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    • 4. 发明申请
    • Optical element and optical spot position adjusting method
    • 光学元件和光点位置调整方法
    • US20060082875A1
    • 2006-04-20
    • US11239694
    • 2005-09-28
    • Masahiro OkitsuKazuyuki OguraKenji KonnoHiroshi Hatano
    • Masahiro OkitsuKazuyuki OguraKenji KonnoHiroshi Hatano
    • G03B21/56
    • G11B7/1374G11B7/08505G11B7/1387Y10S977/862
    • To obtain an optical element for generating near-field light which can accurately detect positions of a plurality of minute structures formed on a metallic thin film provided to a condensing surface, and a method of adjusting an optical spot position of the optical element. The metallic thin film is formed on the condensing surface of the optical element that condenses incident light so as to generate near-field light smaller than an condensing spot B near a condensing point, and a plurality of openings (minute structure) for generating the near-field light are formed into a matrix matter on the metallic thin film, and position detecting structures are formed on positions that partitions the openings is formed. Scanning in X and Y directions is carried out by a light beam, and its reflected light is detected so that the positions of the openings are detected.
    • 为了获得能够精确地检测形成在设置于聚光面的金属薄膜上的多个微小结构的位置的近场光的光学元件,以及调整光学元件的光点位置的方法。 金属薄膜形成在会聚入射光的光学元件的聚光面上,以产生比聚光点附近的聚光点B小的近场光,以及多个用于产生近场的多个开口(微小结构) 场光在金属薄膜上形成为基体物质,位置检测结构形成在形成有开口的位置。 通过光束进行X方向和Y方向的扫描,检测其反射光,从而检测开口的位置。
    • 6. 发明授权
    • Optical element for condensing incident light
    • 用于聚光入射光的光学元件
    • US07612323B2
    • 2009-11-03
    • US11239694
    • 2005-09-28
    • Masahiro OkitsuKazuyuki OguraKenji KonnoHiroshi Hatano
    • Masahiro OkitsuKazuyuki OguraKenji KonnoHiroshi Hatano
    • H01J3/14H01J5/16
    • G11B7/1374G11B7/08505G11B7/1387Y10S977/862
    • To obtain an optical element for generating near-field light which can accurately detect positions of a plurality of minute structures formed on a metallic thin film provided to a condensing surface, and a method of adjusting an optical spot position of the optical element. The metallic thin film is formed on the condensing surface of the optical element that condenses incident light so as to generate near-field light smaller than an condensing spot B near a condensing point, and a plurality of openings (minute structure) for generating the near-field light are formed into a matrix matter on the metallic thin film, and position detecting structures are formed on positions that partitions the openings is formed. Scanning in X and Y directions is carried out by a light beam, and its reflected light is detected so that the positions of the openings are detected.
    • 为了获得能够精确地检测形成在设置于聚光面的金属薄膜上的多个微小结构的位置的近场光的光学元件,以及调整光学元件的光点位置的方法。 金属薄膜形成在会聚入射光的光学元件的聚光面上,以产生比聚光点附近的聚光点B小的近场光,以及多个用于产生近场的多个开口(微小结构) 场光在金属薄膜上形成为基体物质,位置检测结构形成在形成有开口的位置。 通过光束进行X方向和Y方向的扫描,检测其反射光,从而检测开口的位置。