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    • 1. 发明授权
    • Module appearance inspection apparatus
    • 模块外观检查装置
    • US06343503B1
    • 2002-02-05
    • US09455302
    • 1999-12-06
    • Seok Goh
    • Seok Goh
    • G01B1124
    • H01L21/67271
    • A module appearance inspection apparatus includes a warpage checking unit, a visual checking unit, a first module transfer unit for unloading the module from a module tray, a second module transfer unit for transferring the module within the apparatus, and a third module transfer unit for loading the module to a module tray. The apparatus can replace the first and third module transfer units with a single module transfer unit. In this case, the apparatus includes: a warpage checking unit; a visual checking unit; a supply unit in which module trays are stacked; a storage unit in which module trays also can be stacked; a tray transfer unit which moves a module tray from the supply unit to the storage unit; a first module transfer unit which unloads and loads the module from and to the module tray on the tray transfer unit; and a second module transfer unit which transfers the module from the warpage checking unit or the visual checking unit.
    • 模块外观检查装置包括翘曲检查单元,视觉检查单元,用于从模块托盘卸载模块的第一模块传送单元,用于在该设备内传送模块的第二模块传送单元,以及用于 将模块加载到模块托盘。 该装置可以用单个模块传送单元替换第一和第三模块传送单元。 在这种情况下,该装置包括:翘曲检查单元; 视觉检查单元; 堆叠模块托盘的供应单元; 存储单元,其中模块托盘也可以堆叠; 托盘传送单元,其将模块托盘从供给单元移动到存储单元; 第一模块传送单元,其从托盘传送单元上的模块托盘卸载和加载模块; 以及第二模块传送单元,其从所述翘曲检查单元或所述视觉检查单元传送所述模块。
    • 5. 发明申请
    • APPARATUS FOR SEMICONDUCTOR DIE BONDING
    • 用于半导体DIE结合的装置
    • US20110079361A1
    • 2011-04-07
    • US12850027
    • 2010-08-04
    • Byeong-kuk ParkSeok GohKyoung-bok ChoDong-soo LeeJung-hwan Woo
    • Byeong-kuk ParkSeok GohKyoung-bok ChoDong-soo LeeJung-hwan Woo
    • B32B37/02
    • H01L24/83H01L24/75H01L2224/83H01L2224/838H01L2924/01006H01L2924/01033H01L2924/01047H01L2924/01074H01L2924/01082Y10T156/1707Y10T156/1744
    • An apparatus for semiconductor die bonding includes a first bonding head and a second bonding head configured to respectively pickup a first semiconductor chip and a second semiconductor chip located at a pickup point. The apparatus for semiconductor die bonding may also include a first transfer device configured to transfer the first bonding head from the pickup point to a bonding point located on a substrate along a transfer path. The first transfer device may further be configured to return to the pickup point along a first return path after the first semiconductor chip is bonded to the substrate. Also, the apparatus for semiconductor die bonding may include a second transfer device configured to transfer the second bonding head from the pickup point to the bonding point located on the substrate along the transfer path. The second transfer device may further be configured to return to the pickup point along a second return path after the second semiconductor chip is bonded to the substrate. Additionally, the apparatus for semiconductor die bonding may include a controller configured to alternately apply a transfer signal and a return signal to the first transfer device and the second transfer device so the first bonding head and the second bonding head do not collide with each other.
    • 一种用于半导体管芯接合的设备包括:第一接合头和第二接合头,其被配置为分别拾取位于拾取点处的第一半导体芯片和第二半导体芯片。 用于半导体管芯接合的设备还可以包括第一传送设备,其被配置为沿着传送路径将第一接合头从拾取点传送到位于衬底上的接合点。 第一传送装置还可以被配置为在第一半导体芯片被接合到基板之后沿着第一返回路径返回到拾取点。 此外,用于半导体管芯接合的装置可以包括第二传送装置,其被配置为沿着传送路径将第二接合头从拾取点传送到位于衬底上的接合点。 第二传送装置还可以被配置为在第二半导体芯片被接合到基板之后沿着第二返回路径返回到拾取点。 另外,用于半导体管芯接合的装置可以包括控制器,其被配置为交替地将传递信号和返回信号施加到第一传送装置和第二传送装置,使得第一接合头和第二接合头不会彼此碰撞。
    • 10. 发明授权
    • Apparatus for removing wafer ring tape
    • 去除晶圆环带的装置
    • US06698486B2
    • 2004-03-02
    • US10008703
    • 2001-12-06
    • Seok Goh
    • Seok Goh
    • B32B3500
    • H01L21/67132Y10S156/941Y10T29/49819Y10T29/49822Y10T156/1051Y10T156/19
    • An apparatus for removing a wafer ring tape, on which defective chips remain, from a wafer ring after normal chips are detached from the wafer ring tape, is provided. The apparatus comprises a ring table for supporting a tape-adhered wafer ring in which the wafer ring tape is attached to the wafer ring; a detaching head positionable above the ring table and movable for detaching the wafer ring tape from the wafer ring; a blocking pin disposed under the ring table to support the wafer ring tape detached from the wafer ring; and a pair of compressing plates disposed under the ring table to compress the wafer ring tape supported by the blocking pin.
    • 提供了一种用于从正常芯片从晶片环带上拆下之后,从晶片环上去除有缺陷的芯片的晶片环带的装置。 该装置包括一个环形台,用于支撑带状粘结的晶圆环,其中晶片环带附着到晶圆环上; 分离头,其可定位在所述环台上方并且可移动以将所述晶片环带从所述晶片环分离; 设置在所述环台下方以支撑从所述晶片环分离的所述晶片环带的阻塞销; 以及设置在环台下方的一对压缩板,以压缩由阻塞销支撑的晶片环带。