche photo diode (APD) using a silicon epitaxial layer and a method of manufacturing the APD, the photo diode including: a substrate; a well layer of a first conductivity type formed in the substrate; an avalanche embedded junction formed in the well layer of the first conductivity type by low energy ion implantation; the silicon epitaxial layer formed in the avalanche embedded junction; a doping area of a second conductivity type opposite to the first conductive type, formed from a portion of a surface of the well layer of the first conductivity type in the avalanche embedded junction and forming a p-n junction; positive and negative electrodes formed on the doping area of the second conductivity type and the well layer of the first conductivity type separated from the doping area of the second conductivity type, respectively; and an oxide layer formed on an overall surface excluding a window where the positive and negative electrodes are formed.
    • 使用硅外延层的基于互补金属氧化物半导体(CMOS)的平面型雪崩光电二极管(APD)和制造该APD的方法,所述光电二极管包括:衬底; 在衬底中形成的第一导电类型的阱层; 通过低能离子注入形成在第一导电类型的阱层中的雪崩嵌入结; 形成在雪崩嵌入结的硅外延层; 由所述第一导电类型的阱层的表面的一部分形成在所述雪崩嵌入结中并形成p-n结的与所述第一导电类型相反的第二导电类型的掺杂区域; 分别形成在第二导电类型的掺杂区域上的正极和负极以及从第二导电类型的掺杂区域分离的第一导电类型的阱层; 以及形成在除了形成正极和负极的窗口之外的整个表面上的氧化物层。