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1. 发明申请

US20180012972A1 NEMS DEVICES WITH SERIES FERROELECTRIC NEGATIVE CAPACITOR 审中-公开
公开(公告)号：US20180012972A1
公开(公告)日：2018-01-11
申请号：US15695440
申请日：2017-09-05
申请人： Purdue Research Foundation
发明人： Muhammad Ashraful Alam , Muhammad Masuduzzaman , Ankit Jain
IPC分类号： H01L29/51 , H01G7/06 , H01G4/38 , H01G5/40 , H01L27/08 , B81B7/02 , H01L29/78 , H01G5/16 , H01L49/02
CPC分类号： H01L29/515 , B81B7/02 , B81B2201/014 , B81B2201/016 , B81B2201/07 , H01G4/38 , H01G5/16 , H01G5/40 , H01G7/06 , H01L27/0805 , H01L27/11502 , H01L27/11585 , H01L29/516 , H01L29/7842
摘要： An electrical circuit comprising at least two negative capacitance insulators connected in series, one of the two negative capacitance insulators is biased to generate a negative capacitance. One of the negative capacitance insulators may include an air-gap which is part of a nanoelectromechnical system (NEMS) device and the second negative capacitance insulator includes a ferroelectric material. Both of the negative capacitance insulators may be located between the channel and gate of a field effect transistor. The NEMS device may include a movable electrode, a dielectric and a fixed electrode and arranged so that the movable electrode is attached to at least two points and spaced apart from the dielectric and fixed electrode, and the ferroelectric capacitor is electrically connected to either of the electrodes.

2. 发明申请

US20170098509A1 MEMS ELECTROSTATIC ACTUATOR DEVICE FOR RF VARACTOR APPLICATIONS 审中-公开
公开(公告)号：US20170098509A1
公开(公告)日：2017-04-06
申请号：US15385431
申请日：2016-12-20
申请人： Texas Instruments Incorporated
发明人： Arun Gupta , William C. McDonald , Adam Fruehling , Ivan Kmecko , Lance Barron , Divyanshu Agrawal , Arthur M. Turner , John C. Ehmke
IPC分类号： H01G5/16 , H01G5/011 , B81B7/00 , H01G5/40
CPC分类号： H01G5/16 , B81B3/0008 , B81B3/001 , B81B3/0013 , B81B7/0064 , B81B7/008 , B81B7/02 , B81B2201/016 , B81B2201/0221 , B81B2203/0109 , B81B2203/0118 , B81B2203/0127 , B81B2203/0181 , B81B2203/053 , B81B2203/058 , B81B2203/06 , B81B2207/012 , B81B2207/096 , B81C1/00158 , H01G5/011 , H01G5/40
摘要： A MEMs actuator device and method of forming includes arrays of actuator elements. Each actuator element has a moveable top plate and a bottom plate. The top plate includes a central membrane member and a cantilever spring for movement of the central membrane member. The bottom plate consists of two RF signal lines extending under the central membrane member. A MEMs electrostatic actuator device includes a CMOS wafer, a MEMs wafer, and a ball bond assembly. Interconnections are made from a ball bond to an associated through-silicon-via (TSV) that extends through the MEMS wafer. A RF signal path includes a ball bond electrically connected through a TSV and to a horizontal feed bar and from the first horizontal feed bar vertically into each column of the array. A metal bond ring extends between the CMOS wafer and the MEMS wafer. An RF grounding loop is completed from a ground shield overlying the array to the metal bond ring, a TSV and to a ball bond.

3. 发明授权

US09376312B2 Method for fabricating a transducer apparatus 有权
标题翻译：换能器装置的制造方法
公开(公告)号：US09376312B2
公开(公告)日：2016-06-28
申请号：US14031041
申请日：2013-09-18
申请人： Daniel N. Koury, Jr. , Anthony F. Flannery, Jr.
发明人： Daniel N. Koury, Jr. , Anthony F. Flannery, Jr.
IPC分类号： H04R31/00 , B81C1/00 , H01G5/16 , H01G4/40 , H01G5/40
CPC分类号： B81C1/00142 , B81C1/00261 , B81C1/00492 , H01G4/40 , H01G5/16 , H01G5/40
摘要： An improved MEMS transducer apparatus and method. The method includes providing a movable base structure having a base surface region overlying a substrate and a center cavity with a cavity surface region. At least one center anchor structure and one spring structure can be spatially disposed within a substantially circular portion of the surface region. The spring structure(s) can be coupled the center anchor structure(s) to a portion of the cavity surface region. The substantially circular portion can be configured within a vicinity of the center of the surface region. At least one capacitor element, having a fixed and a movable capacitor element, can be spatially disposed within a vicinity of the cavity surface region. The fixed capacitor element(s) can be coupled to the center anchor structure(s) and the movable capacitor element(s) can be spatially disposed on a portion of the cavity surface region.
摘要翻译：一种改进的MEMS换能器装置和方法。该方法包括提供具有覆盖衬底的基面区域和具有空腔表面区域的中心空腔的可移动基座结构。至少一个中心锚固结构和一个弹簧结构可以空间地设置在表面区域的基本圆形部分内。弹簧结构可以将中心锚固结构耦合到空腔表面区域的一部分。大致圆形的部分可以构造在表面区域的中心附近。具有固定和可动电容器元件的至少一个电容器元件可以空间地设置在空腔表面区域附近。固定电容器元件可以耦合到中心锚定结构，并且可移动电容器元件可以在空间上设置在空腔表面区域的一部分上。

4. 发明授权

US09347846B2 Capacitance-based pressure sensor including pressure vessel(s) 有权
标题翻译：电容式压力传感器，包括压力容器
公开(公告)号：US09347846B2
公开(公告)日：2016-05-24
申请号：US14224535
申请日：2014-03-25
申请人： Kionix, Inc.
发明人： Scott G. Adams
IPC分类号： G01L9/00 , H01G5/40 , H01G13/00 , G01L13/02
CPC分类号： G01L9/0073 , G01L9/0086 , G01L9/0095 , G01L13/021 , G01L13/028 , H01G5/40 , H01G13/00 , Y10T29/43
摘要： Techniques are described herein that perform capacitance-based pressure sensing using pressure vessel(s). A pressure vessel is an object that has a cross section that defines a void. The void has a shape that is configured to change based on a change of pressure difference between a cavity pressure in a cavity in which at least a portion of the pressure vessel is suspended and a vessel pressure in the pressure vessel. The pressure vessel may be formed in the shape of an enclosed loop (e.g., along a path that is perpendicular to the cross section), resulting in a looped pressure vessel. For instance, an end of the pressure vessel may be connected to another end of the pressure vessel to form the enclosed loop.
摘要翻译：本文描述了使用压力容器进行基于电容的压力感测的技术。压力容器是具有限定空隙的横截面的物体。该空隙具有基于空腔中的空腔压力的变化而变化的形状，其中压力容器的至少一部分悬浮在其中并且压力容器内的容器压力。压力容器可以形成为封闭环的形状（例如，沿着垂直于横截面的路径），导致环形压力容器。例如，压力容器的一端可以连接到压力容器的另一端以形成封闭环。

5. 发明授权

US09070510B2 Frequency tuning and step control of a digitally controlled oscillator 有权
标题翻译：数字控制振荡器的频率调谐和步进控制
公开(公告)号：US09070510B2
公开(公告)日：2015-06-30
申请号：US13715704
申请日：2012-12-14
申请人： Intel IP Corporation
发明人： Rizwan Ahmed , Darin Nguyen
IPC分类号： H03B5/12 , H01G2/00 , H03L7/099 , H01G4/38 , H01G5/40
CPC分类号： H01G2/00 , H01G4/38 , H01G5/40 , H03L7/099 , H03L2207/06
摘要： A variable leaf capacitor is disclosed. In accordance with some embodiments of the present disclosure, a variable leaf capacitor may comprise a first alternating current coupling capacitor having a first terminal coupled to a first differential node and a second terminal coupled to a first common-mode node, a second alternating current coupling capacitor having a first terminal coupled to a second differential node and a second terminal coupled to a second common-mode node, and a varactor having a bias terminal, a first common-mode terminal coupled to the first common-mode node, and a second common-mode terminal coupled to the second common-mode node, wherein the capacitance of the varactor is based on the voltage from the first common-mode terminal of the varactor to the bias terminal of the varactor and on the voltage from the second common-mode terminal of the varactor to the bias terminal of the varactor.
摘要翻译：公开了一种可变叶片电容器。根据本公开的一些实施例，可变叶电容器可以包括具有耦合到第一差分节点的第一端子和耦合到第一共模节点的第二端子的第一交流耦合电容器，第二交流耦合器电容器，其具有耦合到第二差分节点的第一端子和耦合到第二共模节点的第二端子，以及具有偏置端子的变容二极管，耦合到所述第一共模节点的第一共模终端，耦合到第二共模节点的共模端子，其中变容二极管的电容基于从变容二极管的第一共模端子到变容二极管的偏置端子的电压以及来自第二共模模式端子的电压，变容二极管的模式端子到变容二极管的偏置端子。

6. 发明申请

US20150048903A1 MICROELECTROMECHANICAL SYSTEM WITH A MICRO-SCALE SPRING SUSPENSION SYSTEM AND METHODS FOR MAKING THE SAME 有权
标题翻译：具有微尺度弹簧悬挂系统的微电子机电系统及其制造方法
公开(公告)号：US20150048903A1
公开(公告)日：2015-02-19
申请号：US13970209
申请日：2013-08-19
申请人： HARRIS CORPORATION
发明人： JOHN E. ROGERS
IPC分类号： H03H9/46
CPC分类号： H03H9/462 , B81B7/0016 , B81B2201/0271 , H01G5/16 , H01G5/40 , H03H9/525 , Y10T29/4913
摘要： Integrated Microelectromechanical System (“MEMS”) devices and methods for making the same. The MEMS devices comprise a substrate (200) and a MEMS filter device (100) mechanically suspended above a major surface of the substrate. A first gas gap (202) exists between the major surface of the substrate and the MEMS filter device. An isolation platform (500) is provided to absorb vibrations from an external environment prior to reaching the MEMS filter device. In this regard, the isolation platform comprises: a frame structure (510) framing a periphery of the MEMS filter device; and at least one resilient component (512-518) coupled between the frame structure and the MEMS filter device. The frame structure is mechanically connected to the substrate. Electronic circuitry is connected to the MEMS filter device via a resilient interconnection (204, 206) that is movable in at least one direction of the vibrations.
摘要翻译：集成微机电系统（“MEMS”）器件及其制造方法。 MEMS器件包括机械悬浮在衬底的主表面上方的衬底（200）和MEMS过滤器装置（100）。在衬底的主表面和MEMS过滤器装置之间存在第一气隙（202）。提供隔离平台（500）以在到达MEMS滤波器装置之前吸收来自外部环境的振动。在这方面，隔离平台包括：框架结构（510），框架MEMS滤波器装置的外围; 以及耦合在所述框架结构和所述MEMS滤波器装置之间的至少一个弹性部件（512-518）。框架结构机械连接到基板。电子电路通过可在振动的至少一个方向上移动的弹性互连（204,206）连接到MEMS滤波器装置。

7. 发明申请

US20110085278A1 SELECTABLE CAPACITANCE CIRCUIT 失效
标题翻译：可选电容电路
公开(公告)号：US20110085278A1
公开(公告)日：2011-04-14
申请号：US12972219
申请日：2010-12-17
申请人： Philip D. Floyd
发明人： Philip D. Floyd
IPC分类号： H01G7/00
CPC分类号： G02B26/001 , G09G3/346 , G09G3/3466 , G09G3/3473 , G09G2300/06 , H01G5/18 , H01G5/40
摘要： A voltage-controlled capacitor and methods for forming the same are described. A mechanical conductor membrane of the voltage-controlled capacitor is movable to and from a first position and a second position. An amount of capacitance can vary with the movement of the mechanical conductor membrane. A microelectromechanical systems (MEMS) voltage-controlled capacitor can be used in a variety of applications, such as, but not limited to, RF switches and RF attenuators.
摘要翻译：描述了压控电容器及其形成方法。压控电容器的机械导体膜可移动到第一位置和第二位置。电容量可随着机械导体膜的移动而变化。微机电系统（MEMS）压控电容器可用于各种应用中，例如但不限于RF开关和RF衰减器。

8. 发明申请

US20090211885A1 ELECTRONIC DEVICE 有权
标题翻译：电子设备
公开(公告)号：US20090211885A1
公开(公告)日：2009-08-27
申请号：US11718137
申请日：2005-10-24
申请人： Peter G. Steeneken , Jozef Thomas Martinus Van Beek , Theodoor Rijks
发明人： Peter G. Steeneken , Jozef Thomas Martinus Van Beek , Theodoor Rijks
IPC分类号： H01H59/00
CPC分类号： H01H59/0009 , H01G5/16 , H01G5/40 , H01H1/06 , H01H57/00 , H01H2057/006 , H01H2059/0072
摘要： The electronic device comprising a micro-electromechanical systems (MEMS) element at a first side of a substrate (14). The MEMS element comprises a first electrode (101) and a second electrode (11), that is part of a movable element and movable towards and from the first electrode between a first and a second position. The second electrode (11) is separated from the first electrode (101) by an air gap (110) in its first position. The movable element comprises a mechanical layer (12) and an intermediate layer, in which the second electrode (11) is defined. The second electrode (11) is constituted by a plurality of sections (131, 132, 133) in the intermediate layer, each of which is mechanically connected by a separate vertical interconnect (121, 122, 123) to the mechanical layer (12).
摘要翻译：该电子设备包括在基板（14）的第一侧的微机电系统（MEMS）元件。 MEMS元件包括第一电极（101）和第二电极（11），其是可移动元件的一部分并且可在第一和第二位置之间朝向和离开第一电极移动。第二电极（11）在其第一位置通过气隙（110）与第一电极（101）分离。可移动元件包括机械层（12）和中间层，其中限定了第二电极（11）。第二电极（11）由中间层中的多个部分（131,132,133）构成，每个部分通过分开的垂直互连（121,122,123）与机械层（12）机械连接，。

9. 发明申请

US20090211884A1 Electronic apparatus with a micro-electromechanical switch made of a piezoeletric material 有权
标题翻译：具有由压电材料制成的微机电开关的电子设备
公开(公告)号：US20090211884A1
公开(公告)日：2009-08-27
申请号：US10584044
申请日：2004-12-21
申请人： Heiko Pelzer , Peter Gerard Steeneken , Astrid Lewalter
发明人： Heiko Pelzer , Peter Gerard Steeneken , Astrid Lewalter
IPC分类号： H01H36/00
CPC分类号： H01H57/00 , H01G5/16 , H01G5/40 , H01H1/0036 , H01H2057/006 , H01L41/0933
摘要： The device improved according to the invention comprises a micro-electromechanical switch (MEMS) with a piezoelectric element connected to a mechanical support on both sides at the edges. The electrode design of this piezoelectric element is characterized by two electrodes mounted on at least one of the surfaces.
摘要翻译：根据本发明改进的装置包括具有压电元件的微机电开关（MEMS），所述压电元件在边缘处两端连接到机械支撑。该压电元件的电极设计的特征在于安装在至少一个表面上的两个电极。

10. 发明授权

US07579663B2 Hermetic packaging and method of manufacture and use therefore 失效
标题翻译：因此密封包装及其制造和使用方法
公开(公告)号：US07579663B2
公开(公告)日：2009-08-25
申请号：US12028841
申请日：2008-02-11
申请人： Chang-Feng Wan
发明人： Chang-Feng Wan
IPC分类号： H01L29/78
CPC分类号： G01L9/0042 , B81B2201/0264 , B81B2203/0118 , B81B2203/0307 , B81B2203/0384 , B81B2207/07 , B81C1/00095 , B81C1/00285 , B81C1/00333 , B81C2201/019 , H01G5/16 , H01G5/40 , H01L29/82
摘要： A system and method for manufacturing micro cavity packaging enclosure at the wafer level using MEMS (MicroElectroMechanical Systems) process, wherein micro cavities are formed from epoxy-bonded single-crystalline silicon wafer as its cap, epoxy and deposited metal or insulator as at least part of its sidewall, on substrate wafers.
摘要翻译：一种用于使用MEMS（微电子机械系统）工艺在晶片级制造微腔封装外壳的系统和方法，其中微腔由环氧键合单晶硅晶片作为其盖，环氧树脂和沉积的金属或绝缘体形成为至少部分的侧壁。

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